EP2566597A1 - Method for the plasma-supported treatment of internal surfaces of a hollow body, fluid separator, and use thereof - Google Patents
Method for the plasma-supported treatment of internal surfaces of a hollow body, fluid separator, and use thereofInfo
- Publication number
- EP2566597A1 EP2566597A1 EP11717940A EP11717940A EP2566597A1 EP 2566597 A1 EP2566597 A1 EP 2566597A1 EP 11717940 A EP11717940 A EP 11717940A EP 11717940 A EP11717940 A EP 11717940A EP 2566597 A1 EP2566597 A1 EP 2566597A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- hollow body
- gas
- gases
- plasma
- fluid separator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D17/00—Separation of liquids, not provided for elsewhere, e.g. by thermal diffusion
- B01D17/02—Separation of non-miscible liquids
- B01D17/0202—Separation of non-miscible liquids by ab- or adsorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502753—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by bulk separation arrangements on lab-on-a-chip devices, e.g. for filtration or centrifugation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
- B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Thermal Sciences (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010018981A DE102010018981B3 (en) | 2010-05-03 | 2010-05-03 | Process for the plasma-assisted treatment of inner surfaces of a hollow body, fluid separator and its use |
PCT/EP2011/001993 WO2011137975A1 (en) | 2010-05-03 | 2011-04-19 | Method for the plasma-enhanced treatment of internal surfaces of a hollow body, fluid separator, and use thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2566597A1 true EP2566597A1 (en) | 2013-03-13 |
Family
ID=44202163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11717940A Withdrawn EP2566597A1 (en) | 2010-05-03 | 2011-04-19 | Method for the plasma-supported treatment of internal surfaces of a hollow body, fluid separator, and use thereof |
Country Status (5)
Country | Link |
---|---|
US (1) | US8968837B2 (en) |
EP (1) | EP2566597A1 (en) |
BR (1) | BR112012029523A2 (en) |
DE (1) | DE102010018981B3 (en) |
WO (1) | WO2011137975A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101566920B1 (en) * | 2013-06-11 | 2015-11-17 | 이이쿠보 유이치 | Manufacturing Method for Disilane, Trisilane using Dielectric Barrier Discharge |
CZ305156B6 (en) | 2013-12-19 | 2015-05-20 | Masarykova Univerzita | Plasma treatment of internal and/or external surface of a hollow, electrically non-conducting body and apparatus for making the same |
LU92445B1 (en) * | 2014-05-07 | 2015-11-09 | Luxembourg Inst Of Science And Technology List | Method for forming regular polymer thin films using atmospheric plasma deposition |
CN113106420A (en) * | 2020-02-26 | 2021-07-13 | 台湾积体电路制造股份有限公司 | Method for manufacturing semiconductor device |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2001281076A1 (en) * | 2000-08-07 | 2002-02-18 | Nanostream, Inc. | Fluidic mixer in microfluidic system |
DE10136022B4 (en) * | 2001-07-24 | 2006-01-12 | Robert Bosch Gmbh | Method for avoiding or eliminating precipitates in the exhaust area of a vacuum system |
DE10337097A1 (en) * | 2003-08-04 | 2004-08-26 | Institut für Physikalische Hochtechnologie e.V. | Micro-dispersed fluid phase separation, comprises at least two defined surface elements which have different boundary surface energies |
US7041608B2 (en) * | 2004-02-06 | 2006-05-09 | Eastman Kodak Company | Providing fluorocarbon layers on conductive electrodes in making electronic devices such as OLED devices |
EP1917097A2 (en) * | 2005-07-05 | 2008-05-07 | Massachusetts Institute of Technology (MIT) | Microfluidic separators for multiphase fluid-flow based on membranes |
DE102006036536B3 (en) * | 2006-07-31 | 2008-02-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Process for plasma treating a surface |
GB0621520D0 (en) * | 2006-10-28 | 2006-12-06 | P2I Ltd | Novel products |
-
2010
- 2010-05-03 DE DE102010018981A patent/DE102010018981B3/en active Active
-
2011
- 2011-04-19 WO PCT/EP2011/001993 patent/WO2011137975A1/en active Application Filing
- 2011-04-19 EP EP11717940A patent/EP2566597A1/en not_active Withdrawn
