EP2191522A2 - Dispositif d'actionneur a membrane electroactive - Google Patents
Dispositif d'actionneur a membrane electroactiveInfo
- Publication number
- EP2191522A2 EP2191522A2 EP08835106A EP08835106A EP2191522A2 EP 2191522 A2 EP2191522 A2 EP 2191522A2 EP 08835106 A EP08835106 A EP 08835106A EP 08835106 A EP08835106 A EP 08835106A EP 2191522 A2 EP2191522 A2 EP 2191522A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- electrodes
- membrane
- electric field
- electroactive
- reflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000012528 membrane Substances 0.000 title claims description 58
- 230000005684 electric field Effects 0.000 claims abstract description 20
- 239000011263 electroactive material Substances 0.000 claims abstract description 9
- 229920000642 polymer Polymers 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000007667 floating Methods 0.000 description 19
- 239000012212 insulator Substances 0.000 description 12
- 229920001746 electroactive polymer Polymers 0.000 description 7
- 238000009413 insulation Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 1
- 230000000763 evoking effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 210000005070 sphincter Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
Definitions
- the present invention relates to an electroactive polymer membrane device.
- the deformation is done by crushing the polymer parallel to the electric field lines.
- Such a phenomenon can be used for the production of actuators (especially diaphragm pumps) but also for the realization of sensor, the polymer being such that the electric field is altered when it is deformed.
- EP 1 683 968 discloses a diaphragm pump device comprising a concentric structure of discs of electroactive material separated by electrodes, this structure being bonded to the membrane. This device allows in this precise application not to pierce the membrane. However, this relatively complex solution can not be used in all membrane device applications.
- the object of the invention is to provide an electroactive device obviating the aforementioned drawbacks and improving the electroactive devices known from the prior art.
- the electroactive device according to the invention has a simple structure making it possible to avoid making a hole in an electroactive element in order to connect one of the electrodes to a terminal of a voltage generator.
- the invention also relates to an actuator comprising such an electroactive device.
- the electroactive device comprises an element made of electroactive material and two electrodes in contact with a first surface of the element. It is characterized in that the two electrodes are intended to be carried at two different electrical potentials and in that a means of reflection of the electric field created between the two electrodes is arranged on a second surface of the element.
- the electroactive material may be a polymer.
- the element can be a membrane.
- the first and second surfaces may be opposite or at least substantially parallel.
- the reflection means of the electric field may be at least substantially disposed vis-à-vis the electrodes.
- the electric field reflection means may comprise an integral electrical conductive element or a set of discrete electrical conductive elements.
- the reflection means may be covered by an insulating coating.
- the electric field reflection means may comprise electrically conductive grains in an insulating matrix.
- An insulating coating may cover the assembly formed by the first surface and the electrodes in contact with this surface.
- the electrodes may have means for connecting them to the two poles of the same voltage generator.
- the element may have an at least substantially flat shape.
- the element may have an at least substantially tubular shape, the first surface being the outer surface of this shape and the second surface being the inner surface thereof.
- the element may have an at least substantially spherical shape, the first surface being the outer surface of this shape and the second surface being the inner surface thereof.
- an actuator comprises at least one device defined previously.
- Figure 1 is a diagram of an electroactive device known from the prior art.
- Figure 2 is a diagram of a first embodiment of an electroactive device according to the invention.
- Figure 3 is a diagram of an actuator comprising an electroactive device according to this first mode.
- FIG. 4 is a diagram of an actuator comprising an electroactive device according to a second embodiment.
- Figure 5 is a diagram of a third embodiment of an electroactive device according to the invention.
- a first embodiment of an electroactive device mainly comprises an electroactive element 11 such as an electroactive polymer membrane.
- This membrane has an upper face 12 and a lower face 13, these two faces being opposite and at least substantially parallel.
- On the upper face 12 are disposed a first electrode 14 and a second electrode 15.
- the electrodes are directly in contact with the membrane at its upper face.
- the electrodes are made of an electrically conductive material such as for example a metal or a conductive polymer.
- Each electrode 14, 15 comprises means 18, 19 making it possible to connect it to a terminal of an electric voltage generator 20.
- This element comprises for example a plate or a metal film.
- the floating potential electrode may also not be uniform and / or be composed of conductive grains isolated from each other. It is thus possible to deposit, by spraying, deposition or other on the lower face of the membrane 11, a film constituting a floating potential electrode composed of metal grains, for example a metal powder, taken in a polymer matrix.
