EP2419640B2 - Pompe à vide à vis - Google Patents

Pompe à vide à vis Download PDF

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Publication number
EP2419640B2
EP2419640B2 EP10713646.7A EP10713646A EP2419640B2 EP 2419640 B2 EP2419640 B2 EP 2419640B2 EP 10713646 A EP10713646 A EP 10713646A EP 2419640 B2 EP2419640 B2 EP 2419640B2
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EP
European Patent Office
Prior art keywords
overpressure
pump
channel
screw
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP10713646.7A
Other languages
German (de)
English (en)
Other versions
EP2419640B1 (fr
EP2419640A2 (fr
Inventor
Peter Birch
Robert Jenkins
Roland Müller
Magnus Janicki
Wolfgang Giebmanns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Leybold GmbH filed Critical Leybold GmbH
Priority to EP14150358.1A priority Critical patent/EP2719899B1/fr
Publication of EP2419640A2 publication Critical patent/EP2419640A2/fr
Publication of EP2419640B1 publication Critical patent/EP2419640B1/fr
Application granted granted Critical
Publication of EP2419640B2 publication Critical patent/EP2419640B2/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
    • F04C29/126—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps of the non-return type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet

Definitions

  • the invention relates to a screw vacuum pump, preferably with a compression of a medium, usually from gas to atmosphere takes place.
  • Screw vacuum pumps have a pump chamber in a pump chamber.
  • the screw rotors have on their outer side in each case a helical thread, wherein for conveying and compression of the medium, the two threads of the screw rotors mesh with each other.
  • Within the pump chamber takes place from the suction side, ie the pump inlet in the direction of the pressure side, ie the pump outlet, a compression of the pumped medium.
  • Conventional compression ratios of screw vacuum pumps are in the range of 1 to 10 6 . Depending on the pressure applied to the pump inlet, over-compression can take place within the screw vacuum pump.
  • the overpressure outlet has an overpressure opening arranged in a side wall of the pumping chamber. Within the overpressure outlet, a pressure relief valve is arranged.
  • a screw vacuum pump in which a plurality of overpressure openings are arranged on a side wall of the pumping chamber. These are connected to a common extending in the longitudinal direction of the housing bore. This longitudinal bore is connected via a transverse bore with the pump outlet.
  • the object of the invention is to design the overpressure outlet such that the risk of over-compression within the screw vacuum pump is reduced and the pumping power and the energy efficiency of the screw vacuum pump is improved.
  • a plurality of overpressure openings are provided, which are arranged substantially at the same pressure level.
  • the overpressure openings are connected to a channel which is completely closed by a common housing cover.
  • a plurality of overpressure openings are thus arranged on a line corresponding to the gradient of the screw rotor.
  • the at least one overpressure outlet has a channel which is connected to the pump outlet of the screw vacuum pump, wherein preferably atmospheric pressure is present at the pump outlet.
  • the channel preferably extends in the longitudinal direction of the screw rotors.
  • several overpressure openings can open.
  • the overpressure ports are connected to the channel via transverse bores.
  • a plurality of preferably longitudinally extending channels to be provided in the pump housing, with the individual channels in turn being connected to a plurality of overpressure openings, which may then at least partially be at the same pressure level.
  • a plurality of overpressure openings are connected in particular via individual feed channels to a common overpressure valve.
  • valve bodies with a convex outside.
  • the valve bodies are balls.
  • the use of such valve body has the advantage that they can move when actuated in the valve seat, in particular can rotate and thus an automatic cleaning of the valve seat and the ball takes place.
  • the valve seat itself is correspondingly complementary to the voltage applied to the valve seat outside of the valve body. In particular, it is a frusto-conical bore.
  • valve body For ease of construction, it is preferable to provide weight-loaded valves. Such valves are then preferably arranged within the pump housing such that the valve body abut due to their weight in the valve seat.
  • Suitable materials for the valve body and the valve seat are in particular material pairings Elastomer and metal.
  • an elastomeric ball may be arranged in a valve seat formed of a metallic material or else a metal ball in a valve seat formed from an elastomer. It is also possible to provide elastomer-coated metal balls, which are then arranged in a metallic valve seat. Also, a combination of hard and soft metallic materials or ceramic materials is possible.
  • a good seal in the closed state of the pressure relief valve can be ensured.
  • the choice of material based on the process medium to be pumped and the temperatures occurring and the required weight for weight-loaded valves.
  • valve body balls with a diameter in the range of 20 to 30 mm.
  • the bore of the valve seat in this case has a diameter of 16 to 20 mm.
  • the channel of the overpressure outlet is closed by a housing cover.
  • a housing cover Possibly. a plurality of provided channels, which are integrated in particular in the pump housing, be closed with a common cover.
  • the housing cover is preferably designed such that it extends over the entire length of the channel, so that the housing cover forms or closes a longitudinal side of the channel.
  • the at least one channel of the overpressure outlet in the pump housing in such a way that it is easily accessible even when the pump housing is connected to an attachment such as a further pump.
  • the at least one channel of the overpressure outlet extends the entire length of the screw vacuum pump, i. from the pump inlet to the pump outlet.
