EP2115301B1 - Emitter für ionenantrieb - Google Patents

Emitter für ionenantrieb Download PDF

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Publication number
EP2115301B1
EP2115301B1 EP08762138.9A EP08762138A EP2115301B1 EP 2115301 B1 EP2115301 B1 EP 2115301B1 EP 08762138 A EP08762138 A EP 08762138A EP 2115301 B1 EP2115301 B1 EP 2115301B1
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Prior art keywords
internal
emitter
external
emitter according
face
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EP08762138.9A
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English (en)
French (fr)
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EP2115301A1 (de
Inventor
Dominique Valentian
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Safran Aircraft Engines SAS
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SNECMA SAS
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03HPRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H1/00Using plasma to produce a reactive propulsive thrust
    • F03H1/0037Electrostatic ion thrusters
    • F03H1/005Electrostatic ion thrusters using field emission, e.g. Field Emission Electric Propulsion [FEEP]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/26Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Definitions

  • the present invention relates to a transmitter for ionic propellant.
  • the invention relates to a field emitter for a field emission propellant or colloid propellant, comprising first and second portions delimiting an internal reservoir for supplying liquid metal or conductive ionic liquid and a slot communication between the inner tank and an outlet port.
  • FEEP Field Emission Electric Propulsion
  • ionic boosters are described in the following publication: Field emission electric propulsion development status ", C. Bartoli and D. Valentian, 17th IEPC Tokyo, May 1984 (IEPC International Electric Propulsion Conference ).
  • thrusters are characterized by great dynamics and are proposed for missions requiring a very precise relative positioning such as for example the LISA mission (Laser Interference Space Antenna), or a compensation of drag and external disturbances, such as for example the mission MICROSCOPE, whose object was to verify the principle of equivalence of general relativity.
  • LISA mission Laser Interference Space Antenna
  • mission MICROSCOPE whose object was to verify the principle of equivalence of general relativity.
  • the linear transmitter 10 comprises first and second superimposed portions 11, 12 which delimit between them a reservoir 16 (formed for example in the lower part 12) which is in communication with a linear slot 17 which opens out through a linear orifice extending over the entire width of the slot 17.
  • the superimposed portions 11 and 12 are joined by connecting means such as M2 screws passing through orifices 18 formed in the two parts 11 and 12.
  • the slot 17, which has a thickness of 1.5 microns, is obtained by vacuum deposition on the part 11, through a mask, a shim 19 for example pure nickel.
  • the U-shaped shim 19 extends on a rear branch and two side branches located on either side of the slot 17.
  • the minimum slit width is guaranteed by nickel studs 15 deposited on the part 11 across The mask ( Figure 3 ).
  • the Figure 4 is a sectional view which shows the cooperation of the transmitter 10 with an accelerating electrode 20 brought to a potential of -500 to -5 000 V, which makes it possible to establish an intense electric field on the tip of the transmitter 10 of which the potential is from + 5000 to + 10,000 V.
  • the liquid for example cesium
  • the liquid is introduced through a chimney 13 into the tank 16 and then expelled through the slot 17.
  • Operation requires perfect wetting by the liquid. This requires vacuum curing which can be achieved by a heating resistor (up to a temperature of the order of 200 ° C).
  • the linear emitter technology makes it easy to obtain thrusts less than 1 mN, but becomes more delicate for higher thrusts, of the order of 5 to 10 mN for example.
  • a high thrust is necessary for example to perform the drag compensation of satellites in low orbit or to perform planetary missions at high speed increments (more than 15 km / s).
  • the invention aims to remedy the aforementioned drawbacks, and in particular to make it possible to implement ionic thrusters having a thrust greater than 1 mN, typically of the order of 5 to 10 mN, while allowing a simplified and reliable manufacture, guaranteeing a great precision of realization.
  • the invention also aims at producing a transmitter capable of operating both on the ground in the horizontal or vertical firing position and in the space in microgravity.
  • a Field Emitter or Colloid Propellant Field Effect Transmitter comprising first and second portions having a symmetry of revolution and delimiting an internal supply tank of liquid metal or conductive ionic liquid. and a communication slot between the inner reservoir and an exit orifice, characterized in that the first portion constitutes an outer portion with a polished outer face and an inner face made by precision machining and having conical portions with a single slope determined between 5 and 8 °, in that the second part constitutes an internal part with an internal face and an outer face made by precision machining and having conical portions with a single slope of between 5 and 8 °, the inner face of the outer portion and the outer face of the inner portion delimiting said inner reservoir and said slot, in that metal studs are formed by deposition on the outer face of the inner part to define a thickness of said slot comprised between 1 and 2 micrometers, in that the outer part is maintained applied against the inner part by connecting means, and in that it further comprises a capillary supply channel having a thickness of between 10 and 15
  • the transmitter is characterized in that the exit orifice of the slot constitutes a circular orifice whose radius is between 5 and 50 mm and which is delimited by external and internal tips constituted by ends of the external and internal parts and whose alignment is adjustable by a sealing wedge interposed between bearing surfaces of the first and second parts which extend perpendicularly to the axis of symmetry of said first and second parts.
