EP2564225A1 - Procédé de détermination de la distance d'un conducteur d'excitation, procédé d'étalonnage d'un capteur de champ magnétique, capteur de champ magnétique étalonnable et utilisation d'une structure de conducteurs d'excitation pour la détermination d'une distance entre un conducteur d'excitation et un capteur de champ magnétique - Google Patents

Procédé de détermination de la distance d'un conducteur d'excitation, procédé d'étalonnage d'un capteur de champ magnétique, capteur de champ magnétique étalonnable et utilisation d'une structure de conducteurs d'excitation pour la détermination d'une distance entre un conducteur d'excitation et un capteur de champ magnétique

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Publication number
EP2564225A1
EP2564225A1 EP11713740A EP11713740A EP2564225A1 EP 2564225 A1 EP2564225 A1 EP 2564225A1 EP 11713740 A EP11713740 A EP 11713740A EP 11713740 A EP11713740 A EP 11713740A EP 2564225 A1 EP2564225 A1 EP 2564225A1
Authority
EP
European Patent Office
Prior art keywords
magnetic field
conductor
sensor
excitation
excitation conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11713740A
Other languages
German (de)
English (en)
Inventor
Roland Ernst
Markus Stahl-Offergeld
Hans-Peter Hohe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP2564225A1 publication Critical patent/EP2564225A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0035—Calibration of single magnetic sensors, e.g. integrated calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices

Definitions

  • the present invention relates to a method for determining an excitation conductor spacing of a field conductor of a sensor element of a calibratable magnetic field sensor, and to a method for calibrating a sensor element of the magnetic field sensor and a use of a excitation conductor structure for determining the excitation conductor distance, and a corresponding calibratable magnetic field sensor.
  • the magnetic field sensor may be a horizontal or lateral Hall sensor with one or more sensor elements.
  • a magnetic field with the best known magnetic flux density at the location of the sensor can be generated via a coil or an excitation conductor.
  • the output signal may be a corresponding Hall voltage.
  • the sensitivity of the Hall sensor can therefore be deduced by a change in the Hall voltage, which can be caused by a change in the magnetic flux density in the sensor element.
  • Such a coil or Eixegerleiter Weg can also be integrated on the semiconductor chip formed in integrated magnetic field sensors which are formed in a semiconductor substrate. The mode of operation of such exciter conductors for Hall sensors is described, for example, in the patent DE 10 2007 041 230.
  • the problem may arise that during the production of the magnetic field sensor in a semiconductor substrate, the individual layer structures are subjected to the typical process fluctuations which occur in the production of semiconductor components. These process variations may be generally larger in a vertical direction in a semiconductor device than in a lateral direction with respect to a semiconductor substrate surface. Accordingly, a distance value of an excitation conductor structure, which is formed for example as a conductor track above or next to a magnetic field sensor in a semiconductor chip or a semiconductor substrate, may deviate from an ideal distance value aimed for during production.
  • the position or the effective distance of the exciter line to the actual sensor element of the magnetic field sensor may lead to an inaccurate calibration of the magnetic field sensor.
  • a known current is impressed into the excitation conductor structure, so that a predetermined magnetic calibration flux density attributable to the exciter line is generated at the location of the sensor element of the magnetic field sensor to be calibrated.
  • the calibration magnetic field is thereby defined, inter alia, via the impressed current, the geometry or the characteristics of the excitation line, ie their height, width, thickness, material, and their relative position, ie their distance from the sensor element.
  • the sensor element is, for example, a Hall sensor
  • the sensor element can be calibrated by determining and assigning the associated Hall voltage.
  • the known magnetic calibration flux densities generated at the location of the sensor element can be assigned to the respective Hall voltages measured with the sensor element of the magnetic field sensor, as a result of which the sensor element and thus the magnetic field sensor can be calibrated.
  • FIGS. 6a-b the plan view and the section of a conventional lateral Hall sensor in a semiconductor substrate 4 are shown schematically.
