EP2394275A1 - Electrical multilayered component - Google Patents
Electrical multilayered componentInfo
- Publication number
- EP2394275A1 EP2394275A1 EP10701703A EP10701703A EP2394275A1 EP 2394275 A1 EP2394275 A1 EP 2394275A1 EP 10701703 A EP10701703 A EP 10701703A EP 10701703 A EP10701703 A EP 10701703A EP 2394275 A1 EP2394275 A1 EP 2394275A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- multilayer component
- dielectric layer
- layer
- electrical
- varistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
- H01C7/102—Varistor boundary, e.g. surface layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
- H01C7/12—Overvoltage protection resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/18—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material comprising a plurality of layers stacked between terminals
Definitions
- the object of the present invention is to specify a multilayer electrical component comprising an ESD protection device with a low breakdown voltage and a low ESD clamping voltage.
- An electrical multilayer component which has a main body with at least two external electrodes.
- the electrical multilayer component has at least one first and at least one second inner electrode, which are electrically conductively connected to one outer electrode each.
- the inner electrode is connected directly or via plated-through holes in the multilayer component to the outer electrode.
- the electrical multilayer component has at least one ceramic varistor layer.
- the ceramic varistor layer comprises at least the first inner electrode.
- the first inner electrode is preferably largely surrounded by the ceramic varistor layer, wherein the first inner electrode is freely contactable at least in the region of the contact to the outer electrode.
- the first inner electrode is applied directly to the varistor layer.
- the multilayer electrical component comprises at least one dielectric layer.
- the dielectric layer is arranged at least between a varistor layer and at least one further layer.
- the further layer comprises the second inner electrode.
- the second inner electrode is largely enclosed by the further layer, wherein the second inner electrode is freely contactable at least in the region of the contact with its outer electrode.
- the second inner electrode is preferably applied directly to the further layer.
- the dielectric layer has at least one opening.
- the opening may be formed as a breakthrough, as a recess or as a cavity.
- the opening in the dielectric layer is preferably filled with a semiconductive material or a metal. Preferably, the opening is completely filled. In a further embodiment, however, single or multiple closed or open cavities are present in the filling of the opening.
- the semiconductive material with which one or more openings in the dielectric layer are filled comprises a varistor ceramic.
- the varistor ceramic, with which the opening in the dielectric layer is filled, is preferably identical to the varistor ceramic of the further varistor layer.
- the varistor ceramic in the opening of the dielectric layer is different from the ceramic of the varistor layer.
- the semiconducting material comprises a resistance material.
- the metal with which one or more openings of a dielectric layer are filled comprises a metal, which preferably comprises silver, palladium, platinum, silver palladium or other suitable metals.
- openings in the dielectric layer may be filled with different materials.
- all openings of a dielectric layer are filled with the same material.
- the main body of the electrical multilayer component comprises cover packages, which terminate the basic body of the multilayer component in the thickness direction upwards and downwards.
- the cover packages each comprise at least one dielectric layer.
- the cover packages of the electrical multilayer component and the dielectric layers having at least one opening may comprise the same material. In a further embodiment, it is also possible for the cover packages and the dielectric layer to comprise different materials.
- the dielectric layer a zirconium oxide (ZrO 2) or a zirconia-glass composite, an alumina (AlO x ) or a Alumina-glass composite, a manganese oxide (MnO) or a manganese oxide glass used.
- ZrO 2 zirconium oxide
- AlO x alumina
- MnO manganese oxide
- the dielectric layers may also comprise other suitable materials.
- the multilayer electrical component has one or more plated-through holes, so-called vias, with which individual or all internal electrodes of the multilayer electrical component are connected to the external contacts.
- the external contacts of the electrical multilayer component are formed as an array (row or matrix arrangement).
- LGA Land Grid Array
- BGA Ball Grid Array
- the internal electrodes of the electrical multilayer component are preferably connected via plated-through contacts with the external contacts.
