EP2339899A1 - Kompakte Quelle zur Erzeugung von geladenen Teilchen - Google Patents

Kompakte Quelle zur Erzeugung von geladenen Teilchen Download PDF

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Publication number
EP2339899A1
EP2339899A1 EP10195945A EP10195945A EP2339899A1 EP 2339899 A1 EP2339899 A1 EP 2339899A1 EP 10195945 A EP10195945 A EP 10195945A EP 10195945 A EP10195945 A EP 10195945A EP 2339899 A1 EP2339899 A1 EP 2339899A1
Authority
EP
European Patent Office
Prior art keywords
cathode
power
accelerator
generating
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10195945A
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English (en)
French (fr)
Other versions
EP2339899B1 (de
Inventor
Jean-Pierre Brasile
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thales SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales SA filed Critical Thales SA
Priority to PL10195945T priority Critical patent/PL2339899T3/pl
Publication of EP2339899A1 publication Critical patent/EP2339899A1/de
Application granted granted Critical
Publication of EP2339899B1 publication Critical patent/EP2339899B1/de
Not-in-force legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/02—Circuits or systems for supplying or feeding radio-frequency energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
    • H01J25/02—Tubes with electron stream modulated in velocity or density in a modulator zone and thereafter giving up energy in an inducing zone, the zones being associated with one or more resonators
    • H01J25/10—Klystrons, i.e. tubes having two or more resonators, without reflection of the electron stream, and in which the stream is modulated mainly by velocity in the zone of the input resonator
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H15/00—Methods or devices for acceleration of charged particles not otherwise provided for, e.g. wakefield accelerators
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/22—Details of linear accelerators, e.g. drift tubes