  • the lateral Hall sensor element 1 has four contact terminals la-ld, which are provided for electrical connection to an external drive circuit.
  • a Hall sensor element is designated which is arranged parallel to a chip surface 4a - the xy plane - and can measure a magnetic field component perpendicular to the chip surface.
  • the lateral Hall sensor 1 can be excited with a coil-shaped excitation line 2, which is arranged around the sensor, as shown in Fig. 6a. Ie. It can be generated by impressing a defined current, a predetermined calibration magnetic field in the sensor element with the help of the excitation conductor.
  • FIGS. 7 a - b show the schematic plan view and the section through a vertical Hall sensor.
  • vertical is meant a plane perpendicular to the plane of the chip surface 4a, ie vertically to the xy plane.
  • FIG. 7a-b has, for example, five contact regions 7a-7e along the main surface 4a of the active semiconductor region.
  • Vertical Hall sensors which can measure a magnetic field component parallel to the chip surface (xy plane), can also be specifically excited for a calibration with a current flow through an excitation conductor 2.
  • the excitation conductor can, for example, as shown schematically in FIG. 7a, be passed directly above the sensor, or in the vicinity, past the sensor.
  • the above-mentioned process tolerances in the production of the Hall sensor can have a particularly strong effect, since a distance A between the center of gravity S of the sensor and the exciter 2 may be of the same magnitude as the process variations or the process tolerances , As a result, the sensitivity of vertical Hall sensors can often only be determined with relatively low accuracy. A calibration can be inaccurate and have deviations if it is not carried out with an actual distance value A, but only with an assumed exciter conductor spacing, which in reality is often not completely correct or inaccurate because of the process tolerances in the production.
  • the process tolerances in the production can thus have a particularly strong effect with respect to the substrate surface in the vertical direction, so that the actual distance or the effective relative position of the actually assumed distance value of a field conductor, with which the calibration of the sensor element is performed may vary.
  • the sensitivity of such sensors, especially vertical Hall sensors can often only be determined with low accuracy.
  • This object is achieved by the inventive method according to claim 1 and claim 11, as well as by the calibratable magnetic field sensor according to claim 13 and by the use of a excitation conductor structure for determining a excitation conductor spacing according to claim 21 and by a computer program according to claim 25.
  • Fig. 1 is a schematic representation of a section through a sensor element of a
  • Magnetic field sensor for illustrating the principle for determining an excitation-conductor distance from the sensor element according to an embodiment of the present invention
  • FIG. 2 shows a further schematic representation of a section through a sensor element of a magnetic field sensor, wherein the exciter conductors are arranged offset to one another and with respect to the sensor element, according to a further exemplary embodiment of the present invention
  • FIG. 3 is a schematic plan view of a magnetic field sensor with a sensor element and two associated exciter conductors of a field-effect conductor structure according to an exemplary embodiment of the present invention; the top view of a calibratable magnetic field sensor for detecting magnetic field components in three dimensions according to another embodiment of the present invention; a flowchart for the inventive method for determining an excitation conductor spacing according to an embodiment of the present invention; the plan view and the section through a lateral Hall sensor and a field line; and the plan view and the section through a vertical Hall sensor with a field line.
  • FIG. 1 shows a schematic section of a magnetic field sensor 10 with a sensor element 20a.
  • the magnetic field sensor 10 may be, for example, a vertical Hall sensor. 1, the basic procedure or the method according to the invention for determining an excitation conductor spacing z from an exciter conductor 15, e.g. the first excitation conductor to a center of gravity S of the sensor element 20a illustrated.
  • the sensor element 20a can be formed in a semiconductor substrate 4 with a semiconductor substrate surface 4a, wherein the first excitation conductor 15 is arranged directly above the sensor element 20a.
  • a second exciter conductor 16 Spaced or offset from the first excitation conductor 15, a second exciter conductor 16 is arranged, wherein an exciter conductor spacing between the first excitation conductor 15 and the second exciter conductor 16 corresponds to a value xi.
