EP2435379B1 - Verfahren zur herstellung eines beschichteten glasartikels - Google Patents
Verfahren zur herstellung eines beschichteten glasartikels Download PDFInfo
- Publication number
- EP2435379B1 EP2435379B1 EP10721846.3A EP10721846A EP2435379B1 EP 2435379 B1 EP2435379 B1 EP 2435379B1 EP 10721846 A EP10721846 A EP 10721846A EP 2435379 B1 EP2435379 B1 EP 2435379B1
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- EP
- European Patent Office
- Prior art keywords
- glass substrate
- layer
- functional layer
- process according
- coated
- Prior art date
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- 239000011521 glass Substances 0.000 title claims description 93
- 238000000034 method Methods 0.000 title claims description 22
- 230000008569 process Effects 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000002346 layers by function Substances 0.000 claims description 71
- 239000000758 substrate Substances 0.000 claims description 69
- 239000010410 layer Substances 0.000 claims description 58
- 238000000576 coating method Methods 0.000 claims description 38
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 34
- 229910052709 silver Inorganic materials 0.000 claims description 34
- 239000004332 silver Substances 0.000 claims description 33
- 238000000151 deposition Methods 0.000 claims description 32
- 238000007669 thermal treatment Methods 0.000 claims description 29
- 239000006117 anti-reflective coating Substances 0.000 claims description 27
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 26
- 239000011248 coating agent Substances 0.000 claims description 26
- 238000001771 vacuum deposition Methods 0.000 claims description 23
- 239000011787 zinc oxide Substances 0.000 claims description 13
- 230000005855 radiation Effects 0.000 claims description 12
- 230000036961 partial effect Effects 0.000 claims description 11
- 239000011701 zinc Substances 0.000 claims description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000011135 tin Substances 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 239000010955 niobium Substances 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 239000004411 aluminium Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 230000008021 deposition Effects 0.000 description 22
- 238000010438 heat treatment Methods 0.000 description 17
- 238000011282 treatment Methods 0.000 description 14
- 238000009997 thermal pre-treatment Methods 0.000 description 12
- 238000002834 transmittance Methods 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000003667 anti-reflective effect Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 229910007610 Zn—Sn Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000002596 correlated effect Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- 238000002203 pretreatment Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 239000002516 radical scavenger Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000005329 float glass Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000005340 laminated glass Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/584—Non-reactive treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/001—Other surface treatment of glass not in the form of fibres or filaments by irradiation by infrared light
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/002—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ultraviolet light
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
Definitions
- the invention relates to a process for manufacturing a coated glass article, particularly for manufacturing a coated flat glass substrate provided with a low-e and/or solar control coating.
- the invention relates to a process for manufacturing a coated glass article comprising the following steps:
- Such coated glass articles typically comprise at least one flat glass substrate made of soda-lime-silica glass or the like, particularly for use as a functional component in multiple glazings of the insulating or laminated glass type, for applications in vehicles, buildings or the like.
- the glass substrate surface is provided with a coating to decrease its emissivity ("low-e coating”) to achieve thermal insulation properties and/or to reduce its solar energy transmittance (“solar control coating”) to shield interior rooms against the entry of excessive amounts of solar energy (heat).
- low-e coating a coating to decrease its emissivity
- solar control coating to shield interior rooms against the entry of excessive amounts of solar energy (heat).
- the coating deposition process typically comprises a magnetron-enhanced reactive or non-reactive sputter deposition of the individual layers in a vacuum coating chamber with either of DC, medium frequency (AC) or RF sputtering from metal or compound targets, the invention not being restricted to a specific vacuum deposition process.
- Low-e and solar control coatings typically comprise at least one metallic functional layer each of which is embedded between two anti-reflective layers, the metal of the functional layer(s) being selected from, e.g.,
- the invention primarily aims at improving the quality of functional layers consisting of silver or silver-based alloys (hereinafter referred to as “silver-based layers”), but is not restricted thereto.