  • the conical surface of the inner face of the outer portion has three conical portions of the same slope but having progressive conical transitions between them, so as to define said capillary supply channel, said inner reservoir and said slot.
  • the transmitter further comprises a feed channel with a diameter of between 1 and 2 millimeters formed in the second part and opening into the internal reservoir to feed it from an external fluid source.
  • the particular structure recommended for the circular slot transmitter allows the precise realization of a circular slot of for example 1.5 micrometer over a diameter of 30 to 100 mm thanks to the geometry that allows self-centering and provides a possibility of adjustment, so as to obtain a precision that could not be obtained by simple machining.
  • the invention also relates to the application of the transmitter to a field emission thruster or to colloids, the transmitter being mounted in the vicinity of an accelerating electrode structure, itself surrounded by a screen connected to ground , isolation pads being interposed between the emitter and the accelerator electrode structure, and between the accelerator electrode structure and the screen connected to ground.
  • FIGS. 5 and 6 show the general structure of an example of a circular emitter 100 according to the invention, and the Figure 7 shows the incorporation of such a circular emitter 100 in an ion thruster.
  • the transmitter 100 comprises an inner part 120 having a symmetry of revolution about an axis O, with a base 190 and a protruding part of which an external face 122 ( Figure 1 ) cooperates with the inner face 112 of an outer part 110 which also has a symmetry of revolution about the axis O, is attached to the inner part 120 and is held against this inner part 120 by connecting means such as a nut 140.
  • the Figure 7 shows the incorporation of the circular emitter 100 into an ion thruster such as a field emission thruster or colloid.
  • the transmitter 100 is mounted in the vicinity of an accelerator electrode structure 200 which envelops the transmitter 100.
  • the accelerator electrode structure 200 is surrounded by a screen 300 connected to ground. Insulation pads 401, 402 are interposed between the emitter 100 and the accelerator electrode structure 200, as well as between the accelerator electrode structure 200 and the screen 300 connected to ground.
  • the base plate 190 of the inner part 120 has lights 400 ( Figure 6 ) to ensure the passage of the high voltage insulation pads, such as the pad 401, of the transmitter 100 as well as the pipes 185 ( Figure 5 ) supplying the internal reservoir with liquid, such as cesium.
  • the screen 300 connected to ground prevents interactions between the external plasma created at the outlet of the orifice 171 of the circular slot delimited between the parts 110 and 120, and the electrodes under tension 200.
  • the external plasma results from the operation of the hollow cathode neutraliser located outside the screen in the vicinity of the outlet orifice 171 of the circular slot of the transmitter 100.
  • the accelerating electrode 200 and the screen 300 have annular openings 201, 301 facing the circular outlet orifice 171 of the slot of the transmitter 100 (FIG. Figure 7 ).
  • a heating resistor 195 ( Figures 5 and 7 ) can be arranged in the vicinity of the inner part 120, under the base 190, at the the vicinity of the liquid supply pipes 185 to provide a stoving of the emitter, which is then cooled, and then maintaining in the liquid state in the emitter itself composed of the parts 110 and 120.
  • the shoulder formed by the base 190 of the inner part 120 may have a reduced height and a separate plate 191 may be superimposed on this base 190 (variant shown on the right side of the Figure 6 ).
  • the potential of the accelerating electrode 200 is very negative (-1000 V to -5000 V) and attracts the plasma ions.
  • the accelerating electrode 200 is effectively protected from an excessive current of ions due to the ionospheric plasma and the neutralizer thanks to the screen 300 which in particular surrounds the central part of the accelerating electrode 200 inside the transmitter.
  • the inner part 120 has an inner face 121 whose surface state is not critical and an outer face 122 made by precision machining and polished, having conical portions with a single slope determined between 5 and 8 °.
  • the outer part 110 has a polished outer face 111 and an inner face 112 made by precision machining and having ionic portions with a single slope determined between 5 and 8 °.
  • the inner face 112 of the outer part 110 and the outer face 122 of the inner part 120 delimit an annular internal reservoir 160 and an annular slot 170 opening through a circular orifice 171.
  • Metal studs 123, 124, 125 are deposited under vacuum, for example by sputtering, on the part of the outer face 122 of the inner part 120, to determine the width of the slot 170.
  • the deposit Vacuum pads can be made using a split conical mask. When mounting the two conical parts the sliding of the pads on the opposite surface is for example only 160 microns for a clamping of 16 microns and a slope of 10% (6 °). This reduced friction stroke limits the risk of tearing pads.
  • the pads can be obtained by direct machining, with a tool lift of 1 to 2 microns.
  • Nozzles 116, 126 constituted by the ends of the outer and inner parts 110, 120 and delimiting the circular outlet orifice 171 can be aligned to within 1 micrometer for outlet port radii 171 which can be between 5 and 50 mm .
