EP2356711B1 - Organic light-emitting diode having optical resonator in addition to production method - Google Patents
Organic light-emitting diode having optical resonator in addition to production method Download PDFInfo
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- EP2356711B1 EP2356711B1 EP09784011.0A EP09784011A EP2356711B1 EP 2356711 B1 EP2356711 B1 EP 2356711B1 EP 09784011 A EP09784011 A EP 09784011A EP 2356711 B1 EP2356711 B1 EP 2356711B1
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- layer
- light
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- emitting diode
- optical resonator
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Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/875—Arrangements for extracting light from the devices
- H10K59/876—Arrangements for extracting light from the devices comprising a resonant cavity structure, e.g. Bragg reflector pair
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
- H10K50/852—Arrangements for extracting light from the devices comprising a resonant cavity structure, e.g. Bragg reflector pair
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
- H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching
Definitions
- the invention relates to organic light-emitting diodes, known by the abbreviation OLED, and to a method for the production of such organic light-emitting diodes.
- An organic light emitting diode is a luminous component consisting of organic semiconductors.
- Organic light-emitting diodes consist of one or more organic, thin layers, which are arranged between electrically conductive electrodes.
- An organic light-emitting diode comprises, for example, an anode which is applied to a glass pane and which, for. B. consists of indium tin oxide (ITO), and which is transparent in the visible range.
- ITO indium tin oxide
- This hole conduction layer can consist, for example, of PEDOT / PSS (poly (3,4-ethylenedioxythiophene) / polystyrene sulfonate), which serves to lower the injection barrier for the holes and as a diffusion barrier for indium.
- An emitter layer is provided on the hole line, which either contains a dye (approx. 5-10%) or consists entirely of the dye (e.g. aluminum tris (8-hydroxyquinoline), Alq 3 ).
- a cathode with a low electron work function consisting of a metal or an alloy such as calcium, aluminum, barium, ruthenium, magnesium-silver alloy, is vapor-deposited, for example in a high vacuum.
- the cathode is regularly evaporated as a double layer consisting of a very thin layer of lithium fluoride, cesium fluoride, calcium or barium and a thicker layer of aluminum or silver.
- cathode layers with a multilayer structure such as lithium fluoride / calcium / aluminum or barium / silver are made of EP 1083612 A2 known.
- the function of lithium fluoride or calcium or barium is to inject electrons into the layer below.
- the thickness of the lithium fluoride layer is a few nanometers.
- the thickness of the barium or calcium layer can be up to 100 nm.
- the function of the aluminum or silver layer is to transport the majority of the charges from the cathode connection to the light-emitting element, ie to the light-emitting layer.
- the thickness of this layer is in the range from 0.1 to 2 ⁇ m .
- the layer of lithium fluoride, calcium or barium forms the so-called electron injection layer, the aluminum / silver layer the electrically conductive layer of the cathode.
- the aluminum or silver layer protects the still sensitive and reactive electron injection layer.
- the electrons i.e. the negative charges
- the anode provides the holes or defect electrons, i.e. the positive charges.
- Positive and negative charges migrate towards each other due to an applied electric field and ideally meet in the emitter layer, which is why this layer is also called the recombination layer.
- a so-called exciton results from the recombination of an electron and a hole in the emitter layer.
- the exciton already represents the excited state of the dye molecule, or else the energy of the exciton is transferred to the dye molecule in a transfer process.
- the dye has different states of excitation.
- the excited state can change to the ground state and thereby emit a photon (light particle).
- the color of the emitted light depends on the energy gap between the excited and the ground state and can be specifically changed by varying or chemically modifying the dye molecules.
- Organic light-emitting diodes are mainly used in displays for computers, televisions, MP3 players etc. or as a light source in Lighting applications. OLEDs are also increasingly being considered as light sources for applications in sensor technology.
- organic light-emitting diodes are to be used in full-color displays, this presupposes that at least three basic colors can be generated independently of one another in a controlled manner.
- the display then comprises a multiplicity of individual pixels or organic light-emitting diodes which can emit light of different colors, wherein the generation of light can be electronically controlled by each pixel.
- a light source can also include a large number of pixels or organic light-emitting diodes that can produce different light colors. However, this division only serves to be able to produce the desired light color, for example white light, in that the pixels emit the three primary colors red, green and blue in a suitable distribution.
- organic light-emitting diodes are to be used in the sensor system, it depends on the respective application whether differently colored, individually controllable pixels are required or not. Due to the spectrally wide emission of most of the organic light-emitting diodes known from the state of the art compared to other light sources (e.g. LEDs) used in sensor technology, the use of pixels of different colors is often not meaningfully possible with the state of the art.
- other light sources e.g. LEDs
- Thermal evaporation is preferred because no solvents need to be used, although it is expensive to perform such a process. If a solvent is used, there is a risk of contamination of the material with a negative impact on the efficiency of an organic light-emitting diode and its service life.
- a shadow mask that is used for the structuring described resembles a perforated screen.
- the shadow mask has openings at the points at which the respective molecule is to reach a substrate located underneath. After a first deposition of first molecules through the openings of the shadow mask, the shadow mask is suitably shifted or exchanged for a second shadow mask, and second molecules that emit a different light color are deposited through the holes of the shadow mask on the substrate underneath. In the same way, third molecules are deposited in a third step.
- a material mixture or a multilayer structure which emits white light and use this for all subpixels instead of the structured application of differently colored small molecules or polymers.
- Suitable material mixtures / multilayer structures can be made of polymers or small molecules such as.
- such a material mixture or such a multilayer structure comprises components which emit the three primary colors and thus ultimately emit white light.
- a matrix of color filters Such a matrix or such a color filter array is produced from colored photoresists.
- First is to manufacture applied a first layer of photoresist, which serves, for example, as a color filter for blue light. This layer of photoresist is exposed at the appropriate points and thus made insoluble. The remaining, unexposed areas are washed off. Then another photoresist is applied, which forms a different color filter.
- the desired matrix of color filters is thus obtained in at least three stages.
- Such prior art is e.g. B. the publications " I Underwood et al., SID 04 Digest, pp. 293-295 (2004 )" such as " BJ Green, Displays 10 (3), pp. 181-1 84 (1989 )” refer to.
- an organic light-emitting diode which comprises a lossy optical resonator. Between a completely reflective cathode layer and a partially reflective anode layer there is a layer system consisting of a hole injection layer, a hole transport layer, an emitter layer and an electron transport layer. The light color generated by this organic light-emitting diode is set by the distance between the two reflective electrode layers.
- the thickness of the hole injection layer is varied. The different layers are evaporated.
- small molecules in different thicknesses are evaporated.
- This prior art therefore has the disadvantages already mentioned above, namely having to make complicated alignments several times.
- the item is not suitable for use as a display, since an electric field must be constantly applied to maintain a desired emission color.
- the manufacture and arrangement of the flexible membrane is relatively complex, so that it is also not possible to create an inexpensive white light source, a light source for sensory applications that emits light of different colors, or a spectrometer with this object.
- US 2008/0074037 A1 discloses an organic light-emitting diode with an anode, a cathode, a hole-conducting layer located therebetween and a light-emitting layer located therebetween with spatially separated layers of different thicknesses Layers in order to optimize hole injections depending on the light colors. Different layer thicknesses are obtained by different irradiations of crosslinkable material with ultraviolet light.
- US 2008/268135 discloses an OLED with a photochemically crosslinkable emitter layer.
- WO 2006/087658 discloses an OLED with a white light-emitting layer and a hole transport layer with a varying layer thickness.
- the object of the invention is to provide an organic light-emitting diode that is easier to manufacture.
- an OLED or organic light-emitting diode is produced with an emitter layer, which emits in particular white light.
- the emitter layer is arranged within a lossy optical resonator.
- An optical resonator is an arrangement of two specular or reflective layers that serves to light back and forth to reflect here.
- a standing wave is formed in the resonator if the optical path length of the resonator is a multiple of the wavelength of the emitted light.
- a light beam from a lossy resonator can escape from the arrangement after a few reflections.
- a reflecting layer of the resonator only partially reflects and is also partially transparent to light, so that light is coupled out via this partially reflecting or partially reflecting layer.
- the other reflective layer of the lossy optical resonator preferably reflects light as completely as possible in order to achieve good efficiencies.
- the optical path length between the two reflecting layers of the resonator determines the color of the light emerging from the optical resonator and thus from the light-emitting diode.
- the color of the light emerging from the light-emitting diode is therefore set by means of distances.
- there must be different optical path lengths between the two reflecting surfaces such as the printed matter US 6,091,197 such as US 2007/0286944 A1 can be seen.
- the corresponding different distances can be produced according to the invention in only one working step by means of a photolithographic process.
- the result is an organic light-emitting diode with a lossy optical resonator, in which there is an emitter layer and a layer that can be structured photolithographically.
- This layer which consists of photochemically crosslinkable materials, has different layer thicknesses in order to provide different optical path lengths.
