EP2375074B1 - Rotor pour une pompe à vide - Google Patents

Rotor pour une pompe à vide Download PDF

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Publication number
EP2375074B1
EP2375074B1 EP11001295.2A EP11001295A EP2375074B1 EP 2375074 B1 EP2375074 B1 EP 2375074B1 EP 11001295 A EP11001295 A EP 11001295A EP 2375074 B1 EP2375074 B1 EP 2375074B1
Authority
EP
European Patent Office
Prior art keywords
rotor
vacuum pump
plate
piston
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP11001295.2A
Other languages
German (de)
English (en)
Other versions
EP2375074A2 (fr
EP2375074A3 (fr
Inventor
Sebastian Oberbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
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Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2375074A2 publication Critical patent/EP2375074A2/fr
Publication of EP2375074A3 publication Critical patent/EP2375074A3/fr
Application granted granted Critical
Publication of EP2375074B1 publication Critical patent/EP2375074B1/fr
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Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors

Definitions

  • the invention relates to a rotor for a vacuum pump according to the preamble of the first claim.
  • Roots pumps and screw pumps have been successful on the market for decades and have become indispensable in vacuum generation.
  • the use in metallurgy, vacuum drying and chemical engineering may be mentioned here.
  • both types of pumps usually two shafts are used, on each of which a piston is arranged.
  • gas is displaced and thus achieved the pumping action.
  • the pistons for this type of pumps are cast from a metal alloy, as for example in the introduction of DE 40 30 702 A1 is described. They are characterized by a high mass relative to the piston volume. The resulting high moments of inertia require high drive power of the pump and led to high bearing loads.
  • the solution described in the aforementioned patent document, the rotor to reduce weight from slices, has not prevailed. This may be due to disadvantages such as the risk of virtual leaks in the space between the panes and the effort required to ensure mechanical stability.
  • the US 6164945 A shows a hollow rotor of a Roots vacuum pump.
  • Fig. 1 is a section through a Roots vacuum pump, hereinafter Roots pump shown.
  • the Roots pump has a first rotor 10 and a second rotor 12. These are rotatably mounted in bearings 20, 22 and 24, 26.
  • a gear chamber 6 associated with the rotors synchronization gears 30 and 32 are arranged, which generate a synchronous rotation in the opposite direction of rotation and cause a non-contact rolling of the rotors on each other.
  • One of the rotors is driven via a magnetic coupling 34 by a motor 36 which is located in a drive section 8 of the housing.
  • FIG. 1 A section through the Roots pump along the line 1-1 'is in Fig. 2 shown. Gas passes from the recipient, not shown here, into the Roots pump through a gas inlet flange 14. There it is conveyed by the opposite direction according to arrow arrow rotating piston, in the meantime enclosed in the pump chamber 4 and ejected through the gas outlet flange 16.
  • the two rotors 10 and 12 have as Wälzkolbenprofil an approximately eight-shaped cross-section, wherein each one half of the eight corresponds to a wing. Inside, the rotors are hollow, with the cross-section of the cavity substantially following the octagonal cross-section. In Further developments, the rotors may also have more than two wings, for example three or four.
  • the in Fig. 3 section through one of the rotors along the axis shows its structure. It has a piston 38, with which the pumping action is achieved. At the opposite end faces shaft journals 50 and 52 are provided, which are supported by the bearings of the Roots pump. Also drive, magnetic coupling, synchronization gears and oil distribution discs are arranged on this shaft journal.
  • the piston is constructed of several parts which together define the cavity 54. These parts include the shell body 40, which is a cylinder with eight-shaped cross-section as in Fig. 2 and longitudinal axis along the axis of rotation 100 is designed.
  • This jacket body is preferably made of carbon fiber reinforced plastic (CFRP), glass fiber reinforced plastic (GRP) or aluminum.
  • the production of the sheath body comprises, in the case of the first two materials, the winding of the fibers onto a shaped body.
  • the winding of the fibers onto a shaped body In the production of aluminum extrusion can advantageously be used, injection molding or die casting. With these materials, an advantageous ratio of wall thickness of the piston is achieved to volume. This results in low masses, high stability and cheap production.
  • the front side of the jacket body is closed by a first cover plate 42 and a second cover plate 44 on the opposite end side.
  • the transition from sheath body to cover plate is made vacuum-tight, so that a gas flow between the cavity 54 and the surroundings of the piston, dhua the pump chamber, so far suppressed that the vacuum data of the vacuum pump are not affected by leaking gas from the piston.
  • both cover plates are designed as composite components. Facing the cavity are respective closure plates 420 and 440. They are of the same material as the sheath body. Alternatively, different materials can be used, in which case the thermal expansion properties must be taken into account. For example, a material with adequate thermal expansion may be used, i. the differential expansion is such that it does not result in tensions that deform or even destroy the piston too much. Too much deformation of the piston is given when the gaps between the pistons are consumed with each other or to the housing.
