EP2375071A1 - Dispositif à puce microfluidique et son procédé de fabrication - Google Patents

Dispositif à puce microfluidique et son procédé de fabrication Download PDF

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Publication number
EP2375071A1
EP2375071A1 EP20100175179 EP10175179A EP2375071A1 EP 2375071 A1 EP2375071 A1 EP 2375071A1 EP 20100175179 EP20100175179 EP 20100175179 EP 10175179 A EP10175179 A EP 10175179A EP 2375071 A1 EP2375071 A1 EP 2375071A1
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EP
European Patent Office
Prior art keywords
shape
substrate layer
transformative
memory
microfluidic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20100175179
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German (de)
English (en)
Other versions
EP2375071B1 (fr
Inventor
Chien-Chong Hong
Jui-Chun Chen
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National Tsing Hua University NTHU
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National Tsing Hua University NTHU
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/582—Recycling of unreacted starting or intermediate materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8376—Combined
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor

Definitions

  • This invention relates to a microfluidic chip device and a method of making the same, more particularly to a microfluidic chip device made using a shape memory polymer and a method of making the same.
  • a conventional microfluidic device includes a micropump that is able to transport a fluid and control the same, and a microvalve that is capable of regulating a flow direction and a flow rate of the fluid in a channel of the microfluidic device.
  • the micropump generally falls into one of two categories : a displacement pump and a dynamic pump.
  • the displacement pump can be further classified as a peristaltic type or a reciprocating type.
  • the microvalve may be active or passive, and may include a mechanical moving part or a non-mechanical moving part.
  • M. Koch et al. proposed a microfluidic system including a reciprocating micropump based on a piezoelectric material ( M. Koch, N. Harris, Alan G. R. Evans, Neil M. White and Arthur Brunnschweiler, A Novel Micromachined Pump Based On Thick-Film Piezoelectric Actuation, Sensors and Actuators A: Physical, vol. 70, pp. 98-103, 1998 ).
  • the piezoelectric material is disposed on a unit of three silicon layers that are stacked together.
  • a cantilever beam structure capable of vibrating is used to induce a unidirectional flow of a fluid. When voltage is applied, the piezoelectric material and a membrane reciprocate, thereby being able to transport the fluid.
  • Zengerle et al. proposed a microfluidic system that includes an electrostatic micropump made from a silicon material ( Optoelectronics and Photonics: Principles and Practices. 1st ed., Prentice Hall, 2001 ).
  • the electrostatic micropump employs a cantilever beam structure as a flap valve.
  • a microfluific system made from a polymer can be easily produced, is more biologically compatible, and can be made using a process that does not have limitations of a semiconductor manufacturingprocess. Consequently, polymeric materials, which are able to partially integrate a microvalve and a microfluidic driving source, have been continuously developed.
  • Liu et al. used an acrylic acid-hydroxyethyl methacrylate (AA/HEMA) hydrogel subjected to an ultraviolet curing process to construct a microvalve ( Liu R, Yu Q and Beebe D J, "Fabrication and Characterization of Hydrogel-BasedMicrovalves "J. Microelectromech. Syst., vol. 11, pp. 45-53, 2002 ).
  • the hydrogel changes in volume at different pH. Therefore, by virtue of volume changes of the hydrogel in buffer solutions having different pH values, a polydimethylsiloxane (PDMS) membrane can be pushed.
  • PDMS polydimethylsiloxane
  • the aforementioned conventional partially integrated microfluidic systems require a pressure controlling device and pipes to serve as a driving source for the fluid. Even though a microfluidic chip has a small size, an external driving source having a large size is necessary for the aforementioned conventional partially integrated microfluidic systems. Accordingly, the aforementioned conventional partially integrated microfluidic systems are not convenient to use,
  • a vacuum capillary pneumatic pump serves as a driving source.
  • a driving source which can induce actuation of a fluid by creating a positive pressure or a negative pressure, is generally made via a complicated process, must be precisely controlled to successfully accomplish the actuation of the fluid, and is normally not reusable.