- the layer consists of photochemically cross-linkable, electrically conductive or semiconducting materials. These electrically conductive or semi-conductive negative photoresists become completely or partially insoluble when exposed. The unexposed areas remain soluble. Materials with a comparable effect can also be used. An electrically conductive or semiconductive positive photoresist, for example, can also be used as the material, which can be completely exposed to light or becomes partially soluble. The unexposed areas remain insoluble here.
- the light color of the light emerging from the organic light-emitting diode is determined by the formation of the standing waves in the lossy optical resonator. Other light wavelengths also emerge. However, if necessary, the corresponding desired color can be amplified due to the resonator so that the corresponding wavelength predominates by far.
- the reflective layers of the optical resonator consist of metal. In principle, other materials are also possible, for example dielectric layer stacks, which are provided in connection with Bragg mirrors.
- a reflective layer of the optical resonator consists in particular of Ag, Al, Au, or it is one or more Bragg mirrors. In the case of Bragg reflections, several Bragg mirrors stacked one above the other are usually provided in order to reflect the entire light spectrum. If a reflective layer is to be partially transparent, the layer thickness is suitably thin, for example a 10 to 100 nm thin layer consisting of silver, aluminum, gold, copper, titanium or nickel.
- the emitter layer that is to say the layer which emits light
- the layer which emits light can in principle have different thicknesses and consist of a photochemically crosslinkable material.
- the organic light-emitting diode within the optical resonator comprises an additional layer (in addition to the emitter layer), namely a hole conductor layer with a changing thickness, which consists of the photochemically crosslinkable material.
- the emitter layer can now consist of non-photochemically cross-linkable material. The material of the The emitter layer can therefore be chosen more freely and the emitter layer can be optimized more easily with regard to the generation of light.
- An emitter layer is preferably formed by an RGB copolymer.
- An RGB copolymer emits at least red, green and blue light.
- the emitter layer can be a mixture of red, green and blue emitting components or a layer system which comprises a red light emitting layer, a green light emitting layer and a blue light emitting layer.
- photolithographic structuring is possible.
- the basic principle of photolithography is described, for example, in the publication “ Adams, Layton, Siahmakoun, “Lecture Notes in Computer Science, Springer-Verlag (2008 ) ".
- the structuring of photochemically crosslinkable semiconductors is described in the publication” Gather et al., Solution-Processed Full-Color Polymer Organic Light-Emitting Diode Displays Fabricated by Direct Photolithography, Advanced Functional Materials, 17, 191-200, 2007 “out.
- the structuring according to the invention is not carried out with the aid of a black and white shadow mask but with the aid of a grayscale mask, that is to say a mask which has different light transmittance at different points.
- the grayscale mask can be a glass plate that is coated with metallic layers of different layer thickness. Light that hits the glass plate is absorbed to different extents.
- it can also be a PET film, for example, a film consisting of polyethylene terephthalate, which is blackened to different extents on the surface and thus allows light to pass through differently.
- Such a shadow or grayscale mask is placed on the layer, which can be structured photolithographically, for example, photochemically cross-linked. Then exposure is made through the shadow mask. This ensures that the photochemically crosslinkable layer is crosslinked to different degrees. This leads to different layer thicknesses in the layer that has been crosslinked to different degrees. Crosslinking in particular means that the layer becomes insoluble in the crosslinked regions. In addition, the layer remains soluble. After crosslinking, a development step is regularly carried out to remove the non-crosslinked components. In this way, the desired structuring is achieved in just one work step. A multiple alignment - as described at the beginning - is not necessary.
- the additional layer can be electrically conductive. If the method according to the invention is to be used to produce displays, it must be possible to control the pixels differently. This is possible if the additional layer consists of a semiconducting material or a material with a sufficiently low electrical conductivity.
- low-molecular, crosslinkable hole conductors are provided as the material of the additional layer, for example the structure shown below based on triarylamine with oxetane as the reactive group:
- Dienes and methacrylates can also be used for photo-induced radical crosslinking.
- the chemical structures of such materials are shown below.
- crosslinkable, oligomeric or polymeric hole conductor materials are provided as the material of the additional layer, since production conditions can thus be simplified in comparison to the low molecular weight, crosslinkable hole conductors.
- the reason for this is the good film-forming properties of oligomeric or polymeric hole conductor materials.
- the emitter layer which preferably generates white light, can consist of polymers, oligomers, small molecules, metal complexes or mixtures thereof.
- An OLED structure of the present invention in particular comprises a plurality of thin, organic layers. It can be above an anode which is completely or partially transparent to light (for example indium tin oxide, ITO from the English indium tin oxide, silver, aluminum, gold, MoO 3 , nickel, TiN), which is on a transparent substrate, so For example, on a glass pane or a transparent layer of plastic such as polyethylene terephthalate (PET), a hole transport layer (HTL) can be provided, which consist of the crosslinkable materials and can be of different thicknesses.
- ITO indium tin oxide
- ITO indium tin oxide
- silver, aluminum, gold, MoO 3 , nickel, TiN which is on a transparent substrate
- HTL hole transport layer
- an additional perforated layer made of PEDOT / PSS (poly (3,4-ethylenedioxythiophene) / polystyrene sulfonate, Baytron P) can be provided between the anode and the perforated layer, which serves to lower the injection barrier for holes and also smoothes the surface.
- a layer can be applied to the perforated line layer which either contains differently colored dyes (preferably about 0.05-10%, but also lower or higher concentrations are possible, for example 0.01 to 80%), for example a white-emitting one Copolymer or from several different " There are color-emitting individual layers. Suitable materials can be found in the publications "J. Liu et al., Adv. Mater. 17, 2974-2978 (2005 ) " such as " BW D'Andrade et al., Adv. Mater. 16, 624-628 (2004 ) " known.
- This layer is the emitter layer (EL).
- This can be deposited, for example, from solution or in a high vacuum.
- An electron transport layer (ETL) can be applied to this.
- a cathode consisting of a metal or alloy with a low electron work function (eg calcium, aluminum, magnesium / silver alloy) can be provided, which has been vapor-deposited for example in a high vacuum.
- a very thin layer of LiF or CsF for example, has been vapor-deposited.
- the cathode can finally be coated with silver or with aluminum.
- the transparent substrate can also adjoin the cathode
- the cathode or the anode is completely or partially transparent or completely reflective, depending on the need for light.
- the OLED structure comprises a plurality of thin, organic layers.
- a non-transparent substrate for example a silicon wafer or a metal foil
- a completely or partially reflective or completely or partially transparent electrode for example made of ITO.
- this can serve either as an anode or as a cathode.
- further reflecting layers for example Bragg mirrors
- a completely or partially transparent second electrode is applied to the organic layers (e.g.
- the light is not radiated through the substrate, but through the upper electrode (and the additional, reflective layers which may lie above it).
- the invention is based on the idea of providing a first and a second reflective layer, which can simultaneously take over electrode functions in order to be able to control the component in a suitable manner.
- Between the reflective layers is a layer that is provided in order to be able to structure appropriately.
- further layers can be provided inside or outside the lossy optical resonator. It is only important that there is a layer in the optical resonator that has been structured in just one work step. The order in which the desired layers are applied is ultimately arbitrary. So it can for example, the structured layer is applied first, then a layer which emits white light and, if appropriate, further functional layers, for example known from the prior art.
- a substrate for example a CMOS chip
- CMOS chip can already comprise electronics with which the pixels are controlled accordingly in the case of a display.
- the structuring of the layer with the different layer thicknesses must then take place in such a way that the corresponding layer thicknesses or pixels are suitably aligned relative to the electronics.
- only one alignment step is required.
- the further alignment steps known at the outset, which are known from the prior art, are dispensed with.
- the structured layer of the light-emitting diode not only comprises three different thicknesses in order to represent three primary colors, but also considerably more different thicknesses.
- a grayscale mask used for the production then not only has three grayscale to provide three spectral colors, but also significantly more color levels, for example twenty gradations. By emitting so many different colors from the light-emitting diode, it is much easier to generate a desired light color, for example imitating sunlight.
- the thickness of the structured layer increases or decreases in a wedge shape.
- the distance between the two reflecting surfaces of the resonator thus changes in a wedge shape.
- Such an organic light-emitting diode is able to represent the entire color spectrum, the individual spectral colors being spatially resolved.
- different areas of the aforementioned wedge are contacted by different electrodes. This enables separate addressing of the different spectral line components.
- the light-emitting diode according to the invention with the wedge-shaped structure is part of a spectrometer, that is to say a component with which the spectral range of the light is imaged spatially next to one another.
- the entire spectral range can be reproduced very well thanks to the wedge-shaped structure.
- a wedge-shaped structure in the sense of the invention increases continuously from a minimum thickness d min until a maximum thickness d max of the structure is reached.
- a similar result can be achieved if instead of a continuous increase the increase is staircase-shaped and the staircase comprises a large number of steps with a low step height. The lower the step height of each step, the more a result is achieved which corresponds to the continuous increase. However, preference is given to the continuous increase compared to a step-like increase.
- the light-emitting diode according to the invention comprises a rising and / or falling structure within the lossy resonator and is used as lighting.
- the lighting emits different light colors that are spatially separated from each other.
