EP2198073A1

EP2198073A1 - Fic installation and method for operating a fic installation in the pressure range above atmospheric pressure

Info

Publication number: EP2198073A1
Application number: EP07818895A
Authority: EP
Inventors: Francis-Jurjen Ladru; Alexander Nordalm; Michael Ott
Original assignee: Siemens AG
Current assignee: Siemens AG
Priority date: 2007-10-10
Filing date: 2007-10-10
Publication date: 2010-06-23
Also published as: WO2009049637A1; US20100218787A1; CN101821430B; CN101821430A

Abstract

The invention relates to a FIC installation that can be operated in a pressure range above atmospheric pressure, such that, compared to prior art, a reactive gas (7) can better penetrate the cracks to be cleaned, thereby intensifying the chemical reaction between the reactive gas (8) and the oxide.

Description

FIC system and method for operating a FIC system in the

Overpressure range

The invention relates to a FIC system and a method for operating this FIC system in the overpressure range.

Components of gas turbines of stationary gas turbines or

Aircraft turbines are reworked after use, with the cracks of these components oxides must be removed so that they can be repaired.

The so-called FIC method (fluoride ion clea- ring) is used.

In this case, the component is introduced into a reaction chamber, in which then the reactive gas, for example. Halogen gas, is introduced, which then leads to a reaction of the oxide with the reactive gas, whereby the oxide is removed from the component.

It is therefore an object of the invention to show a FIC system and a method for operating a FIC system, which leads to an intensification of the chemical reaction and to improve the cleaning effect.

The object is achieved by a FIC system according to claim 1 and a method according to claim 7.

In the dependent claims further advantageous measures are listed, which can be combined with each other in order to achieve further advantages.

Show it:

FIG. 1 shows an FIC system,

FIGS. 2 to 5 show exemplary time profiles of the pressure within a FIC system, FIGS. 6, 7 schematically show the sequence of the cleaning process,

FIG. 8 shows a gas turbine,

Figure 9 in perspective a turbine blade and

Figure 10 in perspective a combustion chamber. In Figure 1, a FIC system 1 is shown schematically. The FIC system 1 comprises at least one reaction chamber 10, in which at least one component 4, 120, 130, 155 (FIGS. 8, 9, 10) can be introduced.

The component 4, 120, 130, 155 has oxidation and / or corrosion products, which are mainly present in cracks. The oxidation and corrosion products are also often present as a layer area. Via a valve 13 or pump 13, a reactive gas or reaction mixture, preferably a halide, preferably hydrogen fluoride (HF) can be introduced into the reaction chamber 10, so that there is a reaction between the reactive gas and the oxidation and / or corrosion product to be removed can take place on the component 4, 120, 130, 155.

According to the invention, the FIC system is designed such that a pressure p greater than the atmospheric pressure p _a t (1, 01 bar at RT) can be set by means of means 13. With overpressure range is meant at least one pressure greater than atmosphere p _{at /} in particular greater than 1, lbar (= HOkPa).

The maximum overpressure in the reaction chamber is preferably 10 l, 4 bar (14OkPa).

In this case, the reaction chamber 10 seals as a means 13, so that the reactive gas 7 in the overpressure range not from the

Reaction chamber 10 can escape.

Alternatively or additionally, there is a valve 13 which regulates the pressure in the reaction chamber 10, since the supply 7 with the reaction gas has an overpressure, i. a

Pressure vessel surface with the hydrogen fluoride (HF) used by way of example has an overpressure greater atmospheric pressure, in particular greater l, 4bar, so that the pressure from this pressure vessel must be controlled.

Preferably, the device 1 comprises as a means a pump 13 which is designed so that it can generate an overpressure in the reaction chamber 10. A temporally exemplary course of the cleaning process, preferably with the FIC system 1, is shown in the following table and in FIGS. 2 to 5:

with the flow rates rl, r2, r3, preferably r3>r2> rl and the pressures P _H > P _N / in particular P _H > latm and the holding times tl, t2, t3, preferably t3>t2> tl.

