EP2262929B1 - Method for the electrochemical coating of a substrate by brush plating and device for carrying out said method - Google Patents
Method for the electrochemical coating of a substrate by brush plating and device for carrying out said method Download PDFInfo
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- EP2262929B1 EP2262929B1 EP09733640A EP09733640A EP2262929B1 EP 2262929 B1 EP2262929 B1 EP 2262929B1 EP 09733640 A EP09733640 A EP 09733640A EP 09733640 A EP09733640 A EP 09733640A EP 2262929 B1 EP2262929 B1 EP 2262929B1
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- 239000000758 substrate Substances 0.000 title claims abstract description 29
- 238000000576 coating method Methods 0.000 title claims abstract description 28
- 239000011248 coating agent Substances 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000007747 plating Methods 0.000 title claims abstract description 18
- 239000002245 particle Substances 0.000 claims abstract description 83
- 239000003792 electrolyte Substances 0.000 claims abstract description 71
- 238000005054 agglomeration Methods 0.000 claims abstract description 12
- 230000002776 aggregation Effects 0.000 claims abstract description 12
- 239000006185 dispersion Substances 0.000 claims description 16
- 238000002604 ultrasonography Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 8
- 239000000843 powder Substances 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 6
- 239000002105 nanoparticle Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000002041 carbon nanotube Substances 0.000 claims description 3
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 description 10
- 238000010348 incorporation Methods 0.000 description 8
- 230000008901 benefit Effects 0.000 description 6
- 239000002270 dispersing agent Substances 0.000 description 5
- 239000002612 dispersion medium Substances 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000080 wetting agent Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 230000001680 brushing effect Effects 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 210000001787 dendrite Anatomy 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002609 medium Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 239000008247 solid mixture Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/04—Electroplating with moving electrodes
- C25D5/06—Brush or pad plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D13/00—Electrophoretic coating characterised by the process
- C25D13/22—Servicing or operating apparatus or multistep processes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D15/00—Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/20—Electroplating using ultrasonics, vibrations
Definitions
- the invention relates to a process for the electrochemical coating of a substrate by brush plating, in which an electrolyte in which particles are dispersed is applied to the substrate using a transfer agent, wherein a metallic layer is formed on the substrate, in whose matrix the particles are installed.
- a method of the type mentioned can be, for example, the JP 01301897 A remove.
- a brush plating is to be understood as meaning an electrochemical coating method in which the substrate to be coated is not immersed in an electrolyte, but the electrolyte is applied to the substrate with a carrier called a brush or "brush".
- the transmitter must have the properties of being able to transfer the electrolyte to the substrate on account of predominantly capillary effects.
- a brush is suitable because capillary channels are formed between the individual bristles, which are suitable for transporting the electrolyte.
- Other structures which are suitable for the transfer of the electrolyte are, for example, sponge-like, ie open-pored, inherently elastic materials.
- the transmitter is fed by a channel system with electrolyte, which is in fluid communication with the capillary channels of the transmitter.
- electrolyte which is in fluid communication with the capillary channels of the transmitter.
- US2003 / 234181 A1 discloses a method of electroplating a substrate by brush plating wherein an electrolyte in which particles are dispersed is applied to the substrate using a transfer.
- the object of the invention is therefore to specify a method for the electrochemical coating of substrates by means of brush plating, in which comparatively high incorporation rates of particles can be realized.
- the transmitter is fed via two fluidly independent feed systems, namely a first conduit system for the electrolyte, in which the concentration of particles compared to the required concentration is at least reduced, or no particles are present, and a second conduit system for the particles, with which particles are added to the electrolyte, until in this the required concentration of particles is reached.
- the inventive method advantageously ensures that no stable dispersion of particles in the electrolyte has to be produced. Rather, the fact is used that the brush plating is the time that elapses until the fed into the transmitter electrolyte reaches the surface to be coated of the substrate is very short.
- the electrolyte is passed over the capillary channels formed by the transmitter, which aggravate agglomeration in the electrolyte. Therefore, unwanted agglomeration of particles during the short time to coating of the substrate from the constituents of the electrolyte is very unlikely.
- This has the advantage that it is also possible to use particles, such as CNT, which in themselves are difficult to disperse in the available electrolytes.
- Another way to make sense of this circumstance is to use the particles comparatively high concentrations, which are normally no longer stable as a dispersion in the electrolyte concerned, can be added. As a result, the rate of incorporation of particles in the forming layer can be increased.
- the process window which is available for the formation of electrochemical layers with dispersed particles, advantageously larger.
- Brush Platings Another advantage of Brush Platings is that the transfer medium is in contact with the substrate during the film formation process. As a result, a dendritic layer growth is counteracted because the forming layer is immediately compacted. Incorporation of CNT would otherwise favor the formation of dendrites, with negative effects on the quality of the coating.
- the required concentration of particles in the electrolyte is at a value which is above a critical value for stability of the dispersion.
- the particles are supplied in the second alloy system as a dispersion.
- a gas formation of an aerosol
- a liquid formation of a suspension
- a solid formation of a solid mixture
- a powder is preferably formed from larger particles than the particles to be dispersed in the layer to be formed, which are easier to handle and meter or can be produced.
- the promotion and dosage of the particles to be incorporated into the trainee layer as a powder is possible.
- the use of dispersions has the advantage that handling is generally simplified.
- the electrolyte itself is also preferably used.
- the electrolyte fed through the first conduit system and the electrolyte fed through the second conduit system differ only in the concentration of dispersed particles.
- the electrolyte in the first conduit system which makes up the major part of the mass flow rate, is advantageously not provided with a larger quantity of particles, so that handling is advantageously simplified.
- the capture of the electrolyte after brush plating and recycling the same in the stock from which the first line system is fed it may be that small amounts of particles are present in this electrolyte.
- these do not cause the already mentioned problems of agglomeration, since upon reaching a critical concentration, the particles already precipitate in the collecting container after brush plating and therefore are not returned to the reservoir.
- the comparatively small amount of electrolyte which is fed through the second conduit system can be mixed for a short time before its use, so that a long-term stability of this suspension is not required.
- a liquid dispersion medium a liquid can be used in which the dispersion of the respective particles is simplified.
- this dispersing agent must not affect the coating process of the brushing board in an undesirable manner. This must be taken into account in the selection accordingly.