- a component that is able to reproduce spatially ordered spectral colors can also only be approximately wedge-shaped in the aforementioned sense, for example staircase-shaped.
- Such a component is generally suitable for producing monochromatic integrated light sources for the sensors.
- Figure 1 outlines a structure of an embodiment of the invention in section.
- a silicon wafer 1 there is a 100 nm thick, reflective layer 2 made of aluminum, which acts on the one hand as an electrode and on the other hand as a reflective layer of an optical resonator.
- the thickest point of the wedge-shaped layer 4 is 60 nm.
- the wedge-shaped layer consists of N, N'-bis [4- (6 - [(3-ethyloxetan-3-yl) methoxy] hexyloxy) phenyl] -N, N ' -bis (4-methoxyphenyl) biphenyl-4,4'-diamine, ie a structure based on triarylamine with oxetane as a reactive group.
- An emitter layer 5 which is able to emit white light, is deposited on the wedge-shaped layer 4.
- the emitter layer consists of a white-emitting copolymer and is 70 nm thick.
- the electrically conductive layer 7 is partially transparent, so that light is coupled out of the optical resonator, which comprises the two reflecting layers 2 and 7, via this layer 7.
- Electroluminescence spectra shown a to g are generated. Is represented in Figure 2 the normalized intensity "Normlized Intensity" against the wavelength “Wavelength” in nm.
- the individual light colors can be used, for example, to measure the transmission spectrum of a substance, liquid or solution by combining the OLED in a suitable manner with a photodetector. This maintains the functionality of a spectrometer. However, the dimensions of the component produced were significantly smaller than the dimensions of a commercially available spectrometer. Such a measurement is not possible according to the prior art.
- OLEDs manufactured according to the current state of the art emit over a too wide range of the spectrum (for example white-emitting OLEDs, but also broadband red, green or blue-emitting OLEDs).
- white-emitting OLEDs but also broadband red, green or blue-emitting OLEDs.
- the reflective layers in the in Figure 1 does not necessarily have to act as electrodes at the same time. It is sufficient if the emitter layer is located between two layers functioning as electrodes.
- the layer, the layer thickness of which changes in a wedge shape, does not necessarily have to be arranged within the two electrodes.
- other embodiments of the invention which comprise a layer with different layer thicknesses. If the layer with a different layer thickness or wedge-shaped structure is arranged within the optical resonator, but not between two electrodes, the material can be chosen more freely, since it does not matter to what extent the layer with different layer thicknesses is or is not electrically conductive. This layer with different layer thicknesses can then be an optically transparent, electrical insulator.
- Figure 3 outlines the exposure 8 of a cross-linkable semiconductor 9 through a grayscale mask 10. Different exposure doses result in different degrees of cross-linking in the regions 11, 12 and 13.
- the cross-linkable semiconductor for example consisting of N, N'-bis (4- (6 - ((3-ethyloxetane -3-y) methoxy)) - hexylpenyl) -N, N'-diphenyl-4,4'-diamine or N, N'-bis [4- (6 - [(3-ethyloxetan-3-yl) methoxy ] hexyloxy) phenyl] -N, N'-bis (4-methoxyphenyl) biphenyl-4,4'-diamine is located on a transparent oxide 14, for example on MoO 3 .
- the transparent oxide is applied to a pixilated mirror 15 made of metal.
- the mirror can be made of aluminum, for example.
- the mirror 15 in turn is located on a substrate 16, which consists, for example, of silicon dioxide and / or silicon and can already include electronics with which the pixels are controlled accordingly.
- Figure 5 shows a schematic structure of a light source for lighting applications produced with the present invention.
- the component is shown before the deposition of the emitter layer, the electron injection layer and the reflective cathode.
- Cross-linked hole conductor layers 24 of different thickness, a partially transparent metal mirror 25, for example consisting of Ag, and a transparent substrate 26 are shown.
- Figure 6 shows an example of a lighting element which emits the color spectrum spatially separated.
- a reflective layer 100 there is an optically transparent, hemispherical layer 101, which therefore both rises and falls continuously.
- a conventional OLED structure 102 comprising two electrodes and an emitter layer located between them is located on the hemispherical layer 101.
- the light originating from the emitter layer is generally reflected back and forth between the reflecting layer 100 and an opposite, outer, partially reflecting layer 103 before the light emerges through the layer 103.
- Layer 103 also functions as an electrode.
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Description
Die Erfindung betrifft organische Leuchtdioden, bekannt unter der Abkürzung OLED, sowie ein Verfahren für die Herstellung von solchen organischen Leuchtdioden.The invention relates to organic light-emitting diodes, known by the abbreviation OLED, and to a method for the production of such organic light-emitting diodes.
Eine organische Leuchtdiode ist ein leuchtendes, aus organischen Halbleitern bestehendes Bauelement. Organische Leuchtdioden bestehen aus einer oder mehreren organischen, dünnen Schichten, die zwischen elektrisch leitfähigen Elektroden angeordnet sind.An organic light emitting diode is a luminous component consisting of organic semiconductors. Organic light-emitting diodes consist of one or more organic, thin layers, which are arranged between electrically conductive electrodes.
Eine organische Leuchtdiode umfasst eine beispielsweise auf einer Glasscheibe aufgebrachte Anode, die z. B. aus Indium-Zinn-Oxid (ITO) besteht, und die im sichtbaren Bereich transparent ist. Oberhalb der Anode befindet sich häufig eine Lochleitungsschicht. Diese Lochleitungsschicht kann beispielsweise aus PEDOT/PSS (Poly(3,4-ethylendioxythiophen)/ Polystyrolsulfonat) bestehen, die der Absenkung der Injektionsbarriere für die Löcher und als Diffusionsbarriere für Indium dient. Auf der Lochleitungsschicht wird eine Emitterschicht vorgesehen, die entweder einen Farbstoff enthält (ca. 5-10 %) oder vollständig aus dem Farbstoff (z. B. Aluminium-tris(8-hydroxychinolin), Alq3) besteht. Auf dieser ist häufig eine Elektronenleitungsschicht aufgebracht. Zum Abschluss wird eine Kathode mit geringer Elektronenaustrittsarbeit, bestehend aus einem Metall oder einer Legierung wie zum Beispiel Calcium, Aluminium, Barium, Ruthenium, Magnesium-Silber-Legierung, beispielsweise im Hochvakuum aufgedampft. Zur Verringerung der Injektionsbarriere für Elektronen wird die Kathode regelmäßig als Doppelschicht bestehend aus einer sehr dünnen Schicht aus Lithiumfluorid, Cäsiumfluorid, Calcium oder Barium und einer dickeren Schicht aus Aluminium oder Silber aufgedampft.An organic light-emitting diode comprises, for example, an anode which is applied to a glass pane and which, for. B. consists of indium tin oxide (ITO), and which is transparent in the visible range. There is often a hole line layer above the anode. This hole conduction layer can consist, for example, of PEDOT / PSS (poly (3,4-ethylenedioxythiophene) / polystyrene sulfonate), which serves to lower the injection barrier for the holes and as a diffusion barrier for indium. An emitter layer is provided on the hole line, which either contains a dye (approx. 5-10%) or consists entirely of the dye (e.g. aluminum tris (8-hydroxyquinoline), Alq 3 ). An electron-conducting layer is often applied to this. Finally, a cathode with a low electron work function, consisting of a metal or an alloy such as calcium, aluminum, barium, ruthenium, magnesium-silver alloy, is vapor-deposited, for example in a high vacuum. To reduce the injection barrier for electrons, the cathode is regularly evaporated as a double layer consisting of a very thin layer of lithium fluoride, cesium fluoride, calcium or barium and a thicker layer of aluminum or silver.
Für organische Leuchtdioden sind Kathodenschichten mit einer Mehrlagenstruktur wie Lithiumfluorid/Kalzium/Aluminium oder Barium/Silber aus der
Die Elektronen, also die negativen Ladungen werden von der Kathode injiziert, während die Anode die Löcher bzw. Defektelektronen, also die positiven Ladungen bereitstellt. Positive und negative Ladungen wandern aufgrund eines angelegten elektrischen Feldes aufeinander zu und treffen sich im Idealfall in der Emitterschicht, weshalb diese Schicht auch Rekombinationsschicht genannt wird. Durch Rekombination eines Elektrons und eines Loches in der Emitterschicht entsteht ein sogenanntes Exziton. Abhängig vom Mechanismus stellt das Exziton bereits den angeregten Zustand des Farbstoffmoleküls dar, oder aber die Energie des Exzitons wird in einem Transferprozess auf das Farbstoffmolekül übertragen. Der Farbstoff hat verschiedene Anregungszustände. Der angeregte Zustand kann in den Grundzustand übergehen und dabei ein Photon (Lichtteilchen) aussenden. Die Farbe des ausgesendeten Lichts hängt vom Energieabstand zwischen angeregtem und Grundzustand ab und kann durch Variation oder chemische Modifikation der Farbstoffmoleküle gezielt verändert werden.The electrons, i.e. the negative charges, are injected from the cathode, while the anode provides the holes or defect electrons, i.e. the positive charges. Positive and negative charges migrate towards each other due to an applied electric field and ideally meet in the emitter layer, which is why this layer is also called the recombination layer. A so-called exciton results from the recombination of an electron and a hole in the emitter layer. Depending on the mechanism, the exciton already represents the excited state of the dye molecule, or else the energy of the exciton is transferred to the dye molecule in a transfer process. The dye has different states of excitation. The excited state can change to the ground state and thereby emit a photon (light particle). The color of the emitted light depends on the energy gap between the excited and the ground state and can be specifically changed by varying or chemically modifying the dye molecules.
