EP2392195B1 - Apparatus for modifying the surfaces of web, plate and sheet products using a device for generating plasma - Google Patents
Apparatus for modifying the surfaces of web, plate and sheet products using a device for generating plasma Download PDFInfo
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- EP2392195B1 EP2392195B1 EP10709952.5A EP10709952A EP2392195B1 EP 2392195 B1 EP2392195 B1 EP 2392195B1 EP 10709952 A EP10709952 A EP 10709952A EP 2392195 B1 EP2392195 B1 EP 2392195B1
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- 230000004888 barrier function Effects 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 28
- 210000002381 plasma Anatomy 0.000 description 9
- 239000012159 carrier gas Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 238000007743 anodising Methods 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/47—Generating plasma using corona discharges
Definitions
- the invention relates to a device for modifying the surfaces of sheet, plate and sheet goods with a device for generating a plasma by means of a corona or barrier discharge at atmospheric pressure, wherein the plasma generating device is provided with an electrode and a counter electrode, wherein at least one of the electrodes consists of a hollow body of conductive material comprising a lower wall of conductive material, an upper wall and two side walls, the walls including at least one chamber having a gas inlet for introducing a gaseous medium into the chamber, wherein the bottom wall facing the commodity has at least one row of adjacent outlet openings for the medium and wherein the outlet openings are arranged such that the gas exits the outlet openings via the inwardly directed wall surface of the bottom wall transverse to the row of the outlet can flow openings, and having a transport device, to pass out the product in a direction transverse to the row of outlet openings direction of movement of the group consisting of a hollow body electrode.
- Such a device is both in the WO 2007/017271 as well as in the US 2006/0222779 A1 described.
- the electrode and the counter electrode are arranged opposite to both sides of the web, sheet and sheet goods.
- WO 02/06503 A3 describes a device in which gases are passed over a porous ceramic between the electrodes of a barrier discharge.
- EP 0 914 876 B1 reports a process in which a gas mixture passes through a distributor between roller electrodes is introduced, wherein the rollers are covered by the web.
- the invention is based on the object to set the desired media concentration in the discharge region with the simplest and most effective delivery, with additional cooling of the electrode is unnecessary.
- edges extending transversely to the direction of movement between the side walls and the lower wall are curved and that the average radius of curvature of the edges is greater than 8 mm, preferably greater than 10 mm and that the counter electrode in the chamber Electrode is arranged.
- the counterelectrode is not positioned outside, but installed in the hollow body electrode opposite the outlet openings, the counterelectrode is thus in a chamber of the electrode, the plasma is generated in the hollow body of the electrode when the high voltage is applied and due to the overpressure in the electrode through the openings of the electrode discharged.
- the counter electrode is arranged above the outlet openings, wherein the distance of the counter electrode to the bottom wall in the region of the outlet openings is less than 1 mm. It has been shown that optimal effects can thus be achieved.
- the curvature is formed by a quarter arc, since such a curved edge on the one hand is easy to manufacture and on the other hand so that a fluidically optimal effect can be achieved.
- the electrode is designed to be flat, wherein the front and back of the electrode are designed as circular sections.
- the electrode is easy to produce when formed from a profile with a closed cross-section is, with the end faces are closed by caps.
- the gap between the electrode and the ware is uniformly filled over its entire width with a plasma, if a plurality of rows of outlet openings are provided, which are arranged one behind the other viewed in the direction of movement of the goods.
- the openings are designed so that even at low flow rates, a uniform media outlet over the entire electrode width is possible.
- the electrode is also designed for higher internal pressures (up to 6 bar).
- the geometry of the electrode is preferably rod-shaped with rounded or oval edges, or flat with rounded oval edges.
- the counterelectrode can be of any type and geometry and must be positioned opposite the outlet openings.
- the electrode is made of aluminum or E-delstahl.
- the electrode may be provided with a non-conductive coating to provide the benefits of barrier discharge, even when the counter electrode is bare.
- This non-conductive coating can z. B. simply be an oxide layer, as occurs in the anodizing of aluminum, or a ceramic layer.