  • a pressure relief valve is also arranged in the inlet area. This has the advantage that, if the desired pressure is already present at the pump inlet, the medium can be discharged directly through the channel and thus an unnecessary power consumption of the screw vacuum pump is avoided. If, for example, with two pumps connected in series, pumping of the medium against atmosphere and there is already at the entrance of the second pump atmospheric pressure, so opens the corresponding pressure relief valve, so that the medium flows at least partially at the pump inlet of the second pump directly into the channel of the pressure relief.
  • valve seat is formed in a channel wall.
  • the valve body it is advantageous, in particular for weight-loaded valve bodies, to provide holding elements which, in a particularly preferred embodiment, are arranged within the channel. It is preferred in this case to provide pin-shaped holders, wherein a valve body formed in particular as a ball is held by preferably three or four correspondingly arranged pins.
  • the holder for the valve body can be formed in a simple manner. For example, it is possible for different pump types and different application areas of the pumps to provide the same housing with one or more longitudinal channels. The position of the overpressure openings is then defined by subsequent introduction of corresponding holes. Accordingly, the holding elements can be easily inserted into the channel. It is thus possible to provide a pump housing for different pump types or different areas of application, in which then the desired position of the overpressure openings and the valves can be realized in a simple manner.
  • the width of the overpressure opening in the longitudinal direction of the screw pump or in the conveying direction is selected such that it is smaller than or equal to the tooth width of the screw rotor.
  • the position of the overpressure opening is preferably taken into account, since the tooth width of the screw rotor can vary in the longitudinal direction.
  • the width of the Kochdrücköffhühg in the longitudinal direction of the screw rotor is preferably less than or equal to 90%, in particular less than or equal to 80% of the tooth width in this area.
  • the overpressure opening can be formed as a slot with, for example, oval or rectangular cross section.
  • the slot is arranged such that the longitudinal extent of the slot corresponds to the gradient of the thread of the screw rotor.
  • a first embodiment is formed in a pump housing 10, a pump chamber.
  • a pump housing 10 a pump chamber.
  • the screw rotors each have threads 16 on their outer sides, so that through opposite rotation of the two screw rotors 14 medium is sucked through an inlet 18 and conveyed in the direction of an arrow 20 to the outlet 22.
  • a positive pressure outlet 26 is provided in a side wall 24 of the pump housing 10.
  • the overpressure outlet 26 has two overpressure openings 28 connected to the pumping chamber 12.
  • the overpressure openings 28 are connected via connecting channels 30 with a channel 32 extending in the longitudinal direction 20.
  • the connecting channels 30 are closed by weight-loaded pressure relief valves 34, wherein each pressure relief valve has a valve body 36 designed as a ball.
  • the two valve bodies are in the illustrated embodiment in each case to a valve seat 39.
  • the weight of the spherical valve body 36 when exceeding a limit pressure in the connecting channel 30, the valve body 36 is pushed up so that medium flows into the channel 32.
  • the channel 32 of the overpressure outlet 26 is connected to the pump outlet 22 through the channel 33.
  • At the pump outlet 22 is preferably at atmospheric pressure.
  • the width b ( Fig. 3 ) of the overpressure openings 28 in the flow direction 20 is less than the tooth width B of a corresponding portion of the helical tooth 38 of the screw rotor 14.
  • a further connecting channel 41 is connected to the suction chamber 12. This is also closed with a pressure relief valve 34.
  • the valve 34 closing the connecting channel 41 serves to ensure that, in special operating states, the desired final pressure, usually atmospheric pressure, may already prevail at the inlet 18. In this operating state, the medium would unnecessarily be further compressed by the screw vacuum pump. Due to the provision according to the invention of the overpressure valve 34 in the region of the pump inlet, the already sufficiently compressed medium can flow directly into the channel 32 of the overpressure outlet and exit therefrom through the outlet 22 of the pump.
  • the channel 32 of the overpressure outlet 26 is closed by a housing cover 40, which is fastened to the housing 10 by screws 42, for example. This makes it possible to clean the channel 32 and the valves 34 by removing the housing cover 40 in a simple manner.
  • a further preferred embodiment of the invention are identical or similar components with the same reference numerals.
  • the two screw rotors 14 are not shown for reasons of clarity in the pump chamber 12.
  • a plurality of connecting channels 30 are connected with the pumping chamber 12 .
  • a housing cover 40 is provided. In this embodiment, all channels 32 shown are closed with a common housing cover 40.
  • the overpressure openings 28 can as in Fig. 3 be arranged shown. Here are the two in Fig. 3 left overpressure openings 28 arranged at a pressure level. The two overpressure openings 28 thus lie within a range defined by a threaded area or tooth 38. In the longitudinal direction 20 successively arranged housing openings 28 lie at different pressure levels.
  • a ball valve body 36 holding elements For holding the formed in the illustrated embodiments as a ball valve body 36 holding elements are provided.
  • this embodiment has the disadvantage that the position of the valve 34 is predetermined and the Abblasequerites may be limited.
  • the channels 32 have substantially the same width over their length.
  • pin-shaped holding elements 48 (FIGS. Fig. 5 ) be provided.
  • a further vacuum pump 52 such as a Roots pump.
  • the channels 32 of the overpressure outlets are in such a way that they are arranged laterally next to the contact surface of the Roots pump 52 on the outer side 50.
  • the channels 32 are in turn closed by the housing cover 40. Due to the preferred, in Fig. 6 illustrated arrangement of the channels and the housing cover 40, it is possible to remove the housing cover 40 without having to remove the roots pump 52. As a result, a cleaning of the channels 32 and a cleaning and maintenance of the pressure relief valves 34 is possible in a simple manner.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (9)