- a liquid or else a solid is supplied as the dispersion medium, then these can advantageously be selected such that the dispersant evaporates or sublimates at the temperatures prevailing during the brushing. In this way, it is removed from the brush plating process before it can be incorporated into the forming coating. It may be necessary to provide a suitable catching device which prevents the gaseous dispersion medium from escaping into the environment. As a result, any health risks can be avoided or the dispersant can be used for re-dispersion formation.
- the particles are prevented from agglomerating by the action of an energy, in particular ultrasound, in the second line system.
- an energy in particular ultrasound
- supercritical dispersions can advantageously also be used, since the danger that the dispersed particles are already agglomerating in the second conduit system can be reduced by the introduction of energy.
- this can also be introduced into the transmitter, so that agglomeration of the particles is prevented in this area.
- they can be installed individually in the matrix of the forming layer.
- a further advantageous embodiment of the invention is obtained when the particles are nanoparticles, in particular CNT.
- nanoparticles can be advantageous to produce particularly fine layer structures on the component to be coated.
- the above-described mechanisms of preventing agglomeration of nanoparticles prior to incorporation into the layer are particularly useful use effectively.
- the incorporation of CNT in a metallic matrix without the use of the function of the coating disturbing wetting agents is advantageously possible.
- the invention relates to a device for electroplating a substrate by brush plating, comprising a liquid-permeable carrier for an electrolyte on a substrate to be coated and a first conduit system for the electrolyte, which has outlets on the transmitter.
- the device for brush plating is therefore designed roller-shaped, with a sponge-like roller is used as the transmitter.
- the conduit system is provided, which has the shape of an elongated cylinder which extends in the center of the transmitter.
- This tubular conduit system has a plurality of holes which open into the material of the transmitter.
- the object of the invention is also to specify a device for electrochemical coating of a substrate by brush plating, with which can be produced relatively effectively electrochemical layers are dispersed in the particles.
- this object is achieved with the said device in that this device has a second conduit system which can be fed independently of the first conduit system, which opens into the first conduit system or the transmitter and which is in engagement with a generator for ultraschaft.
- the Particles to be incorporated in the coating to be formed to be supplied separately to the device.
- this second conduit system opens into the first conduit system, or opens directly into the carrier, it is possible according to the invention to feed the particles which are to be incorporated into the coating only shortly before carrying out the coating process into the coating electrolyte. This advantageously avoids formation of a dispersion consisting of the coating electrolyte and the particles to be incorporated.
- the first line system and the second line system are combined in a line module, which communicates with its outlets with the transmitter in contact.
- a line module which communicates with its outlets with the transmitter in contact.
- the second line system is engaged with a generator for ultrasound.
- the generator is thereby engaged with the second line system that the through
- the generator generated ultrasound affects at least in the second line system.
- the ultrasound advantageously effects that particles which are conveyed in the second line system do not agglomerate.
- a powder of particles conveyed in the second line system can also be kept flowing by means of the ultrasound. More detailed information on how the ultrasound generator can be applied in the pipeline system, for example, the DE 10 2004 030 523 A1 remove.
- junctions of the second conduit system are provided in the first conduit system or in the transmitter with metering valves, in particular piezo valves.
- This embodiment of the invention can be implemented by the information of the mentioned DE 10 2004 030 523 A1 be taken into account.
- the piezo valves advantageously a very accurate dosage of the particles to the electrolyte is possible, even if they are handled as a powder.
- the excitation by ultrasound does not only act on the second line system but also on the first line system and / or on the transmitter. In this way it can be avoided that any particles still present in the electrolyte agglomerate or agglomerate the particles after they have been introduced into the electrolyte. In addition, the mixing of the electrolyte with the particles is promoted by the influence of the ultrasound in the transmitter.
- a device 11 according to the invention has a transmitter 12 and a line module 13, to which the transmitter 12 is connected.
- the transmitter is a brush that can be placed on the surface 14 of a substrate 15.
- the device can be used to produce a layer 16 on the substrate 15 in which particles are dispensed.
- the substrate 15 is placed in a collecting container 17. Furthermore, the substrate 15 and the device 11 are connected to a voltage source, wherein the substrate is connected as a cathode. From an electrolyte reservoir 19, an electrolyte is fed into the transmitter 12. This contains ions of the coating material, which will form the metallic matrix (not shown in more detail) of the layer 16. In addition, from a particle reservoir 20, which is a highly concentrated Contains suspension of the particles to be incorporated into the layer 16, introduced into the transmitter 12.
- the line module 13 has a first conduit system 21 for the electrolyte and a second conduit system 22 for the particles. These are independent of each other, d. h., That the first conduit system through the electrolyte reservoir 19 and independently of the second conduit system 22 can be fed from the particle reservoir 20. In the transmitter, it then comes to a mixture of the electrolyte with the particles, which is preferably used as a dispersant for the particles, a liquid having the composition of the electrolyte.
- the device 11 is now pulled over the surface 14 in the indicated direction (arrow). Thereby a constant flow of particles and electrolyte is maintained.
- the applied voltage leads to a comparatively rapid formation of the layer 16, wherein excess electrolyte, mixed with the particles, is collected in the collecting container 17. From this leads a return line 23 to a separator 24, where the particles are again separated from the electrolyte.
- the electrolyte which now contains only insignificant amounts of particles, is returned to the electrolyte reservoir 19, and the particles, which are concentrated in the liquid of the electrolyte start, are returned to the particle reservoir 20.
- the coating process with the recovered electrolyte or the recovered particles can be continued. It should be noted that the taking place on the surface 14 substance turnover in the formation of the layer 16 in a manner not shown must be replaced.
- the device 11 according to FIG. 2 is suitable for coating a wire 25, which thus acts as a substrate 15 according to FIG.
- the device is therefore also tubular.
- the device can be guided back and forth in the direction of the indicated arrows on the wire.
- the line module 13 is arranged in a ring around the transmitter 12, d. h., That the conduit module forms a tubular sleeve. This is supplied via the first line system 21 with electrolyte.
- a central nozzle is used, wherein the electrolyte is passed through the transmitter 12, in this case also comes into contact with the wire 25 and exits at the ends of the tubular sleeve of the line module 13.
- the second line system 22 is embodied in the wall of the line module 13 and has a plurality of orifices 26 for feeding the particles into the transmitter 12. These orifices are evenly distributed over the length of the conduit module and also over its circumference.
- the fact is taken into account that the diffusion of the particles in the transmitter 12 is restricted in comparison to the electrolyte and therefore a uniform distribution in the transmitter 12 is conveyed by a larger number of orifices 26.