- the electrode When the electrode is operated in a dielectric barrier discharge (eg with a ceramic coated roller as counter electrode) with air supply, a much more homogeneous discharge image can be produced, which can be visually observed by the disappearance of discharge filaments when the air supply is switched on becomes.
- a dielectric barrier discharge eg with a ceramic coated roller as counter electrode
- the flow of media from the electrode results in uniform treatment of the material, even in deeper areas of the tissue.
- the hollow body is subdivided into a plurality of chambers extending transversely to the goods, which form a chamber system, each chamber having a connection for introducing a gaseous medium and having at least one row of adjacent outlet openings is provided for the medium, wherein all outlet openings are arranged on one side of the hollow body.
- the electrode can of course also be operated with gas mixtures or with carrier gases.
- the carrier gases may be mixed with volatile components or suspended liquid or solid particles which are carried out of the electrode, so that the electrode can also be used for particularly effective plasma coatings.
- gases or carrier gases can escape with volatile or floating components at different locations of the gas electrode.
- gases or carrier gases can escape with volatile or floating components at different locations of the gas electrode.
- gases or carrier gases can escape with volatile or floating components at different locations of the gas electrode.
- pure 1-nertgaskomponenten be directed via a chamber in the discharge region of the electrode, while a carrier gas discharges volatile components via a second chamber at the end of the discharge region, whereby z. B. fragmentation reactions of the volatile components in the plasma can be avoided or reduced.
- the counter electrode is constructed symmetrically to the electrode and is arranged opposite it, so that the outlet openings of the counter electrode and the electrode are located on opposite sides of the counter electrode and the electrode and the material is passed between the electrode and the counter electrode.
- the FIG. 1 shows an electrode 1, which is designed as a hollow profile bar, which extends perpendicular to the plane of the drawing.
- the cross-section of the profile is rectangular, the surface of the long sides being parallel to a web 2 to be treated. Instead of a web can also be treated a sheet or sheet goods.
- the individual plates or sheets run successively past the electrode and thus also form a train in their sequence.
- a closed chamber 3 is formed, which extends over the width of the web 2 and is closed at the ends of the profile with caps, not shown here.
- edges between the short and long sides of the profile and in particular the web-facing edges 4, 5 are curved.
- a flat and compact counter electrode 8 is arranged below the electrode 1. As a result of the gap 9 formed between the electrode 1 and the counterelectrode 8, the web 2 runs in the direction of the arrow 10.
- the electrode 1 has two chambers 3, 3 'and thus forms a two-chamber system.
- the chambers 3, 3 ' run parallel to each other and across the web 2.
- Each chamber 3, 3' has its own gas inlet 6, 6 'and at least one row of gas outlets 7, 7'.
- the counter electrode 8 is constructed symmetrically to the electrode 1 and thus also has a chamber 5a with a gas inlet 6a and gas outlets 7a.
- the counter electrode 8 is disposed opposite to the electrode 1.
- the gas outlets 7, 7a of counter electrode 8 and electrode 1 are located on opposite sides to the gap 9, through which the web 2 is passed.
