EP2269425B1 - Vorrichtung zur erzeugung eines atmosphärendruck-plasmas - Google Patents

Vorrichtung zur erzeugung eines atmosphärendruck-plasmas Download PDF

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Publication number
EP2269425B1
EP2269425B1 EP09731651.7A EP09731651A EP2269425B1 EP 2269425 B1 EP2269425 B1 EP 2269425B1 EP 09731651 A EP09731651 A EP 09731651A EP 2269425 B1 EP2269425 B1 EP 2269425B1
Authority
EP
European Patent Office
Prior art keywords
electrode
plasma
cathode
region
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP09731651.7A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP2269425A1 (de
Inventor
Michael Bisges
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maschinenfabrik Reinhausen GmbH
Scheubeck GmbH and Co
Original Assignee
Maschinenfabrik Reinhausen GmbH
Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG
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Filing date
Publication date
Application filed by Maschinenfabrik Reinhausen GmbH, Maschinenfabrik Reinhausen Gebrueder Scheubeck GmbH and Co KG filed Critical Maschinenfabrik Reinhausen GmbH
Publication of EP2269425A1 publication Critical patent/EP2269425A1/de
Application granted granted Critical
Publication of EP2269425B1 publication Critical patent/EP2269425B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2475—Generating plasma using acoustic pressure discharges
    • H05H1/2481—Generating plasma using acoustic pressure discharges the plasma being activated using piezoelectric actuators