- each electrode on the same side of the membrane being connected to the same pole of a voltage source. It is noted in particular that the effect produced is the same whether the floating potential electrode is made in one piece or by a set of conductive grains discrete or isolated from each other.
- the electric field is not strictly perpendicular to the membrane at any point. There is, in places, a small parasitic lateral component which causes a slight lateral contraction of the membrane whereas the main field tends to dilate it in this lateral direction.
- the parasitic field being mainly present in the space between the two electrodes of the upper face, this defect is limited.
- this device comprising two electrodes on the same membrane face and a floating potential electrode on the other side allows to have electrical connections on one side of the membrane.
- an insulator 17 is provided.
- This insulator is flexible to deform with the membrane.
- the insulator covers the surfaces of the electrodes not in contact with the upper face of the membrane. It can also cover the upper surface of the membrane not in contact with the electrodes.
- the insulator has a dielectric permittivity much lower than that of the electroactive material constituting the membrane so as to avoid that electric field lines are concentrated in the insulator between the two electrodes.
- the insulation may for example be applied in one of the following ways: by gluing: a sheet of insulation is glued to the membrane once the electrodes are in place.
- the dielectric qualities (avalanche field) and mechanical (fatigue in the presence of cyclic stresses, temperature resistance) are as important as those of insulation itself, by deposition: the insulation is melted and applied in thin layers on the membrane, where it solidifies and settles.
- This method is more particularly indicated for viscous and / or thick polymer insulators, - by spraying: suitable for very thin and very low viscosity insulators in the liquid phase, by polymerization on the membrane: the reagents for the manufacture of the insulation are mixed on the membrane and stick to it during the formation of the polymer, - by painting: the paint then constitutes the insulator.
- the insulator is preferably at least as flexible as the electroactive polymer constituting the membrane on which it is laid. It must also have a relative permittivity much lower than that of the electroactive polymer constituting the membrane otherwise it will deform as much if not more than it.
- Possible materials include but are not limited to: rubber, neoprene, polytetrafluoroethylene (PTFE or teflon ®), - PVC, polyethylene, ethylene tetrafluoroethylene (ETFE).
- the floating potential electrode can also be isolated. For example, it can be insulated in the same way as the electrodes 14 and 15 using the same material to make an insulating film 21. This insulation is recommended when the floating potential electrode is a metal film or a conductive polymer. On the other hand, when the electrode consists of metal grains embedded in an insulating polymer, the electrical insulation is already achieved. Thus, the insulator and the floating potential electrode can constitute a single assembly, which makes the device comprising the membrane and the electrodes finer and eliminates the risk of leakage of electrical current to the medium in contact with the membrane.
- the device described with reference to FIG. 2 can be used to produce an actuator 100 comprising multiple electrodes.
- a plane membrane 11 may be in contact with a linear succession of electrodes 14a, 15a, 14b, 15b, 14c, 15c, 14d intended to be alternately connected to a first pole 18a and to a second pole 19a of a voltage source or several generators to form a succession of devices similar to that of Figure 2.
- the elements with the elements of Figures 2 and 3 bearing the same references are similar.
- This actuator can for example be placed on a conductive surface, in which case, compared to the known devices of the prior art, the absence of contacts on the contact surface avoids electrical faults, including short circuit. It should be noted that if the membrane is placed on a conductive surface, the floating potential electrode is no longer necessary, the conductive surface ensuring its function. It is then necessary to provide means for isolating this conductive surface if necessary. Another advantage of resting the membrane on a surface lies in the uniformity of the mechanical contact with the surface under the floating potential electrode. Prestressing can then be performed by stretching and gluing on the surface in question.
- an actuator 1 10 comprising multiple electrodes and having a tubular shape.
- Such an actuator 1 10 is described with reference to Figure 4 and comprises a succession of tubular devices 10 'having an electrical structure similar to that of the device of Figure 2 and comprising a tubular membrane 1 1' of electroactive material on the outer face 12 'of which are disposed a first annular electrode 14'a and a second annular electrode 15'a and on the inner face 13' of which is provided a tubular shaped floating potential electrode 16 '.
- the electrodes 14'a, 15'a, 14'b, 15'b 14'c, 15'c, 14'd, surrounded by an insulator 17 ', are intended to be alternately connected to a first pole 18'a and at a second pole 19'b of a voltage source or at several voltage sources.
- This structure has a significant advantage: the floating potential electrode is inside a tube and it is therefore not necessary to perforate the tube to pass an electrical conductor.
- this structure has the advantage of simplifying the construction of the tube, which can thus contain liquids without risk of electrical contact, leakage or rupture of the tube at son passage points under the effect of pressure.