  • how to provide a simple method of integrating a microfluidic system and a driving source is the subject of endeavor in the present invention.
  • the object of the present invention is to provide a microfluidic chip device that can overcome the aforesaid drawbacks of the prior art, and a method of making the same.
  • a method of making a microfluidic chip device comprises: forming a shape memory polymer into a substrate layer having a transformative portion with a memory shape; processing the substrate layer to change the transformative portion into a temporary shape; and laminating the substrate layer with a microfluidic layer so that a microchannel of the microfluidic layer is connected fluidly to the transformative portion having the temporary shape.
  • the memory shape is recovered when the transformative portion is activated by an external stimulus, and a fluid driving pressure is produced within the microchannel when the memory shape is recovered.
  • a microfluidic chip device includes a substrate layer and a microfluidic layer.
  • the substrate layer is made from a shape memory polymer, and includes a transformative portion that can change in volume when changing in shape between a memory shape and a temporary shape.
  • the microfluidic layer is laminated with the substrate layer and has a microchannel that is in fluid communication with the transformative portion. The transformative portion produces a fluid driving pressure within the microchannel when changing between the memory shape and the temporary shape,
  • FIG. 1 shows the preferred embodiment of a method of making a microfluidic chip device according to the present invention.
  • a monomer composition which contains a monomer that can be polymerized to form a shape memory polymer (SMP)
  • SMP shape memory polymer
  • the predetermined pattern of the mold 100 is composed of a protrusion 101 of the mold 100, which extends upwardly from a bottom portion of the mold 100.
  • the monomer composition in the mold 100 is subjected to polymerization so as to form the SMP.
  • the SMP is molded into a substrate layer 2 having a transformative portion 21 with a memory shape by virtue of the mold 100.
  • the memory shape of the transformative portion 21 corresponds to the pattern of the mold 100.
  • the monomer composition is disposed in the mold 100 by a casting process. Since the mold 100 has the protrusion 101, the transformative portion 21 with the memory shape has an indentation 21a corresponding to the protrusion 101 of the mold 100.
  • the memory shape of the transformative portion 21 is a permanent shape.
  • the SMP produced from the monomer composition may fall into one of the following four categories: a SMP composed of a covalently cross-linked glassy thermoset network, a SMP composed of a covalently cross-linked semi-crystalline network, a SMP composed of a physically cross-linked glassy copolymer, and a SMP composed of a physically cross-linked semi-crystalline block copolymer. Since the SMP composed of the covalently cross-linked glassy thermoset network has a sharp glass transition temperature (Tg) curve and has a structure of a cross-linked network, the same is able to repress molecular motion between chains.
  • Tg glass transition temperature
  • the SMP composed of the covalently cross-linked glassy thermoset network is capable of accomplishing shape-fixing and rapid shape-recovery, and is preferably used in the method of the present invention.
  • the monomer in the monomer composition is selected from the group consisting of methyl methacrylate (MMA) and butyl metharylate (BMA).
  • the monomer composition may further contain polyhedral oligosilsesquioxane (POSS) that is an inorganic/organic hybrid molecule, and that contains both an inorganic silicon-oxygen cage and compatibilizing organic groups pendant to each silicon corner of the cage.
  • POSS polyhedral oligosilsesquioxane
  • Thermal stability and melt flowability of the SMP can be increased by virtue of POSS, and a mechanical property of the SMP is not adversely affected by POSS.
  • the substrate layer 2 is removed from the mold 100, and the transformative portion 21 is subsequently hot-pressed so that the transformative portion 21 is deformed and is hence changed from the memory shape to a temporary shape.
  • the indentation 21a of the transformative portion 21 disappears when the transformative portion 21 is changed into the temporary shape after the hot pressing step.
  • the transformative portion 21 with the temporary shape which has no indentation 21a, is then cooled down.
  • the substrate layer 2 having the transformative portion 21 with the memory shape is heated to a temperature higher than Tg of the substrate layer 2, and the transformative portion 21 is hot-pressed by a hot-embossing machine.
