EP2419710B1 - Ultraschallprüfsystem - Google Patents

Ultraschallprüfsystem Download PDF

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Publication number
EP2419710B1
EP2419710B1 EP10716521A EP10716521A EP2419710B1 EP 2419710 B1 EP2419710 B1 EP 2419710B1 EP 10716521 A EP10716521 A EP 10716521A EP 10716521 A EP10716521 A EP 10716521A EP 2419710 B1 EP2419710 B1 EP 2419710B1
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Prior art keywords
light
ultrasonic
laser
optical
test
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German (de)
English (en)
French (fr)
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EP2419710A2 (de
Inventor
Dietmar Oberhoff
Guido Flohr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2431—Probes using other means for acoustic excitation, e.g. heat, microwaves, electron beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/262—Linear objects
    • G01N2291/2626—Wires, bars, rods

Definitions

  • the invention relates to an ultrasonic testing system having at least one transmitting unit and at least one receiving unit, a transmitting device for an ultrasonic testing system for testing a test object, with at least one transmitting unit, a receiving system for an ultrasonic testing system for testing a test object, with a laser for illuminating at least two measuring ranges on the Surface of the test object and with at least two receiver units for optically measuring the vibration of the surface of the test object and a method for operating an ultrasonic test system.
  • the methods of non-destructive ultrasonic testing and metrology open up a significant potential for quality improvement.
  • an ultrasonic wave is generated in the test specimen and from the transit time of the sound signal and possibly occurring interference signals, in particular echoes of defects, band thickness and possibly impurities in the material or on the surface of the specimen can be determined.
  • Such a reliable online check for possible internal and surface defects or the wall thickness measurement during the production process leads to a great economic advantage.
  • Information about the condition of the product that has been determined early on not only ensures the quality of the finished product, but also allows it Production-controlling measures, which significantly increase productivity and quality during further processing and increase the safety of personnel in the production process.
  • Laser ultrasound is a non-contact ultrasonic measurement and test method, characterized by the ultrasonic excitation by means of a short laser pulse in conjunction with the optical - usually interferometric - proof of the ultrasonic deflection. If a laser pulse of typically a few nanoseconds duration strikes a material surface, some of its energy is absorbed, the rest is transmitted or reflected. The absorbed energy is for the most part converted into heat, but a small part is transported away in the form of an ultrasonic wave.
  • thermoelastic excitation and the excitation by momentum transfer.
  • the thermoelastic ultrasonic stimulation can be fully explained by the local absorption, heating and thermal expansion. It determines the ultrasound source in the case of low laser pulse intensity. If the intensity is increased, it comes to the spalling of adhering layers, the material evaporation and plasma formation. This is the excitation mechanism with the greatest practical significance, the influence of the surface in steel is limited to a layer in the micrometer range.
  • the ultrasonic vibrations generated by laser pulses are characterized by a complex spatial and temporal structure.
  • the power, eg 360mJ / transmit pulse, the transmit laser in the known systems must be very large or the pulse repetition rate is small, for example. Below 100 Hz, since the existing laser power is distributed to the generated transmission pulses. When using laser laser ultrasound systems, therefore, one receives signals with a poor signal-to-noise ratio at low pulse repetition rate.
  • the EP 1 679 513 A2 describes a method and a system for measuring a physical parameter of a layer of a test object, in which two pulses of electromagnetic energy are directed to the surface of the article, and the ultrasonic pulses thus generated are evaluated to measure the parameter.
  • the object of the invention is the development of a new testing and measuring technique, on the one hand avoids the problems that occur in known methods, and on the other hand is relatively inexpensive to produce.
  • the transmitting unit generates a spark gap in an ultrasonic testing system which generates an ultrasonic vibration on the surface and / or in the test object and that the receiver unit optically measures the vibration of the surface of the test object.
  • a spark gap that is, a plasma resulting from an electrical discharge
  • the spark gap is ignited and transmitted between the transmitting unit and the surface of the test object.
  • the plasma of the spark gap which arises during the discharge, strikes the surface and generates the pressure pulse required for the ultrasound measurement on the surface.
  • the transmitting unit has for this purpose at least one ignition coil and control electronics for igniting the ignition coil at predetermined times.
  • the necessary electronics in particular an ignition coil or an ignition capacitor and control electronics, is very inexpensive to produce and can therefore be designed several times.
  • the conversion efficiency from electrical to ultrasonic energy is much better than when converting from optical to ultrasonic energy. Therefore, a plurality of transmitting units, in particular of more than 100 transmitting units can be used to achieve a sufficiently large test width.
  • the electromagnetic pulse generated when transmitting does not affect the optical system of the receiving unit negatively and therefore it can be well combined with the spark gap.
  • the light of the spark may preferably be shaded by a suitable shielding between the impact area of the spark and the measuring range of the optical receiver unit in order to reduce an influence on the measurement.
  • a commercially available laser ultrasound receiving system can be used, which is characterized in that an illumination laser is provided, the light of which illuminates the surface in a measuring range, wherein the receiver unit receives light from the measuring range into the receiver unit incident.