Definitions

  • the invention relates to a device for generating an atmospheric pressure plasma.
  • a device for generating an atmospheric pressure plasma is from the EP 0761415 A1 already known.
  • a collimated beam of a reactive medium is generated by a plasma discharge and a working gas.
  • the electrical discharge takes place in the form of an arc discharge, which is operated by means of a high-frequency AC voltage.
  • an arc extends directly between the two electrodes of the device: a arranged in a nozzle tube centric pin electrode on the one hand and the counter electrode acting as the mouth of the nozzle tube on the other.
  • This known device has a number of disadvantages. First of all, a high ignition voltage of several kV is required; the operating voltage also moves in the kV range. The resulting arc discharge - a direct arc so - leads to a high heat generation and a sputtering of the electrodes. Other disadvantages are the high cost and size of this device.
  • the object of the invention is to provide a device for generating an atmospheric pressure plasma, which does not have these disadvantages and in particular can also be operated with low voltage.
  • the respective subclaims relate to particularly advantageous developments of the invention.
  • the general idea of the invention is to use a piezoelectric element with primary and secondary region for the generation of the plasma.
  • the control of the primary region of the piezoelectric element with low voltage and high frequency occurs.
  • the plasma is ignited by the field superelevation on the surface of the secondary region of the piezoelectric element.
  • the plasma guidance is effected by counterelectrode and a gas flow. Due to the gas flow, the plasma exits the device.
  • a piezo element for generating a plasma is already in the publication Teranishi, Suzuki, Itoh: A novel generation method of dielectric barrier discharge and ozone production using a piezoelectric transformer, Japanese Journal of Applied Physics, 2004, pp. 6733-6739 , known.
  • the piezoelectric element serves to generate a plasma discharge at the surface of the secondary region.
  • a counter electrode is provided;
  • an arc discharge is generated according to the invention and not just, as in the prior art, a planar plasma on the surface of the secondary region of the piezoelectric element.
  • the cathode is not designed as a passive element, but actively transforms an applied low voltage into a high voltage.
  • the device according to the invention has a number of advantages over the known solutions. First of all, it requires only a low operating voltage in the range of preferably 5... 230 V. Furthermore, it is characterized by a low plasma temperature; a sputtering and burning of the cathode are thus almost impossible. Finally, the device according to the invention is inexpensive to produce, since no high-voltage source is required and also has a small size.
  • FIGS. 1a) and 1b is a rod-shaped piezoelectric element 1 with a contact electrode 2 and a further contact electrode 4 on the back of the primary region and an adjoining secondary region 3 is shown.
  • FIG. 2 shows a first device according to the invention 10.
  • the acting as a cathode piezoelectric element has on its primary side, as already described, a contact electrode 11 and on the back, the opposite side, therefore, a further contact electrode 12, which is not visible in this illustration.
  • the secondary region 13 of the piezoelectric element in which a surface discharge is formed in a manner known per se.
  • the piezoelement is connected via the contact electrodes 11, 12 to a low-voltage source 22.
  • This low-voltage source 22 supplies a high-frequency low voltage in the range of preferably 5... 200 V.
  • the device Due to the applied low voltage in the primary region of the piezoelectric element, a high voltage is generated in its secondary region 13; in the sequence, the described surface discharge on the surface of the secondary side 13 is formed. Also shown is the resulting plasma discharge 14. Between the secondary region 13, which acts as an electrode, and the counter electrode 15, which is at ground potential 19, an arc discharge is formed , Furthermore, the device has an outlet nozzle 16 with an outlet opening 17, through which the plasma outlet 18 takes place. On the opposite side of the plasma outlet 18 is a supply 24 for the working gas, while the gas flow 25 is indicated by the arrow. Also shown is the supply line 23 from the low-voltage source 22 to the piezoelectric element.
  • the plasma gas which is formed in the plasma discharge 14 in the form of an arc discharge, blown out of the outlet nozzle 16 in the form of a jet-shaped plasma outlet 18.
  • the plasma-generating device is enclosed by a housing 20 with an insulating housing wall 21.
  • FIG. 3 a further embodiment of the device according to the invention is shown.
  • a plasma generator 10 is provided with a tubular piezoelectric element 30 as a cathode for generating a plasma discharge 34.
  • the piezoelectric element has a secondary region 32, on the tubular inner surface of which the plasma discharge is produced.
  • an arc discharge which is blown out in the form of a plasma jet 35 with the gas flow.
  • FIG. 4 shows a cascading (multiple) arrangement 40 of a plurality of plasma generators 41 with piezoelectric element as a cathode electrode.
  • the individual plasma generator 41 are supplied with a working gas via a central gas supply 44.
  • a plasma jet 43 exits through the nozzles, the elements being arranged in a particularly advantageous manner such that a uniform plasma distribution 45 results on a substrate 42 to be treated.
  • FIG. 5a shows a plan view of such a cascading arrangement of plasma generators 50 with piezo elements.
  • the individual plasma generators these are several devices according to the invention, are arranged side by side and one behind the other, in order to enable as full as possible a plasma treatment.
  • FIG. 5b shows a side view of another cascading arrangement of plasma generators with piezo elements 51.
  • the plasma is due to an arc discharge between two electrodes, i. H. a spark gap is formed.
  • the secondary region of the piezoceramic each forms the one electrode; namely, the cathode, the counter electrode is at ground potential.
  • the cathode is not, as known from the prior art, formed as a passive element, such as a rod-shaped, metallic electrode in the center of a tube, but represents an active element in which a (applied to the primary area) low voltage in a high voltage (in the secondary area) is transformed.
  • the device according to the invention has for the first time succeeded in combining the advantages of an arc discharge and, as a consequence of a blown-out plasma jet, with the advantages of a piezo element with primary and secondary regions.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Acoustics & Sound (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
EP09731651.7A 2008-04-15 2009-03-10 Vorrichtung zur erzeugung eines atmosphärendruck-plasmas Not-in-force EP2269425B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008018827A DE102008018827B4 (de) 2008-04-15 2008-04-15 Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas
PCT/EP2009/001692 WO2009127297A1 (de) 2008-04-15 2009-03-10 Vorrichtung zur erzeugung eines atmosphärendruck-plasmas

Publications (2)

Publication Number Publication Date
EP2269425A1 EP2269425A1 (de) 2011-01-05
EP2269425B1 true EP2269425B1 (de) 2017-05-10

Family

ID=40756323

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09731651.7A Not-in-force EP2269425B1 (de) 2008-04-15 2009-03-10 Vorrichtung zur erzeugung eines atmosphärendruck-plasmas

Country Status (4)