After the first segments 1, 2, the segments 4, 5 and 3, which represent one cycle, are repeated.

FIG. 2 shows a time profile of the pressure p in the reaction chamber 10.

The initial pressure curve is not shown. In the process, the temperature T in the reaction chamber 10 is initially heated to a specific temperature, in particular above 1000 ^° C., at the beginning. Preferably, after an initial phase, at least temporarily, a pressure p greater than the atmospheric pressure P _{at is} set, and for a holding time t _h , the pressure p is kept constant. This represents a high pressure phase (P _H ). By filling in the superatmospheric pressure range (>

Pa _t ) penetrates more reactive gas of a reactive gas mixture into the cracks to be cleaned. This leads to the intensification of the chemical reaction and thus to the improvement of the cleaning effect. Preferably, the gas in the reaction chamber 10 is constantly pumped to remove spent reaction products, wherein new gas (reactive gas, non-reactive gas) is replenished. This increases productivity.

During a period of time t _s in the high-pressure phase P _H , the reaction chamber 10 is purged with a reactive gas 7 and preferably with a non-reactive gas. This is a reactive gas mixture. Likewise, the non-reactive gas can be a gas mixture, but does not react with the component.

The time duration t _s is preferably smaller than the hold time th for P _H. The flow rate r 1 of the reactive gas or of the reactive gas mixture is preferably smaller than the flow rate r 3 of the non-reactive gas, since otherwise the reaction chamber 10 is attacked.

During the purge time (t _h -t _s ) in the high pressure phase, the flow rate of the nonreactive gas is preferably increased to r3 (r3> r2).

This represents the crack cleaning phase S4.

During the remaining holding time (t _h -t _s ) in the high-pressure phase, only one non-reactive gas is used (flow rate of reactive gas = 0), preferably hydrogen (H ₂ ). Preferably, (t _h -t _s )> 0. This represents the Risgespülphase S5.

Likewise, during the entire high-pressure phase, a reactive gas or a mixture of reactive gas and non-reactive gas can be used (t _h -t _s ) = 0.

After the holding time th, the pressure p is lowered to a pressure P _N smaller p _a t (= low-pressure phase) and after a certain holding time again moved to a pressure preferably greater p _at by the reactive gas or the reactive gas mixture in the reaction chamber 10 by increasing the Flow rate of the reactive gas or the reactive gas mixture is introduced. The reactive gas mixture is formed by combining a reactive gas and a non-reactive gas. This represents the chamber scavenging phase S3.

This process (54, 55, 53) can be repeated periodically who the.

Likewise, the method can be carried out with P _H = p _at and P _N <p _at .

FIG. 3 shows a further time sequence of the cleaning process.

In contrast to FIG. 2, here the pressure p in the low-pressure phase P _{N is} reduced to the atmospheric pressure p _at or preferably remains above the atmospheric pressure p _at (not shown).

In FIG. 4, as in FIGS. 2 and 3, the pressure p is periodically raised and lowered, ie maintained at a high pressure phase P _H and a low pressure phase P _N , initially for some cycles the pressure p in the high pressure phase P _{H is} at the atmospheric pressure p _{at is} limited. Likewise, the pressure p in the high-pressure phase P _H at the beginning of the process may also be less than the atmospheric pressure p _at .

After a certain time, ie after a few high-pressure changes, the pressure p in the high-pressure phase is set to a pressure greater than p _at and there again preferably for one

Duration t _h held. The holding of the pressure at which a pressure p greater p _{at is} used can then be continued as described below in FIG. 2 or FIG. 3.

In particular, at the beginning of the cleaning process, the FIC cleaning can be carried out according to a method according to the prior art, where pressures P _at between 200 mbar and less than one atmosphere are set and the pressure p periodically lowered and raised again. Especially at the beginning of the process, the reaction is still very good, since sufficient reaction products are freely accessible, which are easily accessible. In further steps of the purification, however, it becomes increasingly difficult to reach the remaining reaction products with the reactive gas, so that then the system is operated in the superatmospheric pressure range.