  • an illumination laser is provided, the light of which illuminates the surface in a measuring range, wherein the receiver unit receives light from the measuring range into the receiver unit incident.
  • a plurality of receiving units in particular more than 100 receiver units, may be provided. This also larger test widths can be achieved, preferably the Variety of receiving units is adapted to the plurality of transmitting units.
  • the ultrasonic testing system is characterized by an illuminating laser and measuring areas, each having a measuring area associated with a receiving unit, such that the receiving unit receives light incident from the measuring area in the receiving unit, wherein a light guiding system integrates the light of the laser in a first position of the light guiding system irradiates first measurement range and in a second position of the light guide system in a second measuring range.
  • a light guiding system integrates the light of the laser in a first position of the light guiding system irradiates first measurement range and in a second position of the light guide system in a second measuring range.
  • a light guide system can divide the light of the laser and radiate in a measuring range and in another measuring range, in particular in many different measuring ranges.
  • a laser-ultrasonic receiving system can be connected via optical multiplexer or matrix switch with optical fibers with many receiving optics.
  • the receiver unit comprises an interferometer or a light guide system forwards light incident on the receiver unit to an interferometer.
  • the primary power of the transmission system can be significantly lower, the pulse repetition rate increased and the system costs are significantly reduced.
  • the sequential use of a laser ultrasonic receiving system can thus be achieved in total a much higher sampling rate for many parallel test tracks and relatively low cost per test channel.
  • Laser-optical ultrasonic receiving systems work with illumination lasers, mostly Nd: YAG lasers, in continuous wave operation at a relatively low power of about 500 mW - 2 W.
  • the receiving system can be expensive in a single test channel, ie a receiver unit, which only considers a single measuring range compared to conventional ultrasound technology.
  • the use of optical multiplexers makes it possible to use a laser-optical ultrasound receiving system for N receiving stations or receiver units. As a result, the construction of a low-cost ultrasound system is possible because the price per receiving channel or receiver unit is very low.
  • conventional piezo test systems operate, for example, with 288 (GE Inspection Technologies) and 216 (NDT Systems & Services) receiving tracks, each with a 12.5 mm or 16.6 mm track width.
  • the maximum SNR is additionally limited by the noise of the receive illumination laser.
  • the amplitude noise and the phase noise of the receiving laser are the main sources of noise.
  • Fabry-Pérot interferometers with one resonator achieve an SNR of approx. 26 dB.
  • Fabry-Perot interferometers with two resonators achieve an SNR of approximately 45 dB, since the amplitude noise can be eliminated by a differential measurement technique.
  • the systems with two resonators can be used for test technology with medium sensitivity.
  • the systems with a resonator are actually only suitable for wall thickness measurement.
  • a laser-ultrasonic receiving system which uses a photorefractive crystal instead of an optical interferometer.
  • the photorefractive effect describes the light-induced refractive index change in photoconductive, electro-optical crystals.
  • This receiving system is particularly suitable for use under operating conditions.
  • SNR of approx. 70 dB can be achieved with this type of interferometer.
  • the amplitude noise can be eliminated.
  • the phase noise can be eliminated if the optical path length of the signal and reference beams is the same length.
  • This interferometer can be made very compact, it is less sensitive to environmental vibrations and it does not require active stabilization.
  • Optical switches work with different methods.
  • An electromechanical process using microscopic mirrors Micro Electromechanical Mirrors (MEM).
  • MEM Micro Electromechanical Mirrors
  • the micromirrors are tilted in their axes.
  • the mirrors may reflect or transmit the light signals as a non-reflective disk.
  • the described testing technique allows continuous and automatic quality testing at high speed in a harsh industrial environment.
  • the mechanical complexity can be reduced, for example. be significantly reduced in the heavy plate test and this also results in enormous savings.
  • the improved measuring and testing technology allows the production processes to be operated within narrower limits, which will lead to an increase in quality and an increase in the output.
  • the latter is one of the most efficient ways to enhance the sustainability of industrial production, as it requires less material to be produced, thereby saving raw material and energy and preventing emissions.
  • the development can be used by all steel producers and non-ferrous metal producers.
  • a transmitting device for an ultrasonic testing system for testing a test object with at least one transmitting unit is designed so that the transmitting unit means for generating a spark gap are provided, wherein the spark gap on the surface and / or in the test object generates an ultrasonic vibration.
  • the ultrasound generation by means of spark transmission to the test object is more effective because the production and the operation of the transmitting device are cheaper than in the known from the prior art technique of laser ultrasound generation or piezoelectric ultrasound generation.
  • the strong pulse of the plasma of the spark can be controlled very accurately, both the time and the duration are precisely adjustable. The accuracy of the switching time and the switching time can be set within wide limits.
  • the transmitting unit has an ignition coil and an electronic control unit for igniting the ignition coil at predetermined times.