  • the first exciter conductor 15 and the second exciter conductor 16 together form an excitation conductor structure 14.
  • the sensor element 20a may be formed in a semiconductor substrate 4, wherein on a semiconductor substrate surface 4a a plurality of process layers, for. Example, a metal 1 process position for contact terminals 3 to the sensor element 20a and a metal-2 process position in which the first and the second excitation conductors 15,16 may be formed.
  • the first exciter conductor 15 and the second exciter conductor 16 may be formed as conductor tracks of a semiconductor component. Between the individual metallization layers metal-1 and metal-2 insulating layers may be arranged, which are not shown in Fig. 1. If a current I 0 is then impressed in the first excitation conductor 15 in the direction of the drawing plane of FIG.
  • the current flow causes a magnetic flux density B 0 at the location of the sensor.
  • the magnetic field lines 50 are arranged radially around the excitation conductor in the zx plane, wherein a magnetic field component B x in the x direction can be detected by the sensor element.
  • the magnetic flux density B is a vector that can be represented, for example, in a Cartesian coordinate system with linear-independent position vectors x, y, z corresponding magnetic field components B x , B y and B 2 .
  • the excitation conductor 15 leads directly over the sensor, the magnetic flux density in the x-direction B 0> x , which is caused by the current I 0 at the location of the sensor, can be compared with:
  • a further excitation conductor 16 which has a excitation conductor spacing xi with respect to the first excitation conductor, a magnetic field produced by a current Ii is impressed in the second excitation conductor 16, so again radially symmetrical magnetic field lines 51, wherein at the location of the center of gravity of the sensor element 20a, a further magnetic flux density 5 t is caused.
  • the result for the magnetic field component B is then ljX in the x-direction, with: zz, ⁇ L
  • R corresponds to the exciter-conductor distance of the second excitation conductor 16 from the sensor element, a magnetic-field component according to formula (3):
  • the following formula applies:
  • the generated magnetic flux densities B 0 and 5 should have different strong magnetic field components in the x-direction, ie in the direction of the detection direction of the sensor element, in the center of gravity S of the sensor element. As can be seen from equation (4), otherwise the denominator would become zero.
  • excitation conductor spacing xi between the first excitation conductor 15 and the second excitation conductor 16 is known or can be determined relatively easily.
  • the horizontal manufacturing tolerances in semiconductor devices are generally lower than the vertical manufacturing tolerances, so that the excitation conductor spacings aimed for in the production can also be used.
  • a corresponding sensitivity factor or inaccuracy factor in the determination of the magnetic field components B 1, X and B 0, X is namely in the root of the formula (4) mutually exclusive, since only a ratio of B liX and ⁇ 0 , ⁇ to determine z is needed.
  • the first excitation conductor 15 does not need to be arranged directly vertically above the sensor element 20a (see FIG. 2) if the first excitation conductor 15 is spaced from the second excitation conductor 16, that is, as long as
  • the quantities x 0 and ⁇ may be a lateral distance in relation to a coordinate natensystem, which has its origin in the center of gravity S of the sensor element describe.
  • a first electrical current I 0 into a first exciter conductor 15 of an excitation conductor structure 14
  • a first magnetic field component B 0iX can be generated in the sensor element 20a of the magnetic field sensor 10.
  • a variable dependent on the first magnetic field component B 0, x can be determined. For example, this size may be an output signal, such. B. the Hall voltage act. This is measured and can then be saved.
  • the second electrical current Ii can then be impressed into the second exciter conductor 16 of the excitation conductor structure 14 in order to generate a second magnetic field component B ljX in the sensor element of the magnetic field sensor.
  • this second magnetic field component B 1> x should be different from the first magnetic field component B 0iX .
  • the second magnetic field component B 1, X or a variable which is dependent on the second magnetic field component B 1, X can then be determined again by means of the sensor element 20a and possibly stored or transmitted to an evaluation device for further evaluation.