- the actuator 10 has an electrical structure similar to that of the device of FIG. 2 and comprises a spherical membrane 11" of electroactive material on the outer face 12 "of which are disposed a first electrode 14" and a second electrode 15 " and on the inner face 13 "of which a spherical floating potential electrode 16" is provided, the electrodes 14 "and 15", surrounded by an insulator 17 ", are intended to be connected to a first pole 18 "and a second pole 19" of a voltage source.
- This structure has the same advantage as mentioned above: the floating potential electrode is inside a sphere that is not necessary to perforate to pass an electrical conductor.
- the device according to the invention it is possible to produce actuators having simplified structures. More exactly, the membrane can be made more freely without any perforation that could affect its sealing and / or its mechanical strength.
- the floating potential electrode may have various structures and act as a mirror for the electric field created by the electrodes connected to a voltage source. The potential of the floating potential electrode is fixed by itself with reference to the other electrodes and changes with the voltage applied thereto.
- the device according to the invention has a reduced number of electrical connections and simplifies the control of the electric field in the membrane.
- the device according to the invention makes it possible to use only one voltage source.
- the device according to the invention can in particular be applied to pumps, in particular membrane or pump hoses and cushions, balloons or surfaces with variable geometric shapes (headrest, seat ).
Landscapes
- Micromachines (AREA)
- Fluid-Pressure Circuits (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0706188A FR2920591B1 (fr) | 2007-09-04 | 2007-09-04 | Dispositif d'actionneur a membrane electroactive |
| PCT/FR2008/051571 WO2009044041A2 (fr) | 2007-09-04 | 2008-09-03 | Dispositif d'actionneur a membrane electroactive |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP2191522A2 true EP2191522A2 (fr) | 2010-06-02 |
Family
ID=39226943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP08835106A Withdrawn EP2191522A2 (fr) | 2007-09-04 | 2008-09-03 | Dispositif d'actionneur a membrane electroactive |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2191522A2 (fr) |
| FR (1) | FR2920591B1 (fr) |
| WO (1) | WO2009044041A2 (fr) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS566598A (en) * | 1979-06-29 | 1981-01-23 | Tdk Corp | Ultrasonic converting element |
| JPS58137318A (ja) * | 1982-02-10 | 1983-08-15 | Nec Corp | 薄膜圧電振動子 |
| JP2844068B2 (ja) * | 1988-04-30 | 1999-01-06 | 日本電波工業株式会社 | 超音波トランスジューサ |
| US6812624B1 (en) | 1999-07-20 | 2004-11-02 | Sri International | Electroactive polymers |
| GB2380315A (en) * | 2001-09-26 | 2003-04-02 | 1 Ltd | Bimrph electro-active element with floating central electrode |
| JP3832338B2 (ja) * | 2001-12-25 | 2006-10-11 | 松下電工株式会社 | 電歪ポリマーアクチュエータ |
| US6749556B2 (en) | 2002-05-10 | 2004-06-15 | Scimed Life Systems, Inc. | Electroactive polymer based artificial sphincters and artificial muscle patches |
| US7521840B2 (en) * | 2005-03-21 | 2009-04-21 | Artificial Muscle, Inc. | High-performance electroactive polymer transducers |
-
2007
- 2007-09-04 FR FR0706188A patent/FR2920591B1/fr not_active Expired - Fee Related
-
2008
- 2008-09-03 EP EP08835106A patent/EP2191522A2/fr not_active Withdrawn
- 2008-09-03 WO PCT/FR2008/051571 patent/WO2009044041A2/fr not_active Ceased
Non-Patent Citations (1)
| Title |
|---|
| See references of WO2009044041A2 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2009044041A3 (fr) | 2009-05-28 |
| FR2920591A1 (fr) | 2009-03-06 |
| FR2920591B1 (fr) | 2009-12-18 |
| WO2009044041A2 (fr) | 2009-04-09 |
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Legal Events
| Date | Code | Title | Description |
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| DAX | Request for extension of the european patent (deleted) | ||
| 17Q | First examination report despatched |
Effective date: 20140116 |
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| GRAP | Despatch of communication of intention to grant a patent |
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| RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 41/09 20060101ALI20150622BHEP Ipc: H01L 41/047 20060101AFI20150622BHEP |
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| INTG | Intention to grant announced |
Effective date: 20150716 |
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| STAA | Information on the status of an ep patent application or granted ep patent |
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| 18D | Application deemed to be withdrawn |
Effective date: 20151127 |