- Fig. 4 is a flat and compact counter electrode 8 in the chamber 3 of the electrode 1 is arranged.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Treatment Of Fiber Materials (AREA)
- Plasma Technology (AREA)
Description
Die Erfindung bezieht sich auf eine Vorrichtung zum Modifizieren der Oberflächen von Bahn-, Platten- und Bogenware mit einer Einrichtung zur Erzeugung eines Plasmas mit Hilfe einer Corona- oder Barriereentladung bei Atmosphärendruck, wobei die Plasmaerzeugungavorrichtung mit einer Elektrode und einer Gegenelektrode versehen ist, wobei wenigstens eine der Elektroden aus einem Hohlkörper aus leitfälaigem Material besteht, der eine aus leitfähigem Material bestehende untere Wand, eine obere Wand und zwei Seitenwände aufweist, wobei die Wände wenigstens eine Kammer einschließen, die über einen Gaseinlass zum Einleiten eines gasförmigen Mediums in die Kammer verfügt, wobei die der Ware zugewandte untere Wand wenigstens eine Reihe von nebeneinander liegenden Austrittsöffnungen für das Medium aufweist und wobei die Austrittsöffnungen so angeordnet sind, dass das Gas den Austrittsöffnungen über die nach innen gerichtete Wandfläche der unteren Wand quer zur Reihe der Austrittsöffnungen zufließen kann, und mit einer Transporteinrichtung, um die Ware in einer quer zur Reihe der Austrittsöffnungen liegenden Bewegungsrichtung an der aus einem Hohlkörper bestehenden Elektrode vorbeizuführen.The invention relates to a device for modifying the surfaces of sheet, plate and sheet goods with a device for generating a plasma by means of a corona or barrier discharge at atmospheric pressure, wherein the plasma generating device is provided with an electrode and a counter electrode, wherein at least one of the electrodes consists of a hollow body of conductive material comprising a lower wall of conductive material, an upper wall and two side walls, the walls including at least one chamber having a gas inlet for introducing a gaseous medium into the chamber, wherein the bottom wall facing the commodity has at least one row of adjacent outlet openings for the medium and wherein the outlet openings are arranged such that the gas exits the outlet openings via the inwardly directed wall surface of the bottom wall transverse to the row of the outlet can flow openings, and having a transport device, to pass out the product in a direction transverse to the row of outlet openings direction of movement of the group consisting of a hollow body electrode.
Eine solche Vorrichtung ist sowohl in der
Aus der
Grundsätzlich ist es bekannt, dass in Corona- oder Barriereentladungen auch bei Atmosphärendruck Plasmen entstehen. Die in die Entladungszone eingebrachten Gase bestimmen dabei die Eigenschaften der jeweils entstehenden Plasmen. Im Allgemeinen wird die Entladung einfach an Luft durchgeführt und z. B. zur chemischen Modifizierung von Oberflächen in einem trockenen Prozess verwendet. Bei der Behandlung von Bahn-, Platten- oder Bogenware in einem kontinuierlichen Prozess in Luftatmosphäre ist dabei auch bei hohen Bahngeschwindigkeiten keine spezielle Schleusentechnik nötig.In principle, it is known that in corona or barrier discharges, plasmas also occur at atmospheric pressure. The gases introduced into the discharge zone determine the properties of the resulting plasmas. In general, the discharge is simply carried out in air and z. B. used for chemical modification of surfaces in a dry process. When treating web, sheet or sheet goods in a continuous process in air atmosphere, no special lock technology is required even at high web speeds.
Wenn allerdings eine von Luft abweichende Gaszusammensetzung verwendet werden soll, muss diese durch geeignete Maßnahmen im Entladungsbereich eingestellt werden. Dazu bedarf es in kontinuierlichen Prozessen einer entsprechenden Schleusentechnologie und einer Zuführung für die erwünschten Medien in den Entladungsbereich.However, if an off-gas composition is to be used, it must be adjusted by appropriate measures in the discharge area. In continuous processes, this requires a corresponding lock technology and a feed for the desired media into the discharge area.
Zur Zuführung von Gasen in den Entladungsbereich sind verschiedene Konzepte möglich. In der
In der
Nachteil dieser Verfahren ist die indirekte Zufuhr der Gase in den Entladungsraum, die vor allem im kontinuierlichen Betrieb einen sehr hohen Gasverbrauch erfordert, um die erwünschte Gaszusammensetzung im Entladungsbereich zu erzielen. Bereits bei der Verwendung etwas dickerer poröser Materialien wie Textilien wird mit den beschriebenen Verfahren keine ausreichende Gasdurchmischung im Material erreicht, so dass ein sehr ungleichmäßiges Plasma entsteht. Das Gleiche gilt für höhere Bahngeschwindigkeiten, bei denen ein Luftkissen über dem Material entsteht, so dass auch mit sehr aufwändigen Schleusensystemen Luftanteile in den Entladungsbereich eingebracht werden.Disadvantage of these methods is the indirect supply of the gases in the discharge space, which requires a very high gas consumption, especially in continuous operation, in order to achieve the desired gas composition in the discharge area. Even with the use of somewhat thicker porous materials such as textiles, sufficient gas mixing in the material is achieved with the described methods, so that a very irregular plasma is formed. The same applies to higher web speeds, in which an air cushion over the material is formed, so that even with very complex lock systems air fractions are introduced into the discharge area.