- connection modules 27 which also each have a generator 28 for ultrasound. These generators 28 are dimensioned so that the ultrasonic waves in the entire line module 13 propagate. The ultrasound counteracts agglomeration of the particles in the second conduit system 22.
- FIG. 3 is a section of the device shown, you can see the interaction of the line module 13 and the transmitter 12.
- the transmitter 12 in turn consists of a sponge-like, elastic, open-pored structure, wherein the pores 29 can be seen.
- the line module has the first line system 21, which forms outlets 30, which adjoin the transmitter 12. From the outlets, the electrolyte can be forced into the pores 29.
- the second line system 22 is arranged parallel to the first line system 21.
- the mouths 26 of the second conduit system do not lead into the transmitter 12, but into the first conduit system 21.
- there is a mixing of the electrolyte with the particles already in the first conduit system which has the advantage that here still necessary for mixing diffusion processes can run relatively undisturbed.
- the path which the electrolyte dispersion produced in this way must still travel in the transmitter is short, so that neither segregation nor agglomeration of the particles can occur.
- the particles may preferably be conveyed as powder.
- the generators 28 are arranged directly in the second line system 22. These can be formed for example by piezo crystals. Furthermore, a metering of the powder present in the second line system 22 can be facilitated by providing metering valves 31 at the mouths 26. These can be designed as piezo valves be. By using the piezo technology can be advantageously realize a very compact design of the line module. Therefore, the paths in the first and second conduit systems can be kept short to preclude agglomeration of particles to the surface to be coated.
Abstract
Description
Die Erfindung betrifft ein Verfahren zum elektrochemischen Beschichten eines Substrates durch Brush Plating, bei dem ein Elektrolyt, in dem Partikel dispergiert sind, unter Anwendung eines Überträgers auf das Substrat aufgebracht wird, wobei sich eine metallische Schicht auf dem Substrat ausbildet, in deren Matrix die Partikel eingebaut sind.The invention relates to a process for the electrochemical coating of a substrate by brush plating, in which an electrolyte in which particles are dispersed is applied to the substrate using a transfer agent, wherein a metallic layer is formed on the substrate, in whose matrix the particles are installed.
Ein Verfahren der eingangs genannten Art lässt sich beispielsweise der
Um eine effektive Beschichtung zu ermöglichen, wird der Überträger durch ein Kanalsystem mit Elektrolyt gespeist, welcher mit den kapillaren Kanälen des Überträgers in fluidischer Verbindung steht. Der wesentliche Vorteil im Vergleich zum klassischen elektrochemischen Beschichten, bei dem das Substrat in den Elektrolyt eingetaucht wird, besteht darin, dass durch ständiges Nachführen von Elektrolyt ein hoher Materialdurchsatz möglich ist. Dementsprechend können beispielsweise beim galvanischen Beschichten entsprechend hohe Abscheideströme umgesetzt werden, weswegen ein schneller Schichtaufbau möglich ist. Im Unterschied zu Elektrolytbädern lässt sich durch das ständige Fließen des Elektrolyts beim Brush Plating vermeiden, dass sich aufgrund einer begrenzten Diffusionsgeschwindigkeit im Elektrolyt ein stationärer Zustand einstellt, der die Beschichtungsgeschwindigkeit limitiert.In order to allow an effective coating, the transmitter is fed by a channel system with electrolyte, which is in fluid communication with the capillary channels of the transmitter. The main advantage compared to classical electrochemical coating, in which the substrate is immersed in the electrolyte, is that a high material throughput is possible by constantly feeding electrolyte. Accordingly, correspondingly high deposition currents can be converted, for example, during galvanic coating, which is why a faster layer structure is possible. In contrast to electrolyte baths, constant flow of the electrolyte during brush plating prevents a stationary state in the electrolyte due to a limited diffusion speed, which limits the coating speed.
Selbstverständlich ist es auch bekannt, Partikel in elektrochemisch hergestellte Schichten einzubauen, die in einem elektrochemischen Bad beschichtet wurden. Beispielsweise ist es gemäß der
Die Aufgabe der Erfindung besteht daher darin, ein Verfahren zum elektrochemischen Beschichten von Substraten mittels Brush Plating anzugeben, bei dem vergleichsweise hohe Einbauraten an Partikeln verwirklicht werden können.The object of the invention is therefore to specify a method for the electrochemical coating of substrates by means of brush plating, in which comparatively high incorporation rates of particles can be realized.
Diese Aufgabe wird erfindungsgemäß mit dem eingangs genannten Verfahren dadurch gelöst, dass der Überträger über zwei fluidisch voneinander unabhängige Zuführsysteme gespeist wird, nämlich über ein erstes Leitungssystem für das Elektrolyt, in dem die Konzentration an Partikeln im Vergleich zur geforderten Konzentration zumindest vermindert ist, bzw. keine Partikel vorhanden sind, und ein zweites Leitungssystem für die Partikel, mit dem Partikel dem Elektrolyt zugesetzt werden, bis in diesem die geforderte Konzentration an Partikeln erreicht ist. Durch das erfindungsgemäße Verfahren wird vorteilhaft erreicht, dass keine stabile Dispersion an Partikeln in dem Elektrolyt hergestellt werden muss. Vielmehr wird der Umstand genutzt, dass beim Brush Plating die Zeit, die vergeht, bis das in den Überträger eingespeiste Elektrolyt die zu beschichtende Oberfläche des Substrates erreicht, sehr kurz ist. Außerdem wird das Elektrolyt über die durch den Überträger gebildeten kapillaren Kanäle geleitet, die ein Agglomerieren in dem Elektrolyt erschweren. Daher ist ein unerwünschtes Agglomerieren von Partikeln während der kurzen Zeit bis zur Beschichtung des Substrates aus den Bestandteilen des Elektrolyts sehr unwahrscheinlich. Dies hat den Vorteil, dass auch Partikel wie CNT verwendet werden können, welche sich an sich in den zur Verfügung stehenden Elektrolyten schlecht dispergieren lassen. Eine andere Möglichkeit, diesen Umstand sinnvoll zu nutzen, besteht darin, dass die Partikel in vergleichsweise hohen Konzentrationen, die normalerweise als Dispersion in dem betreffenden Elektrolyten nicht mehr stabil sind, zugegeben werden können. Hierdurch lässt sich die Einbaurate an Partikeln in der sich ausbildenden Schicht erhöhen. Damit wird das Prozessfenster, welches zur Ausbildung von elektrochemischen Schichten mit dispergierten Partikeln zur Verfügung steht, vorteilhaft größer.This object is achieved with the method mentioned in the fact that the transmitter is fed via two fluidly independent feed systems, namely a first conduit system for the electrolyte, in which the concentration of particles compared to the required concentration is at least reduced, or no particles are present, and a second conduit system for the particles, with which particles are added to the electrolyte, until in this the required concentration of particles is reached. The inventive method advantageously ensures that no stable dispersion of particles in the electrolyte has to be produced. Rather, the fact is used that the brush plating is the time that elapses until the fed into the transmitter electrolyte reaches the surface to be coated of the substrate is very short. In addition, the electrolyte is passed over the capillary channels formed by the transmitter, which aggravate agglomeration in the electrolyte. Therefore, unwanted agglomeration of particles during the short time to coating of the substrate from the constituents of the electrolyte is very unlikely. This has the advantage that it is also possible to use particles, such as CNT, which in themselves are difficult to disperse in the available electrolytes. Another way to make sense of this circumstance is to use the particles comparatively high concentrations, which are normally no longer stable as a dispersion in the electrolyte concerned, can be added. As a result, the rate of incorporation of particles in the forming layer can be increased. Thus, the process window, which is available for the formation of electrochemical layers with dispersed particles, advantageously larger.