  • This embodiment of the transmitting unit can be switched in an advantageous manner on the side of the low voltage, so that the cost of electronics is low.
  • the transmitting unit may also have a firing capacitor and control electronics for charging and discharging the ignition capacitor at predetermined times.
  • the high voltage must be switched quickly, which requires a greater effort, but the switching accuracy will be further increased by the design.
  • a receiving system for an ultrasonic inspection system for testing a test object comprises a laser for illuminating at least two measurement areas on the surface of the test object and at least two receiver units for optically measuring the vibration of the surface of the test object. Furthermore, an interferometer and a receiving light guide system are provided which directs in different positions each light from different measuring ranges on the interferometer. In this case, the interferometer and the receiving light guide system each form a receiver unit in one of the positions.
  • each measuring area is assigned a part of the receiving light guidance system in one position. This part can therefore be selectively controlled, so that in this position of the receiving Lichtleitsystems the recorded light is directed to the interferometer.
  • the light guide system can consist of any optical components, for example mirror arrangements.
  • a receiving system at least two optical fibers, each detecting one of the measuring areas, and an optical switch, which can guide light from one of the optical fibers to the interferometer, are provided. Depending on the position of the optical switch, the light received by a light guide from a certain measuring range is then directed onto the interferometer. By switching over the optical switch, the different measuring ranges can then be detected in succession, with the same interferometer being used in each case. By this type of multiplexing, a plurality of measuring ranges can be recorded successively.
  • this constellation it is possible in this constellation to process, for example, 300 test tracks with 100 Hz pulse repetition rate by means of a corresponding activation of the optical multiplexer with a laser-optical ultrasound receiving system.
  • a light guide system emits the light of the laser in different positions in different measuring ranges. Similar to the detection side of the receiving system, the laser light can be passed through a light guide system on the specimen that irradiates laser light only in each of the measuring range, is also currently received by the receiving light control system light. Thus, the laser power can be used specifically there where the light is used. As a result, either an overall lower laser power can be used, or an existing laser power can be used more effectively.
  • the light guide system can also consist here of any optical components, for example. Mirror arrangements.
  • a receiving system at least two optical fibers are provided, which are each assigned to one of the measuring ranges, and an optical switch selectively directs the laser light into one of the optical fibers.
  • This effectively working lighting system can distribute the laser light through fast switching processes so that, for example, the above-mentioned 300 test tracks can be processed with 100 Hz pulse repetition rate.
  • a transmitting device and a receiving system may be used together in an ultrasonic testing system of the type described above.
  • an ultrasonic testing system of the type described above.
  • the ultrasonic testing system described above can be operated with a method in which ultrasonic waves are generated in a test body with a transmitting device with at least two parallel transmitting units by means of spark gaps, in which the ultrasound signal is measured by a receiving system having at least two optical receiver units, in which in each case one transmitter unit and one receiver unit are assigned to one another, in which the mutually associated transmitting unit and receiving unit are activated in time coordinated with each other and in which a grid of measuring points is measured by a serial control of the transmitting device and the receiving unit on the test body.
  • Fig. 1 shows an inventive ultrasonic testing system, which is equipped with both a transmitting device and with a receiving system.
  • a method can be performed with this ultrasonic inspection system.
  • the measurement arrangement initially comprises a controller 2, which carries out and coordinates the control of the components of the ultrasonic testing system described below.
  • the transmitting device 4 has a transmitting electronics 6, an ignition coil 8 and an electrode 10, which together form a transmitting unit.
  • the ignition coil 8 together with the electrode 10 means for generating a spark gap 12, wherein the spark gap 12 generates an ultrasonic vibration on the surface and / or in the test object 14.
  • the controller 2 transmits via a line 16 a control signal to the transmission electronics 6, whereby an accurate timing, in particular with respect to the ignition timing and the ignition duration, for generating the spark gap 12 is achieved.
  • the transmission electronics 6 interrupts the direct current on the primary side of a transformer arranged in the ignition coil, whereby on the secondary side by the collapsing magnetic field for generating the spark gap 12 sufficient voltage is generated.
  • an ignition coil can also be provided a firing capacitor, although the voltage generated by the control electronics 6 must be sufficient in itself to charge the capacitor so strong to ignite the spark gap can.
  • Fig. 1 is indicated by three schematic levels 18 that a plurality of transmitting units is arranged parallel to each other.
  • plane is not to be understood that the arranged there are arranged geometrically in a plane, but that each "level” one having separate arrangement and different arrangements are arranged parallel to each other.
  • each level 18 a transmission electronics 6, an ignition coil 8 and an electrode 10 are provided, which are controlled via one of the lines 16 of the controller 2.
  • the mutually parallel transmission units serially generate spark gaps 12 to induce ultrasonic pulses at different locations on the surface of the test body 14.