  • the excitation-conductor distance of the first or second exciter conductor from the sensor element 20a of the magnetic-field sensor 10 can then be determined as a function of the exciter-conductor spacing xi between the first excitation conductor and the second spaced-apart excitation conductor and the two quantities dependent on the first and second magnetic-field components B 0jX and B ljX become.
  • the formula (4) or (5) can be used.
  • the determination or calculation or determination can be carried out as a function of a ratio between the magnetic field components B 0jX and B 1 , X and as a function of the excitation conductor spacing xi between the first excitation conductor 15 and the second excitation conductor 16.
  • the impressing of a first electric current I 0 and the impressing of a second electric current can take place in succession according to further exemplary embodiments so that there is no superimposition of the magnetic flux densities generated by the current flowing in the first and second exciter conductors 15, 16. Otherwise, this could lead to an inaccurate or incorrect calculation of the excitation conductor spacing.
  • a precisely predetermined magnetic field component can then be generated in the sensor element by impressing a calibration current in the first or second exciter conductor so as to obtain a calibratable output signal of the sensor element 20a.
  • the calibratable output signal may be, for example, an output voltage value of a Hall sensor element that is compared to an expected setpoint value or that is assigned to a specific magnetic field component value.
  • a magnetic field component generated in the sensor element can thus be determined very precisely by impressing the predetermined calibration current in the excitation conductor, and the corresponding output signal of the sensor element can be calibrated accurately and reliably.
  • the excitation conductor distance z 0 between the first excitation conductor 15 and the center of gravity S of the sensor element 20a may be different to the distance z between the second excitation conductor 16 and the plane through the center of gravity S of the sensor element parallel to the xy plane.
  • the exciter conductor distance determination between the first exciter conductor and the sensor element 20a of the magnetic field sensor then yields different relations to formulas (3) and (4) which can be determined with the aid of corresponding vector calculations and trigonometric functions. Influences of geometric changes with respect to the position of the exciter conductors can therefore be determined by more complex transformations with the aid of trigonometric functions and methods of vector computation, as long as the magnetic field components of B 0> x and B 1; X are different in the center of gravity S of the sensor element.
  • FIG. 3 shows the schematic plan view of a calibratable magnetic field sensor 10 with a sensor element 20a and an excitation conductor structure 14, which comprises a first excitation conductor 15 and a second excitation conductor 16 spaced therefrom.
  • the calibratable magnetic field sensor may further comprise a drive device 30 and an evaluation device 40.
  • the drive device 30 is designed to impress an electrical current I 0 , Ii in the first or second excitation conductors 15, 16 and offset in time into the other of the two excitation conductors in order in each case to have different parallel magnetic field components B 0 , x and B 1; Sensor- to produce 20a accordingly.
  • the sensor element then outputs different output signals or variables dependent on the magnetic field components B 0jX and B liX .
  • the on-control device 30 can thus impress, for example, a first current I 0 in the first excitation conductor 15, so that a first magnetic field component Bo > x is generated in the sensor element, which then outputs a first output signal S 0 .
  • a second electrical current Ii is impressed into the second excitation conductor 16 by the drive device 30, so that a second, magnetic field component Bi , X , which is different from the first magnetic field component B 0jX , is generated in the sensor element 20a.
  • the sensor element accordingly outputs a second output signal S, which differs from the first output signal, or makes it available for the evaluation device.
  • the evaluation device 40 can now be configured to determine the excitation conductor spacing of the first or second excitation conductor of the first or second exciter conductor 15, 16 based on the variables dependent on the different magnetic field components B 0, and B ljX and based on the excitation conductor spacing x l5 between the first and second excitation conductors 15, 16 to determine the center of gravity S of the sensor element 20a.
  • the evaluation device 40 can therefore be coupled to the sensor element 20a and, based on the different first and second output signal of the sensor element and the excitation conductor spacing, the excitation conductor spacing z or R (see FIG To determine sensor element 20a.