- the lower and upper anti-reflective coatings embedding the functional layer may serve a variety of purposes, their basic and primary function however being to reduce the visible light reflectance of the functional layer by interference effects.
- Each of the anti-reflective coatings may comprise only a single layer, or they may - most often - be composed of two or more partial layers.
- the anti-reflective coatings embedding the functional layer may - in addition to the transparent dielectric layers making up their major parts - comprise further auxiliary layers or components, e.g.
- primer layers visible light and/or solar energy absorbing layers, diffusion barrier layers, protective layers, blocker or scavenger layers or the like, which need not necessarily consist purely of transparent dielectric materials but may comprise metallic, semiconductive and/or light absorbing layers or components, as well known in the art.
- anti-reflective coating is provided with a broad meaning encompassing at least one transparent dielectric layer, but including also adjacent or embedded auxiliary layers or components (other than the functional layer) such as mentioned before, each anti-reflective coating as a whole being provided with an appropriate thickness to achieve the intended anti-reflection effect.
- EP 0 747 330 A1 discloses coated glass articles with a coating provided with a lower anti-reflective coating comprising a layer of a suboxide of zinc and/or tantalum immediately below the silver-based functional layer to increase its specific conductivity.
- DE 197 26 966 C1 proposes to use a lower anti-reflective coating comprising a medium frequency sputtered titanium oxide layer adjacent to the glass substrate and a zinc oxide layer adjacent to the silver-based functional layer to achieve a significantly increased specific conductivity of the functional layer.
- EP 0 464 789 discloses a thermal post-treatment of a coated glass article with a coating having the layer sequence "glass / ZnO as lower anti-reflective coating / Ag as functional layer / ZnO as upper anti-reflective coating", wherein the thermal post-treatment comprises heat treating the coated article for about 1 h in an N 2 atmosphere at 400 °C.
- DE 42 39 355 A1 proposes to apply a thermal post-treatment to coated glass articles comprising a coating with a layer sequence "glass / ITO / Ag / ITO", wherein the coated glass article is heat treated in an oven for about 1 h at up to 300 °C to decrease the sheet resistance of the silver functional layer.
- DE 44 12 318 C1 discloses a thermal post-treatment of coated glass articles comprising a coating with a layer sequence "glass / SnO 2 + NiCr as lower anti-reflective coating / Ag as functional layer / NiCr + SnO 2 as upper anti-reflective coating", wherein the coated glass article is heat treated in an oven for at least 1 min., particularly for about 15 min., at 250 - 450 °C to decrease the sheet resistance and emissivity of the silver functional layer.
- WO 2008/008165 A2 and WO 2008/096089 A2 proposed certain thermal post-treatments of coated glass articles to improve their properties, particularly to increase the specific conductivity of coatings comprising metallic functional layers, particularly silver-based functional layers. While both publications prefer to apply such thermal post-treatments after the coated article left the vacuum coating chamber, they also consider the application of a thermal post-treatment of the coated glass article inside the vacuum coating chamber.
- a thermal post-treatment of coated glass articles has a number of disadvantages.
- One disadvantage resides in the fact that a metallic functional layer typically reflects a high share of any IR radiation impinging on it so that a heat source with an increased power consumption is needed to achieve a specified temperature of the coated glass surface making the thermal post-treatment costly and time-consuming.
- the functional layer may oxidise by ambient air, thereby decreasing its quality.
- Post deposition heating may require additional processing steps, such as the manipulation and transport of coated glass articles, thereby affecting the cost effectiveness of the method. Heating coated glass articles for extended periods at elevated temperatures may lead to undesirable changes in the properties of the glass, for instance altering its optical properties and stress distribution.