FIG. 5 shows a further time profile of the cleaning process.

In this case, the pressure p in the high-pressure phase P _{H is} periodically varied between a pressure p greater than the atmospheric pressure p _at and a pressure equal to or less than or equal to the atmospheric pressure p _at .

In FIG. 5, first, a pressure in the high-pressure phase P _{H is set to} greater p _at , followed by a pressure in the high-pressure phase P _H equal to p _at , which is repeated. Likewise, of course, can be started with a pressure in the high pressure phase of p = p _at or next follows a pressure in the high pressure phase with a pressure greater than p _at . The number of repetitions with p <p _at or p> p _at can be varied as desired.

The temperature is raised at the beginning of the process to a certain temperature, in particular> 1000 ⁰ C. Preferably, the temperature is kept constant throughout the process, since it could be that by flooding with gas when changing the flow rate it can lead to minimal temperature fluctuations.

Preferably, the reaction chamber is constantly purged preferably with hydrogen (H ₂ ) or a non-reactive gas. FIG. 6 schematically shows a method according to the invention for the cleaning of components which have fissures soiled with oxides.

The method is in particular suitable for cleaning the rotor blades and guide vanes 120, 130 of a gas turbine 100 and other components which are subject to high operating loads, such as the heat shield elements 150 of a combustion chamber 110 of the gas turbine 100. The method comprises the three sections of a pre-purification, a fluorine ion purification and a vacuum annealing. The pre-cleaning, which is optional, but not mandatory and can for example consist in a salt bath, serves to free the surface of the component to be cleaned 120, 130, 155 of superficial oxides and other corrosion products or damage them so that the following Fluorine ion purification can take place better.

After the pretreatment, the component 120, 130, 155 is subjected to fluorine ion cleaning (FIC). During this FIC

Cleaning, which is known per se, is exposed to the component to be cleaned in a cleaning chamber of a cleaning gas atmosphere at temperatures in a range of 1000 ⁰ C. The purge gas contains a hydrogen halide in the form of hydrogen fluoride (HF) which dissociates at the prevailing temperatures to form fluoride ions, which in turn are capable, with the formation of metal fluorides, also of complex oxides formed in the fractures of the component. dissolve.

In the method, a purifying gas containing 18vol% to 30vol% of hydrogen halide or hydrogen fluoride is preferably used, the remaining gas being a non-oxidizing and non-corrosive gas, and more particularly a gas such as a hydrogen gas which has a reducing effect on oxides. The temperature in the cleaning chamber during the FIC cleaning in a range of 980 ⁰ C to 1100 ⁰ C, in particular to 1020 ⁰ C. The loading of the component to be cleaned 120, 130, 155 with the cleaning gas in the form of HF / H ₂ mixture is carried out in several cleaning cycles, which is interrupted by rinsing cycles with a non-oxidizing and especially reducing acting purge gas such as hydrogen (H ₂ ) , The rinsing cycles can be assisted by pumping out the cleaning chamber, in which case the cleaning gas in the cleaning chamber must be refilled before the next cleaning cycle. Likewise, the cleaning can be interrupted by pumping out the cleaning gas. In the illustrated embodiment, four cleaning cycles are used, which are interrupted by a total of three rinse cycles, at the end of the last cleaning cycle also takes place flushing. However, the number of cleaning and rinsing cycles can also be significantly higher. Preferably, three to ten rinsing cycles are performed.

The cleaning cycles, in which the component is treated with the cleaning gas, take 10 to 60 minutes each and in particular 45 minutes, whereby the cleaning cycles can be the same length. Similarly, the first and fourth cleaning cycles may be slightly longer than the middle two cleaning cycles. However, this is because in the first cycle, the temperature must be increased only in the desired range and in the last cycle, the temperature must be shut down again. Preferably, five cleaning cycles are performed.

Following the final cycle of FIC cleaning, a solution heat treatment is performed which dissolves reaction products such as γ 'phases such as those found in nickel-base superalloys.