  1. Pompe à vide à vis, en particulier pour la compression vis-à-vis de la pression atmosphérique, avec
    un carter de pompe (10) constituant une chambre d'aspiration (12),
    deux rotors à vis (14) disposés dans la chambre d'aspiration (12) et engrenant l'un dans l'autre,
    plusieurs orifices de surpression (28) disposés dans une paroi latérale (24) de la chambre d'aspiration (12) essentiellement au même niveau de pression et raccordés à une sortie de surpression (26), et
    une soupape de surpression (34) disposée dans la sortie de surpression (26), la sortie de surpression (26) présentant une gaine (32) raccordée à une sortie de pompe (22),
    caractérisée par
    un couvercle de carter (40) fermant entièrement la gaine (32) de la sortie de surpression (26),
    la soupape de surpression (34) étant constituée en tant que soupape fonctionnant par gravité.
  2. Pompe à vide à vis selon la revendication 1, caractérisée en ce que les orifices de surpression (28) sont raccordés au moins partiellement à la même sortie de surpression (26).
  3. Pompe à vide à vis selon la revendication 1 ou 2,
    caractérisée en ce que la gaine (32) s'étend dans la direction longitudinale (20) des rotors à vis (14).
  4. Pompe à vide à vis selon une des revendications 1 à 3,
    caractérisée en ce qu'un corps de soupape (36) est disposé essentiellement à l'intérieur de la gaine (32), un siège de soupape (39) étant disposé de préférence dans une paroi de gaine (24).
  5. Pompe à vide à vis selon une des revendications 1 à 4,
    caractérisée en ce qu'un corps de soupape (36) est retenu dans la gaine (32) par des éléments de retenue (48) constitués de préférence en forme de broche.
  6. Pompe à vide à vis selon une des revendications 1 à 5,
    caractérisée en ce que la gaine (32) est intégrée dans le carter de pompe (10).
  7. Pompe à vide à vis selon une des revendications 1 à 6,
    caractérisée en ce que la gaine (32) s'étend dans la direction longitudinale (20) des rotors à vis (14) à partir d'une entrée de pompe (18) jusqu'à la sortie de pompe (22).
  8. Pompe à vide à vis selon une des revendications 1 à 7,
    caractérisée en ce que la largeur (b) de l'orifice de surpression (28) dans la direction longitudinale (20) des rotors à vis (14) est inférieure ou égale à une largeur de dent (B) des rotors à vis (14).
  9. Pompe à vide à vis selon une des revendications 1 à 8,
    caractérisée en ce que la soupape de surpression (34) présente un corps de soupape (36) présentant un côté extérieur convexe, de préférence une bille.
EP10713646.7A 2009-04-17 2010-04-13 Pompe à vide à vis Active EP2419640B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP14150358.1A EP2719899B1 (fr) 2009-04-17 2010-04-13 Pompe à vide à vis

