EP2160296A4 - Method of forming connection between electrode and actuator in an inkjet nozzle assembly - Google Patents

Method of forming connection between electrode and actuator in an inkjet nozzle assembly

Info

Publication number
EP2160296A4
EP2160296A4 EP07870177A EP07870177A EP2160296A4 EP 2160296 A4 EP2160296 A4 EP 2160296A4 EP 07870177 A EP07870177 A EP 07870177A EP 07870177 A EP07870177 A EP 07870177A EP 2160296 A4 EP2160296 A4 EP 2160296A4
Authority
EP
European Patent Office
Prior art keywords
actuator
electrode
nozzle assembly
inkjet nozzle
forming connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07870177A
Other languages
German (de)
French (fr)
Other versions
EP2160296A1 (en
EP2160296B1 (en
Inventor
Gregory John Mcavoy
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zamtec Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Priority to EP12174685.3A priority Critical patent/EP2527152B1/en
Publication of EP2160296A1 publication Critical patent/EP2160296A1/en
Publication of EP2160296A4 publication Critical patent/EP2160296A4/en
Application granted granted Critical
Publication of EP2160296B1 publication Critical patent/EP2160296B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1648—Production of print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14435—Moving nozzle made of thermal bend detached actuator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP07870177A 2007-06-15 2007-06-15 Method of forming connection between electrode and actuator in an inkjet nozzle assembly Active EP2160296B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP12174685.3A EP2527152B1 (en) 2007-06-15 2007-06-15 printhead integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/AU2007/000846 WO2008151351A1 (en) 2007-06-15 2007-06-15 Method of forming connection between electrode and actuator in an inkjet nozzle assembly

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP12174685.3A Division-Into EP2527152B1 (en) 2007-06-15 2007-06-15 printhead integrated circuit

Publications (3)

Publication Number Publication Date
EP2160296A1 EP2160296A1 (en) 2010-03-10
EP2160296A4 true EP2160296A4 (en) 2010-09-08
EP2160296B1 EP2160296B1 (en) 2012-08-15

Family

ID=40129117

Family Applications (2)

Application Number Title Priority Date Filing Date
EP12174685.3A Active EP2527152B1 (en) 2007-06-15 2007-06-15 printhead integrated circuit
EP07870177A Active EP2160296B1 (en) 2007-06-15 2007-06-15 Method of forming connection between electrode and actuator in an inkjet nozzle assembly

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP12174685.3A Active EP2527152B1 (en) 2007-06-15 2007-06-15 printhead integrated circuit

Country Status (5)

Country Link
EP (2) EP2527152B1 (en)
KR (1) KR101064043B1 (en)
CA (1) CA2688245C (en)
TW (2) TWI409175B (en)
WO (1) WO2008151351A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI495570B (en) * 2009-07-27 2015-08-11 Memjet Technology Ltd Inkjet printhead assembly having backside electrical connection
JP6575097B2 (en) * 2015-03-24 2019-09-18 セイコーエプソン株式会社 Head unit and liquid ejection device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332669B1 (en) * 1997-06-05 2001-12-25 Ricoh Company, Ltd. Ink jet head including vibration plate and electrode substrate
US6416168B1 (en) * 1997-07-15 2002-07-09 Silverbrook Research Pty Ltd Pump action refill ink jet printing mechanism
US20060066677A1 (en) * 2004-09-30 2006-03-30 Fuji Photo Film Co., Ltd. Liquid ejection head, manufacturing method thereof, and image forming apparatus
US20070103510A1 (en) * 1997-07-15 2007-05-10 Silverbrook Research Pty Ltd Ink jet nozzle arrangement with static and dynamic structures

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3177897B2 (en) 1996-04-23 2001-06-18 ザール テクノロジー リミテッド Droplet deposit device
US6648453B2 (en) * 1997-07-15 2003-11-18 Silverbrook Research Pty Ltd Ink jet printhead chip with predetermined micro-electromechanical systems height
US6416167B1 (en) 1997-07-15 2002-07-09 Silverbrook Research Pty Ltd Thermally actuated ink jet printing mechanism having a series of thermal actuator units
US6260953B1 (en) 1997-07-15 2001-07-17 Silverbrook Research Pty Ltd Surface bend actuator vented ink supply ink jet printing mechanism
JP4296361B2 (en) * 1999-04-06 2009-07-15 富士フイルム株式会社 Inkjet head, inkjet printer, and inkjet head manufacturing method
US6265301B1 (en) * 1999-05-12 2001-07-24 Taiwan Semiconductor Manufacturing Company Method of forming metal interconnect structures and metal via structures using photolithographic and electroplating or electro-less plating procedures
JP4288399B2 (en) * 2000-03-31 2009-07-01 富士フイルム株式会社 Multi-nozzle inkjet head and method for manufacturing the same
WO2001089842A1 (en) * 2000-05-24 2001-11-29 Silverbrook Research Pty. Ltd. Fluidic seal for an ink jet nozzle assembly
US6623101B1 (en) 2000-10-20 2003-09-23 Silverbrook Research Pty Ltd Moving nozzle ink jet
KR100552660B1 (en) * 2001-08-09 2006-02-20 삼성전자주식회사 Bubble-jet type ink-jet print head
TW200500292A (en) * 2002-11-20 2005-01-01 Reveo Inc Method of fabricating multi layer MENs and microfluidic devices
US6755509B2 (en) * 2002-11-23 2004-06-29 Silverbrook Research Pty Ltd Thermal ink jet printhead with suspended beam heater
JP5008844B2 (en) 2005-08-23 2012-08-22 株式会社リコー Droplet discharge head, inkjet recording apparatus, and method of manufacturing droplet discharge head

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6332669B1 (en) * 1997-06-05 2001-12-25 Ricoh Company, Ltd. Ink jet head including vibration plate and electrode substrate
US6416168B1 (en) * 1997-07-15 2002-07-09 Silverbrook Research Pty Ltd Pump action refill ink jet printing mechanism
US20070103510A1 (en) * 1997-07-15 2007-05-10 Silverbrook Research Pty Ltd Ink jet nozzle arrangement with static and dynamic structures
US20060066677A1 (en) * 2004-09-30 2006-03-30 Fuji Photo Film Co., Ltd. Liquid ejection head, manufacturing method thereof, and image forming apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2008151351A1 *

Also Published As

Publication number Publication date
EP2527152B1 (en) 2013-12-11
CA2688245C (en) 2012-12-18
EP2160296A1 (en) 2010-03-10
EP2160296B1 (en) 2012-08-15
CA2688245A1 (en) 2008-12-18
KR101064043B1 (en) 2011-09-08
TW200848270A (en) 2008-12-16
WO2008151351A1 (en) 2008-12-18
TWI409175B (en) 2013-09-21
KR20100029187A (en) 2010-03-16
TWI406772B (en) 2013-09-01
EP2527152A1 (en) 2012-11-28
TW200848271A (en) 2008-12-16

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