Ein weiterer Vorteil des Brush Platings ergibt sich dadurch, dass das Übertragungsmedium während des Schichtbildungsprozesses mit dem Substrat in Kontakt steht. Hierdurch wird einem dendritischen Schichtwachstum entgegengewirkt, da die sich ausbildende Schicht sofort kompaktiert wird. Die Einbringung von CNT würde sonst nämlich die Ausbildung von Dendriten begünstigen - mit negativen Auswirkungen auf die Schichtqualität.Another advantage of Brush Platings is that the transfer medium is in contact with the substrate during the film formation process. As a result, a dendritic layer growth is counteracted because the forming layer is immediately compacted. Incorporation of CNT would otherwise favor the formation of dendrites, with negative effects on the quality of the coating.
Gemäß einer besonderen Ausgestaltung der Erfindung ist vorgesehen, dass die geforderte Konzentration an Partikeln in dem Elektrolyt bei einem Wert liegt, der oberhalb eines kritischen Wertes für eine Stabilität der Dispersion liegt. Die Vorteile einer hierdurch bedingten erhöhten Einbaurate an Partikeln in der sich ausbildenden Schicht sind bereits erläutert worden.According to a particular embodiment of the invention, it is provided that the required concentration of particles in the electrolyte is at a value which is above a critical value for stability of the dispersion. The advantages of a resulting increased incorporation rate of particles in the forming layer have already been explained.
Eine andere Ausgestaltung der Erfindung sieht vor, dass die Partikel in dem zweiten Legierungssystem als Dispersion zugeführt werden. Als Dispersionsmittel können dabei gleichermaßen ein Gas (Bildung eines Aerosols), eine Flüssigkeit (Bildung einer Suspension) oder ein Feststoff (Bildung eines Feststoffgemisches) zum Einsatz kommen. Bei Verwendung eines Feststoffes wird vorzugsweise aus größeren Partikeln als den in der auszubildenden Schicht zu dispergierenden Partikeln ein Pulver gebildet, welches sich leichter handhaben, dosieren bzw. herstellen lässt. Aber auch die Förderung und Dosierung der in die auszubildende Schicht einzubauenden Partikel als Pulver ist möglich. Die Verwendung von Dispersionen hat jedoch den Vorteil, dass die Handhabung im Allgemeinen vereinfacht wird. Als flüssiges Dispersionsmittel kommt bevorzugt auch das Elektrolyt selbst zum Einsatz. Damit unterscheiden sich das Elektrolyt, welches durch das erste Leitungssystem eingespeist wird, und das Elektrolyt, was durch das zweite Leitungssystem eingespeist wird, lediglich in der Konzentration an dispergierten Partikeln. Das Elektrolyt im ersten Leitungssystem, was den Hauptteil des Mengendurchsatzes ausmacht, ist vorteilhaft dabei nicht mit einer größeren Menge von Partikeln versehen, so dass die Handhabung vorteilhaft vereinfacht ist. Insbesondere bei mehrfacher Verwendung des Elektrolytes, also dem Auffangen des Elektrolytes nach erfolgtem Brush Plating und Rückführung desselben in den Vorrat, aus dem das erste Leitungssystem gespeist wird, kann es jedoch sein, dass geringe Mengen an Partikeln in diesem Elektrolyt vorhanden sind. Diese verursachen jedoch nicht die bereits angesprochenen Probleme eines Agglomerierens, da bei Erreichen einer kritischen Konzentration die Partikel bereits im Auffangbehälter nach erfolgtem Brush Plating ausfallen und daher nicht in den Vorratsbehälter zurückgeführt werden. Andererseits kann die vergleichsweise kleine Menge an Elektrolyt, die durch das zweite Leitungssystem eingespeist wird, jeweils kurzzeitig vor dessen Verwendung gemischt werden, so dass eine Langzeitstabilität dieser Suspension nicht erforderlich ist. Alternativ kann als flüssiges Dispersionsmittel auch eine Flüssigkeit verwendet werden, in der die Dispersion der betreffenden Partikel vereinfacht ist. Dieses Dispersionsmittel darf allerdings den Beschichtungsprozess des Brush Platings nicht in ungewünschter Weise beeinflussen. Dies muss bei der Auswahl entsprechend berücksichtigt werden. Wird als Dispersionsmittel eine Flüssigkeit oder auch ein Feststoff zugeführt, so können diese vorteilhaft so ausgewählt werden, dass das Dispersionsmittel bei den während des Brush Platings herrschenden Temperaturen verdampft bzw. sublimiert. Auf diese Weise wird es dem Brush Plating-Prozess entzogen, bevor es in die sich ausbildende Beschichtung eingebaut werden kann. Eventuell ist für eine geeignete Auffangvorrichtung zu sorgen, die das gasförmige Dispersionsmittel an einem Austritt in die Umgebung hindert. Hierdurch können eventuelle Gesundheitsrisiken vermieden werden bzw. das Dispersionsmittel zur erneuten Dispersionsbildung verwendet werden.Another embodiment of the invention provides that the particles are supplied in the second alloy system as a dispersion. In this case, a gas (formation of an aerosol), a liquid (formation of a suspension) or a solid (formation of a solid mixture) can likewise be used as dispersion medium. When using a solid, a powder is preferably formed from larger particles than the particles to be dispersed in the layer to be formed, which are easier to handle and meter or can be produced. But also the promotion and dosage of the particles to be incorporated into the trainee layer as a powder is possible. However, the use of dispersions has the advantage that handling is generally simplified. As the liquid dispersion medium, the electrolyte itself is also preferably used. Thus, the electrolyte fed through the first conduit system and the electrolyte fed through the second conduit system differ only in the concentration of dispersed particles. The electrolyte in the first conduit system, which makes up the major part of the mass flow rate, is advantageously not provided with a larger quantity of particles, so that handling is advantageously simplified. In particular, with multiple use of the electrolyte, so the capture of the electrolyte after brush plating and recycling the same in the stock from which the first line system is fed, it may be that small amounts of particles are present in this electrolyte. However, these do not cause the already mentioned problems of agglomeration, since upon reaching a critical concentration, the particles already precipitate in the collecting container after brush plating and therefore are not returned to the reservoir. On the other hand, the comparatively small amount of electrolyte which is fed through the second conduit system can be mixed for a short time before its use, so that a long-term stability of this suspension is not required. Alternatively, as a liquid dispersion medium, a liquid can be used in which the dispersion of the respective particles is simplified. However, this dispersing agent must not affect the coating process of the brushing board in an undesirable manner. This must be taken into account in the selection accordingly. If a liquid or else a solid is supplied as the dispersion medium, then these can advantageously be selected such that the dispersant evaporates or sublimates at the temperatures prevailing during the brushing. In this way, it is removed from the brush plating process before it can be incorporated into the forming coating. It may be necessary to provide a suitable catching device which prevents the gaseous dispersion medium from escaping into the environment. As a result, any health risks can be avoided or the dispersant can be used for re-dispersion formation.