  • Transition plates 422 and 442 are connected to the closure plates. Their function is to create a transition between the shaft journal on the one hand and the closure plates on the other. Especially the use of CFRP or GFRP for sheath bodies and closing plates would require a direct transition to the metallic shaft journal. This is structurally difficult and is facilitated by the transition plates in an advantageous manner.
  • the transition plate can be connected by welding, soldering, pressing or shrinking with the shaft journal. For this purpose, it is advantageous to make the transition plate of a metal alloy.
  • the advantage of using shaft journals can be seen in the weight reduction and in the prevention of uneven thermal expansion of the sheath body and shaft.
  • a tie rod 56 may be provided which completely penetrates the cavity and with which the transition plates are pulled against each other and thus against the closure plates.
  • a support wall 70 is provided within the cavity, which may have one or more holes through which the tie rods are passed. This support wall reduces the deformation latitude for the sheath body and thereby enables low wall thicknesses of the sheath body.
  • the area of the piston with closure plate, shell body, transition plate and screw is in Fig. 4 shown in more detail again.
  • Sheath body 40 and closure plate 420 are connected to each other at connection 68.
  • the jacket body surrounds the closure plate in the radial direction.
  • the connection is made by gluing or by welding.
  • the transition plate 422 terminates flush with the sheath body in the radial direction. In this way dead spaces are prevented. Since differences in the temperature expansion behavior between transition plate and closure plate can not be excluded, it is advantageous to arrange the screw 60 floating. For this purpose, the screw is taken in a relative movements between the closure plate and transition plate zulendem element.
  • an elastomeric sealing ring 66 is located between the screw head and the transition plate.
  • the screw passes through a hole in the transition plate and is recessed.
  • the thread of the screw engages the thread of a glued threaded bushing 62.
  • the gap 64 around the screw shaft allows uneven expansion of the transition plate and closure plate, with the screw head floating on the seal 66.
  • a continuous shaft can be used instead of two shaft journals. If such a continuous wave is used, care must be taken in a choice of the materials of the shaft and the sheath body with different coefficients of thermal expansion that stresses due to the uneven expansion are avoided. This is achieved, for example, by a floating design of the connection 68.
  • connection between 420 and 422 is to take place before the connection of the cover plate and the sheath body, it is advantageous to connect the end face 69 of the sheath body with the transition plate 422, for example by gluing or welding.
  • the sheath body and at least one closure plate can be made in one piece. As a result, tightness and stability are further improved.
  • the rotor can be designed by suitable shape of the jacket body as a screw pump rotor.
  • the cross section of the jacket body is adapted and provided for use along the rotor axis.
  • FIG. 5 A development of the rotor is in Fig. 5 shown in section along the axis of rotation.
  • the rotor 500 shown there is used in a two-stage vacuum pump.
  • the structure described below can easily be extended to more than two pump stages.
  • the rotor has first and second pistons 502 and 504.
  • the length L 1 of the first piston is greater than the length L 2 of the second piston.
  • the first Piston is thus adapted for use in the high-vacuum side pumping stage of a two-stage vacuum pump.
  • the first piston has cover plates 520 and 526, each formed as a composite of a closure plate 522 and 528 with a transition plate 524 and 530. Between the cover plates, a jacket body 532 is arranged. The transition plate 530 is connected to a shaft journal 570, which is intended to be received in a bearing of the rotor.
  • the second piston has cover plates 540 and 546, which in turn are formed by a combination of a closure plate 542 and 548 with a transition plate 544 and 550. Between the cover plates, a jacket body 552 is provided. The transition plate 544 is connected to a shaft journal 560, which in turn is intended to be received in a bearing of the rotor.
  • Both pistons are connected by a shaft piece.
  • This shaft has sections 562 and 566.
  • the portion 562 is connected to the transition plate 550 of the second piston, the portion 566 to the transition plate 524 of the first piston.
  • Conceivable is a bond or a positive connections such as a dovetail.
  • the least misalignment indicates the in Fig. 5 shown solution.
  • the portion 562 has a projection 564 which engages a mating recess of the portion 566 and is secured by a pin 568.
  • the multi-stage rotor according to the embodiment is very well suited for the modular construction of a series of multi-stage pumps, for different members, common parts, for example, shaft journals, cover plates, closure plates, shell body, etc. are used.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Rotary Pumps (AREA)

Claims (8)