- the dielectric layer which comprises at least one opening, is designed such that it forms an ESD discharge gap together with at least two adjacent varistor layers and two overlapping internal electrodes.
- the opening in the dielectric layer is filled with a semiconducting material or a metal, in particular by a method of printing on the dielectric layer, in such a way that a so-called catch pad known per se is formed.
- a via can be arranged thereon, whereby a free-standing electrode structure is formed over the dielectric layer.
- the electrical multilayer component has the function of a varistor with integrated ESD protection component.
- the varistor preferably has a capacity of less than 1 pF.
- the ESD protection component of the electrical multilayer component is preferably designed such that it has an ESD breakdown voltage of less than 20 V at 1 mA current.
- the ESD protection component of the electrical multilayer component preferably has an ESD clamping voltage of less than 500 V.
- An electrical multilayer component as described above has a reduction in the total capacitance of the component, especially as a result of the arrangement of the small capacitance of the dielectric layer connected in series with the varistor capacitance.
- the clamping voltage of the electrical multilayer component is only slightly increased by the dielectric layer compared to conventional multilayer components.
- the specified clamping voltage of the ESD protection component is essentially dependent on the distance between the inner electrode layers.
- the total capacitance of the electrical multilayer component is significantly reduced, as a result of which the current-carrying capacity and pulse stability of the component are further increased.
- FIG. 1 shows a schematic structure of a first exemplary embodiment of the electrical multilayer component
- FIG. 2 shows a further embodiment of the electrical multilayer component
- FIG. 3 shows another embodiment of the electrical multilayer component, wherein the external contacts as
- FIG. 4 shows a further embodiment of the multilayer electrical component, wherein the external contacts are designed as land grid arrays,
- FIG. 5 shows another embodiment of the electrical
- Multilayer component wherein the dielectric layer has two openings
- FIG. 6 shows a further embodiment of the multilayer electrical component, which shows a plurality of ESD regions connected in parallel in a multilayer component
- Figure 7 shows another embodiment of the electrical multilayer component, wherein between two
- Electrodes are arranged a plurality of dielectric layers with openings.
- Varistor layer facing away from the dielectric layer a catch pad on the filling of the opening is present.
- FIG 9 shows a further embodiment of the electrical multilayer component, in which a catch pad is present on the filling of the opening on the side of the dielectric layer facing the varistor layer.
- FIG. 1 shows a first embodiment of an electrical multilayer component which comprises a main body 1.
- the main body 1 has a varistor layer 5, which comprises a first inner electrode 3.
- the first inner electrode 3 is largely enclosed by the varistor layer 5.
- the electrical multilayer component has a further layer 7, which in the illustrated embodiment is designed as a further varistor layer.
- the further layer 7 comprises a second inner electrode 4, which is largely enclosed by the further layer 7.
- a dielectric layer 6 is arranged, which has an opening 8.
- the opening 8 is filled with a semiconductive material or a metal.
- the main body 1 of the electrical multilayer component is terminated in the thickness direction by cover packages 9, 9 ', the cover packages 9, 9' preferably each comprising at least one dielectric layer.
- FIG. 2 shows a further embodiment of the electrical multilayer component.
- the structure of the electrical multilayer component is almost identical to the structure in FIG. 1, wherein the first internal electrode 3 is applied to one surface of the varistor layer 5 and the second internal electrode 4 is applied to a surface of the further layer 7.
- the first inner electrode is arranged between the varistor layer 5 and the cover package 9.
- the second inner electrode 4 is arranged between the further layer 7 and the further second cover package 9 '.
- FIG. 3 shows a further embodiment of the electrical multilayer component.
- the electrical multilayer component has a main body 1 in which a varistor layer 5 is arranged, on which a first inner electrode 3 is arranged. In the thickness direction, the first inner electrode 3 and the varistor layer 5 are closed by a first cover package 9 upwards.
- a dielectric layer 6 is arranged below the varistor layer 5, which has openings 8. The openings 8 are filled with a semiconducting material or metal.