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009017886A DE102009017886A1 (de) 2009-04-17 2009-04-17 Schraubenvakuumpumpe
PCT/EP2010/054842 WO2010119038A2 (fr) 2009-04-17 2010-04-13 Pompe à vide à vis

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP14150358.1A Division EP2719899B1 (fr) 2009-04-17 2010-04-13 Pompe à vide à vis
EP14150358.1A Division-Into EP2719899B1 (fr) 2009-04-17 2010-04-13 Pompe à vide à vis

Publications (3)

Publication Number Publication Date
EP2419640A2 EP2419640A2 (fr) 2012-02-22
EP2419640B1 EP2419640B1 (fr) 2014-01-15
EP2419640B2 true EP2419640B2 (fr) 2017-09-13

Family

ID=42751084

Family Applications (2)

Application Number Title Priority Date Filing Date
EP14150358.1A Active EP2719899B1 (fr) 2009-04-17 2010-04-13 Pompe à vide à vis
EP10713646.7A Active EP2419640B2 (fr) 2009-04-17 2010-04-13 Pompe à vide à vis

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP14150358.1A Active EP2719899B1 (fr) 2009-04-17 2010-04-13 Pompe à vide à vis

Country Status (8)

Country Link
US (1) US8602759B2 (fr)
EP (2) EP2719899B1 (fr)
JP (1) JP5665847B2 (fr)
KR (1) KR101695319B1 (fr)
CN (1) CN102395793B (fr)
DE (1) DE102009017886A1 (fr)
TW (2) TWI589779B (fr)
WO (1) WO2010119038A2 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2978214B1 (fr) * 2011-07-21 2013-08-16 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
TWI491803B (zh) * 2013-02-07 2015-07-11 Hanbell Precise Machinery Co Ltd 一種雙段螺旋導程真空泵
CN111247342B (zh) * 2017-10-25 2023-03-28 开利公司 用于压缩机的内部排气通道
CN109139471B (zh) * 2018-09-03 2019-07-02 东北大学 一种具备过压排气功能的卧式无油螺杆真空泵
CN109113991B (zh) * 2018-09-03 2019-07-23 东北大学 一种具备过压排气功能的立式无油螺杆真空泵
KR102178373B1 (ko) 2018-10-11 2020-11-13 (주)엘오티베큠 과 압축 발생을 방지하는 진공펌프 하우징 및 이를 포함한 진공펌프
JP7198116B2 (ja) * 2019-03-01 2022-12-28 株式会社日立産機システム 多段圧縮機
KR102382668B1 (ko) 2020-03-05 2022-04-06 (주)엘오티베큠 과 압축 발생을 방지하는 진공펌프 하우징 및 이를 포함한 진공펌프
GB2606224B (en) * 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump
BE1029442B1 (nl) 2021-05-27 2023-01-09 Atlas Copco Airpower Nv Element voor het samenpersen van een gas en werkwijze voor het regelen van dergelijk element
US11713761B2 (en) * 2021-09-26 2023-08-01 Paul Xiubao Huang Screw compressor with a shunt-enhanced decompression and pulsation trap (SEDAPT)
CN114526233B (zh) * 2022-03-02 2024-05-10 安徽理工大学 罗茨转子和螺杆转子串联的复合干式真空泵及使用方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB384355A (en) † 1931-08-05 1932-12-08 Frederick Charles Greenfield Improvements in and relating to rotary machines for the compression and propulsion of