Gemäß einer anderen Ausgestaltung des Verfahrens ist vorgesehen, dass die Partikel durch Einwirken einer Energie, insbesondere Ultraschall, im zweiten Leitungssystem am Agglomerieren gehindert werden. Hierdurch können vorteilhaft auch überkritische Dispersionen verwendet werden, da die Gefahr, dass die dispergierten Partikel bereits im zweiten Leitungssystem agglomerieren, durch die Energieeinleitung vermindert werden kann. Insbesondere bei Verwendung von Ultraschall kann dieser auch noch in den Überträger eingeleitet werden, so dass auch in diesem Bereich ein Agglomerieren der Partikel verhindert wird. Hierdurch lassen sich diese einzeln in die Matrix der sich ausbildenden Schicht einbauen.According to another embodiment of the method, it is provided that the particles are prevented from agglomerating by the action of an energy, in particular ultrasound, in the second line system. As a result, supercritical dispersions can advantageously also be used, since the danger that the dispersed particles are already agglomerating in the second conduit system can be reduced by the introduction of energy. In particular, when using ultrasound this can also be introduced into the transmitter, so that agglomeration of the particles is prevented in this area. As a result, they can be installed individually in the matrix of the forming layer.
Eine weitere vorteilhafte Ausgestaltung der Erfindung wird erhalten, wenn die Partikel Nanopartikel, insbesondere CNT sind. Bei der Verwendung von Nanopartikeln lassen sich vorteilhaft besonders feine Schichtstrukturen auf dem zu beschichtenden Bauteil herstellen. Außerdem lassen sich die oben erläuterten Mechanismen einer Verhinderung des Agglomerierens von Nanopartikeln vor dem Einbau in die Schicht besonders effektiv nutzen. Insbesondere der Einbau von CNT in eine metallische Matrix ohne die Verwendung von die Funktion der Beschichtung störenden Netzmitteln wird vorteilhaft ermöglicht.A further advantageous embodiment of the invention is obtained when the particles are nanoparticles, in particular CNT. When using nanoparticles can be advantageous to produce particularly fine layer structures on the component to be coated. In addition, the above-described mechanisms of preventing agglomeration of nanoparticles prior to incorporation into the layer are particularly useful use effectively. In particular, the incorporation of CNT in a metallic matrix without the use of the function of the coating disturbing wetting agents is advantageously possible.
Weiterhin betrifft die Erfindung eine Vorrichtung zum elektrochemischen Beschichten eines Substrates durch Brush Plating, aufweisend einen flüssigkeitsdurchlässigen Überträger für ein Elektrolyt auf ein zu beschichtendes Substrat und ein erstes Leitungssystem für das Elektrolyt, welches Auslässe am Überträger aufweist.Furthermore, the invention relates to a device for electroplating a substrate by brush plating, comprising a liquid-permeable carrier for an electrolyte on a substrate to be coated and a first conduit system for the electrolyte, which has outlets on the transmitter.
Eine derartige Vorrichtung ist in der eingangs bereits erwähnten
Die Aufgabe der Erfindung besteht weiterhin darin, eine Vorrichtung zum elektrochemischen Beschichten eines Substrates durch Brush Plating anzugeben, mit der sich vergleichsweise effektiv elektrochemische Schichten herstellen lassen, in die Partikel dispergiert sind.The object of the invention is also to specify a device for electrochemical coating of a substrate by brush plating, with which can be produced relatively effectively electrochemical layers are dispersed in the particles.