In der oben schon erwähnten
Der Erfindung liegt die Aufgabenstellung zugrunde, mit einer möglichst einfachen und effektiven Zuführung die erwünschte Medienkonzentration im Entladungsbereich einzustellen, wobei eine zusätzliche Kühlung der Elektrode überflüssig wird.The invention is based on the object to set the desired media concentration in the discharge region with the simplest and most effective delivery, with additional cooling of the electrode is unnecessary.
Zur Lösung der Aufgabe ist vorgesehen, dass die quer zur Bewegungsrichtung verlaufenden Kanten zwischen den Seitenwänden und der unteren Wand gekrümmt ausgeführt sind und dass der mittlere Krummungsradius der Kanten größer als 8 mm, vorzugsweise größer als 10 mm ist und dass die Gegenelektrode in der Kammer der Elektrode angeordnet ist.To solve the problem, it is provided that the edges extending transversely to the direction of movement between the side walls and the lower wall are curved and that the average radius of curvature of the edges is greater than 8 mm, preferably greater than 10 mm and that the counter electrode in the chamber Electrode is arranged.
Dies bedingt auch bei einer hohen Bahngeschwindigkeit eine turbulenzfreie Strömung, so dass die Medienkonzentration in dem Spalt zwischen Elektrode und Ware sehr gleichmäßig bleibt und der Eintrag von Fremdmedium minimiert wird.This requires a turbulence-free flow even at a high web speed, so that the media concentration in the gap between electrode and product remains very uniform and the entry of foreign medium is minimized.
Wird die Gegenelektrode nicht außerhalb positioniert, sondern in die Hohlkörperelektrode gegenüber den Austrittsöffnungen eingebaut, die Gegenelektrode ist somit in einer Kammer der Elektrode, wird bei Anlegung der Hochspannung das Plasma im Hohlkörper der Elektrode erzeugt und aufgrund des Überdrucks in der Elektrode durch die Öffnungen der Elektrode ausgetragen.If the counterelectrode is not positioned outside, but installed in the hollow body electrode opposite the outlet openings, the counterelectrode is thus in a chamber of the electrode, the plasma is generated in the hollow body of the electrode when the high voltage is applied and due to the overpressure in the electrode through the openings of the electrode discharged.
Vorzugsweise ist die Gegenelektrode dabei oberhalb der Austrittsöffnungen angeordnet, wobei der Abstand der Gegenelektrode zur unteren Wand im Bereich der Austrittsöffnungen kleiner als 1 mm ist. Es hat sich gezeigt, dass sich damit optimale Wirkungen erzielen lassen.Preferably, the counter electrode is arranged above the outlet openings, wherein the distance of the counter electrode to the bottom wall in the region of the outlet openings is less than 1 mm. It has been shown that optimal effects can thus be achieved.
Vorzugsweise wird die Krümmung von einem Viertelbogen gebildet, da eine derart gekrümmte Kante einerseits leicht herzustellen ist und andererseits damit eine strömungstechnisch optimale Wirkung erzielt werden kann.Preferably, the curvature is formed by a quarter arc, since such a curved edge on the one hand is easy to manufacture and on the other hand so that a fluidically optimal effect can be achieved.
Ein weiterer Vorteil ergibt sich, wenn in der Kammer ein Überdruck aufgebaut ist, so dass das gasförmige Medium unter Druck aus den Austrittsöffnungen ausströmt.Another advantage arises when an overpressure is built up in the chamber, so that the gaseous medium flows out of the outlet openings under pressure.
Vorzugsweise ist dazu die Elektrode flach ausgeführt, wobei die Vorder- und Rückseite der Elektrode als Kreisabschnitte ausgeführt sind.Preferably, the electrode is designed to be flat, wherein the front and back of the electrode are designed as circular sections.