  • the transmitting device may consist of one or more transmitting units, depending on the requirements of the test body to be measured.
  • Fig. 1 also shows a receiving system for a Ultrasonic testing system.
  • a laser 20 generates a laser beam which is introduced by means of an optical switch 22 into a light guide 24, or optical waveguide (LWL).
  • the light guide 24 transmits the light to a measuring region 30 in a first plane 18 by means of suitable optics 26 and 28.
  • the light reflected by the measuring area 30 is coupled out of the light path by means of a beam splitter 32, and fed into a light guide 36 by means of a suitable optical system 34.
  • An optical switch 38 then decouples the light from the light guide 36 and passes it to an interferometer 40.
  • a detector 42 generates an output signal which is transmitted to an evaluation unit 44.
  • a signal evaluation with A / D conversion and real-time signal processing instead, the result of which is transmitted to a computer 46.
  • phase or frequency modulated light oscillations are then interferometrically converted into an amplitude modulated signal that can be measured with a photodetector.
  • the structure described above is provided in a plurality of planes 16, in each of which a receiving unit described above is arranged in order to be able to detect a multiplicity of measuring areas 30.
  • the controller 2 then controls via a line 48, the two optical switches 22 and 38 so that they assume different positions.
  • the laser light is introduced into the light guide 24 at the same time and the reflected light received by the light guide 36 is directed onto the interferometer 40.
  • Both light guides 22 and 38 are thus simultaneously "active". By alternately activating the respective light paths and thus the juxtaposed receiving units multiplexing of the receiving system is thus achieved.
  • Fig. 1 also shows the interaction of the transmitting device and the receiving system of the ultrasonic testing system.
  • the controller 2 takes over the synchronization of the transmitting device and the receiving system.
  • the Transmission electronics 6 driven to produce by means of the ignition coil 8 and the electrode 10, a spark gap 12 with a defined start and end time.
  • the spark gap 12 induces an ultrasonic pulse in the test body 14.
  • the receiving system and in particular the optical switches 22 and 38 are driven so that the receiving system is active in the same plane 18 and measures a surface vibration due to the ultrasonic signal.
  • the components of the receiving system in the respective level 18 are left active so long that a sufficient time for a transit time measurement has elapsed. This period of time depends on the material parameters and the thickness of the test specimen and is, for example, about 30 to 50 ⁇ s.
  • both the transmitting device and the receiving system can be activated at different levels one after the other in chronological succession. Due to the temporal sequence of activating the levels, adjacent measuring ranges can be detected. A grid of measuring ranges is thus detected in succession. Moves the specimen transverse to the arrangement of the planes or move the transmitting and receiving systems on the body to be tested and corresponds to the width of the arrangement of the planes or the amplitude of movement of the transmitting and receiving system substantially the width of the specimen, then successively the entire test pieces are checked in a narrow grid of measuring ranges.
  • Fig. 1 shows, moreover, that a shield 50 is provided between the spark gap 12 and the measuring area 30, which shields the intense light occurring when generating the spark gap 12 with respect to the measuring area 30.
  • the signal-to-noise ratio can still be improved by the use of suitable optical band filters, which preferably pass only the wavelength range of the laser light.
  • suitable optical band filters which preferably pass only the wavelength range of the laser light.
  • such an optical filter may be arranged between the beam splitter 32 and the lens 34.
  • the Fig. 2 to 4 show examples of signals taken during run time measurement.
  • the output signal of the interferometer is shown at the top, while the lower curve shows the envelope (eg the quadrature-demodulated signal or the low-pass filtered curve of the upper measurement curve).
  • the labels of the x-axis of the diagrams represent the sampling points of the signal which correspond to any time unit.
  • the y-axis represents the intensity of the curve in arbitrary units.
  • Fig. 2 shows an idealized, noise-free and undisturbed signal. At regular intervals, an oscillation can be seen whose amplitude decreases from occurrence to occurrence. These vibrations are generated by the ultrasonic signal, which is reflected several times on the surface of the specimen opposite the observed surface. By repeatedly passing through the test body, the amplitude of the signal decreases. The in Fig. 2 shown waveform is undisturbed, since only the regularly occurring vibration signals occur.
  • Fig. 3 shows an idealized, noise-free, but now disturbed signal. At regular intervals is initially a vibration as in Fig. 2 to recognize, the amplitude of which decreases from occurrence to occurrence. Smaller signals can be seen between each two oscillation cycles, which indicates a shorter transit time of the ultrasonic signal within the specimen. Such an additional signal may result from a disturbance within the specimen that results in reflection of the ultrasonic wave in the region between the two surfaces. Thus, this additional signal or its frequency and amplitude of occurrence can be used as a measure of the quality of the test specimen.
  • Fig. 4 finally shows the in Fig. 3 represented signal with a superimposed noise, so that these waveforms represent a realistic case. It can be seen that the determination of the maxima is made difficult by the noise. Therefore, when selecting the interferometer, attention is always paid to the signal-to-noise ratio to be achieved with it.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP10716521A 2009-04-15 2010-04-15 Ultraschallprüfsystem Active EP2419710B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009017106 2009-04-15
PCT/EP2010/054954 WO2010119094A2 (de) 2009-04-15 2010-04-15 Ultraschallprüfsystem