- 2011-04-19 BR BR112012029523A patent/BR112012029523A2/en not_active IP Right Cessation
-
2012
- 2012-11-01 US US13/666,575 patent/US8968837B2/en not_active Expired - Fee Related
Non-Patent Citations (2)
Title |
---|
None * |
See also references of WO2011137975A1 * |
Also Published As
Publication number | Publication date |
---|---|
US20130129582A1 (en) | 2013-05-23 |
US8968837B2 (en) | 2015-03-03 |
BR112012029523A2 (en) | 2016-12-06 |
DE102010018981B3 (en) | 2011-07-21 |
WO2011137975A1 (en) | 2011-11-10 |
WO2011137975A8 (en) | 2012-01-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE102009048397A1 (en) | Atmospheric pressure plasma process for producing surface modified particles and coatings | |
DE3708717C2 (en) | ||
EP1902156A2 (en) | Method for treating plasma and/or covering plasma of workpieces under continuous atmospheric pressure, in particular material plates or strips | |
DE112007003640T5 (en) | Apparatus for generating a gas for a dielectric barrier discharge | |
DE102010018981B3 (en) | Process for the plasma-assisted treatment of inner surfaces of a hollow body, fluid separator and its use | |
DE102009028830A1 (en) | Plasma coatings and process for their preparation | |
EP2054166B1 (en) | Method and device for producing a coating | |
EP1264330B1 (en) | Method and device for the plasma-activated surface treatment and use of the inventive method | |
DE102006015591B3 (en) | Organic material with a catalytically coated surface and process for its production | |
EP3430864B1 (en) | Plasma nozzle and method of using the plasma nozzle | |
DE102013213897A1 (en) | Method and apparatus for forming amorphous hard carbon coatings | |
DE19505449C2 (en) | Method for producing a layer system on substrates and the layer system produced with this method | |
DE102008044024A1 (en) | Coating method and coating device | |
EP2526218A1 (en) | Plasma- or ion-based system for producing coatings on fluoropolymers, said coatings having good adhesion | |
DE10035177C2 (en) | Process for the plasma-assisted treatment of the inner surface of a hollow body and use of the same | |
DE102008022145A1 (en) | Apparatus and method for high performance pulse-gas flow sputtering | |
DE102005041330A1 (en) | Production of graft polymers on silicone elastomers, especially e.g. to improve the adhesion of subsequent coating materials, involves using a plasma process in which the plasma contains vinyl monomers | |
EP3012090A1 (en) | Device for plasma treating surfaces and a method for treating surfaces containing plasma | |
DE102010055659A1 (en) | Method for depositing dielectric layers in vacuum and use of the method | |
DE102012219667A1 (en) | Method for applying aluminum oxide layer on semiconductor substrate for photovoltaic solar cell, involves creating plasma zone between supply point of aluminum-containing gas and suction location of gases in process chamber | |
EP2186922B1 (en) | Method for deposting a nanocomposite layer on a substrate using chemical vapor deposition | |
DE102008020468B4 (en) | A method for coating surfaces with an electrically conductive diamond-like layer, electrically conductive diamond-like layer produced by the method, workpiece with the electrically conductive diamond-like layer produced by the method, method for producing the workpiece with the electrically conductive diamond-like layer and method for determining the Position of the workpiece | |
EP2387456B1 (en) | Method for modifying the surface of particles and device suitable for the same | |
DE3837306C2 (en) | Piston and piston rod for a vibration damper in motor vehicles | |
DE10103460B4 (en) | Multilayer plasma polymer coating, process for its preparation and its use |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20121203 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
DAX | Request for extension of the european patent (deleted) | ||
17Q | First examination report despatched |
Effective date: 20160317 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: GRANT OF PATENT IS INTENDED |
|
INTG | Intention to grant announced |
Effective date: 20180418 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20180829 |