Die Elektrode lässt sich leicht herstellen, wenn sie aus einem Profil mit einem geschlossenen Querschnitt gebildet ist, wobei die Stirnseiten durch Kappen verschlossen sind.The electrode is easy to produce when formed from a profile with a closed cross-section is, with the end faces are closed by caps.
Der Spalt zwischen Elektrode und ware wird über seine gesamte Breite gleichmäßig mit einem Plasma erfüllt, wenn mehrere Reihen von Austrittsöffnungen vorgesehen sind, die in Bewegungsrichtung der Ware gesehen hintereinander angeordnet sind. Die Öffnungen sind so gestaltet, dass auch bei kleinen Durchflussmengen ein gleichmäßiger Medienaustritt über die vollständige Elektrodenbreite möglich ist.The gap between the electrode and the ware is uniformly filled over its entire width with a plasma, if a plurality of rows of outlet openings are provided, which are arranged one behind the other viewed in the direction of movement of the goods. The openings are designed so that even at low flow rates, a uniform media outlet over the entire electrode width is possible.
Um hohe Austrittsgeschwindigkeiten zu ermöglichen, ist die Elektrode auch für höhere Innendrücke (bis 6 bar) ausgelegt. Die Geometrie der Elektrode ist vorzugsweise stabförmig mit gerundeten bzw. ovalen Kanten, oder flächig mit gerundeten ovalen Kanten. Die Gegenelektrode kann von beliebigem Typ und Geometrie sein und ist jeweils gegenüber den Austrittsöffnungen zu positionieren.To enable high exit velocities, the electrode is also designed for higher internal pressures (up to 6 bar). The geometry of the electrode is preferably rod-shaped with rounded or oval edges, or flat with rounded oval edges. The counterelectrode can be of any type and geometry and must be positioned opposite the outlet openings.
vorzugsweise besteht die Elektrode aus Aluminium oder E-delstahl.Preferably, the electrode is made of aluminum or E-delstahl.
Die Elektrode kann mit einem nicht leitenden Überzug versehen werden, um die vorzüge einer Barriereentladung zu gewährleisten, auch wenn die Gegenelektrode blank ausgeführt ist. Dieser nicht leitende Überzug kann z. B. einfach eine Oxid-Schicht sein, wie sie beim Eloxieren von Aluminium auftritt, oder eine Keramikschicht.The electrode may be provided with a non-conductive coating to provide the benefits of barrier discharge, even when the counter electrode is bare. This non-conductive coating can z. B. simply be an oxide layer, as occurs in the anodizing of aluminum, or a ceramic layer.
Wird die Elektrode in einer dielektrischen Barriereentladung (z. B. mit einer Keramik beschichteten Walze als Gegenelektrode) mit Luftzufuhr betrieben, kann ein sehr viel homogeneres Entladungsbild erzeugt werden, was optisch durch das Verschwinden von Entladungsfilamenten beobachtet werden kann, wenn die Luftzufuhr eingeschaltet wird. Bei der Behandlung poröser Materialien wie Textilien führt die Strömung der Medien aus der Elektrode zu einer gleichmäßige Behandlung des Materials, auch in tiefer liegenden Bereichen des Gewebes.When the electrode is operated in a dielectric barrier discharge (eg with a ceramic coated roller as counter electrode) with air supply, a much more homogeneous discharge image can be produced, which can be visually observed by the disappearance of discharge filaments when the air supply is switched on becomes. When treating porous materials such as textiles, the flow of media from the electrode results in uniform treatment of the material, even in deeper areas of the tissue.
Um verschiedene Medien in die Entladungszone einbringen zu können, ist vorgesehen, dass der Hohlkörper in mehrere quer zur Ware verlaufende Kammern unterteilt ist, die ein Kammersystem bilden, wobei jede Kammer einen Anschluss zum Einleiten eines gasförmigen Mediums und mit wenigstens einer Reihe von nebeneinander liegenden Austrittsöffnungen für das Medium versehen ist, wobei alle Austrittsöffnungen an einer Seite des Hohlkörpers angeordnet sind.In order to be able to introduce various media into the discharge zone, it is provided that the hollow body is subdivided into a plurality of chambers extending transversely to the goods, which form a chamber system, each chamber having a connection for introducing a gaseous medium and having at least one row of adjacent outlet openings is provided for the medium, wherein all outlet openings are arranged on one side of the hollow body.