Organische Leuchtdioden werden vor allem in Displays für Computer, Fernseher, MP3-Player usw. eingesetzt oder aber als Lichtquelle in Beleuchtungsanwendungen. OLEDs kommen zunehmend auch als Lichtquellen für Anwendungen in der Sensorik in Betracht.Organic light-emitting diodes are mainly used in displays for computers, televisions, MP3 players etc. or as a light source in Lighting applications. OLEDs are also increasingly being considered as light sources for applications in sensor technology.
Sollen organische Leuchtdioden in Vollfarb-Displays eingesetzt werden, so setzt dies voraus, dass zumindest drei Grundfarben unabhängig voneinander gesteuert erzeugt werden können. Das Display umfasst dann eine Vielzahl von einzelnen Pixeln bzw. organischen Leuchtdioden, die verschiedenfarbiges Licht emittieren können, wobei die Erzeugung von Licht durch ein jedes Pixel elektronisch gesteuert werden kann.If organic light-emitting diodes are to be used in full-color displays, this presupposes that at least three basic colors can be generated independently of one another in a controlled manner. The display then comprises a multiplicity of individual pixels or organic light-emitting diodes which can emit light of different colors, wherein the generation of light can be electronically controlled by each pixel.
Soll eine organische Leuchtdiode als Lichtquelle zur Beleuchtung eingesetzt werden, so ist eine elektronische Ansteuerung einzelner Pixel nicht erforderlich. Eine Lichtquelle kann zwar ebenfalls eine Vielzahl von Pixeln bzw. organischen Leuchtdioden, die unterschiedliche Lichtfarben erzeugen können, umfassen. Diese Aufteilung dient jedoch lediglich dazu, die gewünschte Lichtfarbe erzeugen zu können, so zum Beispiel weißes Licht, indem die Pixel die drei Grundfarben Rot, Grün und Blau geeignet verteilt ausstrahlen.If an organic light-emitting diode is to be used as the light source for lighting, then electronic control of individual pixels is not necessary. A light source can also include a large number of pixels or organic light-emitting diodes that can produce different light colors. However, this division only serves to be able to produce the desired light color, for example white light, in that the pixels emit the three primary colors red, green and blue in a suitable distribution.
Sollen organische Leuchtdioden in der Sensorik eingesetzt werden, hängt es von der jeweiligen Anwendung ab, ob verschiedenfarbig emittierende, einzeln ansteuerbare Pixel benötigt werden oder nicht. Aufgrund der im Vergleich zu anderen in der Sensorik verwendeten Lichtquellen (z.B. LEDs) - spektral breiten Emission der meisten aus dem Stand der Technik bekannten organischen Leuchtdioden ist die Verwendung verschiedenfarbig emittierender Pixel mit den Stand der Technik häufig nicht sinnvoll möglich.If organic light-emitting diodes are to be used in the sensor system, it depends on the respective application whether differently colored, individually controllable pixels are required or not. Due to the spectrally wide emission of most of the organic light-emitting diodes known from the state of the art compared to other light sources (e.g. LEDs) used in sensor technology, the use of pixels of different colors is often not meaningfully possible with the state of the art.
Aus dem Stand der Technik ist bekannt, die einzelnen Pixel eines Displays oder einer Lichtquelle auf Basis organischer Leuchtdioden im Hochvakuum durch thermische Verdampfung von verschiedenfarbig emittierenden kleinen Molekülen herzustellen. In diesem mindestens dreistufigen Prozess werden beispielsweise rot, grün und blau emittierende kleine Moleküle nacheinander durch Schattenmasken auf das Substrat aufgebracht. Bei diesem Verfahren werden grundsätzlich kleine Moleküle und nicht etwa Polymere abgeschieden, da Polymere zu groß sind, um sich thermisch verdampfen zu lassen.It is known from the prior art to produce the individual pixels of a display or a light source on the basis of organic light-emitting diodes in a high vacuum by thermal evaporation of small molecules emitting different colors. In this at least three-stage process, for example, small, red, green and blue emitting small molecules are successively applied to the substrate using shadow masks. This process basically uses small molecules and not polymers deposited because polymers are too large to be thermally evaporated.
Ein typisches kleines Molekül, welches durch thermische Verdampfung aufgetragen wird, ist der Metallkomplex Alq3, Alq3 emittiert grünes Licht. Durch Beimischung von Farbstoffen kann die Emissionsfarbe von Alq3 verändert werden. Darüber hinaus können auch andere Metallkomplexe oder andere kleine Moleküle verwendet werden, um andere Farben zu erzeugen, die durch Alq3 oder modifiziertes Alq3 nicht zu erreichen sind.A typical small molecule, which is applied by thermal evaporation, is the metal complex Alq 3 , Alq 3 emits green light. By adding dyes, the emission color of Alq 3 can be changed. In addition, other metal complexes or other small molecules can be used to produce other colors that cannot be achieved by Alq 3 or modified Alq 3 .
Thermische Verdampfung wird bevorzugt, da keine Lösungsmittel verwendet werden müssen, obwohl die Durchführung eines solchen Verfahrens teuer ist. Wird ein Lösungsmittel verwendet, so besteht die Gefahr der Verunreinigung des Materials mit negativem Einfluss auf die Effizienz einer organische Leuchtdiode und ihrer Lebensdauer.Thermal evaporation is preferred because no solvents need to be used, although it is expensive to perform such a process. If a solvent is used, there is a risk of contamination of the material with a negative impact on the efficiency of an organic light-emitting diode and its service life.
Eine Schattenmaske, die für die beschriebene Strukturierung verwendet wird, gleicht einem Lochsieb. Die Schattenmaske weist Öffnungen an den Stellen auf, zu denen das jeweilige Molekül auf ein darunter befindliches Substrat gelangen soll. Nach einer ersten Abscheidung von ersten Molekülen durch die Öffnungen der Schattenmaske hindurch wird die Schattenmaske geeignet verschoben oder durch eine zweite Schattenmaske ausgetauscht, und es werden zweiten Moleküle, die eine andere Lichtfarbe emittieren, durch die Löcher der Schattenmaske hindurch auf dem darunter befindlichen Substrat abgeschieden. In gleicher Weise werden in einem dritten Schritt dritte Moleküle abgeschieden.A shadow mask that is used for the structuring described resembles a perforated screen. The shadow mask has openings at the points at which the respective molecule is to reach a substrate located underneath. After a first deposition of first molecules through the openings of the shadow mask, the shadow mask is suitably shifted or exchanged for a second shadow mask, and second molecules that emit a different light color are deposited through the holes of the shadow mask on the substrate underneath. In the same way, third molecules are deposited in a third step.
Die korrekte Ausrichtung der Schattenmasken relativ zueinander und relativ zum Substrat hat sich als schwierig erwiesen, da über große Flächen Ausrichtungsgenauigkeiten in der Größenordnung von 1 bis 10 µm erforderlich sind [
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Um den komplizierten Ausrichtungsvorgang zu umgehen, wurde zudem vorgeschlagen, statt der strukturierten Aufbringung verschiedenfarbig emittierender kleiner Moleküle oder Polymere eine Materialmischung oder einen Mehrschichtaufbau zu verwenden, die/ der weißes Licht emittiert und diese/ diesen für alle Subpixel zu verwenden. Geeignete Materialmischungen/ Mehrschichtaufbauten können aus Polymeren oder aus kleinen Molekülen wie z. B. Metallkomplexen bestehen. Im letzteren Fall werden Metallkomplexe häufig bevorzugt, da diese derzeit eine größere Helligkeit ermöglichen. In der Regel umfasst eine solche Materialmischung bzw. ein solcher Mehrschichtaufbau Komponenten, die die drei Grundfarben emittieren und so schließlich weißes Licht ausstrahlen.In order to avoid the complicated alignment process, it has also been proposed to use a material mixture or a multilayer structure which emits white light and use this for all subpixels instead of the structured application of differently colored small molecules or polymers. Suitable material mixtures / multilayer structures can be made of polymers or small molecules such as. B. metal complexes exist. In the latter case, metal complexes are often preferred because they currently allow greater brightness. As a rule, such a material mixture or such a multilayer structure comprises components which emit the three primary colors and thus ultimately emit white light.