  1. Rotor (10, 12 ; 500) pour une pompe à vide, comportant un piston (38 ; 502, 504), dans lequel
    le piston comprend un corps formant enveloppe (40 ; 532, 552) et une plaque de couverture (42, 44 ; 520, 526, 540, 546) reliée à la face frontale du corps formant enveloppe,
    caractérisé en ce que
    la plaque de couverture (42, 44 ; 520, 526, 540, 546) comprend une plaque d'obturation (420, 440 ; 522, 528, 542, 548) et une plaque de transition (422, 442 ; 524, 530, 544, 550) reliée à la plaque d'obturation.
  2. Rotor (10, 12 ; 500) pour une pompe à vide selon la revendication 1, caractérisé en ce que
    une vis (60) engagée dans un élément (66) permettant des mouvements relatifs entre la plaque d'obturation et la plaque de transition relie la plaque d'obturation (420, 440 ; 522, 528, 542, 548) et la plaque de transition (422, 442 ; 524, 530, 544, 550) l'une à l'autre.
  3. Rotor (10, 12 ; 500) pour une pompe à vide selon l'une des revendications 1 ou 2,
    caractérisé en ce que
    la plaque d'obturation (420, 440 ; 522, 528, 542, 548) et le corps formant enveloppe (40 ; 532, 552) sont reliés l'un à l'autre de façon étanche au vide.
  4. Rotor (10, 12 ; 500) pour une pompe à vide selon l'une des revendications 1 à 3,
    caractérisé en ce que
    le composant principal de la plaque de transition (422, 442 ; 524, 530, 544, 550) est du métal et le composant principal de la plaque d'obturation (420, 440 ; 522, 528, 542, 548) et du corps formant enveloppe (40) est un matériau composite renforcé de fibres.
  5. Rotor (10, 12 ; 500) pour une pompe à vide selon l'une des revendications précédentes,
    caractérisé en ce que
    un tourillon d'arbre (50, 52 ; 560, 570) est relié à la plaque de transition (422, 442 ; 530, 544).
  6. Rotor (10, 12 ; 500) pour une pompe à vide selon l'une des revendications précédentes,
    caractérisé en ce que
    il comprend un second position (504).
  7. Pompe à vide,
    caractérisée en ce que
    elle comprend un rotor (10, 12 ; 500) selon l'une des revendications précédentes.
  8. Pompe à vide selon la revendication 7,
    caractérisée en ce que
    le corps formant enveloppe (40 ; 532 ; 552) présente en section transversale un profil en forme de lobes.
EP11001295.2A 2010-03-25 2011-02-17 Rotor pour une pompe à vide Active EP2375074B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010012759.0A DE102010012759B4 (de) 2010-03-25 2010-03-25 Rotor für eine Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2375074A2 EP2375074A2 (fr) 2011-10-12
EP2375074A3 EP2375074A3 (fr) 2014-11-12
EP2375074B1 true EP2375074B1 (fr) 2017-11-08

Family

ID=44508515

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11001295.2A Active EP2375074B1 (fr) 2010-03-25 2011-02-17 Rotor pour une pompe à vide

Country Status (2)

Country Link
EP (1) EP2375074B1 (fr)
DE (1) DE102010012759B4 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014104161A1 (de) * 2014-03-26 2015-10-01 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE696509C (de) 1937-08-12 1940-09-23 Daimler Benz Akt Ges Drehkolben fuer Rootsgeblaese
US2491678A (en) 1943-12-09 1949-12-20 Borg Warner Rotary blower with abrading casing end walls and abradable rotor end plates
DE810419C (de) 1949-01-01 1951-08-09 Otto Becker Drehkolbengeblaese
JPS6022091A (ja) 1983-07-16 1985-02-04 Nippon Piston Ring Co Ltd 回転式流体ポンプ用ロ−タ
DE3321718A1 (de) 1983-06-16 1984-12-20 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Waelzkolbenpumpe
DE4030702A1 (de) 1990-09-28 1992-04-02 Leybold Ag Verfahren zur herstellung eines drehkolbens fuer eine vakuumpumpe und nach diesem verfahren hergestellter drehkolben
KR100414475B1 (ko) 1996-02-21 2004-03-30 가부시키 가이샤 에바라 세이사꾸쇼 터보기계용로우터및그제조방법
EP0975874A1 (fr) 1998-02-13 2000-02-02 Ebara Corporation Rotor de pompe a vide et procede de fabrication associe
WO2008010539A1 (fr) 2006-07-19 2008-01-24 Kabushiki Kaisha Toyota Jidoshokki Machine à fluide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
DE102010012759B4 (de) 2018-06-21
EP2375074A2 (fr) 2011-10-12
DE102010012759A1 (de) 2011-09-29
EP2375074A3 (fr) 2014-11-12

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