- the invention aims at providing an improved process for manufacturing coated articles of the type mentioned hereinbefore whereby an increased specific conductivity of the metallic functional layer is achieved more effectively. It particularly aims at applying a thermal treatment such that the energy transferred into the glass substrate is used more effectively. A further aim is to provide a manufacturing process by which the effect of a thermal treatment on the properties of the functional layer, particularly its specific conductivity, is better controllable.
- the thermal treatment is applied to the glass substrate after its introduction into the vacuum coating chamber and is - with respect to the deposition of a functional layer - performed as a thermal pre-treatment of the (uncoated or partially coated) glass substrate surface to be coated such that it takes place only a short period of time before actually depositing the functional layer.
- the inventive thermal treatment is performed separately from any deposition step by the use of a thermal treatment device that does not deposit a layer on the glass substrate surface.
- the thermal pre-treatment of the (uncoated or partially coated) glass substrate surface may preferably be achieved by applying IR or UV radiation.
- IR heating is easier to implement as high power lamp sources are readily available for use within an evacuated environment.
- High power UV lamp sources may be used for heating the glass substrate surface but they require a gas flow over the quartz envelope to prevent over heating.
- Other UV sources such as UV lasers may provide an alternative solution.
- a benefit of UV radiation over IR radiation is the very high absorption of UV radiation below 320 nm by glass which would give an energy efficiency advantage of a UV source over an IR source of equivalent power. UV radiation may be even more preferred when applied to UV-absorbing glass substrates or to partially coated substrates wherein the partial coating comprises at least one UV absorbing layer.
- the IR radiators are preferably selected and arranged such that the installed power is in a range of about 2 - 70 W/cm 2 , preferably about 5 - 40 W/cm 2 .
- High output IR sources enable higher line speeds of the substrate transported relative to the IR sources to be achieved whilst maintaining the same beneficial effect(s) to the functional layer.
- the efficiency of the IR heating source can be maximised by increasing the directionality of the IR radiation by the use of lenses or high IR reflectance mirrors to focus the radiation onto the glass substrate surface.
- the walls of the thermal treatment compartment would have to be water-cooled to prevent mechanical failures due to thermal expansion of the vacuum coating chamber walls and of components within the chamber.
- the thermal energy is effectively transferred into the glass substrate surface without significant losses by subsequent radiative cooling and/or heat dissipation.
- the temperature increase caused by the inventive thermal pre-treatment primarily takes place in the glass substrate surface before the functional layer is deposited whereby a high effectiveness of the thermal treatment is achievable.
- the thermal treatment may also be applied at earlier stages during the deposition process, e.g. in between the deposition of two partial layers of the lower anti-reflective coating.
- the inventive thermal pre-treatment is laid out such that the surface temperature of the (uncoated or partially coated) glass substrate is increased to at least about 80 °C, preferably to at least about 100 °C, when measured immediately before the glass substrate enters the compartment of the vacuum coating chamber in which the functional layer is deposited. It was found that when increasing the glass substrate surface temperature to or above such temperatures a significant increase of the specific conductivity of the coating, as compared to an identical coating deposited without such thermal pre-treatment, is achievable.
- the thermal treatment is laid out such that the glass substrate surface temperature, as measured immediately prior to the deposition of a functional layer, is increased to less than about 300 °C, preferably to at most about 250 °C, most preferably to no more than about 220 °C.
- Such upper limits which are particularly applicable to silver-based functional layers, ensure that the functional layer is not damaged during its deposition by an overheated glass substrate surface.
- the amount of energy to be supplied to the substrate and to the vacuum coating chamber is hereby limited. It was found that by increasing the glass substrate surface temperature above these limits no major further improvement of the quality of functional layers, particularly when consisting of silver or a silver-based alloy, could be achieved.
- the thermal treatment takes place after the deposition of the lower anti-reflective coating and immediately before the deposition of the subsequent functional layer.
- An improvement to the (silver-based) functional layer can also be achieved if the heat treatment of the substrate surface takes place at earlier stages in the deposition sequence of the layer stack, before the (silver-based) functional layer is deposited.