Definitions

  • the object of the present invention is to provide a device and method for providing a compact electron source.
  • Linear particle accelerators can use a radiofrequency electromagnetic accelerating field. These accelerators work with any type of charged particles but have in common the need to provide the accelerator with very high radiofrequency power generally from an electron tube such as a klystron or magnetron. This power tube operates in pulse mode, powered by rectangular voltage pulses of up to several hundred kV. The flat of the pulse is indeed necessary to avoid a power drift of the tube or a change of mode.
  • the idea of the present invention is based in particular on the integration in a common enclosure and evacuated, a radiofrequency source and a particle accelerator part, with a common impulse supply between the radiofrequency part and the part accelerator to provide the high voltage RF power needed for the accelerator.
  • a cathode may be a thermionic cathode fed by a thermal queue, or a cathode based on nanotubes
  • the vacuum system is, for example, composed of a first pump for the primary vacuum and a second pump for the vacuum secondary, the product vacuum being common for the two parts disposed in the enclosure.
  • the device according to the invention is, for example, used in a system comprising a guide disposed at the outlet of the cavity structure making it possible to direct the beam produced on a product or a part to be treated and in that it comprises a module of deviation of the particle beam and a collector of said particles.
  • the device can also be used for the generation of H + ions, protons.
  • the figure 1 describes an example of a compact source of electrons according to the invention.
  • the device according to the invention comprises an enclosure 1 in connection with a vacuum system composed for example of a first pump 2 1 making the primary vacuum and a second pump 2 2 for the secondary vacuum.
  • the evacuated chamber 1 is connected to ground or earth by a suitable device 3.
  • a modulator 4 which supplies the high voltage to the device.
  • An insulating part 5 carries out the separation between the high voltage modulator 4 and the grounding of the enclosure.
  • the enclosure also comprises a cooling device with temperature control not shown for reasons of simplification.
  • a cathode support 6 will receive a first cathode 7 used for the accelerator portion and a second cathode 8 forming part of the tube.
  • an accelerating structure 9 is constituted, for example, by a set of cavities 9i. arranged in series with each other. Other devices such as sliding space, focusing magnet may also be necessary for the proper conditioning of electrons so that they can be accelerated optimally.
  • This structure will receive an RF power to allow the acceleration of electrons torn from the second cathode 8.
  • the electrons propagate along an axis A 1 .
  • a guide 10 makes it possible to bring the electron beam thus created to a target or an object 11.
  • the electron beam after interaction with this object 11 is, for example, deflected by an appropriate means 12 and collected. by a collector 13 having a structure known to those skilled in the art.
  • the high voltage RF supplied to the structure as described below will accelerate the electrons in the cavities.
  • a module 14 supplied with high voltage is disposed between the cathode 7 and the inlet E 9 of the cavity to improve the quality of the beam.
  • This module has the particular function of avoiding a burst of the electron beam produced by the cathode 7, it pre-accelerates the electrons before they enter the accelerating cavities.
  • the electron beam is subjected to strong acceleration gradients at the gun to bring it to relativistic energies where the effects of space charges are mitigated.
  • the portion of the tube comprises a cathode 8 which supplies the electrons which will pass, in this example of implementation in a first cavity 20, which produces a first modulation of velocity, the dispersion of velocity of the electrons being translated after the space of slip by increasing the intensity of the beam due to the bundling of electrons.
  • These electron packets propagate along an axis A 2 and will interact with one (or more) extraction cavity 21, whose (or positions) are optimized for maximum power extraction, the cavity acting as an excited resonator by successive packets of electrons q.
  • the cavity 21 will oscillate with the rhythm of the passage of the packets electron.
  • the resonant cavity produces the HF power that increases as the energy flows from the electron packets. This HF power is in phase with the oscillation created at the beginning.
  • Part of this HF power will supply the cavities arranged in series via a suitable physical link 23.
  • the power of the electron beam, not used during the interaction can be collected by a collection device 24.
  • a collection device 24 Such a device can if necessary use the technique of depressed collectors that is to say a collector made of several sections carried at different voltages to improve the performance of the assembly.
  • An example of implementation may be to use a klystron type structure for the integrated radiofrequency tube.
  • the principle of klystron is to transform a modulation of the electron beam velocity obtained by a modulation cavity into an intensity modulation which allows the extraction cavity to resonate through a slip space which may be in some cases long for very high voltages because fast electrons take longer to catch up to the electrons of lower speeds, the difference in speed becoming low for highly energetic electrons.
  • the production of the HF power can be obtained by means other than the electron speed modulation proposed in nominal operation of the device.
  • the cavities may be replaced by a flap f, 3f to directly obtain the electron packets for the RF source, a continuous post-acceleration by applying a continuous DC field of the packed packets sufficient before the extraction.
  • the first and second cathodes 7, 8 may consist of a thermionic cathode activated by a thermal filament.
  • the cathodes 7, 8 may also be cathodes based on nanotubes which have the particular advantage of being very compact and provide significant current densities.
  • the various elements constituting the invention are connected via means suitable for vacuum technologies.
  • the introduction of the elements may use adapted flanges and valves for disconnection of sections to simplify maintenance for example.
  • the high voltage transition capable of ensuring the air / vacuum transition and maintaining a good impulse isolation at several hundred kV also becomes common for the radio frequency tube and for the accelerator.
  • the invention described above can be applied generally for the generation of charged or charged particles.
  • Protons are for example generated from a plasma-based device, such as a magnetron.
  • the H + ions can be generated with a magnetron consisting of a cylindrical central cathode surrounded by an anode.
  • the discharge voltage is generally greater than 150V and the drain current is of the order of 40 A.
  • a magnetic field of the order of 0.2 Tesla is parallel to the axis of the cathode.
  • the hydrogen gas used is introduced by a pulsed valve.
  • the device according to the invention offers a compact particle accelerator in which the pulsed power supply is common between the radiofrequency tube part integrated in the linear accelerator to provide the RF power and the gun of the accelerator since both require voltages of several hundred kV to operate with the best performance.
  • the device according to the invention has the particular advantage of not using an exit window usually used when the tube and the accelerating part are disjoint.
  • vacuum is common for the integrated radiofrequency tube and the particle accelerator.
  • cooling circuits and, where appropriate, focusing structures which may also be common.
  • accelerator vacuum technologies use of flanges to connect the various parts of the system instead of the sealed technologies of conventional tubes
  • the simplification of the architecture goes in the direction of the reduction of the costs and towards a better compactness of the whole.
  • the RF cavity structures being naturally tuned to the same frequency, assuming structures of the same type for both functions (tube and accelerator) and the same cooling circuit, the drifts in temperature and therefore in frequency, are substantially identical. This makes it possible to maintain proper operation of the assembly without requiring too precise control of the temperature.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
EP10195945.0A 2009-12-22 2010-12-20 Kompakte Quelle zur Erzeugung von geladenen Teilchen Not-in-force EP2339899B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PL10195945T PL2339899T3 (pl) 2009-12-22 2010-12-20 Kompaktowe źródło generujące cząstki będące nośnikiem ładunku

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0906261A FR2954666B1 (fr) 2009-12-22 2009-12-22 Source compacte de generation de particules portant une charge.