Der Farbeindruck wird durch die nachträgliche Auflaminierung einer Matrix von Farbfiltern erreicht. Eine solche Matrix bzw. ein solches Farbfilterarray wird aus eingefärbten Fotolacken hergestellt. Zunächst wird zur Herstellung eine erste Fotolackschicht aufgetragen, die beispielsweise als Farbfilter für blaues Licht dient. Diese Fotolackschicht wird an den entsprechenden Stellen belichtet und so unlöslich gemacht. Die übrigen, unbelichteten Bereiche werden abgewaschen. Anschließend wird ein nächster Fotolack aufgetragen, der einen anderen Farbfilter bildet. In mindestens drei Stufen wird so die gewünschte Matrix von Farbfiltern erhalten. Ein solcher Stand der Technik ist z. B. den Druckschriften "
Hierdurch verlagert sich das Ausrichtungsproblem jedoch lediglich auf einen späteren Zeitpunkt der Prozesskette, da die Farbfilter bzw. das Farbfilterarray relativ zur Subpixelstruktur exakt ausgerichtet werden muss. Außerdem sind die mit diesem Verfahren erreichten Farbsättigungen und Leistungseffizienz für viele Anwendungen unzureichend.However, this only shifts the alignment problem to a later point in the process chain, since the color filter or the color filter array must be exactly aligned relative to the subpixel structure. In addition, the color saturation and power efficiency achieved with this method are inadequate for many applications.
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Aufgabe der Erfindung ist die Schaffung einer einfacher herzustellenden organischen Leuchtdiode.The object of the invention is to provide an organic light-emitting diode that is easier to manufacture.
Die Aufgabe wird durch eine organische Leuchtdiode mit den Merkmalen des Anspruchs 1 sowie durch ein Verfahren mit den Merkmalen des nebengeordneten Anspruchs gelöst.The object is achieved by an organic light-emitting diode with the features of
Erfindungsgemäß wird eine OLED bzw. organische Leuchtdiode mit einer Emitterschicht hergestellt, die insbesondere weißes Licht emittiert. Die Emitterschicht wird innerhalb eines verlustbehafteten, optischen Resonators angeordnet. Ein optischer Resonator ist eine Anordnung von zwei spiegelnden bzw. reflektierenden Schichten, die dazu dient, Licht hin und her zu reflektieren. Im Resonator bildet sich eine stehende Welle aus, wenn die optische Weglänge des Resonators ein Vielfaches der Wellenlänge des emittierten Lichts beträgt. Im Unterschied zu einem verlustfreien Resonator kann ein Lichtstrahl aus einem verlustbehafteten Resonator nach einigen Reflexionen aus der Anordnung entkommen. Eine reflektierende Schicht des Resonators reflektiert nur teilweise und ist darüber hinaus für Licht teilweise durchlässig, so dass Licht über diese teilweise reflektierende bzw. teilweise spiegelnde Schicht ausgekoppelt wird. Die andere reflektierende Schicht des verlustbehafteten optischen Resonators reflektiert Licht bevorzugt möglichst vollständig, um zu guten Wirkungsgraden zu gelangen.According to the invention, an OLED or organic light-emitting diode is produced with an emitter layer, which emits in particular white light. The emitter layer is arranged within a lossy optical resonator. An optical resonator is an arrangement of two specular or reflective layers that serves to light back and forth to reflect here. A standing wave is formed in the resonator if the optical path length of the resonator is a multiple of the wavelength of the emitted light. In contrast to a lossless resonator, a light beam from a lossy resonator can escape from the arrangement after a few reflections. A reflecting layer of the resonator only partially reflects and is also partially transparent to light, so that light is coupled out via this partially reflecting or partially reflecting layer. The other reflective layer of the lossy optical resonator preferably reflects light as completely as possible in order to achieve good efficiencies.
Die optische Weglänge zwischen den beiden reflektierenden Schichten des Resonators bestimmt die Farbe des aus dem optischen Resonator und damit aus der Leuchtdiode austretenden Lichts. Die Farbe des aus der Leuchtdiode austretenden Lichts wird also durch Abstände eingestellt. Um eine Vielzahl von Farben erzeugen zu können, müssen unterschiedliche optische Weglängen zwischen den beiden spiegelnden Flächen vorhanden sein, wie beispielsweise den Druckschriften
Die Lichtfarbe des aus der organischen Leuchtdiode austretenden Lichts wird durch die Ausbildung der stehenden Wellen im verlustbehafteten optischen Resonator bestimmt. Es treten zwar auch andere Lichtwellenlängen aus. Allerdings kann bei Bedarf aufgrund des Resonators die entsprechende, gewünschte Farbe so verstärkt werden, dass die entsprechende Wellenlänge bei weitem überwiegt. Die reflektierenden Schichten des optischen Resonators bestehen der Einfachheit halber aus Metall. Grundsätzlich kommen auch andere Materialien in Betracht, beispielsweise dielektrische Schichtstapel, die im Zusammenhang mit Bragg-Spiegeln vorgesehen werden.The light color of the light emerging from the organic light-emitting diode is determined by the formation of the standing waves in the lossy optical resonator. Other light wavelengths also emerge. However, if necessary, the corresponding desired color can be amplified due to the resonator so that the corresponding wavelength predominates by far. For the sake of simplicity, the reflective layers of the optical resonator consist of metal. In principle, other materials are also possible, for example dielectric layer stacks, which are provided in connection with Bragg mirrors.
Eine spiegelnde Schicht des optischen Resonators besteht insbesondere aus Ag, Al, Au, oder es handelt sich um ein oder mehrere Bragg-Spiegel. Im Fall von Bragg-Reflexionen werden in der Regel mehrere, übereinander gestapelte Bragg-Spiegel vorgesehen, um das gesamte Lichtspektrum zu reflektieren. Soll eine reflektierende Schicht teilweise transparent sein, so wird die Schichtdicke geeignet dünn gewählt, so eine beispielsweise 10 bis 100 nm dünne, aus Silber, Aluminium, Gold, Kupfer, Titan oder Nickel bestehende Schicht.A reflective layer of the optical resonator consists in particular of Ag, Al, Au, or it is one or more Bragg mirrors. In the case of Bragg reflections, several Bragg mirrors stacked one above the other are usually provided in order to reflect the entire light spectrum. If a reflective layer is to be partially transparent, the layer thickness is suitably thin, for example a 10 to 100 nm thin layer consisting of silver, aluminum, gold, copper, titanium or nickel.
Zwar kann grundsätzlich die Emitterschicht, also die Schicht, die Licht emittiert, unterschiedlich dick sein und aus einem photochemisch vernetzbaren Material bestehen. Hierdurch wird jedoch die Materialauswahl stark eingeschränkt, aus der die Emitterschicht bestehen kann.In principle, the emitter layer, that is to say the layer which emits light, can in principle have different thicknesses and consist of a photochemically crosslinkable material. However, this severely limits the choice of material from which the emitter layer can be made.
Erfindungsgemäß umfasst die organische Leuchtdiode innerhalb des optischen Resonators eine zusätzliche Schicht (zusätzlich zur Emitterschicht), nämlich eine Lochleiterschicht mit sich verändernder Dicke, die aus dem photochemisch vernetzbaren Material besteht. Die Emitterschicht kann nun aus nicht photochemisch vernetzbarem Material bestehen. Das Material der Emitterschicht kann daher entsprechend freier gewählt und die Emitterschicht einfacher hinsichtlich der Lichterzeugung optimiert werden.According to the invention, the organic light-emitting diode within the optical resonator comprises an additional layer (in addition to the emitter layer), namely a hole conductor layer with a changing thickness, which consists of the photochemically crosslinkable material. The emitter layer can now consist of non-photochemically cross-linkable material. The material of the The emitter layer can therefore be chosen more freely and the emitter layer can be optimized more easily with regard to the generation of light.
Eine Emitterschicht wird vorzugsweise durch ein RGB-Copolymer gebildet. Ein RGB-Copolymer emittiert wenigstens rotes, grünes und blaues Licht. Die Emitterschicht kann eine Mischung aus rot, grün und blau emittierenden Komponenten sein oder ein Schichtsystem, das eine rotes Licht emittierende Schicht, eine grünes Licht emittierende Schicht und eine blaues Licht emittierende Schicht umfasst.An emitter layer is preferably formed by an RGB copolymer. An RGB copolymer emits at least red, green and blue light. The emitter layer can be a mixture of red, green and blue emitting components or a layer system which comprises a red light emitting layer, a green light emitting layer and a blue light emitting layer.
Da die Schicht, die strukturiert wird, also unterschiedlich dick hergestellt wird, photochemisch vernetzt werden kann, ist eine fotolithographische Strukturierung möglich. Das Grundprinzip der Photolithographie wird beispielsweise in der Druckschrift "
Im Unterschied zu den vorgenannten Druckschriften erfolgt die Strukturierung erfindungsgemäß nicht mit Hilfe einer Schwarz-Weiß Schattenmaske sondern mit Hilfe einer Graustufenmaske, also einer Maske, die an verschiedenen Stellen unterschiedliche Lichtdurchlässigkeit aufweist. Dies ermöglicht es, ortsaufgelöst unterschiedliche Belichtungsdosen anzuwenden. Die Graustufenmaske kann eine Glasplatte sein, die mit metallischen Schichten unterschiedlicher Schichtdicke beschichtet ist. Licht, welches auf die Glasplatte auftrifft, wird unterschiedlich stark absorbiert. Es kann sich aber beispielsweise auch um eine PET-Folie, also eine aus Polyethylenterephthalat bestehende Folie handeln, die unterschiedlich stark auf der Oberfläche geschwärzt ist und so Licht unterschiedlich gut durchlässt.In contrast to the aforementioned publications, the structuring according to the invention is not carried out with the aid of a black and white shadow mask but with the aid of a grayscale mask, that is to say a mask which has different light transmittance at different points. This makes it possible to use different exposure doses in a spatially resolved manner. The grayscale mask can be a glass plate that is coated with metallic layers of different layer thickness. Light that hits the glass plate is absorbed to different extents. However, it can also be a PET film, for example, a film consisting of polyethylene terephthalate, which is blackened to different extents on the surface and thus allows light to pass through differently.
