EP2491407A4 - Mécanisme d'alignement et d'antidérive - Google Patents

Mécanisme d'alignement et d'antidérive

Info

Publication number
EP2491407A4
EP2491407A4 EP09850676.9A EP09850676A EP2491407A4 EP 2491407 A4 EP2491407 A4 EP 2491407A4 EP 09850676 A EP09850676 A EP 09850676A EP 2491407 A4 EP2491407 A4 EP 2491407A4
Authority
EP
European Patent Office
Prior art keywords
alignment
drift mechanism
drift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09850676.9A
Other languages
German (de)
English (en)
Other versions
EP2491407A1 (fr
Inventor
Ing-Shouh Hwang
En-Te Hwu
Hans Ulrich Danzebrink
Hartmut Illers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Academia Sinica
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of EP2491407A1 publication Critical patent/EP2491407A1/fr
Publication of EP2491407A4 publication Critical patent/EP2491407A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Recording Or Reproduction (AREA)
EP09850676.9A 2009-10-23 2009-10-23 Mécanisme d'alignement et d'antidérive Withdrawn EP2491407A4 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2009/061822 WO2011049577A1 (fr) 2009-10-23 2009-10-23 Mécanisme d'alignement et d'antidérive

Publications (2)

Publication Number Publication Date
EP2491407A1 EP2491407A1 (fr) 2012-08-29
EP2491407A4 true EP2491407A4 (fr) 2014-03-26

Family

ID=43900588

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09850676.9A Withdrawn EP2491407A4 (fr) 2009-10-23 2009-10-23 Mécanisme d'alignement et d'antidérive

Country Status (3)

Country Link
EP (1) EP2491407A4 (fr)
CN (1) CN102844665B (fr)
WO (1) WO2011049577A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107238361B (zh) * 2017-06-08 2019-09-06 蔡银花 一种音圈马达位移精度及可靠性检测方法
CN107228621A (zh) * 2017-06-08 2017-10-03 重庆腾毅兴精密电子有限公司 一种音圈马达摆动检测装置及其方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5661548A (en) * 1994-11-30 1997-08-26 Nikon Corporation Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal
EP0807799A1 (fr) * 1996-05-13 1997-11-19 Seiko Instruments Inc. Appareil de balayage pour une sonde
WO2001022468A1 (fr) * 1999-09-20 2001-03-29 Veeco Instruments, Inc. Microactionneur sans recul a grande largeur de bande
US7247827B1 (en) * 2006-05-31 2007-07-24 Academia Sinica System for measurement of the height, angle and their variations of the surface of an object
US20080277582A1 (en) * 2007-05-07 2008-11-13 Veeco Instruments Inc. Closed loop controller and method for fast scanning probe microscopy

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5852232A (en) * 1997-01-02 1998-12-22 Kla-Tencor Corporation Acoustic sensor as proximity detector
US6590208B2 (en) * 2001-01-19 2003-07-08 Veeco Instruments Inc. Balanced momentum probe holder
JP2003215018A (ja) * 2002-01-23 2003-07-30 Jeol Ltd 表面情報測定方法及び表面情報測定装置
KR100501893B1 (ko) * 2002-11-14 2005-07-25 한국전자통신연구원 주파수 응답 분리 방식을 이용한 비접촉식 측정 장치 및그 측정 방법
US6845655B2 (en) * 2003-03-17 2005-01-25 Wisconsin Alumni Research Foundation Heterodyne feedback system for scanning force microscopy and the like

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5661548A (en) * 1994-11-30 1997-08-26 Nikon Corporation Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal
EP0807799A1 (fr) * 1996-05-13 1997-11-19 Seiko Instruments Inc. Appareil de balayage pour une sonde
WO2001022468A1 (fr) * 1999-09-20 2001-03-29 Veeco Instruments, Inc. Microactionneur sans recul a grande largeur de bande
US7247827B1 (en) * 2006-05-31 2007-07-24 Academia Sinica System for measurement of the height, angle and their variations of the surface of an object
US20080277582A1 (en) * 2007-05-07 2008-11-13 Veeco Instruments Inc. Closed loop controller and method for fast scanning probe microscopy

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2011049577A1 *

Also Published As

Publication number Publication date
WO2011049577A1 (fr) 2011-04-28
EP2491407A1 (fr) 2012-08-29
CN102844665B (zh) 2015-04-29
CN102844665A (zh) 2012-12-26

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