FIG. 7 shows an exemplary temperature profile T and a pressure curve p in a diagram over time t. A component 120, 130, 155 to be cleaned is put into the cleaning introduced chamber, and the temperature T is raised to the desired range. In this case, the reactive gas 7, here an HF / H ₂ mixture, is introduced into the cleaning chamber 10. In this embodiment, four cleaning cycles take place, which are interrupted by three rinsing cycles. In these rinsing cycles, the gas mixture is also pumped out, so that during the rinsing cycles, the pressure within the chamber drops significantly. In addition, a reducing gas such as hydrogen is introduced into the chamber.

As already stated in the introduction, the method according to the invention is particularly suitable for cleaning gas turbine components which consist of alloys with a chromium content of at least 10% by weight.

FIG. 8 shows by way of example a gas turbine 100 in one embodiment

Longitudinal section.

The gas turbine 100 has inside a rotatably mounted about a rotation axis 102 rotor 103 with a shaft 101, which is also referred to as a turbine runner.

Along the rotor 103 follow one another an intake housing 104, a compressor 105, for example, a toroidal combustion chamber 110, in particular annular combustion chamber, with a plurality of coaxially arranged burners 107, a turbine 108 and the exhaust housing 109th

The annular combustion chamber 110 communicates with an annular annular hot gas channel 111, for example. There, for example, four turbine stages 112 connected in series form the turbine 108.

Each turbine stage 112 is formed, for example, from two blade rings. As seen in the direction of flow of a working medium 113, in the hot gas channel 111 of a row of guide vanes 115, a series 125 formed of rotor blades 120 follows.

The vanes 130 are attached to an inner housing 138 of a stator 143, whereas the blades 120 a row 125 are attached to the rotor 103, for example by means of a turbine disk 133.

Coupled to the rotor 103 is a generator or work machine (not shown).

During operation of the gas turbine 100, air 105 is sucked in and compressed by the compressor 105 through the intake housing 104. The compressed air provided at the turbine-side end of the compressor 105 is fed to the burners 107 where it is mixed with a fuel. The mixture is then burned to form the working fluid 113 in the combustion chamber 110. From there, the working medium 113 flows along the hot gas channel 111 past the guide vanes 130 and the rotor blades 120. The working medium 113 expands on the rotor blades 120 in a pulse-transmitting manner, so that the rotor blades 120 drive the rotor 103 and drive the machine coupled to it ,

The components exposed to the hot working medium 113 are subject to thermal loads during operation of the gas turbine 100. The guide vanes 130 and rotor blades 120 of the first turbine stage 112, viewed in the flow direction of the working medium 113, are subjected to the highest thermal stress in addition to the heat shield elements lining the annular combustion chamber 110.

To withstand the prevailing temperatures, they can be cooled by means of a coolant. Likewise, substrates of the components may have a directional structure, i. they are monocrystalline (SX structure) or have only longitudinal grains (DS structure).

As the material for the components, in particular for the turbine blade 120, 130 and components of the combustion chamber 110, for example, iron-, nickel- or cobalt-based superalloys are used. Such superalloys are known, for example, from EP 1 204 776 B1, EP 1 306 454, EP 1 319 729 A1, WO 99/67435 or WO 00/44949. Also, the blades 120, 130 may be anti-corrosion coatings (MCrAlX; M is at least one element of the group iron (Fe), cobalt (Co), nickel (Ni), X is an active element and is yttrium (Y) and / or silicon , Scandium (Sc) and / or at least one element of the rare earth or hafnium). Such alloys are known from EP 0 486 489 B1, EP 0 786 017 Bl, EP 0 412 397 B1 or EP 1 306 454 A1.

On the MCrAlX may still be present a thermal barrier coating, and consists for example of ZrO ₂ , Y ₂ O ₃ -ZrO ₂ , that is, it is not, partially or completely stabilized by yttria and / or calcium oxide and / or magnesium oxide. Suitable coating processes, such as electron beam evaporation (EB-PVD), produce stalk-shaped grains in the thermal barrier coating.