- second internal electrodes 4 are arranged on the underside of the dielectric layer 6.
- the first inner electrode 3 and the second inner electrodes 4 are connected via vias 10 with external contacts 2.
- the vias 10 may, for example, be cylindrical as shown in FIG.
- the main body 1 of the electrical multilayer component is closed in the thickness direction down by a second cover package 9 '.
- FIG. 4 shows a further embodiment of the multilayer electrical component similar to the embodiment in FIG. 3, wherein the dielectric layer 6 has the two openings 8.
- the dielectric layer 6 is arranged in the thickness direction between two layers 5, 7.
- the two layers 5, 7 are designed as varistor ceramic.
- the external contacts 2, 2 'of the electrical multilayer component are designed as land grid arrays in the illustrated embodiment.
- the vias can be cylindrical, for example, as shown in Figure 4 or frusto-conical, the vias can, for example in the direction of the external contacts 2, 2 'or towards the internal electrodes 3, 4 towards tapering.
- FIG. 5 shows a further embodiment of the electrical multilayer component which is similar to the embodiment in FIG.
- the dielectric layer 6 in FIG. 5 has two openings 8, which are filled with a semiconductive material or with a metal.
- FIG. 6 shows a further embodiment of the multilayer electrical component, the multilayer electrical component having three ESD protective elements connected in parallel.
- the ESD protection elements are each already described in detail in FIG.
- Each of the ESD protection elements comprises a first varistor layer 5 and a further layer 7.
- the further layer 7 is designed as a further varistor layer in the illustrated embodiment.
- a dielectric layer 6 is arranged, which has an opening 8.
- the opening 8 is filled with a semiconductive material or with metal.
- the ESD protection elements each have a first inner electrode 3 and a second inner electrode 4, wherein the inner electrodes 3, 4 are applied to the varistor layer 5 or to the further layer 7.
- FIG. 7 shows a further embodiment of the electrical multilayer component.
- the electrical multilayer component has a base body 1 with cover packages 9, 9 ', the cover packages 9, 9' preferably comprising at least one dielectric layer. Between the cover packages 9, 9 ', a varistor layer 5 and a further layer 7 are arranged, wherein the further layer 7 is designed as a varistor layer. Between the varistor layer 5 and the further layer 7, three dielectric intermediate layers 6 are arranged, which are separated from one another by intermediate layers of a varistor ceramic are spaced in the thickness direction.
- the dielectric layers 6 each have an opening 8.
- the openings 8 of the dielectric layers 6 are each filled with a semiconductive material or the opening 8 'with a metal.
- the electrical multilayer component has internal electrodes 3, 4 which are connected to external contacts 2, 2 '.
- the first inner electrode 3 is arranged between the varistor layer 5 and the cover package 9.
- the second inner electrode 4 is arranged between the further layer 7 and the second cover package 9 '.
- FIG. 8 shows an exemplary embodiment in which, similar to the exemplary embodiments of FIGS. 3 and 4, a base body 1, a varistor layer 5, a first inner electrode 3, a first cover package 9, a dielectric layer 6 with openings 8, a second cover package 9 ', vias 10 and external contacts 2, 2 'are present.
- the openings 8 are filled with a semiconductive material or metal, so that catch pads 11 are formed, which laterally spread on a surface of the dielectric layer 6 to the openings 8.
- the catch pads 11 are in the embodiment of Figure 8 on the side facing away from the varistor layer 5 side of the dielectric layer 6.
- the catch pads 11 can be prepared, for example, characterized in that the openings by a method of pressing with the semiconducting material or metal, so that a portion of the material used for the fillings forms the top-side catch pads 11.
- the catch pads 11 can, as shown in FIG. 8, be provided with the associated vias 10 and thus electrically connected to the external contacts 2 '.
- the catch pads 11 may act as second internal electrodes. It may additionally second Internal electrodes are provided in electrically conductive connection with the catch pads 11.