- the resulting benefit to the sheet resistance can be due to an improved crystallinity of dielectric layers deposited on the heated surface as well as the heat retained in the substrate during the (silver-based) functional layer deposition.
- the glass surface temperature may need to be increased during the thermal treatment to a temperature slightly above the target value to be achieved immediately before the deposition of the functional layer to compensate for any interim cooling of the glass substrate surface due to heat re-radiation or heat dissipation into the body of the substrate.
- the inventive process is particularly well suited to manufacture coated glass articles wherein the functional layer is deposited as a silver-based layer. It was found that by applying the inventive pre-treatment a favourable growth of the crystallites of a silver-based functional layer can be achieved such that relatively large crystallites having essentially the same crystalline direction - i.e. having their [111] crystal axis directed essentially perpendicular to the glass surface - grow upon the upper partial layer of the lower anti-reflective layer.
- Zinc oxide based layers are known to provide already a preferred base for silver based functional layers, and the inventive thermal treatment further improves the advantageous effect of using a zinc oxide based silver growth promoting layer.
- Zinc oxide based layers consist primarily of zinc oxide. They may be doped with Al, Sn or the like as well known in the art.
- the process is advantageously applied to coated glass articles in which the lower anti-reflective coating comprises a lower partial layer which is deposited adjacent to the glass substrate surface, the material of which lower partial layer is selected from (oxy)nitrides of silicon and/or aluminium, oxides of titanium, zirconium, niobium, tin, zinc and mixtures thereof, e.g. zinc tin oxide (particularly zinc stannate).
- coated glass articles comprising one basic layer sequence "glass / lower anti-reflective coating / functional layer / upper anti-reflective coating” (“single functional layer coatings”) the coating may comprise further sequences of such type so as to improve its selectivity and other performance features as well known in the art (“multiple functional layers coating”), all of the functional layers being spaced by anti-reflective layers.
- the inventive thermal pre-treatment may take place at least before depositing the first of the functional layers, but it may also take place before depositing several of these or each of these.
- the inventive process is particularly advantageous when applied to coated glass articles comprising a coating able to withstand high temperature heat treatments of the bending or thermal toughening type without major changes of their optical properties such as disclosed, e.g., in EP 0 718 250 A2 , WO 02/062717 A1 , WO 02/062717 A1 , WO 2007/080428 A1 .
- Such coated articles having stable optical properties may advantageously be used in mixed arrangements of glazings comprising toughened and non-toughened coated glass panes which makes them very attractive both for producers of coated articles and for their customers.
- inventive pre-treatment is applied to heat treatable coatings being designed to have stable optical properties, not only their optical properties may be kept stable but also their emissivity and sheet resistance will be less affected by heat treatments of the bending and toughening type.
- the figure shows:
- the exemplary vacuum coating chamber 1 of Fig. 1 is equipped with a magnetron cathode sputtering device and comprises a number of compartments located along the line of travel of a glass substrate 2 to be coated inside the vacuum coating chamber 1.
- the compartments may be gas-separated from each other by locks (not shown). Several compartments may be united to a common compartment without intervening wall or lock if no compartment separation is needed.
- the glass substrate 2 is supported and transported through the vacuum coating chamber 1 by a number of rollers 3.
- Cathodes 4 - 8 that are provided at their lower surfaces with targets from which material may be sputter-coated onto the upper surface of the glass substrate 2, are arranged above the rollers 3.
- the first compartment at the left side - at the entry of the vacuum coating chamber 1 - contains a cathode 4 for sputtering a first partial layer of a lower anti-reflective coating
- the second compartment contains a cathode 5 for sputtering a second partial layer of a lower anti-reflective coating
- the fifth compartment contains a cathode 6 for sputtering a functional layer
- the sixth compartment contains a cathode 7 for sputtering a scavenger or blocker layer
- the seventh compartment near the exit of the vacuum coating chamber 1 contains a cathode 8 for sputtering an upper anti-reflective layer.