Eine solche Schatten- bzw. Graustufenmaske wird auf die Schicht gelegt, die sich fotolithographisch strukturieren, also zum Beispiel photochemisch vernetzen lässt. Anschließend wird durch die Schattenmaske hindurch belichtet. Hierdurch wird erreicht, dass die photochemisch vernetzbare Schicht unterschiedlich stark vernetzt wird. Dies führt zu unterschiedlichen Schichtdicken bei der Schicht, die unterschiedlich stark vernetzt wurde. Durch das Vernetzen wird insbesondere erreicht, dass die Schicht in den vernetzten Bereichen unlöslich wird. Darüber hinaus bleibt die Schicht löslich. Regelmäßig wird nach dem Vernetzen ein Entwicklungsschritt durchgeführt, um die nicht vernetzten Bestandteile zu entfernen. Auf diese Weise wird in nur einem Arbeitsschritt die gewünschte Strukturierung erreicht. Eine mehrfache Ausrichtung - wie eingangs beschrieben - entfällt.Such a shadow or grayscale mask is placed on the layer, which can be structured photolithographically, for example, photochemically cross-linked. Then exposure is made through the shadow mask. This ensures that the photochemically crosslinkable layer is crosslinked to different degrees. This leads to different layer thicknesses in the layer that has been crosslinked to different degrees. Crosslinking in particular means that the layer becomes insoluble in the crosslinked regions. In addition, the layer remains soluble. After crosslinking, a development step is regularly carried out to remove the non-crosslinked components. In this way, the desired structuring is achieved in just one work step. A multiple alignment - as described at the beginning - is not necessary.
Soll die Leuchtdiode als Lichtquelle eingesetzt werden, so kann die zusätzliche Schicht elektrisch leitfähig sein. Soll das erfindungsgemäße Verfahren zur Herstellung von Displays dienen, so muss eine unterschiedliche Ansteuerung der Pixel möglich sein. Dies ist möglich, wenn die zusätzliche Schicht aus einem halbleitenden Material bzw. einem Material mit hinreichend geringer elektrischer Leitfähigkeit besteht.If the light-emitting diode is to be used as a light source, the additional layer can be electrically conductive. If the method according to the invention is to be used to produce displays, it must be possible to control the pixels differently. This is possible if the additional layer consists of a semiconducting material or a material with a sufficiently low electrical conductivity.
In einer Ausführungsform werden niedermolekulare, vernetzbare Lochleiter als Material der zusätzlichen Schicht vorgesehen, so zum Beispiel die nachfolgend gezeigte Struktur auf der Basis von Triarylamin mit Oxetan als reaktiver Gruppe:
Weitere Beispiele für geeignete Materialien ergeben sich aus den nachfolgenden Strukturen:
Weitere mögliche chemische Strukturen, die nicht zur Erfindung gehören, werden nachfolgend abgebildet.Further possible chemical structures that are not part of the invention are shown below.
Diese sind ebenfalls photochemisch vernetzbar, basieren aber nicht auf Oxetanen. Beispielsweise können Derivate der Zimtsäure verwendet werden, die durch eine [2+2]Cycloaddition vernetzen. Die chemischen Strukturen solcher Materialien sind im folgenden gezeigt:
Außerdem können Diene und Methacrylate zur photoinduzierten radikalischen Vernetzung verwendet werden. Die chemischen Strukturen solcher Materialien sind im folgenden gezeigt.
In einer anderen Ausführungsform der Erfindung werden vernetzbare, oligomere oder polymere Lochleitermaterialien als Material der zusätzlichen Schicht vorgesehen, da so Produktionsbedingungen im Vergleich zu den niedermolekularen, vernetzbaren Lochleitern vereinfacht werden können. Ursächlich dafür sind die guten Filmbildungseigenschaften von oligomeren oder polymeren Lochleitermaterialien.In another embodiment of the invention, crosslinkable, oligomeric or polymeric hole conductor materials are provided as the material of the additional layer, since production conditions can thus be simplified in comparison to the low molecular weight, crosslinkable hole conductors. The reason for this is the good film-forming properties of oligomeric or polymeric hole conductor materials.
Nachfolgend wird die chemische Struktur von oligomeren, vernetzbaren Lochleitern auf der Basis von Triarylamin mit Oxetan als reaktiver Gruppe gezeigt.
Nachfolgend wird die chemische Struktur von polymeren, vernetzbaren Lochleitern auf der Basis von Triarylamin mit Oxetan als reaktiver Gruppe gezeigt.
Mit der vorliegenden Erfindung lässt sich ein gewünschter Farbton sehr genau einstellen. Die Emitterschicht, die vorzugsweise weißes Licht erzeugt, kann aus Polymeren, Oligomeren, kleinen Molekülen, Metallkomplexen oder Mischungen davon bestehen.With the present invention, a desired color tone can be set very precisely. The emitter layer, which preferably generates white light, can consist of polymers, oligomers, small molecules, metal complexes or mixtures thereof.
Ein OLED-Aufbau der vorliegenden Erfindung umfasst insbesondere mehrere dünne, organische Schichten. Es kann oberhalb einer für Licht ganz oder teilweise transparenten Anode (z.B. Indium-Zinn-Oxid, ITO vom englischen Indium-Tin-Oxide, Silber, Aluminium, Gold, MoO3, Nickel, TiN), die sich auf einem transparenten Substrat, so zum Beispiel auf einer Glasscheibe oder einer transparenten Schicht aus Kunststoff wie Polyethylenterephthalat (PET) befindet, eine Lochleitungsschicht (hole transport layer = HTL) vorgesehen sein, die aus den vernetzbaren Materialien bestehen und unterschiedlich dick sein kann. Zwischen der Anode und der Lochleitungsschicht kann abhängig von der Herstellungsmethode eine zusätzliche Lochleitungsschicht aus PEDOT/PSS (Poly(3,4-ethylendioxythiophen)/Polystyrolsulfonat, Baytron P) vorgesehen sein, die zur Absenkung der Injektionsbarriere für Löcher dient und außerdem die Oberfläche glättet. Auf die Lochleitungsschicht kann eine Schicht aufgebracht sein, die entweder verschiedenfarbig emittierende Farbstoffe enthält (vorzugsweise ca. 0,05-10 %, aber auch niedrigerer oder höhere Konzentrationen sind möglich, so zum Beispiel 0,01 bis 80%) beispielsweise ein weiß-emittierendes Copolymer oder aus mehreren unterschiedliche "
Diese Schicht ist die Emitterschicht (emitter layer = EL). Diese kann beispielsweise aus Lösung oder im Hochvakuum abgeschieden werden. Auf diese kann eine Elektronenleitungsschicht (electron transport layer = ETL) aufgebracht sein. Zum Abschluss kann eine Kathode (bestehend aus einem Metall oder Legierung mit geringer Elektronenaustrittsarbeit (z.B. Calcium, Aluminium, Magnesium/Silber-Legierung) vorgesehen sein, die beispielsweise im Hochvakuum aufgedampft wurde. Zur Verringerung der Injektionsbarriere für Elektronen kann zwischen Kathode und ETL oder Emitter eine sehr dünne Schicht an z.B. LiF oder CsF zum Beispiel aufgedampft worden sein. Die Kathode kann abschließend mit Silber oder mit Aluminium beschichtet sein. Das transparente Substrat kann aber auch an die Kathode grenzen. Die Kathode oder die Anode ist in Abhängigkeit vom Bedarf für Licht ganz oder teilweise transparent oder vollständig reflektierend.This layer is the emitter layer (EL). This can be deposited, for example, from solution or in a high vacuum. An electron transport layer (ETL) can be applied to this. Finally, a cathode (consisting of a metal or alloy with a low electron work function (eg calcium, aluminum, magnesium / silver alloy) can be provided, which has been vapor-deposited for example in a high vacuum. To reduce the injection barrier for electrons, there can be between the cathode and the ETL or emitter For example, a very thin layer of LiF or CsF, for example, has been vapor-deposited. The cathode can finally be coated with silver or with aluminum. However, the transparent substrate can also adjoin the cathode The cathode or the anode is completely or partially transparent or completely reflective, depending on the need for light.