- typical dimensions are, for example, a thickness of the dielectric layer 6 of 10 ⁇ m to 30 ⁇ m, a diameter of the openings 8 of 20 ⁇ m to 30 ⁇ m, a diameter of the catch pads 11 of approximately 100 ⁇ m, a thickness of the catch pads of 3 microns to 5 microns and a height of a vias 10 plus catch pad 11 of about 50 microns.
- the vias 10 may be cylindrical or conical.
- FIG. 9 shows a further exemplary embodiment in which, similar to the exemplary embodiment according to FIG. 8, a base body 1, a varistor layer 5, a first inner electrode 3, a first cover package 9, a dielectric layer 6 with openings 8, a second cover package 9 ', vias 10 and External contacts 2, 2 'are present.
- the openings 8 are filled with a semiconductive material or metal, so that catch pads 11 are formed, which laterally spread on a surface of the dielectric layer 6 to the openings 8.
- the catch pads 11 are located on the side of the dielectric layer 6 facing the varistor layer 5.
- Second internal electrodes 4 are arranged on the side of the dielectric layer 6 remote from the varistor layer 5 and via vias 10 with external contacts 2 'electrically connected.
- the dimensions, in particular the openings 8 and the catch pads 11, can correspond to the dimensions given above for the embodiment of FIG.
- the electrical multilayer component comprises a plurality of ESD protection devices connected in series or in parallel, which are protected by at least a dielectric layer having one or more openings and at least one adjacent varistor layer are formed.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Thermistors And Varistors (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009007316A DE102009007316A1 (en) | 2009-02-03 | 2009-02-03 | Electrical multilayer component |
PCT/EP2010/051247 WO2010089294A1 (en) | 2009-02-03 | 2010-02-02 | Electrical multilayered component |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2394275A1 true EP2394275A1 (en) | 2011-12-14 |
EP2394275B1 EP2394275B1 (en) | 2019-10-16 |
Family
ID=42035891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10701703.0A Active EP2394275B1 (en) | 2009-02-03 | 2010-02-02 | Electrical multilayered component |
Country Status (7)
Country | Link |
---|---|
US (1) | US8410891B2 (en) |
EP (1) | EP2394275B1 (en) |
JP (1) | JP5758305B2 (en) |
KR (1) | KR101665742B1 (en) |
CN (1) | CN102308341B (en) |
DE (1) | DE102009007316A1 (en) |
WO (1) | WO2010089294A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2381451B1 (en) * | 2010-04-22 | 2018-08-01 | Epcos AG | Method for producing an electrical multi-layer component and electrical multi-layer component |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009010212B4 (en) * | 2009-02-23 | 2017-12-07 | Epcos Ag | Electrical multilayer component |
DE102010036270B4 (en) * | 2010-09-03 | 2018-10-11 | Epcos Ag | Ceramic component and method for producing a ceramic component |
TW201234393A (en) * | 2011-02-09 | 2012-08-16 | Yageo Corp | Multi-layer varistor having core electrode unit |
DE102012101606A1 (en) * | 2011-10-28 | 2013-05-02 | Epcos Ag | ESD protection device and device with an ESD protection device and an LED |
KR101983135B1 (en) | 2012-12-27 | 2019-05-28 | 삼성전기주식회사 | Inductor and composition for manufacturing the gap layer of the same |
KR101808794B1 (en) * | 2015-05-07 | 2018-01-18 | 주식회사 모다이노칩 | Laminated device |
DE102017108384A1 (en) | 2017-04-20 | 2018-10-25 | Epcos Ag | Multi-layer component and method for producing a multilayer component |