- each single cathode 4 - 8 may in practice comprise several separate cathodes arrange in one or several compartment(s).
- a thermal treatment device 10 In the third compartment a thermal treatment device 10 according to the invention is arranged. It comprises a number of IR radiation sources arranged such that the whole width of the glass substrate 2 can be heated to essentially the same surface temperature.
- the surface temperature increase achieved by the thermal treatment depends, e.g., upon the distance of the radiation sources of the thermal treatment device to the surface of the glass substrate 2, the power applied to the radiation sources, and the speed at which the glass substrate 2 is passing on the rollers 3 underneath the thermal treatment device 10.
- a temperature measuring device 11 such as a pyrometer is arranged by which the temperature of the surface of the glass substrate 2 can be measured.
- the temperature measurement is not restricted to the use of pyrometers.
- the maximum surface temperature achieved during the thermal treatment may, e.g., be determined by using temperature stickers that are applied to the glass surface.
- the thermal treatment device 10 comprised six 1 kW IR lamps which were each 40 cm long. The lamps were secured underneath a steel housing. The IR lamps were positioned at a distance of 10 cm from where the glass substrate 2 would pass during exposure. The temperature of the surface of the glass substrate 2 could be controlled by either adjusting the speed of the passing glass substrate 2 or by adapting the power setting of the IR lamps. The surface temperature of the glass substrate 2 was measured using an IR pyrometer as temperature measuring device 11 below which the heated glass substrate 2 passed immediately prior to the silver deposition compartment.
- ZnO:Al Al-doped zinc oxide
- ITO indium tin oxide
- Zn-Sn oxide mixed zinc-tin oxide with about 50 wt.% each of zinc and tin
- a thermal treatment device 10 was provided so that the surface temperature of the glass substrate 2 could be raised to about 190 °C after the deposition of the silver growth promoting layer of ZnO:Al and immediately before the deposition of the silver layer.
- the thermal treatment device 10 comprised six 1 kW IR lamps each having a length of 40 cm and arranged with a spacing of about 5 cm such that they covered an area of about 1,200 cm 2 , the installed power thus being about 5 W/cm 2 .
- the IR lamps were positioned about 10 cm above the glass substrate 2. With this setup a glass substrate 2 passing underneath at about 0.5 m/min had its surface temperature raised to about 190 °C according to a temperature measuring device 11 consisting of an IR pyrometer positioned to monitor the top surface of the glass substrate 2 after the thermal treatment and immediately before the silver layer deposition.
- the sheet resistance of the layer stack was measured using a conventional Nagy sheet resistance measuring device.
- Example 1 In a further series of experiments always the same coating was deposited as in Example 1.
- the line speed of the glass substrate 2 was however varied. Passing the glass substrate 2 underneath the 6 * 1 kW IR heater at higher line speeds of 1 - 5 m/min resulted in a sheet resistance reduction of at least about 5 %. These line speeds can be translated into a glass surface temperature before depositing the silver layer of about 80 - 100 °C.
- a degradation of the silver quality was observed for coatings deposited on a glass substrate 2 whose surface temperature was increased to about 300 °C, a surface temperature that was achieved by passing underneath the thermal treatment device 10 at less than about 0.4 m/min.
- the invention is not limited to the coatings of the examples.
- the inventive thermal pre-treatment taking place before depositing the functional layer is applicable to a large variety of coatings, particularly all coatings with a silver-based functional layer comprising lower anti-reflective coatings comprising dielectric layers such as Si and/or Al nitride or oxynitride, oxides such as Zn oxide, Zn-Sn oxide, Ti oxide and the like.