  • a microfluidic layer 3 having a microchannel 31 is laminated with the substrate layer 2 so that the microchannel 31 is connected fluidly to the transformative portion 21 having the temporary shape. Consequently, the preferred embodiment of a microfluidic chip device according to the present invention is formed.
  • the microfluidic layer 3 further has a first hole 311 that is formed on a first surface of the microfluidic layer 3 and that is in spatial communication with the microchannel 31, and a second hole 312 that is formed on a second surface of the microfluidic layer 3 opposite to the first surface, that is in spatial communication with the microchannel 31, and that may be in spatial communication with the indentation 21a of the transformative portion 21.
  • the microchannel 31 may be in spatial communication with the indentation 21a of the transformative portion 21.
  • the microfluidic layer 3 may be made from glass or a polymer, and may be bonded to the substrate layer 2 by virtue of an adhesive 4.
  • the microfluidic layer 3 is made by drilling a substrate made from a cyclic olefin copolymer (COC). Accordingly, the microchannel 31, and the first and second holes 311, 312 are formed.
  • a UV curable adhesive 4 is spin-coated onto the second surface of the microfluidic layer 3, which has the second hole 312.
  • the microfluidic layer 3 is disposed on the substrate layer 2 with the second surface thereof facing the transformative portion 21, and with the second hole 312 disposed at a location of the transformative portion 21 with the temporary shape, which corresponds in position to the indentation 21a of the transformative portion 21 with the memory shape.
  • the assembly of the microfluidic layer 3 and the substrate layer 2 is placed in a UV exposure box and is exposed to UV light such that the microfluidic layer 3 and the transformative portion 21 are bonded to each other (see step (d) of FIG. 1 ).
  • the memory shape of the transformative portion 21 is recovered when the transformative portion 21 is activated by an external stimulus, and a fluid driving pressure is produced within the microchannel 31 when the memory shape is recovered. Specifically, when the transformative portion 21 is activated by the external stimulus and hence changes from the temporary shape to the memory shape, a volume of the transformative portion 21 (i.e., a volume of the SMP) changes such that the fluid driving pressure is produced within the microchannel 31. Namely, a pressure change is induced by the volume change of the transformative portion 21.
  • an amount of POSS is not less than 10 wt% based on a total weight of the monomer composition. More preferably, the amount of POSS is not less than 15 wt% based on the total weight of the monomer composition.
  • the external stimulus is heat
  • the fluid driving pressure is a negative pressure that is produced in the microchannel 31 when the indentation 21a of the transformative portion 21 is recovered.
  • the transformative portion 21 could be designed to produce a positive pressure in the microchannel 31 in other embodiments.
  • FIG. 3 how the microfluidic chip device can drive a fluid 100 is illustrated as follows.
  • the fluid 100 is disposed on the first hole 311.
  • the transformative portion 21 is heated to a temperature higher than Tg thereof, the internal energy is released to change the transformative portion 21 from the temporary shape to the memory shape, thereby recovering the indentation 21a.
  • the volume change of the transformative portion 21 produces the negative pressure in the microchannel 31.
  • the fluid 100 is sucked into the microchannel 31 by the negative pressure.
  • a driving source i.e., the transformative portion 21
  • a microfluidic chip i.e., the microfluidic layer 3
  • the microfluidic layer 3 and the transformative portion 21 could be detachably connected to each other in other embodiments. Consequently, the substrate layer 2 having the transformative portion 21 with the memory shape may be detached from the microfluidic layer 3, and may be subjected to a hot-pressing process so as to change the transformative portion 21 from the memory shape to the temporary shape. As a result, the substrate layer 2 may be attached to a new microfluidic layer 3 and is considered reusable.
  • the method of this invention is simple and convenient, and can be easily conducted. A production cost of the microfluidic chip device of this invention is also low.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
EP10175179.0A 2010-04-08 2010-09-03 Dispositif à puce microfluidique et son procédé de fabrication Active EP2375071B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW099110881A TWI537314B (zh) 2010-04-08 2010-04-08 智慧型可變型態高分子微流體動力裝置及其製作方法