Diese Aufgabe wird erfindungsgemäß mit der genannten Vorrichtung dadurch gelöst, dass diese Vorrichtung ein zweites Leitungssystem aufweist, welches unabhängig von dem ersten Leitungssystem gespeist werden kann, welches in das erste Leitungssystem oder den Überträger mündet und welches mit einem generator für ultraschaft in Eingriff steht. Hierdurch wird erfindungsgemäß eine Möglichkeit zur Verfügung gestellt, die Partikel, die in die zu bildende Beschichtung eingebaut werden sollen, separat der Vorrichtung zuzuführen. Je nachdem, ob dieses zweite Leitungssystem in das erste Leitungssystem mündet, oder direkt in den Überträger mündet, ist es erfindungsgemäß möglich, die Partikel, die in die Beschichtung eingebaut werden sollen, erst kurz vor Durchführung des Beschichtungsvorganges in das Beschichtungselektrolyt einzuspeisen. Hierdurch kann vorteilhaft eine Bildung einer Dispersion, bestehend aus dem Beschichtungselektrolyt und den einzubauenden Partikeln, vermieden werden. Dadurch ergibt sich die Möglichkeit, insbesondere Partikel in die elektrochemisch sich ausbildende Schicht einzubauen, deren Dispersion in das Elektrolyt als Dispersionsmittel problematisch ist. Zum Beispiel kann, wie bereits erwähnt, auch die Verwendung von Netzmitteln vermieden werden, die das Schichtergebnis negativ beeinflussen können.This object is achieved with the said device in that this device has a second conduit system which can be fed independently of the first conduit system, which opens into the first conduit system or the transmitter and which is in engagement with a generator for ultraschaft. As a result, a possibility is provided according to the invention, the Particles to be incorporated in the coating to be formed, to be supplied separately to the device. Depending on whether this second conduit system opens into the first conduit system, or opens directly into the carrier, it is possible according to the invention to feed the particles which are to be incorporated into the coating only shortly before carrying out the coating process into the coating electrolyte. This advantageously avoids formation of a dispersion consisting of the coating electrolyte and the particles to be incorporated. This results in the possibility, in particular, of incorporating particles into the electrochemically forming layer whose dispersion in the electrolyte as dispersant is problematic. For example, as already mentioned, it is also possible to avoid the use of wetting agents which can adversely affect the coating result.
Gemäß einer Ausgestaltung der Erfindung ist vorgesehen, dass das erste Leitungssystem und das zweite Leitungssystem in einem Leitungsmodul zusammengefasst sind, welches mit seinen Auslässen mit dem Überträger in Kontakt steht. Auf diese Weise lässt sich vorteilhaft eine besonders kompakte Vorrichtung erzeugen, bei der die Wege, die das Elektrolyt und die Partikel zurückzulegen haben, kurz gehalten werden können. Hierdurch kann vorteilhaft ein Agglomerieren der Partikel in dem Elektrolyt so weit wie möglich vermieden werden. Außerdem weist die Vorrichtung vorteilhaft einen einfachen Aufbau auf, so dass beispielsweise der Überträger einfach gewechselt werden kann.According to one embodiment of the invention, it is provided that the first line system and the second line system are combined in a line module, which communicates with its outlets with the transmitter in contact. In this way, it is possible to advantageously produce a particularly compact device in which the paths which the electrolyte and the particles have to cover are kept short. As a result, advantageously agglomeration of the particles in the electrolyte can be avoided as far as possible. In addition, the device advantageously has a simple structure, so that, for example, the transmitter can be easily changed.
Das zweite Leitungssystem steht mit einem Generator für Ultraschall im Eingriff. Der Generator steht dadurch mit dem zweiten Leitungssystem im Eingriff, dass der durch den Generator erzeugte Ultraschall sich zumindest im zweiten Leitungssystem auswirkt. Der Ultraschall bewirkt vorteilhaft, dass Partikel, die in dem zweiten Leitungssystem gefördert werden, nicht agglomerieren. Beispielsweise kann auch ein in dem zweiten Leitungssystem gefördertes Pulver von Partikeln mittels des Ultraschalls fließflähig gehalten werden. Genauere Angaben, wie der Ultraschallgenerator in das Leitungssystem appliziert werden kann, lässt sich beispielsweise der
Zusätzlich ist es vorteilhaft, wenn die Einmündungen des zweiten Leitungssystems in das erste Leitungssystem oder in den Überträger mit Dosierventilen, insbesondere Piezoventilen, versehen sind. Auch diese Ausgestaltung der Erfindung kann umgesetzt werden, indem die Angaben der erwähnten
Von besonderem Vorteil ist es, wenn die Anregung durch Ultraschall nicht nur auf das zweite Leitungssystem, sondern auch auf das erste Leitungssystem und/oder auf den Überträger wirken. Auf diese Weise kann vermieden werden, dass eventuell noch im Elektrolyt befindliche Partikel agglomerieren bzw. es zu einem Agglomerieren der Partikel nach Einleitung in das Elektrolyt kommt. Außerdem wird durch den Einfluss des Ultraschalls im Überträger eine Durchmischung des Elektrolytes mit den Partikeln gefördert.It is particularly advantageous if the excitation by ultrasound does not only act on the second line system but also on the first line system and / or on the transmitter. In this way it can be avoided that any particles still present in the electrolyte agglomerate or agglomerate the particles after they have been introduced into the electrolyte. In addition, the mixing of the electrolyte with the particles is promoted by the influence of the ultrasound in the transmitter.
Weitere Einzelheiten der Erfindung werden im Folgenden anhand der Zeichnung beschrieben. Gleiche oder sich entsprechende Zeichnungselemente sind hierbei jeweils mit den gleichen Bezugszeichen versehen und werden nur insoweit mehrfach erläutert, wie sich Unterschiede zwischen den einzelnen Figuren ergeben. Es zeigen
- Figur 1
- schematisch den Ablauf eines Ausführungsbeispiels des erfindungsgemäßen Verfahrens unter Anwendung eines Ausführungsbeispiels der erfindungsgemäßen Vorrichtung,
- Figur 2
- schematisch ein anderes Ausführungsbeispiel der erfindungsgemäßen Vorrichtung als isometrische Ansicht und
- Figur 3
- ein Leitungsmodul, wie es in einem anderen Ausführungsbeispiel der erfindungsgemäßen Vorrichtung zum Einsatz kommen kann, als Querschnitt.
- FIG. 1
- 1 schematically the sequence of an embodiment of the method according to the invention using an embodiment of the device according to the invention,
- FIG. 2
- schematically another embodiment of the device according to the invention as an isometric view and
- FIG. 3
- a line module, as it can be used in another embodiment of the device according to the invention, as a cross section.