The vane 130 has a guide vane foot (not shown here) facing the inner housing 138 of the turbine 108 and a vane head opposite the vane foot. The vane head faces the rotor 103 and fixed to a mounting ring 140 of the stator 143.

FIG. 9 shows a perspective view of a moving blade 120 or guide blade 130 of a turbomachine that extends along a longitudinal axis 121.

The turbomachine may be a gas turbine of an aircraft or a power plant for power generation, a steam turbine or a compressor.

The blade 120, 130 has along the longitudinal axis 121 consecutively a fastening region 400, a blade platform 403 adjacent thereto and an airfoil 406 and a blade tip 415. As a guide blade 130, the blade 130 may have at its blade tip 415 another platform (not shown).

In the mounting region 400, a blade root 183 is formed, which serves for attachment of the blades 120, 130 to a shaft or a disc (not shown).

The blade root 183 is designed, for example, as a hammer head. Other designs as fir tree or Schwäbwschwanzfuß are possible.

The blade 120, 130 has a leading edge 409 and a trailing edge 412 for a medium flowing past the airfoil 406.

In conventional blades 120, 130, for example, solid metallic materials, in particular superalloys, are used in all regions 400, 403, 406 of the blade 120, 130. Such superalloys are known, for example, from EP 1 204 776 B1, EP 1 306 454, EP 1 319 729 A1, WO 99/67435 or WO 00/44949.

The blade 120, 130 can hereby be manufactured by a casting process, also by directional solidification, by a forging process, by a milling process or combinations thereof.

Workpieces with a monocrystalline structure or structures are used as components for machines which are exposed to high mechanical, thermal and / or chemical stresses during operation.

The production of such monocrystalline workpieces takes place e.g. by directed solidification from the melt. These are casting processes in which the liquid metallic alloy is transformed into a monocrystalline structure, i. to the single-crystal workpiece, or directionally solidified.

Here, dendritic crystals are aligned along the heat flow and form either a columnar grain structure (columnar, ie grains over the entire length run the workpiece and here, the general usage, referred to as directionally solidified) or a monocrystalline structure, ie the entire workpiece consists of a single crystal. In these processes, it is necessary to avoid the transition to globulitic (polycrystalline) solidification, since non-directional growth necessarily produces transverse and longitudinal grain boundaries which negate the good properties of the directionally solidified or monocrystalline component. If the term generally refers to directionally solidified structures, it means both single crystals that have no grain boundaries or at most small-angle grain boundaries, and stem crystal structures that have grain boundaries that are probably longitudinal but no transverse grain boundaries. In these second-mentioned crystalline

Structures are also called directionally solidified structures.

Such methods are known from US Pat. No. 6,024,792 and EP 0 892 090 A1.

Likewise, the blades 120, 130 may have coatings against corrosion or oxidation, e.g. M is at least one element of the group iron (Fe), cobalt (Co), nickel (Ni), X is an active element and stands for yttrium (Y) and / or silicon and / or at least one element of the rare ones Earth, or hafnium (Hf)). Such alloys are known from EP 0 486 489 B1, EP 0 786 017 Bl, EP 0 412 397 B1 or EP 1 306 454 A1. The density is preferably 95% of the theoretical density.

A protective aluminum oxide layer (TGO = thermal grown oxide layer) is formed on the MCrAlX layer (as an intermediate layer or as the outermost layer).

Preferably, the layer composition comprises Co-30Ni-28Cr-8Al-0,6Y-0,7Si or Co-28Ni-24Cr-10Al-0, 6Y. In addition to these cobalt-based protective coatings, nickel-based protective layers such as Ni-10Cr-12Al are also preferably used. 0.6Y-3Re or Ni-12Co-21Cr-IIAl-O, 4Y-2Re or Ni-25Co-17Cr-10Al-0.4Y-1, 5Re.