Publications (2)

Publication Number Publication Date
EP2339899A1 true EP2339899A1 (de) 2011-06-29
EP2339899B1 EP2339899B1 (de) 2015-12-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP10195945.0A Not-in-force EP2339899B1 (de) 2009-12-22 2010-12-20 Kompakte Quelle zur Erzeugung von geladenen Teilchen

Country Status (4)

Country Link
EP (1) EP2339899B1 (de)
DK (1) DK2339899T3 (de)
FR (1) FR2954666B1 (de)
PL (1) PL2339899T3 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210307152A1 (en) * 2020-03-24 2021-09-30 Applied Materials, Inc. Controller and control techniques for linear accelerator and ion implanter having linear accelarator

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4027193A (en) * 1974-03-04 1977-05-31 Atomic Energy Of Canada Limited Klystron-resonant cavity accelerator system
US4118653A (en) * 1976-12-22 1978-10-03 Varian Associates, Inc. Variable energy highly efficient linear accelerator
US4956219A (en) * 1986-03-25 1990-09-11 Universite Catholique De Louvain method of producing perforations in a solid material in sheet form, an irradiation device for working the method, and the resulting perforated material
US5506473A (en) 1990-06-15 1996-04-09 Thomson-Csf Electron gun for providing electrons grouped in short pulses
US6465957B1 (en) * 2001-05-25 2002-10-15 Siemens Medical Solutions Usa, Inc. Standing wave linear accelerator with integral prebunching section
US6809325B2 (en) * 2001-02-05 2004-10-26 Gesellschaft Fuer Schwerionenforschung Mbh Apparatus for generating and selecting ions used in a heavy ion cancer therapy facility
US20080224064A1 (en) * 2007-03-14 2008-09-18 Hitachi High-Technologies Corporation Charged particle accelerator
US20090284126A1 (en) * 2008-05-15 2009-11-19 Protz Jonathan Michael Vacuum Electronic Devices and Cavities and Fabrication Methods Therefor

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4027193A (en) * 1974-03-04 1977-05-31 Atomic Energy Of Canada Limited Klystron-resonant cavity accelerator system
US4118653A (en) * 1976-12-22 1978-10-03 Varian Associates, Inc. Variable energy highly efficient linear accelerator
US4956219A (en) * 1986-03-25 1990-09-11 Universite Catholique De Louvain method of producing perforations in a solid material in sheet form, an irradiation device for working the method, and the resulting perforated material
US4956219B1 (en) * 1986-03-25 1993-11-02 Method of producing perforations in a solid material in sheet form,an irradiation device for working the method,and the resulting perforated material
US5506473A (en) 1990-06-15 1996-04-09 Thomson-Csf Electron gun for providing electrons grouped in short pulses
US6809325B2 (en) * 2001-02-05 2004-10-26 Gesellschaft Fuer Schwerionenforschung Mbh Apparatus for generating and selecting ions used in a heavy ion cancer therapy facility
US6465957B1 (en) * 2001-05-25 2002-10-15 Siemens Medical Solutions Usa, Inc. Standing wave linear accelerator with integral prebunching section
US20080224064A1 (en) * 2007-03-14 2008-09-18 Hitachi High-Technologies Corporation Charged particle accelerator
US20090284126A1 (en) * 2008-05-15 2009-11-19 Protz Jonathan Michael Vacuum Electronic Devices and Cavities and Fabrication Methods Therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210307152A1 (en) * 2020-03-24 2021-09-30 Applied Materials, Inc. Controller and control techniques for linear accelerator and ion implanter having linear accelarator
US11576252B2 (en) * 2020-03-24 2023-02-07 Applied Materials, Inc. Controller and control techniques for linear accelerator and ion implanter having linear accelerator
US12193140B2 (en) 2020-03-24 2025-01-07 Applied Materials, Inc. Controller and control techniques for linear accelerator and ion implanter having linear accelarator

Also Published As

Publication number Publication date
FR2954666B1 (fr) 2012-07-27
DK2339899T3 (en) 2016-03-07
FR2954666A1 (fr) 2011-06-24
EP2339899B1 (de) 2015-12-16
PL2339899T3 (pl) 2016-04-29

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