Claims (9)
- Verfahren zur Herstellung eines beschichteten Glasgegenstands, das die folgenden Schritte umfasst:- Einbringen eines Glassubstrats, das eine zu beschichtende Oberfläche aufweist, in eine Vakuumbeschichtungskammer;- Abscheiden einer mehrschichtigen Beschichtung auf dem Glassubstrat, die der Reihe nach ab der Glassubstratoberfläche mindestens umfasst: eine untere Antireflexionsbeschichtung, eine metallische IR-reflektierende Funktionsschicht und eine obere Antireflexionsschicht,- Anwenden einer Wärmebehandlung auf die Glassubstratoberfläche innerhalb der Vakuumbeschichtungskammer,dadurch gekennzeichnet, dass- die Wärmebehandlung so vor dem Abscheiden der Funktionsschicht durchgeführt wird, dass die Glassubstratoberflächentemperatur unmittelbar vor dem Abscheiden der Funktionsschicht auf mindestens 80 °C erhöht wird.
- Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass die Wärmebehandlung durch Anwenden von IR- oder UV-Strahlung erfolgt.
- Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Oberflächentemperatur auf mindestens 100 °C erhöht wird.
- Verfahren nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die Oberflächentemperatur auf weniger als 300 °C erhöht wird.
- Verfahren nach Anspruch 4, dadurch gekennzeichnet, dass die Oberflächentemperatur auf höchsten 250 °C erhöht wird.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Wärmebehandlung unmittelbar vor dem Abscheiden der Funktionsschicht durchgeführt wird.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Funktionsschicht als eine Schicht auf Silberbasis abgeschieden wird.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die untere Antireflexionsbeschichtung eine obere Teilschicht angrenzend an die Funktionsschicht umfasst, die als eine Schicht auf Zinkoxidbasis abgeschieden wird.
- Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die untere Antireflexionsbeschichtung einen untere Teilschicht umfasst, die angrenzend an die Glassubstratoberfläche abgeschieden wird, wobei das Material der Schicht unter (Oxy)nitriden von Silicium und/oder Aluminium, Oxiden von Titan, Zirconium, Niob, Zinn, Zink und Gemischen davon ausgewählt wird.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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PL10721846.3T PL2435379T5 (pl) | 2009-05-29 | 2010-05-21 | Sposób wytwarzania produktu ze szkła powlekanego |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0909235.4A GB0909235D0 (en) | 2009-05-29 | 2009-05-29 | Process for manufacturing a coated glass article |
PCT/GB2010/050831 WO2010136788A1 (en) | 2009-05-29 | 2010-05-21 | Process for manufacturing a coated glass article |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2435379A1 EP2435379A1 (de) | 2012-04-04 |
EP2435379B1 true EP2435379B1 (de) | 2017-12-13 |
EP2435379B2 EP2435379B2 (de) | 2022-06-15 |
Family
ID=40902276
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EP10721846.3A Active EP2435379B2 (de) | 2009-05-29 | 2010-05-21 | Verfahren zur herstellung eines beschichteten glasartikels |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2435379B2 (de) |
GB (1) | GB0909235D0 (de) |
PL (1) | PL2435379T5 (de) |
WO (1) | WO2010136788A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4098632A1 (de) * | 2020-01-10 | 2022-12-07 | Cardinal CG Company | Legierungsoxiddeckschicht, indiumzinnoxidbeschichtungen, beschichtete verglasungen und herstellungsverfahren |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11155493B2 (en) | 2010-01-16 | 2021-10-26 | Cardinal Cg Company | Alloy oxide overcoat indium tin oxide coatings, coated glazings, and production methods |
US8679634B2 (en) * | 2011-03-03 | 2014-03-25 | Guardian Industries Corp. | Functional layers comprising Ni-inclusive ternary alloys and methods of making the same |