  • the evaluation device 40 may be configured to generate a value based on a ratio of the magnitudes dependent on the different magnetic field components B 0; X and B 1; X and based on the exciter line spacing xi Exciter conductor distance z or R of the first or second exciter conductor 15, 16 to be determined by the relevant sensor element 20a.
  • the evaluation device 40 may also be coupled to the drive device 30, as shown by the dashed line in Fig. 3, for example, to exchange data or control signals with the drive means 30.
  • This information exchange, for example, of the detected excitation conductor distance may be necessary for a subsequent calibration.
  • the evaluation device could send information about the excitation conductor spacing to the control device 30, whereupon the control device 30 impresses a predetermined calibration current as a function of the ascertained excitation conductor spacing for more accurate or exact calibration of the sensor element 20a in the first or second excitation conductor. That is, the control device 30 and the evaluation device 40 may, for example, measurement data such. Magnetic field measurement data, control data, or z. B. the height of the impressed or embossed streams, or the data obtained, such. B. replace the exciter conductor distance.
  • the calibration process of the magnetic field sensor 10 may further include a step of comparing the output signal of the sensor element with a desired value or a step of associating the output signal with a specific magnetic field component value. That is, the output signals determined by a sensor element may be compared to expected setpoints, or these output signals are assigned to particular magnetic field component values.
  • the evaluation device 40 may be formed in embodiments as an on-chip control device in the semiconductor substrate in which the magnetic field sensor is arranged.
  • the evaluation device can be designed as a digital sequence control, as a (micro) electronic circuit or as a microcontroller, which can be integrated together with the magnetic field sensor in the semiconductor substrate.
  • the evaluation device 40 can also be an off-chip or external evaluation device, which is part of a test device, for example.
  • the calibratable magnetic field sensor 10 can also optionally have a memory 75.
  • the determined excitation conductor distance can be stored so that it can be used again at any time later in a calibration carried out in order to perform an accurate and accurate calibration can.
  • the memory 75 can be integrated in the magnetic field sensor, in the evaluation device 40 or on-chip in the semiconductor substrate in which the magnetic field sensor is also formed.
  • the excitation conductor spacing can be determined and its individually determined excitation conductor spacing stored in its associated memory 75, so that in a subsequent calibration of the respective magnetic field sensor in the application at any time, even repeatedly, the stored individual exciter ladder distance can be accessed.
  • the exciter conductor distance determination only needs to be carried out once, while at a later calibration phase depending on the stored excitation conductor distance, a predetermined magnetic field component can be repeatedly generated by impressing a corresponding calibration current and thus the magnetic field sensor can be repeatedly calibrated.
  • a calibratable output signal of the sensor element can be generated, which then by comparison with a setpoint value or by an assignment of the sensor output signal to a magnetic field component comparison value for calibrating the sensor element can be used.
  • the method according to the invention for determining an excitation conductor spacing and for calibration with a test device for magnetic field sensors can be carried out.
  • a test device may comprise, for example, so-called front-end and / or back-end test systems, but also laboratory test devices which need not be optimized for mass production.
  • a computer program or a program code with which the methods according to the invention are carried out can be executed on the test device.
  • a calibratable magnetic field sensor 10 may comprise a single or even a plurality of sensor elements, as shown schematically in FIG. 4.
  • a calibratable magnetic field sensor may comprise one, two or four lateral Hall sensor elements and / or one, two, four, eight or more vertical Hall sensor elements.
  • the Eiregerleiters Thermal 14 with the first 15 and second 16 excitation conductor can, for. B. can be arranged directly or offset in the vicinity of the sensor elements in order to calibrate the sensor elements can.
  • the calibratable magnetic field sensor can be a multidimensional Hall sensor for determining a magnetic field in one or more spatial directions.