Neben Medien wie reinen Gasen kann die Elektrode natürlich auch mit Gasgemischen oder mit Trägergasen betrieben werden. Den Trägergasen können flüchtige Komponenten oder schwebfähige flüssige oder feste Teilchen beigemischt werden, die mit aus der Elektrode ausgetragen werden, so dass die Elektrode auch für besonders effektive Plasmabeschichtungen verwendet werden kann.In addition to media such as pure gases, the electrode can of course also be operated with gas mixtures or with carrier gases. The carrier gases may be mixed with volatile components or suspended liquid or solid particles which are carried out of the electrode, so that the electrode can also be used for particularly effective plasma coatings.
Durch die Unterteilung des Hohlkörpers mit einem Kammersystem können Gase bzw. Trägergase mit flüchtigen oder schwebfähigen Komponenten auch an unterschiedlichen Stellen der Gaselektrode austreten. So können z. B. reine 1-nertgaskomponenten über eine Kammer in den Entladungsbereich der Elektrode gelenkt werden, während ein Trägergas flüchtige Komponenten über eine zweite Kammer am Ende des Entladungsbereichs austrägt, wodurch z. B. Fragmentierungsreaktionen der flüchtigen Komponenten im Plasma vermieden oder verringert werden.By dividing the hollow body with a chamber system gases or carrier gases can escape with volatile or floating components at different locations of the gas electrode. So z. B. pure 1-nertgaskomponenten be directed via a chamber in the discharge region of the electrode, while a carrier gas discharges volatile components via a second chamber at the end of the discharge region, whereby z. B. fragmentation reactions of the volatile components in the plasma can be avoided or reduced.
Eine andere Ausgestaltung der Vorrichtung die nicht unter der Bereich der Erfindung fällt sieht vor, dass die Gegenelektrode symmetrisch zu Elektrode aufgebaut ist und ihr gegenüberliegend angeordnet ist, so dass sich die Austrittsöffnungen von Gegenelektrode und Elektrode auf sich gegenüberliegenden Seiten von Gegenelektrode und Elektrode befinden und die ware zwischen Elektrode und Gegenelektrode hindurchgeführt ist.Another embodiment of the device that does not fall under the scope of the invention provides that the counter electrode is constructed symmetrically to the electrode and is arranged opposite it, so that the outlet openings of the counter electrode and the electrode are located on opposite sides of the counter electrode and the electrode and the material is passed between the electrode and the counter electrode.
Im Folgenden soll anhand von 4 Ausführungsbeispielen die Erfindung näher erläutert werden. Dazu zeigen jeweils im Querschnitt:
- Fig. 1
- ein erstes Beispiel, bei der die Elektrode ein Einkammersystem ist und die Gegenelektrode unterhalb der Elektrode angeordnet ist, wobei durch den Spalt zwischen Elektrode und Gegenelektrode die zu behandelnde Ware verläuft,
- Fig. 2
- ein zweites Beispiel, bei der die Elektrode ein Zweikammersystem hat,
- Fig. 3
- ein drittes Biespiel, bei der die Elektrode und die Gegenelektrode symmetrisch zueinander aufgebaut und gegenüberliegend angeordnet sind, und
- Fig. 4
- eine Ausführungsform, bei der die Gegenelektrode in der Kammer der Elektrode angeordnet ist.
- Fig. 1
- a first example in which the electrode is a single-chamber system and the counter electrode is arranged below the electrode, wherein the product to be treated passes through the gap between electrode and counter electrode,
- Fig. 2
- a second example in which the electrode has a bicameral system,
- Fig. 3
- a third Biespiel, in which the electrode and the counter electrode are constructed symmetrically to each other and arranged opposite, and
- Fig. 4
- an embodiment in which the counter electrode is arranged in the chamber of the electrode.
