CN102844665B - 调准及抗飘移机制 - Google Patents
调准及抗飘移机制 Download PDFInfo
- Publication number
- CN102844665B CN102844665B CN200980162097.3A CN200980162097A CN102844665B CN 102844665 B CN102844665 B CN 102844665B CN 200980162097 A CN200980162097 A CN 200980162097A CN 102844665 B CN102844665 B CN 102844665B
- Authority
- CN
- China
- Prior art keywords
- actuator
- drift
- measured
- displacement sensors
- institute
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
- G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
Abstract
Description
Claims (23)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2009/061822 WO2011049577A1 (en) | 2009-10-23 | 2009-10-23 | Alignment and anti-drift mechanism |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102844665A CN102844665A (zh) | 2012-12-26 |
CN102844665B true CN102844665B (zh) | 2015-04-29 |
Family
ID=43900588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200980162097.3A Expired - Fee Related CN102844665B (zh) | 2009-10-23 | 2009-10-23 | 调准及抗飘移机制 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2491407A4 (zh) |
CN (1) | CN102844665B (zh) |
WO (1) | WO2011049577A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107238361B (zh) * | 2017-06-08 | 2019-09-06 | 蔡银花 | 一种音圈马达位移精度及可靠性检测方法 |
CN107228621A (zh) * | 2017-06-08 | 2017-10-03 | 重庆腾毅兴精密电子有限公司 | 一种音圈马达摆动检测装置及其方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5661548A (en) * | 1994-11-30 | 1997-08-26 | Nikon Corporation | Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal |
US6078044A (en) * | 1996-05-13 | 2000-06-20 | Seiko Instruments Inc. | Probe scanning apparatus |
US5852232A (en) * | 1997-01-02 | 1998-12-22 | Kla-Tencor Corporation | Acoustic sensor as proximity detector |
US6323483B1 (en) * | 1999-09-20 | 2001-11-27 | Veeco Instruments Inc. | High bandwidth recoiless microactuator |
US6590208B2 (en) * | 2001-01-19 | 2003-07-08 | Veeco Instruments Inc. | Balanced momentum probe holder |
JP2003215018A (ja) * | 2002-01-23 | 2003-07-30 | Jeol Ltd | 表面情報測定方法及び表面情報測定装置 |
KR100501893B1 (ko) * | 2002-11-14 | 2005-07-25 | 한국전자통신연구원 | 주파수 응답 분리 방식을 이용한 비접촉식 측정 장치 및그 측정 방법 |
US6845655B2 (en) * | 2003-03-17 | 2005-01-25 | Wisconsin Alumni Research Foundation | Heterodyne feedback system for scanning force microscopy and the like |
US7247827B1 (en) * | 2006-05-31 | 2007-07-24 | Academia Sinica | System for measurement of the height, angle and their variations of the surface of an object |
US8904560B2 (en) * | 2007-05-07 | 2014-12-02 | Bruker Nano, Inc. | Closed loop controller and method for fast scanning probe microscopy |
-
2009
- 2009-10-23 CN CN200980162097.3A patent/CN102844665B/zh not_active Expired - Fee Related
- 2009-10-23 WO PCT/US2009/061822 patent/WO2011049577A1/en active Application Filing
- 2009-10-23 EP EP09850676.9A patent/EP2491407A4/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP2491407A4 (en) | 2014-03-26 |
EP2491407A1 (en) | 2012-08-29 |
WO2011049577A1 (en) | 2011-04-28 |
CN102844665A (zh) | 2012-12-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: ACADEMIA SINICA Free format text: FORMER OWNER: LIANG QIMING Effective date: 20150325 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20150325 Address after: Nangang District Institute of Taiwan city Taipei two Chinese Road No. 128 Applicant after: ACADEMIA SINICA Address before: Nangang District Institute of Taiwan city Taipei two Chinese Road No. 128 Applicant before: Liang Qiming |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150429 Termination date: 20211023 |