Publications (2)

Publication Number Publication Date
EP2375071A1 true EP2375071A1 (fr) 2011-10-12
EP2375071B1 EP2375071B1 (fr) 2019-03-27

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EP10175179.0A Active EP2375071B1 (fr) 2010-04-08 2010-09-03 Dispositif à puce microfluidique et son procédé de fabrication

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Country Link
US (1) US20110247707A1 (fr)
EP (1) EP2375071B1 (fr)
JP (1) JP5379766B2 (fr)
TW (1) TWI537314B (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013153912A1 (fr) * 2012-04-12 2013-10-17 国立大学法人東京大学 Soupape, dispositif microfluidique, microstructure, siège de soupape, procédé de fabrication de siège de soupape, et procédé de fabrication de dispositif microfluidique
TWI557163B (zh) 2015-12-15 2016-11-11 國立清華大學 用於微流道晶片裝置的模具

Citations (6)

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Publication number Priority date Publication date Assignee Title
US20020047003A1 (en) * 2000-06-28 2002-04-25 William Bedingham Enhanced sample processing devices, systems and methods
WO2004076859A2 (fr) * 2003-02-24 2004-09-10 Mark Banister Systeme de commande de pompe active par impulsion
WO2006065884A2 (fr) * 2004-12-14 2006-06-22 Mark Banister Systeme de pompage a actionneur
EP1690595A1 (fr) * 2003-01-24 2006-08-16 Applera Corporation Ensemble enceinte d'échantillonage et procédé pour traiter un échantillon biologique
WO2006087655A1 (fr) * 2005-02-21 2006-08-24 Koninklijke Philips Electronics N.V. Systemes microfluidiques a elements de commande
WO2008018036A2 (fr) * 2006-08-09 2008-02-14 Koninklijke Philips Electronics N.V. Système microfluidique

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US5593290A (en) * 1994-12-22 1997-01-14 Eastman Kodak Company Micro dispensing positive displacement pump
US7524914B2 (en) * 2002-10-11 2009-04-28 The University Of Connecticut Shape memory polymers based on semicrystalline thermoplastic polyurethanes bearing nanostructured hard segments
US7235093B2 (en) * 2003-05-20 2007-06-26 Boston Scientific Scimed, Inc. Mechanism to improve stent securement
US7901770B2 (en) * 2003-11-04 2011-03-08 Boston Scientific Scimed, Inc. Embolic compositions

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020047003A1 (en) * 2000-06-28 2002-04-25 William Bedingham Enhanced sample processing devices, systems and methods
EP1690595A1 (fr) * 2003-01-24 2006-08-16 Applera Corporation Ensemble enceinte d'échantillonage et procédé pour traiter un échantillon biologique
WO2004076859A2 (fr) * 2003-02-24 2004-09-10 Mark Banister Systeme de commande de pompe active par impulsion
WO2006065884A2 (fr) * 2004-12-14 2006-06-22 Mark Banister Systeme de pompage a actionneur
WO2006087655A1 (fr) * 2005-02-21 2006-08-24 Koninklijke Philips Electronics N.V. Systemes microfluidiques a elements de commande
WO2008018036A2 (fr) * 2006-08-09 2008-02-14 Koninklijke Philips Electronics N.V. Système microfluidique

Non-Patent Citations (6)

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Title
"Optoelectronics and Photonics: Principles and Practices1st ed.,", 2001, PRENTICE HALL
DAVID T, EDDINGTON; DAVID J. BEEBE: "A Valved Responsive Hydrogel Microdispensing Device With Integrated Pressure Source", JOURNAL OF MICROELECTRO-MECHANICAL SYSTEMS, vol. 13, no. 4, 2004, XP011116016, DOI: doi:10.1109/JMEMS.2004.832190
J. MICROMECH. MICROENG., vol. 17, 2007, pages 410 - 417
KUO-YAO WENG ET AL.: "encapsulated vacuum capillaries in a flexible and elastic film", vol. 8, 2008, THE ROYAL SOCIETY OF CHEMISTRY 2008, LAB CHIP, pages: 1216 - 1219
LIU R, YU Q; BEEBE D J: "Fabrication and Characterization of Hydrogel-Based Microvalves", J.MICROELECTROMECH.SYST., vol. 11, 2002, pages 45 - 53, XP001124515, DOI: doi:10.1109/84.982862
M. KOCH; N. HARRIS; ALAN G.; R. EVANS; NEIL M. WHITE; ARTHUR BRUNNSCHWEILER, A NOVEL MICROMACHINED PUMP BASED ON THICK-FILM PIEZOELECTRIC ACTUATION, SENSORS AND ACTUATORS A: PHYSICAL, vol. 70, 1998, pages 98 - 103

Also Published As

Publication number Publication date
TWI537314B (zh) 2016-06-11
EP2375071B1 (fr) 2019-03-27
JP2011218546A (ja) 2011-11-04
TW201134861A (en) 2011-10-16
US20110247707A1 (en) 2011-10-13
JP5379766B2 (ja) 2013-12-25

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