Die
Die Kanten zwischen den kurzen und langen Seiten des Profils und insbesondere die der Bahn zugewandten Kanten 4, 5 sind gekrümmt ausgeführt.The edges between the short and long sides of the profile and in particular the web-facing
An der von der Bahn abgewandten Oberseite der Elektrode 1 befindet sich ein Gaseinlass 6.At the top of the electrode 1 facing away from the web there is a gas inlet 6.
An der der Bahn zugewandten Unterseite befinden sich in der Wand der Elektrode 1 drei Reihen von Gasauslässen 7 in Form von düsenförmigen Austrittsöffnungen. Die Reihen verlaufen parallel zueinander und quer zur Bahn 2.On the underside facing the web are located in the wall of the electrode 1, three rows of gas outlets 7 in the form of nozzle-shaped outlet openings. The rows are parallel to each other and transverse to the web. 2
Wegen des Druckabfalls in den Gasauslässen 7 wird an der Kammer 3 ein Überdruck von bis zu 6 bar angelegt, der bewirkt, dass das durch den Gaseinlass 6 einströmende Medium sich gleichmäßig in der Kammer 3 verteilt.Because of the pressure drop in the gas outlets 7, an overpressure of up to 6 bar is applied to the
Eine flächige und kompakt ausgeführte Gegenelektrode 8 ist unterhalb der Elektrode 1 angeordnet. Durch den sich dadurch bildenden Spalt 9 zwischen der Elektrode 1 und Gegenelektrode 8 verläuft die Bahn 2 in Richtung des Pfeiles 10.A flat and
Gemäß der
Gemäß der
Gemäß der
- 11
- Elektrodeelectrode
- 22
- Bahntrain
- 33
- Kammerchamber
- 44
- Kanteedge
- 55
- Kanteedge
- 6, 6a6, 6a
- Gaseinlassgas inlet
- 7, 7a7, 7a
- Gasauslassgas outlet
- 88th
- Gegenelektrodecounter electrode
- 99
- Spaltgap
- 1010
- Pfeilarrow
Claims (9)
- An apparatus for modifying the surfaces of web, plate and sheet products using a device for generating a plasma with the aid of a corona or barrier discharge at atmospheric pressure, wherein the plasma generation device is provided with an electrode (1) and a counter-electrode (8), wherein at least one of the electrodes comprises a hollow body made of conductive material, which comprises a lower wall made of a conductive material, an upper wall and two side walls, wherein the walls enclose at least one chamber (3), which comprises a gas inlet (6) for introducing a gaseous medium into the chamber (3), wherein the lower wall facing the products (2) comprises at least one row of exit openings (7) lying beside one another for the medium and wherein the exit openings (7) are disposed in such a way that the gas can flow to the exit openings (7) via the inwardly facing wall surface of the lower wall transverse to the row of exit openings, and with a transporting device for conveying the products in a direction of motion lying transverse to the row of exit openings past the electrode (1) comprising a hollow body, characterised in that the edges (4, 5) between the side walls and the lower wall running transverse to the direction of motion are constituted curved and that the average radius of curvature of the edges is greater than 8 mm, preferably greater than 10 mm, and that the counter-electrode (8) is disposed in the chamber (3) of the electrode (1).
- The device according to claim 1, characterised in that the counter-electrode (8) is disposed above the exit openings and the distance of the counter-electrode (8) from the lower wall in the region of the exit openings is less than 1 mm.
- The device according to any one of the preceding claims, characterised in that the curvature is formed by a quarter arc.
- The device according to any one of the preceding claims, characterised in that an excess pressure is built up in the chamber.
- The device according to any one of the preceding claims, characterised in that the electrode (1) is constituted flat, wherein the front and rear side of the electrode are constituted as a segment of a circle.
- The device according to any one of the preceding claims, characterised in that the electrode (1) is formed from a profile with a closed cross-section, wherein the sides are closed by caps.
- The device according to any one of the preceding claims, characterised in that a plurality of rows of exit openings (7) are provided which are disposed one behind the other viewed in the direction of motion of the products.
- The device according to any one of the preceding claims, characterised in that the electrode (1) is provided with a non-conductive coating.
