EP2203645A1 - Dispositif de microdosage pour doser des quantités infimes d'un produit - Google Patents

Dispositif de microdosage pour doser des quantités infimes d'un produit

Info

Publication number
EP2203645A1
EP2203645A1 EP08786456A EP08786456A EP2203645A1 EP 2203645 A1 EP2203645 A1 EP 2203645A1 EP 08786456 A EP08786456 A EP 08786456A EP 08786456 A EP08786456 A EP 08786456A EP 2203645 A1 EP2203645 A1 EP 2203645A1
Authority
EP
European Patent Office
Prior art keywords
outlet
inlet
layer
cover layer
piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08786456A
Other languages
German (de)
English (en)
Inventor
Ralf Reichenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP2203645A1 publication Critical patent/EP2203645A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Definitions

  • Microdosing device for dosing small amounts of a medium
  • the invention relates to a microdosing device for dosing small quantities of a medium, comprising an emptying device, an outlet device and a pump device, wherein the inlet device comprises an inlet opening and an inlet valve with an inlet valve piston, the outlet device an outlet opening and an outlet valve with an outlet valve piston and the pumping device Pump piston has.
  • Microdosing have in various applications, such as in the medical technology field, a great importance and serve z.
  • the smallest amounts of a medium must be precisely dosed and administered.
  • microdosing devices Various implementations of microdosing devices are known from the prior art. Most of these microdosage devices use silicon bulk micromechanics for structuring silicon or glass wafers, which are then usually joined together by bonding.
  • a microdosing device is known from DE 197 37 173 A1, which has a micro-diaphragm pump and a free-jet dosing device connected thereto.
  • the micro-membrane pump and the free-jet dispenser are formed according to this construction in a common component, wherein these components are composed of a plurality of semiconductor layers.
  • the micromembran pump has a pumping membrane which, by means of an actuator, is perpendicular to its initial position. level is deflectable. In this way, can be sucked by a separately trained Emiassventil medium from a reservoir and then passed through a likewise separately trained exhaust valve to the free jet dispenser.
  • the microdosing device according to the invention has the advantage over that it can be produced easily and inexpensively.
  • a microdosing device for dosing small amounts of a medium, having an inlet device, an outlet device, a pumping device and a media channel leading from the inlet device to the outlet device, the inlet device having an inlet opening and an inlet valve with an inlet valve piston, the outlet device an outlet opening and an outlet valve having an outlet valve piston and the pumping means comprises a pumping piston, characterized in that the inlet valve piston, the outlet valve piston and the pump piston are provided on a common membrane layer.
  • the membrane layer acts as a membrane for both the inlet valve, the outlet valve and the pumping device.
  • the inlet valve piston, the outlet valve piston and the pump piston are each arranged on mutually different regions of the membrane layer.
  • This membrane layer with the devices arranged thereon represents the most stressed part of the microdosing device.
  • This part is preferably produced by means of classical micromechanics from a composite of a substrate with a sacrificial layer and a functional layer.
  • This composite preferably has an SOI wafer, a silicon substrate with SiCV sacrificial layer and an epitaxially grown polycrystalline (epipoly) Si functional layer or a silicon substrate with SiGe sacrificial layer and an epipoly-Si functional layer.
  • a preferred embodiment of the invention is that above the membrane layer, an upper cover layer and / or below the membrane layer, a lower cover layer
  • Cover layer is provided, wherein the upper cover layer and the lower cover layer are preferably made of a polymer substrate.
  • the most heavily loaded part of the microdosing device according to the invention namely the membrane with its devices, is realized from a mechanically high-quality material, while the upper cover layer, which preferably has the inlet opening and the outlet opening, and the lower cover layer, which are preferably together with the membrane forms the media channel, through which the medium from the inlet to the outlet device is conveyed, are made of substantially cheaper producible materials.
  • structured glass, pyrex, quartz or silicon wafers are also possible for the upper cover layer and the lower cover layer.
  • the individual layers are preferably joined by gluing or optionally by suitable wafer bonding processes.
  • the inlet opening and the outlet opening are preferably provided on the upper cover layer.
  • the inlet valve piston and the outlet valve piston are arranged between the upper cover layer and the membrane layer, so that the inlet opening and the outlet opening can be sealed by means of a movement of the membrane layer.
  • a pumping device associated pump actuator may be provided so that on the
  • Pump piston acts, which allows movement of the membrane in the pumping device perpendicular to its plane of extension upwards or downwards. This is associated with a pumping action, due to which medium can be sucked in through the inlet valve or ejected through the outlet valve, as described in detail below.
  • a media channel is provided between the membrane layer and the lower cover layer, through which the medium can be requested from the inlet device to the outlet device.
  • the membrane layer in the region of the inlet valve and in the region of the outlet valve in each case has at least one passage opening for the passage of the medium from the region between the upper cover layer and the membrane layer into the media channel.
  • FIG. 1 Facilities be designed as a common entity.
  • the inlet valve piston, the outlet valve piston and the pump piston are provided on the common membrane layer together with the upper cover layer as a removable unit in a housing, which in turn provides the lower cover layer.
  • the combination unit comprising the inlet valve piston, the outlet valve piston, the pump piston and the common membrane layer can thus be provided as one-way device, which is arranged in a reusable housing which closes the disposable unit downwards by means of the lower cover layer, around the media channel to build.
  • this housing can be made in different ways.
  • the housing has a preferably removable media reservoir.
  • the housing provides the pump actuator required for the pumping device.
  • the housing is provided with a preferably removable power supply, such as a battery.
  • the media reservoir and the pumping unit are designed as a removable total unit which is replaced as soon as the medium in the reservoir has been used up or expired / expired.