Eine erfindungsgemäße Vorrichtung 11 weist einen Überträger 12 und ein Leitungsmodul 13 auf, an das der Überträger 12 angeschlossen ist. Bei dem Überträger handelt es sich um eine Bürste, die auf die Oberfläche 14 eines Substrates 15 aufgesetzt werden kann. Wie im Folgenden näher erläutert wird, lässt sich mit der Vorrichtung eine Schicht 16 auf dem Substrat 15 erzeugen, in der nicht näher dargestellt Partikel dispiergiert sind.A device 11 according to the invention has a
Zum Zwecke der Herstellung der Schicht 16 wird das Substrat 15 in einem Auffangbehälter 17 platziert. Weiterhin wird das Substrat 15 und die Vorrichtung 11 an eine Spannungsquelle angeschlossen, wobei das Substrat als Kathode geschaltet ist. Aus einem Elektrolyt-Vorratsbehälter 19 wird ein Elektrolyt in den Überträger 12 eingespeist. Dieser enthält Ionen des Beschichtungswerkstoffes, welcher die metallische Matrix (nicht näher dargestellt) der Schicht 16 bilden wird. Außerdem wird aus einem Partikelvorratsbehälter 20, der eine hochkonzentrierte Suspension der Partikel enthält, die in die Schicht 16 eingebaut werden sollen, in den Überträger 12 eingeleitet.For the purpose of producing the
Das Leitungsmodul 13 weist ein erstes Leitungssystem 21 für das Elektrolyt und ein zweites Leitungssystem 22 für die Partikel auf. Diese sind unabhängig voneinander, d. h., dass das erste Leitungssystem durch den Elektrolytvorratsbehälter 19 und unabhängig davon das zweite Leitungssystem 22 von dem Partikel-Vorratsbehälter 20 gespeist werden kann. In dem Überträger kommt es dann zu einer Mischung des Elektrolytes mit den Partikeln, wobei bevorzugt als Dispersionsmittel für die Partikel auch eine Flüssigkeit mit der Zusammensetzung des Elektrolyts zum Einsatz kommt.The
Um eine Schicht 16 auszubilden, wird nun die Vorrichtung 11 in der angedeuteten Richtung (Pfeil) über die Oberfläche 14 gezogen. Dabei wird ein ständiger Fluss an Partikeln und Elektrolyt aufrechterhalten. Durch die angelegte Spannung kommt es zu einer vergleichsweise schnellen Ausbildung der Schicht 16, wobei überschüssiges Elektrolyt, gemischt mit den Partikeln, in dem Auffangbehälter 17 aufgefangen wird. Von diesem führt eine Rückflussleitung 23 zu einer Trenneinrichtung 24, wo die Partikel wieder von dem Elektrolyt getrennt werden. Das Elektrolyt, das nun nur noch unwesentliche Mengen an Partikeln enthält, wird zurück in den Elektrolyt-Vorratsbehälter 19, und die Partikel, die in der Flüssigkeit des Elektrolytes start aufkonzentriert sind, werden in den Partikel-Vorratsbehälter 20 zurückgeführt. Nun kann der Beschichtungsprozess mit dem wiedergewonnenen Elektrolyt bzw. den wiedergewonnenen Partikeln fortgeführt werden. Dabei ist zu berücksichtigen, dass der an der Oberfläche 14 erfolgende Stoffumsatz bei der Ausbildung der Schicht 16 in nicht dargestellter Weise ersetzt werden muss.In order to form a
Die Vorrichtung 11 gemäß
Um eine Beschichtung zu ermöglichen, ist das Leitungsmodul 13 ringförmig um den Überträger 12 angeordnet, d. h., dass das Leitungsmodul eine rohrförmige Manschette bildet. Diese wird über das erste Leitungssystem 21 mit Elektrolyt versorgt. Hierbei kommt ein zentraler Stutzen zum Einsatz, wobei das Elektrolyt durch den Überträger 12 hindurchgeleitet wird, hierbei auch mit dem Draht 25 in Kontakt kommt und an den Enden der rohrförmigen Manschette des Leitungsmoduls 13 austritt.In order to allow a coating, the
Weiterhin ist das zweite Leitungssystem 22 in der Wandung des Leitungsmoduls 13 ausgeführt und weist mehrere Mündungen 26 zum Einspeisen der Partikel in den Überträger 12 auf. Diese Mündungen sind über die Länge des Leitungsmoduls und auch über dessen Umfang gleichmäßig verteilt. Hier wird dem Umstand Rechnung getragen, dass die Diffusion der Partikel in dem Überträger 12 im Vergleich zum Elektrolyt eingeschränkt ist und daher eine gleichmäßige Verteilung im Überträger 12 durch eine größere Anzahl von Mündungen 26 befördert wird.Furthermore, the
Die Einleitung der Partikel in das zweite Leitungssystem 22 erfolgt über nicht näher dargestellte Anschlussmodule 27. Diese weisen außerdem je einen Generator 28 für Ultraschall auf. Diese Generatoren 28 sind so dimensioniert, dass sich die Ultraschallwellen im gesamten Leitungsmodul 13 ausbreiten. Der Ultraschall wirkt einem Agglomerieren der Partikel im zweiten Leitungssystem 22 entgegen.The introduction of the particles into the
In
Anders als bei dem Ausführungsbeispiel gemäß
In dem zweiten Leitungssystem können die Partikel bevorzugt als Pulver gefördert werden. Um ein Agglomerieren zu verhindern, sind die Generatoren 28 direkt im zweiten Leitungssystem 22 angeordnet. Diese können beispielsweise durch Piezokristalle ausgebildet sein. Weiterhin kann eine Dosierung des im zweiten Leitungssystem 22 befindlichen Pulvers dadurch erleichtert werden, dass an den Mündungen 26 Dosierventile 31 vorgesehen werden. Diese können als Piezoventile ausgeführt sein. Durch die Verwendung der Piezotechnik lässt sich vorteilhafterweise eine sehr kompakte Bauform des Leitungsmoduls verwirklichen. Daher können die Wege in dem ersten und zweiten Leitungssystem kurz gehalten werden, um ein Agglomerieren von Partikeln bis zur zu beschichtenden Oberfläche auszuschließen. In the second conduit system, the particles may preferably be conveyed as powder. In order to prevent agglomeration, the
Claims (9)
- Process for the electrochemical coating of a substrate (15) by brush plating, in which process an electrolyte, in which particles are dispersed, is applied to the substrate (15) using a carrier (12), wherein a metallic layer (16), in the matrix of which the particles are incorporated, forms on the substrate (15),
characterized
in that the carrier is fed via two fluidically independent supply systems, namely via• a first conduit system for the electrolyte, in which the concentration of particles is at least reduced compared to the required concentration, or no particles are present, and• a second conduit system for the particles, by means of which particles are added to the electrolyte until the required concentration of particles is achieved therein. - Process according to Claim 1,
characterized
in that the required concentration of particles in the electrolyte is at a value above a critical value for stability of the dispersion. - Process according to either of the preceding claims,
characterized
in that the particles are supplied in the second conduit system as a dispersion. - Process according to one of the preceding claims,
characterized