- The device according to any one of the preceding claims, characterised in that the hollow body is split up into a plurality of chambers (3, 3') running transverse to the direction of motion of the products, said chambers forming a chamber system, wherein each chamber (3, 3') is provided with a gas inlet (6, 6') for introducing a gaseous medium and with at least one row of exit openings (7, 7') lying beside one another for the medium, wherein all the exit openings (7, 7') are disposed on a side of the hollow body.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009006484A DE102009006484A1 (en) | 2009-01-28 | 2009-01-28 | Device for modifying the surfaces of sheet, plate and sheet goods with a device for generating a plasma |
PCT/DE2010/000082 WO2010085941A2 (en) | 2009-01-28 | 2010-01-28 | Apparatus for modifying the surfaces of web, plate and sheet products using a device for generating plasma |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2392195A2 EP2392195A2 (en) | 2011-12-07 |
EP2392195B1 true EP2392195B1 (en) | 2014-05-07 |
Family
ID=42282684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10709952.5A Active EP2392195B1 (en) | 2009-01-28 | 2010-01-28 | Apparatus for modifying the surfaces of web, plate and sheet products using a device for generating plasma |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2392195B1 (en) |
DE (2) | DE102009006484A1 (en) |
WO (1) | WO2010085941A2 (en) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19505268C2 (en) * | 1995-02-16 | 1999-02-18 | Fraunhofer Ges Forschung | CVD process for coating substrate surfaces |
DE19538176A1 (en) | 1995-10-13 | 1997-04-17 | Arcotec Oberflaechentech Gmbh | Device for treating flat substrates with a corona station |
FR2770425B1 (en) | 1997-11-05 | 1999-12-17 | Air Liquide | METHOD AND DEVICE FOR THE SURFACE TREATMENT OF A SUBSTRATE BY ELECTRIC SHOCK BETWEEN TWO ELECTRODES IN A GAS MIXTURE |
EP1073091A3 (en) * | 1999-07-27 | 2004-10-06 | Matsushita Electric Works, Ltd. | Electrode for plasma generation, plasma treatment apparatus using the electrode, and plasma treatment with the apparatus |
WO2002006503A2 (en) | 2000-07-18 | 2002-01-24 | United States Department Of Energy | Process for generation of hydrogen gas from various feedstocks using thermophilic bacteria |
BRPI0413769A (en) * | 2003-09-09 | 2006-10-31 | Dow Global Technologies Inc | process for depositing a film coating on the exposed surface of a substrate |
EP1521509B1 (en) * | 2003-09-30 | 2013-11-06 | FUJIFILM Manufacturing Europe B.V. | Method and arrangement for generating an atmospheric pressure glow plasma |
EP1686092A4 (en) * | 2003-11-17 | 2012-03-07 | Konica Minolta Holdings Inc | Method for producing nanostructured carbon material, nanostructured carbon material produced by such method, and substrate having such nanostructured carbon material |
WO2006103828A1 (en) * | 2005-03-28 | 2006-10-05 | Showa Denko K.K. | Method of manufacturing magnetic recording medium, magnetic recording medium and surface treatment apparatus |
JP2009505342A (en) | 2005-08-11 | 2009-02-05 | フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ | Plasma generating apparatus and plasma generating method |
JP2008153147A (en) * | 2006-12-20 | 2008-07-03 | Seiko Epson Corp | Plasma treatment device |
-
2009
- 2009-01-28 DE DE102009006484A patent/DE102009006484A1/en not_active Withdrawn
-
2010
- 2010-01-28 WO PCT/DE2010/000082 patent/WO2010085941A2/en active Application Filing
- 2010-01-28 DE DE112010000200T patent/DE112010000200A5/en not_active Withdrawn
- 2010-01-28 EP EP10709952.5A patent/EP2392195B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE112010000200A5 (en) | 2012-06-06 |
DE102009006484A1 (en) | 2010-07-29 |
WO2010085941A2 (en) | 2010-08-05 |
WO2010085941A3 (en) | 2010-11-18 |
EP2392195A2 (en) | 2011-12-07 |
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