Country Link
EP (1) EP2269425B1 (es)
DE (1) DE102008018827B4 (es)
ES (1) ES2636846T3 (es)
WO (1) WO2009127297A1 (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008008980U1 (de) 2008-07-04 2008-09-04 Maschinenfabrik Reinhausen Gmbh Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas
DE102010027795A1 (de) 2010-04-15 2011-10-20 BSH Bosch und Siemens Hausgeräte GmbH Hausgerät mit Plasmagenerator und Verfahren zu seinem Betrieb
DE102011111884B3 (de) 2011-08-31 2012-08-30 Martin Weisgerber Verfahren und Vorrichtung zur Erzeugung von thermodynamisch kaltem Mikrowellenplasma
CN102523674B (zh) * 2011-11-30 2016-04-20 华中科技大学 手持式等离子体电筒
DE102012103938A1 (de) 2012-05-04 2013-11-07 Reinhausen Plasma Gmbh Plasmamodul für eine Plasmaerzeugungsvorrichtung und Plasmaerzeugungsvorrichtung
DE102012104137A1 (de) 2012-05-11 2013-11-14 Maschinenfabrik Reinhausen Gmbh Feldgesteuerter Verbundisolator
DE102013100617B4 (de) 2013-01-22 2016-08-25 Epcos Ag Vorrichtung zur Erzeugung eines Plasmas und Handgerät mit der Vorrichtung
DE102013107448B4 (de) 2013-07-15 2016-11-24 Relyon Plasma Gmbh Anordnung zur Keimreduktion mittels Plasma
CN103491699A (zh) * 2013-09-30 2014-01-01 东南大学 一种并联电容式低温等离子体射流产生装置
DE102013112316A1 (de) * 2013-11-08 2015-05-13 Epcos Ag Piezoelektrischer Transformator und Gegenelektrode
DE102015113656A1 (de) * 2015-08-18 2017-02-23 Epcos Ag Plasmagenerator und Verfahren zur Einstellung eines Ionenverhältnisses
DE102015119574A1 (de) 2015-11-12 2017-05-18 Epcos Ag Ansteuerschaltung und Verfahren zur Ansteuerung eines piezoelektrischen Transformators
DE102016102585A1 (de) * 2016-02-15 2017-08-17 Epcos Ag Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas
DE102016104490B3 (de) * 2016-03-11 2017-05-24 Epcos Ag Vorrichtung und Verfahren zur Erzeugung eines nichtthermischen Atmosphärendruck-Plasmas
DE102017118652A1 (de) * 2017-08-16 2019-02-21 Hochschule Für Angewandte Wissenschaft Und Kunst Hildesheim/Holzminden/Göttingen Plasmageneratormodul und dessen Verwendung
AU2021261100A1 (en) * 2020-04-24 2022-11-24 Sekisui Chemical Co., Ltd. Lighting instrument and plasma device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2830274A (en) * 1954-01-04 1958-04-08 Gen Electric Electromechanical transducer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19532412C2 (de) 1995-09-01 1999-09-30 Agrodyn Hochspannungstechnik G Vorrichtung zur Oberflächen-Vorbehandlung von Werkstücken
JP3687881B2 (ja) * 1997-07-08 2005-08-24 富士通株式会社 放電管及び放電管の放電方法
WO1999018596A1 (en) * 1997-10-07 1999-04-15 Koninklijke Philips Electronics N.V. Discharge lamp, comprising secondary side of piezotransformer as electrode
JP2004237135A (ja) * 2003-02-03 2004-08-26 Nissan Motor Co Ltd 触媒素子及びこれを用いた排気ガス浄化装置
DE102005032890B4 (de) * 2005-07-14 2009-01-29 Je Plasmaconsult Gmbh Vorrichtung zur Erzeugung von Atmosphärendruck-Plasmen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2830274A (en) * 1954-01-04 1958-04-08 Gen Electric Electromechanical transducer

Also Published As

Publication number Publication date
DE102008018827B4 (de) 2010-05-12
WO2009127297A1 (de) 2009-10-22
DE102008018827A1 (de) 2009-10-29
ES2636846T3 (es) 2017-10-09
EP2269425A1 (de) 2011-01-05

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