On the MCrAlX may still be present a thermal barrier coating, which is preferably the outermost layer, and consists for example of ZrO ₂ , Y ₂ O ₃ -ZrO ₂ , ie it is not, partially or completely stabilized by yttria and / or calcium oxide and / or magnesium oxide. The thermal barrier coating covers the entire MCrAlX layer. By suitable coating methods such as electron beam evaporation (EB-PVD) stalk-shaped grains are generated in the thermal barrier coating.

Other coating methods are conceivable, e.g. atmospheric plasma spraying (APS), LPPS, VPS or CVD. The heat-insulating layer may have porous, micro- or macro-cracked grains for better thermal shock resistance. The thermal barrier coating is therefore preferably more porous than the MCrAlX layer.

Refurbishment means that components

120, 130 may need to be cleared of protective layers (e.g., by sandblasting) after use. This is followed by removal of the corrosion and / or oxidation layers or products. Optionally, even cracks in the component 120, 130 are repaired. This is followed by a re-coating of the component 120, 130 and a renewed use of the component 120, 130.

The blade 120, 130 may be hollow or solid. If the blade 120, 130 is to be cooled, it is hollow and may still film cooling holes 418 (indicated by dashed lines) on.

FIG. 10 shows a combustion chamber 110 of a gas turbine.

The combustion chamber 110 is designed, for example, as a so-called annular combustion chamber, in which a plurality of arranged in the circumferential direction about a rotation axis 102 around Burners 107 open into a common combustion chamber space 154, the flames 156 produce. For this purpose, the combustion chamber 110 is configured in its entirety as an annular structure, which is positioned around the axis of rotation 102 around.

To achieve a comparatively high efficiency, the combustion chamber 110 is designed for a comparatively high temperature of the working medium M of about 1000 ^° C. to 1600 ^° C. In order to allow a comparatively long service life for these operating parameters, which are unfavorable for the materials, the combustion chamber wall 153 is provided on its side facing the working medium M with an inner lining formed of heat shield elements 155. Each heat shield element 155 made of an alloy is equipped on the working medium side with a particularly heat-resistant protective layer (MCrAlX layer and / or ceramic coating) or is made of high-temperature-resistant material (solid ceramic blocks). These protective layers may be similar to the turbine blades, so for example MCrAlX means: M is at least one element of the group iron (Fe), cobalt (Co), nickel (Ni), X is an active element and stands for yttrium (Y) and / or silicon and / or at least one element of the rare earths, or hafnium (Hf). Such alloys are known from EP 0 486 489 B1, EP 0 786 017 Bl, EP 0 412 397 B1 or EP 1 306 454 A1.

On the MCrAlX, for example, a ceramic thermal barrier coating may be present and consists for example of ZrO ₂ , Y ₂ O ₃ -ZrO ₂ , ie it is not, partially or completely stabilized by yttria and / or calcium oxide and / or magnesium oxide.

By suitable coating methods, e.g. Electron beam evaporation (EB-PVD) produces stalk-shaped grains in the thermal barrier coating.

Other coating methods are conceivable, for example atmospheric plasma spraying (APS), LPPS, VPS or CVD. The heat- insulating layer may have porous, micro- or macro-cracked grains for better thermal shock resistance.

Refurbishment means that heat shield elements 155 may be replaced after use by heat shielding elements 155

Protective layers must be freed (for example by sandblasting). This is followed by removal of the corrosion and / or oxidation layers or products. If necessary, cracks in the heat shield element 155 are also repaired. This is followed by a recoating of the heat shield elements 155 and a renewed use of the heat shield elements 155.

Due to the high temperatures inside the combustion chamber 110 may also be provided for the heat shield elements 155 and for their holding elements, a cooling system. The heat shield elements 155 are then, for example, hollow and possibly still have cooling holes (not shown) which open into the combustion chamber space 154.

