EP2549115A3 - Pompe turbomoléculaire - Google Patents
Pompe turbomoléculaire Download PDFInfo
- Publication number
- EP2549115A3 EP2549115A3 EP12174596.2A EP12174596A EP2549115A3 EP 2549115 A3 EP2549115 A3 EP 2549115A3 EP 12174596 A EP12174596 A EP 12174596A EP 2549115 A3 EP2549115 A3 EP 2549115A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- turbomolecular pump
- disk
- sheet metal
- outer radius
- metal stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201110108115 DE102011108115A1 (de) | 2011-07-20 | 2011-07-20 | Turbomolekularpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2549115A2 EP2549115A2 (fr) | 2013-01-23 |
EP2549115A3 true EP2549115A3 (fr) | 2015-08-05 |
Family
ID=46466192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP12174596.2A Withdrawn EP2549115A3 (fr) | 2011-07-20 | 2012-07-02 | Pompe turbomoléculaire |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2549115A3 (fr) |
DE (1) | DE102011108115A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013207269A1 (de) | 2013-04-22 | 2014-10-23 | Pfeiffer Vacuum Gmbh | Statorelement für eine Holweckpumpstufe, Vakuumpumpe mit einer Holweckpumpstufe und Verfahren zur Herstellung eines Statorelements für eine Holweckpumpstufe |
DE102013114576A1 (de) * | 2013-12-19 | 2015-06-25 | Pfeiffer Vacuum Gmbh | Statorscheibe |
DE102014100207B4 (de) * | 2014-01-09 | 2020-07-09 | Pfeiffer Vacuum Gmbh | Statorscheibe |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004353652A (ja) * | 2003-05-01 | 2004-12-16 | Osaka Vacuum Ltd | 分子ポンプ |
DE69928866T2 (de) * | 1998-06-23 | 2006-07-06 | Boc Edwards Japan Ltd. | Turbomolekularpumpe |
-
2011
- 2011-07-20 DE DE201110108115 patent/DE102011108115A1/de not_active Ceased
-
2012
- 2012-07-02 EP EP12174596.2A patent/EP2549115A3/fr not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69928866T2 (de) * | 1998-06-23 | 2006-07-06 | Boc Edwards Japan Ltd. | Turbomolekularpumpe |
JP2004353652A (ja) * | 2003-05-01 | 2004-12-16 | Osaka Vacuum Ltd | 分子ポンプ |
Also Published As
Publication number | Publication date |
---|---|
DE102011108115A1 (de) | 2013-01-24 |
EP2549115A2 (fr) | 2013-01-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
AX | Request for extension of the european patent |
Extension state: BA ME |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
AX | Request for extension of the european patent |
Extension state: BA ME |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: F04D 19/04 20060101AFI20150630BHEP Ipc: F04D 29/54 20060101ALI20150630BHEP Ipc: F04D 29/64 20060101ALI20150630BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20160206 |