GB201106788D0 (en) | 2011-04-21 | 2011-06-01 | Pilkington Group Ltd | Heat treatable coated glass pane |
US9919959B2 (en) * | 2012-05-31 | 2018-03-20 | Guardian Glass, LLC | Window with UV-treated low-E coating and method of making same |
PL222444B1 (pl) * | 2013-07-15 | 2016-07-29 | Akademia Górniczo Hutnicza Im Stanisława Staszica W Krakowie | Hybrydowy konwerter energii słonecznej |
FR3048244B1 (fr) * | 2016-02-26 | 2018-03-16 | Saint-Gobain Glass France | Procede de gravure selective d'une couche ou d'un empilement de couches sur substrat verrier |
US10822270B2 (en) | 2018-08-01 | 2020-11-03 | Guardian Glass, LLC | Coated article including ultra-fast laser treated silver-inclusive layer in low-emissivity thin film coating, and/or method of making the same |
CN115057628A (zh) * | 2022-06-27 | 2022-09-16 | 吴江南玻华东工程玻璃有限公司 | 一种中性色低反low-e镀膜玻璃及制备方法 |
Citations (2)
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WO2005000758A2 (fr) | 2003-06-27 | 2005-01-06 | Saint-Gobain Glass France | Substrat revetu d’une couche dielectrique et procede et installation pour sa fabrication |
WO2008096089A2 (fr) | 2007-01-05 | 2008-08-14 | Saint-Gobain Glass France | Procede de depot de couche mince et produit obtenu |
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US6893544B2 (en) * | 2001-08-14 | 2005-05-17 | Samsung Corning Co., Ltd. | Apparatus and method for depositing thin films on a glass substrate |
FR2892409B1 (fr) * | 2005-10-25 | 2007-12-14 | Saint Gobain | Procede de traitement d'un substrat |
US8420162B2 (en) * | 2006-07-07 | 2013-04-16 | Guardian Industries Corp. | Method of making coated article using rapid heating for reducing emissivity and/or sheet resistance, and corresponding product |
-
2009
- 2009-05-29 GB GBGB0909235.4A patent/GB0909235D0/en not_active Ceased
-
2010
- 2010-05-21 WO PCT/GB2010/050831 patent/WO2010136788A1/en active Application Filing
- 2010-05-21 EP EP10721846.3A patent/EP2435379B2/de active Active
- 2010-05-21 PL PL10721846.3T patent/PL2435379T5/pl unknown
Patent Citations (2)
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WO2005000758A2 (fr) | 2003-06-27 | 2005-01-06 | Saint-Gobain Glass France | Substrat revetu d’une couche dielectrique et procede et installation pour sa fabrication |
WO2008096089A2 (fr) | 2007-01-05 | 2008-08-14 | Saint-Gobain Glass France | Procede de depot de couche mince et produit obtenu |
Non-Patent Citations (3)
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ARBAB: "The base layer effect on the d.c. conductivity and structure of direct current magnetron sputtered thin films of silver", THIN SOLID FILMS, vol. 381, 2001, pages 15 - 21, XP004227492 |
FANG ET AL.: "Effect of Vacuum Annealing on the Properties of Transparent Conductive AZO Thin Films Prepared by DC Magnetron Sputtering", PHYS. STAT. SOL., vol. 193, no. 1, 2002, pages 139 - 152, XP055521256 |
SAHU ET AL.: "Effect of substrate temperature and annealing treatment on the electrical and optical properties of silver-based multilayer coating electrodes", THIN SOLID FILMS, vol. 515, no. 3, 2006, pages 932 - 935, XP005845370 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4098632A1 (de) * | 2020-01-10 | 2022-12-07 | Cardinal CG Company | Legierungsoxiddeckschicht, indiumzinnoxidbeschichtungen, beschichtete verglasungen und herstellungsverfahren |
Also Published As
Publication number | Publication date |
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EP2435379A1 (de) | 2012-04-04 |
WO2010136788A1 (en) | 2010-12-02 |
GB0909235D0 (en) | 2009-07-15 |
PL2435379T5 (pl) | 2023-01-02 |
PL2435379T3 (pl) | 2018-06-29 |
EP2435379B2 (de) | 2022-06-15 |
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