  • FIG. 4 shows, in a schematic plan view, a calibratable magnetic field sensor 10 with a field-effect conductor structure 14 according to an exemplary embodiment of the present invention.
  • the calibratable magnetic field sensor according to the invention may be a magnetic field sensor which has one or more vertical and / or horizontal Hall sensors for detecting spatial components of a magnetic field at a reference point 45.
  • the calibratable magnetic field sensor 10 shown schematically in FIG. 4 has a plurality of Hall sensor elements for determining a magnetic field at a reference point 45.
  • the magnetic field sensor has three sensor element arrangements 20, 22 and 60, each consisting of four associated sensor elements 20a-20d, 22a-22d and 60a-60d.
  • the opposing paired sensor elements may be symmetrical to each other.
  • the exciter conductors 15, 16 may be arranged asymmetrically with respect to the sensor elements arranged in pairs, so that during a calibration phase, the magnetic field which can be generated by impressing a calibration current ⁇ into the first excitation conductor 15 and a calibration current in ⁇ into the second excitation conductor 16, unequal calibration magnetic field components the couple wise arranged opposite sensor elements can be generated.
  • the calibration currents can be impressed into the excitation conductor structure 14 at the same time or overlapping in time, for example. In further exemplary embodiments, the calibration currents can also be impressed in chronological succession.
  • the excitation conductor structure 14 has a rectangular or coil-like structure.
  • the excitation conductor structure may, for example, be conductor tracks in a metallization plane above the sensor elements in a semiconductor substrate or, for example, also an external, discrete excitation conductor structure or coil which is attached correspondingly above the sensor elements.
  • a first current I 0 and a second current Ii can be offset in time or one behind the other only in a partial path 15 a or 15b of the first exciter conductor 15 or in a partial section 16a or 16b of the second excitation conductor 16 are impressed, wherein the partial sections may each be assigned to the one sensor element of at least pairwise symmetrically arranged sensor elements.
  • the sections 15a and 16a may comprise two adjacent sides of the rectangular excitation conductor structure 14. Depending on which sensor element the exciter conductor distance is to be determined, such a subsection may of course also include the subsections 15b and 16b.
  • the magnetic fields in impressing a current in the two exciter 15 and 16 are superimposed to produce a resultant excitation or calibration magnetic field.
  • the excitation conductors 15 and 16 may be arranged in pairs symmetrically with respect to the sensor elements, but this need not necessarily be the case, but generally any geometry are conceivable that allow defined different calibration magnetic field components to be generated within a sensor element array. If an exciter line or coil runs directly over the vertical sensor elements, its influence with respect to these is significantly greater than the influence of an adjacent or laterally offset exciter line or coil.
  • the calibratable magnetic field sensor can furthermore, as already described above, have a control device 30 and an evaluation device 40.
  • the drive device 30 and the off-value device 40 may be on-chip devices, but also to external devices with which the corresponding currents are impressed in the excitation conductor structure 14 and determines the corresponding output signals of the sensor elements and determined according to the excitation conductor distance.
  • the control device 30 and the evaluation device 40 may thus be on-chip or off-chip devices which may be embodied in hardware or software and whose processes are executed, for example, on a computer or a microprocessor and thus a corresponding computer program or Software include or, for example, on a fixed sequence control.
  • the exciter conductor distance determination phase and a calibration phase are described in more detail below for the exemplary embodiment in FIG.
  • the actuation device 30 can impress a current, for example, only in a partial section 15a or 16a which is assigned to the sensor element to which the excitation conductor spacing is to be determined. This can z. B. a first current I 0 in the leg 15a of the first excitation conductor 15 are impressed and later in time or subsequently a second current ⁇ in a section 16a of the second exciter conductor.
  • the currents I 0 and from the control device 30 can be impressed over the partial sections 15b and 16b, in which case no partial paths 15a and 16a Electricity is impressed.