In einer Ausführungsform der Erfindung umfasst der OLED-Aufbau mehrere dünne, organische Schichten, Insbesondere wird ein nicht transparentes Substrat (beispielsweise ein Silizium-Wafer oder eine Metallfolie) verwendet. Auf dieses wird in Abhängigkeit vom Bedarf eine ganz oder teilweise reflektierende oder ganz oder teilweise transparente Elektrode (z.B. aus ITO. Silber, Aluminium, Gold, MoO3, Nickel, Calcium, Barium, LiF, CsF oder TiN) aufgebracht. Diese kann in Abhängigkeit vom Bedarf entweder als Anode oder als Kathode dienen. Zur Verbesserung der Lichtreflexion können zwischen die Anode und das Substrat weitere reflektierende Schichten (beispielsweise Bragg-Spiegel) eingefügt werden. Auf die organischen Schichten wird eine ganz oder teilweise transparente zweite Elektrode aufgebracht (z B. aus ITO, Silber, Aluminium, Gold, MoO3, Nickel, Calcium, Barium, LiF, CsF oder TiN). Auf diese Elektrode können in Abhängigkeit vom Bedarf wiederum zusätzliche reflektierende Schichten (beispielsweise Bragg-Spiegel) aufgebracht werden. In dieser Ausführungsform wird das Licht nicht durch das Substrat, sondern durch die obere Elektrode (und die ggf. darüber liegenden, zusätzlichen, reflektierenden Schichten) abgestrahlt.In one embodiment of the invention, the OLED structure comprises a plurality of thin, organic layers. In particular, a non-transparent substrate (for example a silicon wafer or a metal foil) is used. Depending on the requirements, a completely or partially reflective or completely or partially transparent electrode (for example made of ITO. Silver, aluminum, gold, MoO 3 , nickel, calcium, barium, LiF, CsF or TiN) is applied to this. Depending on requirements, this can serve either as an anode or as a cathode. To improve the light reflection, further reflecting layers (for example Bragg mirrors) can be inserted between the anode and the substrate. A completely or partially transparent second electrode is applied to the organic layers (e.g. made of ITO, silver, aluminum, gold, MoO 3 , nickel, calcium, barium, LiF, CsF or TiN). Depending on requirements, additional reflective layers (for example Bragg mirrors) can be applied to this electrode. In this embodiment, the light is not radiated through the substrate, but through the upper electrode (and the additional, reflective layers which may lie above it).
Der Erfindung liegt der Gedanke zugrunde, eine erste und zweite spiegelnde Schicht vorzusehen, die zugleich Elektrodenfunktionen übernehmen können, um das Bauteil geeignet ansteuern zu können. Zwischen den spiegelnden Schichten befindet sich eine Schicht, mit der insbesondere weißes Licht erzeugt wird. Zwischen den spiegelnden Schichten befindet sich eine Schicht, die vorgesehen wird, um geeignet strukturieren zu können. Es können darüber hinaus weitere Schichten innerhalb oder außerhalb des verlustbehafteten optischen Resonators vorgesehen werden. Wichtig ist lediglich, dass es eine Schicht im optischen Resonator gibt, die in nur einem Arbeitsschritt strukturiert worden ist. Die Reihenfolge der Aufbringung der gewünschten Schichten ist letzten Endes beliebig. Es kann also beispielsweise zuerst die strukturierte Schicht aufgebracht werden, dann eine Schicht, die weißes Licht emittiert und ggf. weitere, beispielsweise aus dem Stand der Technik bekannte Funktionsschichten.The invention is based on the idea of providing a first and a second reflective layer, which can simultaneously take over electrode functions in order to be able to control the component in a suitable manner. There is a layer between the reflecting layers with which white light in particular is generated. Between the reflective layers is a layer that is provided in order to be able to structure appropriately. In addition, further layers can be provided inside or outside the lossy optical resonator. It is only important that there is a layer in the optical resonator that has been structured in just one work step. The order in which the desired layers are applied is ultimately arbitrary. So it can for example, the structured layer is applied first, then a layer which emits white light and, if appropriate, further functional layers, for example known from the prior art.
Mit einem solchen Aufbau kann der mögliche Farbraum verbessert ausgenutzt bzw. erzeugt werden. Brillantere Farben und zwar nicht nur im Vergleich zur TFT- oder LCD-Technik, sondern auch im Vergleich zu anderen OLED-Beleuchtungselementen oder OLED-Displays sind daher möglich. Im Fall einer Weißlicht-Beleuchtung kann ein natürlicher wirkendes Spektrum erzeugt werden.With such a structure, the possible color space can be exploited or generated in an improved manner. Brilliant colors, not only in comparison to TFT or LCD technology, but also in comparison to other OLED lighting elements or OLED displays are therefore possible. In the case of white light lighting, a more natural-looking spectrum can be created.
Wie aus dem Stand der Technik bekannt, kann ein Substrat, beispielsweise ein CMOS-Chip, bereits eine Elektronik umfassen, mit der im Fall eines Displays die Pixels entsprechend angesteuert werden. Die Strukturierung der Schicht mit den unterschiedlichen Schichtdicken muss dann so erfolgen, dass die entsprechenden Schichtdicken bzw. Pixel relativ zur Elektronik geeignet ausgerichtet werden. Es ist also im Fall eines Displays lediglich ein Ausrichtungsschritt erforderlich. Die weiteren aus dem Stand der Technik bekannten, eingangs genannten Ausrichtungsschritte entfallen.As is known from the prior art, a substrate, for example a CMOS chip, can already comprise electronics with which the pixels are controlled accordingly in the case of a display. The structuring of the layer with the different layer thicknesses must then take place in such a way that the corresponding layer thicknesses or pixels are suitably aligned relative to the electronics. In the case of a display, only one alignment step is required. The further alignment steps known at the outset, which are known from the prior art, are dispensed with.
In einer Ausführungsform der Erfindung umfasst die strukturierte Schicht der Leuchtdiode nicht lediglich drei unterschiedliche Dicken, um drei Grundfarben darzustellen, sondern wesentlich mehr unterschiedliche Dicken. Eine für die Herstellung eingesetzte Graustufenmaske weist dann nicht lediglich drei Graustufen zur Bereitstellung von drei Spektralfarben auf, sondern wesentlich mehr Farbniveaus, so beispielsweise zwanzig Abstufungen. Indem so viele verschiedene Farben von der Leuchtdiode emittiert werden, gelingt es sehr viel besser, eine gewünschten Lichtfarbe zu erzeugen, so zum Beispiel das Sonnenlicht nachzuahmen.In one embodiment of the invention, the structured layer of the light-emitting diode not only comprises three different thicknesses in order to represent three primary colors, but also considerably more different thicknesses. A grayscale mask used for the production then not only has three grayscale to provide three spectral colors, but also significantly more color levels, for example twenty gradations. By emitting so many different colors from the light-emitting diode, it is much easier to generate a desired light color, for example imitating sunlight.
Aus Praktikabilitätsgründen können gemäß Stand der Technik nicht derart viele Abstufungen vorgesehen werden, die erforderlich sind, um perfektes weißes Licht zu erzeugen, also Licht, das eine gute Farbwiedergabe gewährleistet. Mit der vorliegenden Erfindung gelingt dies schnell und einfach, da eine Strukturierung in einem Arbeitsschritt bereitgestellt werden kann. Durch die vorliegende Erfindung wird es daher möglich, Beleuchtungskörper bereitzustellen, mit denen weißes Licht besonders gut nachgebildet wird.For reasons of practicability, according to the prior art it is not possible to provide as many gradations as are required to produce perfect white light, that is to say light which has good color rendering guaranteed. This is achieved quickly and easily with the present invention, since structuring can be provided in one work step. The present invention therefore makes it possible to provide lighting fixtures with which white light is reproduced particularly well.
Indem eine Schicht benötigt wird, die lediglich weißes Licht erzeugt, wird das Problem vermieden, dass sich unerwünschte Alterungserscheinungen aufgrund von unterschiedlicher Ansteuerung bemerkbar machen. Insofern gibt es einen Vorteil im Vergleich zu einem solchen Stand der Technik, bei dem verschiedenfarbig emittierende Pixel unterschiedlich und unterschiedlich lang angesteuert werden und die damit nachteilhaft unterschiedlich schnell altern.By requiring a layer that only generates white light, the problem is avoided that undesired signs of aging are noticeable due to different activation. In this respect, there is an advantage compared to such a prior art, in which different-colored emitting pixels are driven differently and for different lengths and which therefore disadvantageously age at different speeds.
In einer Ausführungsform der Erfindung nimmt die Dicke der strukturierten Schicht keilförmig zu bzw. ab. Der Abstand zwischen den beiden spiegelnden Flächen des Resonators verändert sich also keilförmig. Eine solche organische Leuchtdiode vermag das gesamte Farbspektrum darzustellen, wobei die einzelnen Spektralfarben räumlich geordnet aufgelöst sind.In one embodiment of the invention, the thickness of the structured layer increases or decreases in a wedge shape. The distance between the two reflecting surfaces of the resonator thus changes in a wedge shape. Such an organic light-emitting diode is able to represent the entire color spectrum, the individual spectral colors being spatially resolved.
in einer Ausführungsform der Erfindung sind unterschiedliche Bereiche des vorgenannten Keils durch unterschiedliche Elektroden kontaktiert. Es ist so eine getrennte Adressierung der verschiedenen Spektrallinienkomponenten möglich.In one embodiment of the invention, different areas of the aforementioned wedge are contacted by different electrodes. This enables separate addressing of the different spectral line components.