in that the particles are conveyed in the second conduit system as a powder. - Process according to either of Claims 3 and 4,
characterized
in that agglomeration of the particles is prevented by the action of an energy, in particular ultrasound, in the second conduit system. - Process according to one of the preceding claims,
characterized
in that the particles used are nanoparticles, in particular carbon nanotubes. - Device for the electrochemical coating of a substrate (15) by brush plating, comprising• a carrier (12) through which liquid can pass for applying an electrolyte to a substrate (15) to be coated, and• a first conduit system (21) for the electrolyte, which has outlets (30) on the carrier (12),wherein the device has a second conduit system (22), which can be fed independently of the first conduit system and issues into the first conduit system (21) or into the carrier (12),
characterized
in that the second conduit system (22) engages with a generator (28) for ultrasound. - Device according to Claim 7,
characterized
in that the first conduit system (21) and the second conduit system (22) are combined in a conduit module, which is in contact with the carrier (12) by way of its outlets (30). - Device according to one of Claims 7 to 8,
characterized
in that the points at which the second conduit system (22) issues into the first conduit system (21) or into the carrier (12) are provided with metering valves (31), in particular piezo valves.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008019864A DE102008019864B3 (en) | 2008-04-16 | 2008-04-16 | Process for the electrochemical coating of a substrate by brush plating and apparatus for carrying out this process |
PCT/EP2009/053844 WO2009127518A2 (en) | 2008-04-16 | 2009-04-01 | Method for the electrochemical coating of a substrate by brush plating and device for carrying out said method |
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Publication Number | Publication Date |
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EP2262929A2 EP2262929A2 (en) | 2010-12-22 |
EP2262929B1 true EP2262929B1 (en) | 2012-06-13 |
Family
ID=40984262
Family Applications (1)
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EP09733640A Active EP2262929B1 (en) | 2008-04-16 | 2009-04-01 | Method for the electrochemical coating of a substrate by brush plating and device for carrying out said method |
Country Status (6)
Country | Link |
---|---|
US (1) | US8512542B2 (en) |
EP (1) | EP2262929B1 (en) |
CN (1) | CN102007233B (en) |
DE (1) | DE102008019864B3 (en) |
DK (1) | DK2262929T3 (en) |
WO (1) | WO2009127518A2 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102008019864B3 (en) | 2008-04-16 | 2009-09-24 | Siemens Aktiengesellschaft | Process for the electrochemical coating of a substrate by brush plating and apparatus for carrying out this process |
DE102009048669A1 (en) * | 2009-09-30 | 2011-03-31 | Siemens Aktiengesellschaft | Process for the electrochemical coating of a substrate by brush plating and apparatus for carrying out this process |
CN102051656B (en) * | 2010-12-17 | 2012-07-25 | 哈尔滨工业大学 | Electroplating device for composite plating electrodeposition |
EP2780494A2 (en) * | 2011-11-16 | 2014-09-24 | Nanoridge Materials, Incorporated | Metal enhanced with conductive nanomaterial |
RU2503753C1 (en) * | 2012-11-21 | 2014-01-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенская государственная сельскохозяйственная академия" | Device for coat mechanical electroplating |
DE102013217368A1 (en) | 2013-08-30 | 2015-03-05 | Hamm Ag | Drive assembly, in particular for a construction machine, subassembly for a drive assembly and this comprehensive construction machine |
CN109402689B (en) * | 2018-12-25 | 2020-12-01 | 广东电网有限责任公司 | Brush plating pen and preparation method of brush plating layer |
RU2769383C1 (en) * | 2021-05-07 | 2022-03-31 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Казанский государственный аграрный университет" (ФГБОУ ВО Казанский ГАУ) | Device for non-leveled electrolytic deposition of metals using roller anodes |
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JPH01301897A (en) * | 1988-05-31 | 1989-12-06 | Sumitomo Metal Ind Ltd | Composite plating method |
US5225059A (en) | 1992-08-03 | 1993-07-06 | W. R. Associates | Apparatus for single anode brush electroplating |
US5620575A (en) * | 1993-12-27 | 1997-04-15 | Honda Giken Kogyo Kabushiki Kaisha | Composite plating apparatus and apparatus for dispersing air bubbles within a composite plating solution |
JP2000232078A (en) * | 1999-02-10 | 2000-08-22 | Toshiba Corp | Plating method and apparatus |
US20030234181A1 (en) | 2002-06-25 | 2003-12-25 | Gino Palumbo | Process for in-situ electroforming a structural layer of metallic material to an outside wall of a metal tube |
DE102004030523A1 (en) * | 2004-06-18 | 2006-01-12 | Siemens Ag | Transport system for nanoparticles and method for its operation |
US7651766B2 (en) * | 2005-05-20 | 2010-01-26 | University Of Central Florida Research Foundation, Inc. | Carbon nanotube reinforced metal composites |
CN100582316C (en) | 2005-06-01 | 2010-01-20 | 上海工程技术大学 | Method for preparing stable and dispersed composite plating solution used for carbon nanotube electro brush plating |
SE529744C2 (en) * | 2005-12-22 | 2007-11-13 | Abb Technology Ag | Device and method of metallic coating and use of the device |
KR100748228B1 (en) * | 2006-02-28 | 2007-08-09 | 한국과학기술원 | Method of making metal/carbon nanotube composite materials by electroplating |
DE102008019864B3 (en) | 2008-04-16 | 2009-09-24 | Siemens Aktiengesellschaft | Process for the electrochemical coating of a substrate by brush plating and apparatus for carrying out this process |
-
2008
- 2008-04-16 DE DE102008019864A patent/DE102008019864B3/en not_active Expired - Fee Related
-
2009
- 2009-04-01 US US12/736,547 patent/US8512542B2/en active Active
- 2009-04-01 CN CN2009801136307A patent/CN102007233B/en active Active
- 2009-04-01 DK DK09733640.8T patent/DK2262929T3/en active
- 2009-04-01 EP EP09733640A patent/EP2262929B1/en active Active
- 2009-04-01 WO PCT/EP2009/053844 patent/WO2009127518A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
US8512542B2 (en) | 2013-08-20 |
EP2262929A2 (en) | 2010-12-22 |
CN102007233B (en) | 2013-05-01 |
DK2262929T3 (en) | 2012-08-20 |
CN102007233A (en) | 2011-04-06 |
DE102008019864B3 (en) | 2009-09-24 |
WO2009127518A3 (en) | 2009-12-23 |
US20110031125A1 (en) | 2011-02-10 |
WO2009127518A2 (en) | 2009-10-22 |
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