  • a calibration phase all the sensor elements 20a-20d, 22a-22d and 60a-60d of a calibratable magnetic field sensor can be excited via the excitation conductors 15 and 16 or via the coils 15 and 16. That is, by impressing a particular calibration current, predetermined calibration magnetic field components can be generated in the respective sensor elements as a function of the determined excitation conductor spacing.
  • a corresponding calibration current ⁇ ⁇ can thereby flow from the terminal ECP_0 to the terminal ECN_0 of the first excitation conductor 15 and a calibration current I K i can be impressed from a terminal ECP_1 to the terminal ECN_1 of the second exciter conductor 16.
  • the respective sensor element then outputs a corresponding calibratable output signal.
  • the current flows only through a portion of the excitation conductors 15, 16, either from KALI_0 to ECN_0 and / or from KALI_1 to ECN_1. So that the currents can be impressed correspondingly during the calibration phase and the distance determination phase, the terminals ECP_0 and ECP_1 can be switched to high impedance by the control device 30 during the distance determination phase, for example. In contrast, in a calibration phase, the terminals KALI_1 and KALI_0 can be switched to high impedance so that the current flow in the excitation conductor structure 14 that is different for the calibration measurement phase and the distance determination phase can be made possible.
  • the method of determining a field gap of a field conductor from a sensor element, impressing a first electrical current I 0 into the first field line of a field line structure may be a first Magnetic field component B 0jX in a sensor element 20a of a magnetic field sensor 10 to produce, have. Furthermore, a determination 110 of a quantity dependent on the first magnetic field component ⁇ , ⁇ can be carried out by means of the sensor element 20a, and an impressing 120 of a second electrical current Ii in the second excitation conductor 16 of the excitation conductor pattern 14, by a second magnetic field component B ljX in the sensor element 20a of the magnetic field sensor 10.
  • a variable dependent on the second magnetic field component B ljX can then be determined by means of the sensor element 20a. Further, a step of determining the exciter conductor pitch of the exciter conductor 15 or 16 from the sensor element 20a of the magnetic field sensor 10 becomes dependent on an exciter line spacing between the first exciter line 15 and the spaced second exciter line 16 and that of the first and second magnetic field components B0 > x and B 1; X dependent variables.
  • the implementation may be performed using a digital storage medium, such as a floppy disk, a DVD, a Blu-ray Disc, a CD, a ROM, a PROM, an EPROM, an EEPROM or FLASH memory, a hard disk, or other magnetic disk or optical memory are stored on the electronically readable control signals that can cooperate with a programmable computer system or cooperate such that the respective method is performed. Therefore, the digital storage medium can be computer readable.
  • some embodiments of the invention include a data carrier having electronically readable control signals capable of interacting with a programmable computer system to perform one of the methods described herein.
  • embodiments of the present invention may be implemented as a computer program product having program code, wherein the program code is operable to perform one of the methods when the computer program product runs on a computer or tester.
  • the program code may, for example, also be stored on a machine-readable carrier or be implemented as a semiconductor circuit.
  • an exemplary embodiment of the method according to the invention is thus a computer program which has a program code for carrying out one of the methods described herein when the computer program runs on a computer, a microprocessor or a microcontroller.
  • a further exemplary embodiment of the method according to the invention is thus a data carrier (or a digital storage medium or a computer-readable medium) on which the computer program is recorded for carrying out one of the methods described herein.
  • the methods are performed by any hardware device.
  • This may be a general-purpose hardware such as a computer processor (CPU), a hardware specific to the method, such as an ASIC or a digital sequencer.