In einer Ausführungsform ist die erfindungsgemäße Leuchtdiode mit der keilförmigen Struktur Teil eines Spektrometers, also ein Bauteil, mit dem der Spektralbereich des Lichts räumlich nebeneinander abgebildet wird. Durch die keilförmige Struktur kann der gesamte Spektralbereich sehr gut wiedergegeben werden. Eine keilförmige Struktur im Sinne der Erfindung steigt von einer minimalen Dicke dmin kontinuierlich an, bis eine maximale Dicke dmax der Struktur erreicht ist. Ein ähnliches Ergebnis kann erzielt werden, wenn anstelle eines kontinuierlichen Anstiegs der Anstieg treppenförmig erfolgt und die Treppe eine große Zahl an Stufen mit geringer Stufenhöhe umfasst. Je geringer die Stufenhöhe einer jeden Stufe ist, um so mehr wird ein Ergebnis erzielt, welches dem kontinuierlichen Anstieg entspricht. Zu bevorzugen ist allerdings der kontinuierliche Anstieg im Vergleich zu einem treppenförmigen Anstieg.In one embodiment, the light-emitting diode according to the invention with the wedge-shaped structure is part of a spectrometer, that is to say a component with which the spectral range of the light is imaged spatially next to one another. The entire spectral range can be reproduced very well thanks to the wedge-shaped structure. A wedge-shaped structure in the sense of the invention increases continuously from a minimum thickness d min until a maximum thickness d max of the structure is reached. A similar result can be achieved if instead of a continuous increase the increase is staircase-shaped and the staircase comprises a large number of steps with a low step height. The lower the step height of each step, the more a result is achieved which corresponds to the continuous increase. However, preference is given to the continuous increase compared to a step-like increase.
In einer Ausführungsform der Erfindung umfasst die erfindungsgemäße Leuchtdiode eine ansteigende und/ oder abfallende Struktur innerhalb des verlustbehafteten Resonators und wird als Beleuchtung eingesetzt. Die Beleuchtung strahlt verschiedene Lichtfarben aus, die voneinander räumlich getrennt sind.In one embodiment of the invention, the light-emitting diode according to the invention comprises a rising and / or falling structure within the lossy resonator and is used as lighting. The lighting emits different light colors that are spatially separated from each other.
Ein Bauteil, welches räumlich geordnet Spektralfarben wiederzugeben vermag, kann auch lediglich näherungsweise keilförmig im vorgenannten Sinne, so zum Beispiel treppenförmig sein. Allgemein ist ein solches Bauteil geeignet, um hieraus monochromatische integrierte Lichtquellen für die Sensorik zu fertigen.A component that is able to reproduce spatially ordered spectral colors can also only be approximately wedge-shaped in the aforementioned sense, for example staircase-shaped. Such a component is generally suitable for producing monochromatic integrated light sources for the sensors.
Die Dicken der einzelnen Schichten sowie der Dickenbereich des Keils beginnend mit einer minimalen Dicke dmin = 0 und endend mit einer maximalen Dicke dmax = 60 nm sind so gewählt, dass sich an der dünnsten Stelle des Keils für blaues Licht eine Resonanz ergibt und an der dicksten Stelle für rotes Licht. Soll ein anderer Spektralbereich abgedeckt werden, sind die genannten Dicken entsprechend anders zu wählen. Allein durch Wahl der Dicken kann also bereits ein gewünschter Spektralbereich eingestellt werden.The thicknesses of the individual layers and the thickness range of the wedge starting with a minimum thickness d min = 0 and ending with a maximum thickness d max = 60 nm are chosen so that there is resonance at the thinnest point of the wedge for blue light and on the thickest spot for red light. If a different spectral range is to be covered, the thicknesses mentioned should be chosen accordingly. A desired spectral range can therefore already be set simply by selecting the thicknesses.
Mit der in
Die spiegelnden Schichten in dem in
- 17: Teilweise transparenter Metall-Spiegel, z.B. Ag;
- 18: Elektroneninjektions-Schicht, z.B. Ba ;
- 19: Emitterschicht
- 20: vernetzter Halbleiter;
- 21: Transparentes Oxid, z.B. MoO3;
- 22: Pixilierter Metall-Spiegel, z.B. Al;
- 23: Substrat.
- 17: Partially transparent metal mirror, for example Ag;
- 18: electron injection layer, for example Ba;
- 19: Emitter layer
- 20: cross-linked semiconductor;
- 21: transparent oxide, for example MoO 3 ;
- 22: Pixilized metal mirror, for example Al;
- 23: substrate.
Claims (10)
- Organic light-emitting diode having a lossy optical resonator and an emitter layer (5) in the optical resonator which can generate light by recombination of electrons with holes, the light-emitting diode comprising a photolithographically patternable material arranged within the resonator, the material being in particular photochemically crosslinkable or a photoresist which becomes soluble by exposure to light, wherein the photolithographically patternable material is present in the form of a layer (4) with different layer thicknesses so that a plurality of colours can be produced, the emitter layer (5) being adapted such that it is capable of emitting white light, characterised in that the layer (4) with different layer thicknesses is made of a material with a structure based on triarylamine with oxetane as reactive group and is a hole-conducting layer (4) in addition to the emitter layer (5)
- Light-emitting diode according to the preceding claim, wherein the emitter layer is or comprises an RGB copolymer, a mixture of red, green and blue emitting components or a layer system comprising red, green and blue emitting layers.
- Light-emitting diode according to one of the preceding claims, in which fully or partially reflecting layers (2, 7) of the optical resonator are made of silver, aluminium or gold or are implemented as Bragg mirrors.
- Light-emitting diode according to one of the preceding claims, in which an electron or hole conducting layer (4) is made of a photochemically crosslinkable material and said layer is of different thickness.
- Light-emitting diode according to one of the preceding claims with a layer (4) within a lossy optical resonator, the layer thickness of which changes according to a wedge-shaped or step-shaped course.
- Light-emitting diode according to one of the preceding claims with a layer within a lossy optical resonator, the layer of which comprises more than three different layer thicknesses, preferably at least six different, particularly preferably ten different layer thicknesses.
- Display with light-emitting diodes according to any of the preceding claims with a layer comprising three different thicknesses.
- Lighting with light-emitting diodes according to one of the preceding claims with a layer (4) inside a lossy optical resonator, the layer thickness of which increases and/or decreases continuously.
- Method for producing a light-emitting diode according to one of the preceding claims, which comprises applying above a reflecting layer (2) of a lossy optical resonator an emitter layer (5) which is adapted such that it is capable of emitting white light, and an electrically conductive or electrically semiconductive layer (4) of photochemically crosslinkable material, and adjusting different layer thicknesses of the electrically conductive or electrically semiconductive layer (4) by a photolithographic process, and applying a second reflective layer (7) of the lossy optical resonator above said layers (4, 5), characterised in that the layer (4) with different layer thicknesses is made of a material with a structure based on triarylamine with oxetane as reactive group and is a hole-conducting layer (4) in addition to the emitter layer (5).
- Method according to the preceding claim in which the lithographic process is carried out by placing a grey scale mask on the photochemically crosslinkable material, exposing the photochemically crosslinkable material through the grey scale mask and subsequently removing the non-crosslinked areas.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE102008054435A DE102008054435A1 (en) | 2008-12-09 | 2008-12-09 | Organic light emitting diode with optical resonator and manufacturing method |
PCT/EP2009/063422 WO2010066488A1 (en) | 2008-12-09 | 2009-10-14 | Organic light-emitting diode having optical resonator in addition to production method |
Publications (2)
Publication Number | Publication Date |
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EP2356711A1 EP2356711A1 (en) | 2011-08-17 |
EP2356711B1 true EP2356711B1 (en) | 2020-06-10 |
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EP09784011.0A Active EP2356711B1 (en) | 2008-12-09 | 2009-10-14 | Organic light-emitting diode having optical resonator in addition to production method |
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US (1) | US8878164B2 (en) |
EP (1) | EP2356711B1 (en) |
JP (1) | JP5603346B2 (en) |
KR (1) | KR101596875B1 (en) |
CN (1) | CN102246329A (en) |
DE (1) | DE102008054435A1 (en) |
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WO (1) | WO2010066488A1 (en) |
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CN102246329A (en) | 2011-11-16 |
DE102008054435A1 (en) | 2010-06-10 |
JP2012511796A (en) | 2012-05-24 |
US20110303905A1 (en) | 2011-12-15 |
KR101596875B1 (en) | 2016-02-23 |
WO2010066488A1 (en) | 2010-06-17 |
JP5603346B2 (en) | 2014-10-08 |
US8878164B2 (en) | 2014-11-04 |
KR20110110151A (en) | 2011-10-06 |
EP2356711A1 (en) | 2011-08-17 |
SG171416A1 (en) | 2011-07-28 |
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