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1737588A (en) * 1925-12-10 1929-12-03 Cons Ashcroft Hancock Co Incased adjustable weight-loaded valve
US2519913A (en) * 1943-08-21 1950-08-22 Jarvis C Marble Helical rotary compressor with pressure and volume regulating means
GB1248031A (en) * 1967-09-21 1971-09-29 Edwards High Vacuum Int Ltd Two-stage rotary vacuum pumps
JPS5475409U (fr) * 1977-11-09 1979-05-29
SE444601B (sv) * 1983-10-24 1986-04-21 Stal Refrigeration Ab Anordning for reglering av volymkapaciteten hos en skruvkompressor
JPH06100188B2 (ja) * 1984-09-05 1994-12-12 株式会社日立製作所 オイルフリースクリュー真空ポンプ
JPH03111690A (ja) * 1989-09-22 1991-05-13 Tokuda Seisakusho Ltd 真空ポンプ
JPH0510285A (ja) * 1991-07-04 1993-01-19 Hitachi Ltd 気体圧縮機の容量調整装置
US5246357A (en) * 1992-07-27 1993-09-21 Westinghouse Electric Corp. Screw compressor with oil-gas separation means
JP3111690B2 (ja) 1992-10-01 2000-11-27 トヨタ自動車株式会社 圧電積層体の製造方法
JP3593365B2 (ja) * 1994-08-19 2004-11-24 大亜真空株式会社 ねじれ角可変型歯車
JP3635869B2 (ja) * 1997-06-16 2005-04-06 株式会社デンソー 逆流防止弁
DE19800711A1 (de) * 1998-01-10 1999-07-29 Hermann Dipl Ing Lang Trockene Schraubenspindel Vakuumpumpe mit innerer Vorverdichtung
KR100301478B1 (ko) * 1998-07-03 2002-01-15 구자홍 스크롤압축기의바이패스밸브
DE19839501A1 (de) * 1998-08-29 2000-03-02 Leybold Vakuum Gmbh Trockenverdichtende Schraubenspindelpumpe
DE10045768C1 (de) 2000-09-15 2002-03-21 Siemens Ag Verfahren zum Steuern eines elektromechanischen Stellantriebs
DE10046768B4 (de) 2000-09-21 2011-08-11 Leybold Vakuum GmbH, 50968 Schraubenvakuumpumpe mit Bypass-Ventil
JP2002106735A (ja) * 2000-09-29 2002-04-10 Seiko Instruments Inc チェックバルブとこれを用いた気体圧縮機
EP1859163A4 (fr) * 2005-03-10 2014-11-26 Alan Notis Pompe ou moteur a vis coniques etanches par pressurisation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB384355A (en) † 1931-08-05 1932-12-08 Frederick Charles Greenfield Improvements in and relating to rotary machines for the compression and propulsion of

Also Published As

Publication number Publication date
KR20110136898A (ko) 2011-12-21
WO2010119038A2 (fr) 2010-10-21
TWI589779B (zh) 2017-07-01
TW201546373A (zh) 2015-12-16
JP5665847B2 (ja) 2015-02-04
CN102395793A (zh) 2012-03-28
EP2419640B1 (fr) 2014-01-15
DE102009017886A1 (de) 2010-10-21
EP2419640A2 (fr) 2012-02-22
US20120039737A1 (en) 2012-02-16
US8602759B2 (en) 2013-12-10
TW201042153A (en) 2010-12-01
KR101695319B1 (ko) 2017-01-11
JP2012524202A (ja) 2012-10-11
WO2010119038A3 (fr) 2011-06-23
CN102395793B (zh) 2015-04-01
EP2719899B1 (fr) 2017-09-06
TWI513903B (zh) 2015-12-21
EP2719899A1 (fr) 2014-04-16

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