  • CPU computer processor
  • ASIC application specific integrated circuit

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)

Abstract

L'invention concerne, au travers d'exemples de réalisation, un procédé de détermination de la distance entre un conducteur d'excitation (15, 16) d'une structure de conducteurs d'excitation (14) et un élément capteur (20a) d'un capteur de champ magnétique étalonnable (10). La structure de conducteurs d'excitation (14) comporte un premier conducteur d'excitation (15) et un deuxième conducteur d'excitation (16), à distance du premier, et l'élément capteur (20a) peut être étalonné au moyen du premier (15) ou du deuxième conducteur d'excitation (16). Le procédé comporte une étape d'application (100) d'un premier courant électrique I0 au premier conducteur d'excitation (15) de la structure de conducteurs d'excitation (14), de sorte à produire une première composante de champ magnétique B0,x dans l'élément capteur (20a) du capteur de champ magnétique (10), et une étape de détermination (110) d'une grandeur dépendant de la première composante de champ magnétique B0,x, au moyen de l'élément capteur (20a). En outre, le procédé comporte l'application (120) d'un deuxième courant électrique I1 au deuxième conducteur d'excitation (16) de la structure de conducteurs d'excitation (14), pour produire une deuxième composante de champ magnétique B1,x dans l'élément capteur (20a) du capteur de champ magnétique (10), ainsi qu'une étape de détermination (130) d'une grandeur dépendant de ladite deuxième composante de champ magnétique B1,x,au moyen de l'élément capteur (20a). Le procédé comprend en outre une étape de détermination (140) de la distance entre le conducteur d'excitation (15, 16) et l'élément capteur (20a) du capteur de champ magnétique (10), en fonction d'une distance entre le premier conducteur d'excitation (15) et le deuxième conducteur d'excitation (16) à distance du premier, et en fonction des grandeurs dépendant de la première et de la deuxième composante de champ magnétique B0,x et B1,x.
EP11713740A 2010-04-29 2011-04-04 Procédé de détermination de la distance d'un conducteur d'excitation, procédé d'étalonnage d'un capteur de champ magnétique, capteur de champ magnétique étalonnable et utilisation d'une structure de conducteurs d'excitation pour la détermination d'une distance entre un conducteur d'excitation et un capteur de champ magnétique Withdrawn EP2564225A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201010028390 DE102010028390B4 (de) 2010-04-29 2010-04-29 Verfahren zur Bestimmung eines Erregerleiterabstandes von einem Magnetfeldsensor, Verfahren zum Kalibrieren des Magnetfeldsensors sowie ein kalibrierbarer Magnetfeldsensor und Verwendung einer Erregerleiterstruktur zur Bestimmung eines Erregerleiterabstandes
PCT/EP2011/055224 WO2011134748A1 (fr) 2010-04-29 2011-04-04 Procédé de détermination de la distance d'un conducteur d'excitation, procédé d'étalonnage d'un capteur de champ magnétique, capteur de champ magnétique étalonnable et utilisation d'une structure de conducteurs d'excitation pour la détermination d'une distance entre un conducteur d'excitation et un capteur de champ magnétique

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EP2564225A1 true EP2564225A1 (fr) 2013-03-06

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EP11713740A Withdrawn EP2564225A1 (fr) 2010-04-29 2011-04-04 Procédé de détermination de la distance d'un conducteur d'excitation, procédé d'étalonnage d'un capteur de champ magnétique, capteur de champ magnétique étalonnable et utilisation d'une structure de conducteurs d'excitation pour la détermination d'une distance entre un conducteur d'excitation et un capteur de champ magnétique

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US (1) US9000754B2 (fr)
EP (1) EP2564225A1 (fr)
JP (1) JP5715687B2 (fr)
CA (1) CA2797574C (fr)
DE (1) DE102010028390B4 (fr)
WO (1) WO2011134748A1 (fr)

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US20130057256A1 (en) 2013-03-07
CA2797574C (fr) 2016-03-15
JP5715687B2 (ja) 2015-05-13
DE102010028390A1 (de) 2011-11-03
WO2011134748A8 (fr) 2012-01-12
WO2011134748A1 (fr) 2011-11-03
DE102010028390B4 (de) 2012-12-06
JP2013539195A (ja) 2013-10-17
US9000754B2 (en) 2015-04-07
CA2797574A1 (fr) 2011-11-03

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