JP7235492B2 (en) * | 2018-12-12 | 2023-03-08 | Tdk株式会社 | chip varistor |
JP7322793B2 (en) * | 2020-04-16 | 2023-08-08 | Tdk株式会社 | Chip varistor manufacturing method and chip varistor |
US20230215727A1 (en) * | 2022-01-05 | 2023-07-06 | Polar Semiconductor, Llc | Forming passivation stack having etch stop layer |
Family Cites Families (14)
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JPH0722752A (en) * | 1993-06-30 | 1995-01-24 | Matsushita Electric Ind Co Ltd | Multilayer ceramic substrate and its manufacture |
JPH11265808A (en) | 1998-03-16 | 1999-09-28 | Tokin Corp | Surge absorbing element and manufacture of the same |
JP3489728B2 (en) * | 1999-10-18 | 2004-01-26 | 株式会社村田製作所 | Multilayer capacitors, wiring boards and high frequency circuits |
DE10064447C2 (en) * | 2000-12-22 | 2003-01-02 | Epcos Ag | Electrical multilayer component and interference suppression circuit with the component |
JP2002368420A (en) * | 2001-06-05 | 2002-12-20 | Murata Mfg Co Ltd | Method for manufacturing glass ceramic multilayer substrate and glass ceramic multilayer substrate |
FR2835981B1 (en) * | 2002-02-13 | 2005-04-29 | Commissariat Energie Atomique | TUNABLE VOLUME MEMS ACOUSTIC WAVE MICRORESONATOR |
JP4292788B2 (en) * | 2002-11-18 | 2009-07-08 | 三菱マテリアル株式会社 | Chip-type surge absorber and manufacturing method thereof |
DE102004010001A1 (en) | 2004-03-01 | 2005-09-22 | Epcos Ag | Electrical component comprises a stack of ceramic layers which form a base member, electrode layers, and a phase pushing unit |
DE102004058410B4 (en) | 2004-12-03 | 2021-02-18 | Tdk Electronics Ag | Multi-layer component with ESD protective elements |
DE102005016590A1 (en) * | 2005-04-11 | 2006-10-26 | Epcos Ag | Electric multilayer component and method for producing a multilayer component |
DE102005050638B4 (en) * | 2005-10-20 | 2020-07-16 | Tdk Electronics Ag | Electrical component |
DE102006000935B4 (en) | 2006-01-05 | 2016-03-10 | Epcos Ag | Monolithic ceramic component and method of manufacture |
US7541910B2 (en) * | 2006-05-25 | 2009-06-02 | Sfi Electronics Technology Inc. | Multilayer zinc oxide varistor |
DE102007012049B4 (en) | 2007-03-13 | 2017-10-12 | Epcos Ag | Electrical component |
-
2009
- 2009-02-03 DE DE102009007316A patent/DE102009007316A1/en not_active Ceased
-
2010
- 2010-02-02 JP JP2011546873A patent/JP5758305B2/en active Active
- 2010-02-02 US US13/146,490 patent/US8410891B2/en active Active
- 2010-02-02 KR KR1020117020632A patent/KR101665742B1/en active IP Right Grant
- 2010-02-02 EP EP10701703.0A patent/EP2394275B1/en active Active
- 2010-02-02 CN CN2010800064889A patent/CN102308341B/en active Active
- 2010-02-02 WO PCT/EP2010/051247 patent/WO2010089294A1/en active Application Filing
Non-Patent Citations (1)
Title |
---|
See references of WO2010089294A1 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2381451B1 (en) * | 2010-04-22 | 2018-08-01 | Epcos AG | Method for producing an electrical multi-layer component and electrical multi-layer component |
Also Published As
Publication number | Publication date |
---|---|
EP2394275B1 (en) | 2019-10-16 |
CN102308341B (en) | 2013-06-05 |
JP2012517097A (en) | 2012-07-26 |
US20120044039A1 (en) | 2012-02-23 |
CN102308341A (en) | 2012-01-04 |
US8410891B2 (en) | 2013-04-02 |
WO2010089294A1 (en) | 2010-08-12 |
KR20110116041A (en) | 2011-10-24 |
KR101665742B1 (en) | 2016-10-12 |
DE102009007316A1 (en) | 2010-08-05 |
JP5758305B2 (en) | 2015-08-05 |
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