Claims

claims

1. FIC system (1), the components (4, 120, 130, 155) can receive in a reaction chamber (10) and purified by means of a reactive gas or a reactive gas mixture of oxides and / or corrosion products having a means (13) in that (13) makes it possible to set a pressure (p) of the reactive gas or of the reactive gas mixture in the reaction chamber (10) of the FIC system (1) greater than atmospheric pressure (p _at ).

2. FIC system (1) according to claim 1, which has as a means (13) a pump which can pump the reactive gas or the reactive gas mixture in a pressure range (> p _at ) in the reaction chamber (10).

3. FIC system (1) according to claim 1 or 2, which has as means (13) positive pressure seals on the reaction chamber (10).

4. FIC system (1) according to claim 1, 2 or 3, which is internally a pressure (p) of the reactive gas or of the reactive gas mixture of greater than the atmospheric pressure

in particular to 14OkPa, allows.

5. FIC system (1) according to claim 1, 2, 3 or 4, which allows inside a pressure (p) of the reactive gas or of the reactive gas mixture of 1.4 bar (= 140 kPa).

6. FIC system according to claim 1, 2, 3, 4 or 5, which has a valve (13), which (13) can separate a container of the reactive gas mixture or reactive gas from the reaction chamber (10).

7. A method for FIC cleaning of a component (4, 120, 130, 155), wherein the pressure (p) of the reactive gas or the reactive gas mixture in a reaction chamber (10) of a FIC system

(D, in particular according to one or more of the preceding claims 1 to 6, at least temporarily greater than the atmospheric pressure (p _a t) is set.

8. The method of claim 7, wherein the pressure (p) in the reaction chamber (10) at least temporarily between high atmospheric pressure (p _at ) and l, 4bar

(= 14OkPa), in particular 14OkPa amounts.

9. The method of claim 7 or 8, wherein the pressure (p) in the reaction chamber (10) is lowered periodically and raised again.

10. The method of claim 7, 8 or 9, wherein the pressure (p) in the reaction chamber (10) is at least temporarily constant, in particular in which the holding time is at least 4min to 10min.

11. The method of claim 7, 8, 9 or 10, wherein the pressure (p) in the reaction chamber (10) at least temporarily below the atmospheric pressure (p _at ), in particular for 5min to 10min.

12. The method of claim 7, 8, 9 or 10, wherein the pressure (p) in the reaction chamber (10) at least temporarily corresponds to the atmospheric pressure (p _at ), in particular greater than the atmospheric pressure (p _at ) / in particular for at least for 25min to 65min.

13. The method according to one or more of the preceding claims 7 to 12, wherein a high pressure phase (P _H ) for a period of time (th) has a higher pressure than in a low pressure phase (P _N ) (P _H > P _N ), and at during the high-pressure phase (P _H ), the reaction chamber (10) is rinsed with the reactive gas or with the reactive gas mixture at most temporarily (t _s , t _s <t _h ), which represents a crack cleaning phase (S4).

14. Method according to one or more of the preceding

Claims 7 to 12, in which a high-pressure phase (P _H ) has a higher pressure for a period of time (t _h ) than in a low-pressure phase (P _N ) (P _H > P _N ), and in which during the high-pressure phase (P _H ) for the duration

(t _h ) the reaction chamber (10) is rinsed with the reactive gas or with the reactive gas mixture, which is a crack cleaning phase (S4).

15. The method of claim 7, 8, 9, 10, 11, 12 or 13, wherein in the high pressure phase (P _H ) for the period (th - t _s > 0) is rinsed only with a non-reactive gas, which is a Risgespülphase ( S5) represents.

16. The method of claim 1, 13 or 15, wherein the flow rate of the non-reactive gas is changed, in particular during the high pressure phase (P _H ) and in particular between two values is changed, in particular is lowered, if the flow rate of the reactive gas mixture or the reactive gas> 0th is.