Publications (2)

Publication Number Publication Date
EP2419710A2 EP2419710A2 (de) 2012-02-22
EP2419710B1 true EP2419710B1 (de) 2013-02-13

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US (1) US20120067128A1 (ru)
EP (1) EP2419710B1 (ru)
JP (1) JP5128004B2 (ru)
KR (1) KR20120002535A (ru)
CN (1) CN102395872B (ru)
BR (1) BRPI1016098A2 (ru)
CA (1) CA2757715A1 (ru)
ES (1) ES2403687T3 (ru)
RU (1) RU2528578C2 (ru)
WO (1) WO2010119094A2 (ru)

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JP5249975B2 (ja) * 2010-02-26 2013-07-31 三菱重工業株式会社 レーザ超音波探傷装置
JP2012047607A (ja) * 2010-08-27 2012-03-08 Hitachi Ltd 内部欠陥検査方法及びその装置
FI20145205L (fi) * 2014-03-04 2015-09-05 Photono Oy Menetelmä ja järjestelmä silmänpainemittauksiin
RU2635851C2 (ru) * 2016-01-11 2017-11-20 Федеральное государственное бюджетное образовательное учреждение высшего образования "Иркутский государственный университет путей сообщения" (ФГБОУ ВО ИрГУПС) Способ неконтактной импульсной ультразвуковой дефектоскопии
WO2018104783A2 (en) 2016-12-07 2018-06-14 Abb Schweiz Ag Systems and method for inspecting a machine
CN109212794A (zh) * 2018-10-17 2019-01-15 深圳市华星光电技术有限公司 一种液晶气泡分析方法及分析装置
CN110333285B (zh) * 2019-07-04 2021-07-27 大连海洋大学 基于变分模态分解的超声兰姆波缺陷信号识别方法
CN111998763B (zh) * 2020-08-27 2021-04-16 四川大学 高温电磁超声波金属体厚度在线监测方法

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ES2403687T3 (es) 2013-05-21
CN102395872A (zh) 2012-03-28
WO2010119094A3 (de) 2011-03-31
CA2757715A1 (en) 2010-10-21
JP2012524250A (ja) 2012-10-11
BRPI1016098A2 (pt) 2017-07-18
WO2010119094A2 (de) 2010-10-21
JP5128004B2 (ja) 2013-01-23
RU2528578C2 (ru) 2014-09-20
KR20120002535A (ko) 2012-01-05
US20120067128A1 (en) 2012-03-22
CN102395872B (zh) 2013-11-13
EP2419710A2 (de) 2012-02-22
RU2011146131A (ru) 2013-05-20

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