  • a sterile packaged disposable unit may be provided, e.g. stored in the refrigerator with which the following changes can be made: open the housing, remove the old unit, sterilize and unpack and insert the new unit.
  • the housing has an electronic circuit with a programmable interface for programming at least one presetting of the microdosing device.
  • z. B individually adjustable for each application, which quantities of the medium to be dosed and administered at what times.
  • the housing has a sensor connection for connection to a sensor, according to the measured value of which the metering of the medium is controlled. This sensor connection can be configured wired or wireless.
  • the outlet valve is self-locking in the media channel at a suppression.
  • the inlet valve is self-locking at an overpressure in the media channel.
  • microdosing device described above is preferably used in medical technology, for.
  • insulin administration as well as the continuous local administration of analgesics.
  • Further areas of application are in automation technology as pre- and control valves for larger valves.
  • automation technology as pre- and control valves for larger valves.
  • Fig. 1 is a schematic cross-sectional view with the three essential
  • FIG. 2 shows a schematic cross-sectional view of the microdosing device according to the preferred embodiment of the invention during the suction process
  • FIG. 3 is a schematic cross-sectional view of the micro-dosing device according to the preferred embodiment of the invention in the ejection process
  • Fig. 4 is a schematic representation of the micro-dosing device according to the preferred embodiment of the invention as a combination of a disposable part in a reusable housing in the closed state and 5 is a schematic representation of the microdosing device according to the preferred embodiment of the invention as a combination of a disposable part in a reusable housing in the open state.
  • FIGS. 1 to 3 each show a schematic cross-sectional representation of a microdosing device according to a preferred exemplary embodiment of the invention.
  • This microdosing device is used for dosing small quantities of a medium and has an inlet device 1, an outlet device 2 and a pumping device 3, which in FIG. 1, for the sake of clarity, are separated from one another by three
  • the inlet device 1 has an inlet opening 4 and an inlet valve 5 with an inlet valve piston 6.
  • the outlet device 2 has an outlet opening 7, an outlet valve 8 and an outlet valve piston 9.
  • the pumping device 3 is provided, which has a pump piston 10, which is associated with a pump actuator 11. As a pump actuator
  • a piezo stack is provided according to the presently described preferred embodiment of the invention, a piezo stack.
  • other principles for the pump actuator 11 are usable, such as magnetic or hydrodynamic.
  • a bending piezo can also be used. If the achievable forces and strokes are sufficient, a piezoelectric thin layer may also be provided for actuating the pump piston 10.
  • the inlet valve piston 6, the outlet valve piston 9 and the pump piston 10 are provided on a common membrane layer 12, which is formed as Epipoly-Si functional layer. Above this membrane layer 12, an upper cover layer 13 is formed, and below the membrane layer 12, a lower cover layer 14 is formed. According to the presently described preferred embodiment of the invention, the top cover layer 13 and the bottom cover layer 14 are both made of a polymer substrate.
  • the upper cover layer 13 has the inlet opening 4 and the outlet opening 7, while by means of the lower cover layer 14 between the membrane Layer 12 and the lower cover layer 14, a media channel 15 is defined. Through this media channel 15 through the medium to be metered from the inlet device 1 to the outlet 2 is fordable.
  • the membrane layer 12 has passage openings 16 in the region of the inlet device 1 and a passage opening 17 in the region of the outlet device 2.
  • a passage opening 31 is furthermore provided in the outlet valve piston 9 provided above the passage opening 17 in the region of the outlet device 2.
  • the supply of the medium takes place via a feed line 18 which leads to the inlet opening 4 of the inlet device 1.
  • a discharge line 19 is provided to forward the ejected medium.
  • the pump actuator 11 is moved downwards, so that the pump piston 10 presses the membrane layer 12 downwards on the upper side of the lower cover layer 14 in the area of the pumping device 3 ,
  • the inlet valve 5 closes automatically and the outlet valve 8 is opened, so that the medium through the in the region of the outlet 2 in the Membrane layer 12 provided fürgangsöffhung 17 and subsequently discharged through the outlet opening 7 above the outlet valve 8 in the discharge line 19.
  • the upper cover layer 13 are provided together with the Emiassventilkolben 6, the Auslassventilkolben 9 and the pump piston 10 on the common membrane layer 12 as a removable unit 20 in an external housing 21.
  • the housing 21 can be folded open, so that the removable unit 20 described above can be placed on the lower part 22 of the housing, which in turn thus forms the lower cover layer 14 of the micro-metering device.
  • the removable unit 20 may thus be provided as a disposable part, which can be removed after its use from the reusable housing 21 and replaced with a new one.
  • the sealing of the upper part 23 of the housing 21 relative to the removable unit 20 by means of O-ring seals 32. To open the housing 21, the upper part 23 and the lower part
  • the upper part 23 of the housing 21 has, according to the presently described preferred first embodiment of the invention, a media reservoir 24 which is connected to the inlet device, so that from the media reservoir 24 medium to Emiass worn 1 out is feasible. If the medium provided in the media reservoir 24 is used up, the media reservoir 24 can be removed and exchanged for a new one.
  • a removable power supply 25 is provided in the form of a battery.
  • the thus made available electrical energy is z. B. required for the pump actuator 11, which is also provided in the upper part 23 of the housing 21 and, as described above, acts on the pump piston 11 of the pumping device 3.
  • an electronic circuit 26 is provided with a programmable interface for programming at least one presetting of the micro-metering device, in the form of a micro-processor.
  • Expensive silicon is only used for the mechanically most important layers. As a result, the expensive processing of silicon is limited: There are only three micromechanical processing steps due, namely twice Trenchen and once the etching of a sacrificial layer.
  • the size of the structures in conjunction with the planar technology also brings with it the possibility of using the thick-film technology, namely for applying z.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)