A method according to claim 7, 9, 10, 11 or 16, wherein the pressure is lowered below atmospheric pressure (p _at ) to (P _N ) and purging with only a non-reactive gas, which is a chamber scavenging phase (S3) ,

18. The method according to any one of the preceding claims, wherein the crack cleaning phase (S4) is determined by the presence of the reactive gas or the reactive gas mixture, in particular with a certain pressure (P _H ), wherein the Kammerspülphase (S3) is determined by the absence of Reactive gas or the reactive gas mixture and a pressure (P _N ), lower (P _N <P _H ) than during the Kämmerspülphase (S3), and in which the reactive gas or the reactive gas mixture is applied several times, the (S4, S5) of the Kämmerspülphase ( S3) are interrupted, wherein the cracks in the Rissspülphasen (S5) are subjected to a non-reactive gas.

A method according to claim 18, wherein the phases (S4, S5, S3) follow one another directly as a cycle.

20. The method of claim 18 or 19, wherein three to ten cycles, in particular five, are performed.

21. The method according to any one of claims 18 to 20, wherein a crack cleaning phase (S4) 10min to 60min, in particular 45min lasts.

22. The method according to any one of claims 18 to 21, wherein the crack cleaning phases (S4) are the same length.

23. The method according to any one of claims 18 to 22, wherein the Kammerspülphase (S3) 2min to 10min, in particular 5min, lasts.

24. The method according to any one of claims 18 to 23, wherein the last cleaning phase a Rissspülphase (S5) follows.

25. The method according to any one of claims 18 to 23, wherein the cleaning chamber (10) during the various phases (S3, S4, S5) is pumped.

26. The method according to any one of claims 15, 17 or 18, wherein the non-reactive gas, a reducing gas, in particular hydrogen, is used.

27. The method according to any one of the preceding claims, wherein the component (4, 120, 130, 155) after the cleaning treatment in the reaction chamber (10) is annealed in a vacuum.

28. Method according to one or more of the preceding

Claims in which a temperature (T) in the reaction chamber (10) is kept constant except for heating at the beginning of the process and cooling at the end of the process.

29. Method according to one or more of the preceding

Claims in which the reaction chamber (10) is constantly purged with a purge gas, a non-reactive gas, in particular hydrogen (H ₂ ).

30. Method according to one or more of the preceding

Claims in which the reaction chamber (10) is constantly pumped out.

31. Method according to one or more of the preceding

Claims in which a reactive gas mixture is used which contains from 18vol% to 30vol% of a hydrogen halide

32. The method according to any one of the preceding claims, wherein the cracks of the component at a temperature of 980 ⁰ C to 1100 ⁰ C, in particular at 1020 ⁰ C, are acted upon by the reactive gas mixture or reactive gas.

33. The method according to one or more of the preceding claims, in which temperatures above 1000 ⁰ C are used.

34. The method of claim 27, wherein the annealing is carried out at the γ 'solution annealing temperature of the material used for the component (4, 120, 130, 155).

35. The method according to any one of claims 27 or 34, wherein the annealing to annealing temperature takes at least two hours.

36. The method according to any one of the preceding claims, wherein the treatment of the component (4, 120, 130, 155) in the reactive gas chamber (10) precedes a pre-cleaning of the component (4, 120, 130, 155) in a salt bath.

37. The method according to any one of the preceding claims, wherein the components (4, 120, 130, 155) of chromium-containing

Alloys, in particular having a chromium content of at least 10% by weight, are cleaned.

38. The method of claim 37, wherein the components (4, 120, 130, 155) of directionally solidified casting alloys, in particular superalloys cleaned.

39. The method according to any one of the preceding claims, wherein during the high pressure phase (P _H ) for the period (t _h -t _s ) at the end of the cooking pressure phase after application of the reactive gas mixture, a reducing gas is used.

40. The method according to any one of the preceding claims, wherein during the whole high-pressure phase (P _H ), a reactive gas or a reactive gas mixture is used.

41. The method of claim 31, wherein the hydrogen halide is in the form of hydrogen fluoride (HF).

42. The method according to any one of the preceding claims, wherein the reactive gas comprises a mixture of the hydrogen halide and a reducing gas or non-reactive gas, in particular hydrogen, in particular consists thereof.