Abstract

La présente invention a pour objet un dispositif de microdosage pour doser des quantités infimes d'un produit possédant un système d'admission (1), un système d'évacuation (2), un système de pompe (3) et un canal pour produit (15) menant du système d'admission (1) au système d'évacuation (2). Le système d'admission (1) comporte un orifice d'admission (4) et une soupape d'admission (5) dotée d'un piston de soupape d'admission (6) ; le système d'évacuation (2) comporte un orifice d'évacuation (7) et une soupape d'évacuation (8) dotée d'un piston de soupape d'évacuation (9) ; et le système de pompe (3) comportant un piston de pompe (10). Le piston de soupape d'admission (6), le piston de soupape d'évacuation (9) et le piston de pompe (10) sont agencés sur une couche membranaire (12) commune. Le dispositif de microdosage présente l'avantage de pouvoir être fabriqué simplement et de manière peu onéreuse.
EP08786456A 2007-09-25 2008-07-25 Dispositif de microdosage pour doser des quantités infimes d'un produit Withdrawn EP2203645A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007045637A DE102007045637A1 (de) 2007-09-25 2007-09-25 Mikrodosiervorrichtung zum Dosieren von Kleinstmengen eines Mediums
PCT/EP2008/059796 WO2009040165A1 (fr) 2007-09-25 2008-07-25 Dispositif de microdosage pour doser des quantités infimes d'un produit

Publications (1)

Publication Number Publication Date
EP2203645A1 true EP2203645A1 (fr) 2010-07-07

Family

ID=39869947

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08786456A Withdrawn EP2203645A1 (fr) 2007-09-25 2008-07-25 Dispositif de microdosage pour doser des quantités infimes d'un produit

Country Status (4)

Country Link
US (1) US20100166585A1 (fr)
EP (1) EP2203645A1 (fr)
DE (1) DE102007045637A1 (fr)
WO (1) WO2009040165A1 (fr)

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DE102010029573A1 (de) * 2010-06-01 2011-12-01 Robert Bosch Gmbh Mikropumpe
DE102011015184B4 (de) * 2010-06-02 2013-11-21 Thinxxs Microtechnology Ag Vorrichtung für den Transport kleiner Volumina eines Fluids, insbesondere Mikropumpe oder Mikroventil
WO2013084909A1 (fr) * 2011-12-09 2013-06-13 株式会社村田製作所 Appareil de commande de gaz
JP6126948B2 (ja) * 2013-08-30 2017-05-10 高砂電気工業株式会社 圧電ポンプ
CN104117110A (zh) * 2014-07-01 2014-10-29 南通市三和生物工程有限公司 微量输注泵
DE102017218198A1 (de) * 2017-10-12 2019-04-18 Robert Bosch Gmbh Passives Ventil, Mikropumpe und Verfahren zur Herstellung eines passiven Ventils
TWI721241B (zh) * 2018-01-22 2021-03-11 研能科技股份有限公司 流體系統
EP3527826B1 (fr) * 2018-02-16 2020-07-08 ams AG Structure de pompage, détecteur de particules et procédé de pompage

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Also Published As

Publication number Publication date
DE102007045637A1 (de) 2009-04-02
US20100166585A1 (en) 2010-07-01
WO2009040165A1 (fr) 2009-04-02

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