  • Vertical alignment of the beaks 116, 126 is adjustable by grinding a sealing shim 130 interposed between bearing surfaces 117, 127 of the outer and inner parts 110, 120 which extend perpendicular to the axis of symmetry O of these parts 110, 120.
  • the shim 130 is preferably made of nickel and also seals between the parts 110 and 120 to prevent leakage of liquid to the outside at the lower part of the outer part 110.
  • the closure between the parts 110 and 120 is provided by mechanical connection means such as screws or solder.
  • mechanical connection means such as screws or solder.
  • the mechanical connection between the parts 110 and 120 enclosing the shim 130 is provided preferably by a nut 140 with fine pitch.
  • the internal face 112 of the outer part 110 has three conical sections 112A, 112B, 112C of the same slope but not aligned and joined together by progressive conical transitions to prevent the meniscus of the liquid is blocked at a level of abrupt variation of the diameter, while the outer face 122 of the inner part 120 has in its upper part a single conical face to define on the one hand the inner tank 160, in cooperation with the section 112A and on the other hand, to the upper part provided with pads 123 to 125, the annular slot 170 in cooperation with the section 112C.
  • Intermediate section 112B and the corresponding slope of face 122 define a capillary supply channel 161 of diameter between 10 and 15 micrometers, which is interposed between internal reservoir 160 and slot 170 to allow a capillary rise of the liquid since the internal tank 160 to the narrow slot 170, regardless of the position of the transmitter.
  • the capillary supply channel 161 facilitates in all cases the feeding of the narrow slot 170 and also allows a shot in particular with a horizontal axis.
  • the small volume 160 delimited by the lower section 112A of the conical face 112 and the conical face 122 may for example correspond to a mean radius difference of the section 112A and the conical face 122 of the order of 1.5 to 2 mm and allows both to ensure a degassing of the transmitter and to constitute a buffer tank inside the transmitter for a liquid such as cesium intended to be propelled by the orifice 171.
  • the inner part 120 may have between the bottom surface of its base 190 and the orifice 171 a height H for example between 20 and 30 mm.
  • the inner tank 160 can be fed from the external pipes 185 ( figure 5 ) through a bore 150, for example of diameter between 1 and 2 millimeters, made in the base 190 of the inner part 120.
  • the slopes of the different sections 112A, 112B, 112C of the rectified internal face 112 of the outer part 110 are identical to each other. This facilitates machining and assembly.
  • the slope, between 5 and 8 °, is determined according to the machining constraints.
  • the inner part 120 is preferably designed to be much stiffer than the outer part 110. It can be seen for example on the figure 1 that the inner part 120 is more massive than the complementary part 110.
  • the inner and outer parts 120, 110 may be made for example of a nickel superalloy, or a hardened stainless steel.
  • the surfaces to be machined 112, 122 must be made on a hard substrate.
  • a nickel superalloy such as that known under the name INCONEL 718, or a hardened stainless steel coated with a layer of chemical nickel are thus well suited materials for constituting the parts 110, 120.
  • the polished faces of the parts 110, 120 are preferably obtained by direct diamond machining on a precision machine, according to the technique used for the realization of metal mirrors.
  • the aforementioned polished zones and in particular the surfaces delimiting the slot 170 and the external surface subjected to the electric field must preferably have a polish of 0.025 ⁇ m rms.
  • the straightness of the surfaces facing the slot 170 and at the beaks 116, 126 must be very good. On the other hand, defects in shape are tolerable on the outer surface 111, because on this surface the role of the polish is to avoid local discharges by micro-tips.
  • the non-critical areas of the surfaces of the parts 110 and 120 may have a surface state of the order of 0.2 micrometer.
  • the transmitter structure according to the invention makes it possible to obtain a circular slot 170 of small width, for example preferably between 1 and 1.8 micrometer, and an alignment of the beakers 116, 126 to within 1 micrometer, even for a slot 170 whose outlet orifice 171 has a radius R between 15 and 50 mm.
  • the invention provides a simplification of the construction of the transmitter 100 because for mounting the outer part 110 on the inner part 120 it is easier to give a conical slope to the contact surface 112 than to mount by differential expansion.
  • the mounting on cones used to build the transmitter 100 also allows several disassemblies which allows to align the nozzles 116, 126 by rotation of the outer part 110, to remedy the lack of parallelism of the beaks 116, 126 vis-à-vis the reference faces, and also by grinding the shim 130 located in the lower part of the outer part 110, to compensate for the difference in height between the outer and inner parts 110, 120.
  • the degassing of the emitter 100 can be ensured by the conductance of the slot 170 and a liquid filling chimney, similar to the chimney 13 of the linear emitter of the figure 4 , in a ground test configuration.
  • the degassing can be obtained by a dedicated orifice or by a "getter” degassing material incorporated in the cavity 160, 161 formed between the outer and inner parts 110, 120 and serving for the supply of Slot liquid 170.
  • the term "getter” is used to refer to a set of reactive metals used in vacuum tubes to improve vacuum.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Particle Accelerators (AREA)
  • Plasma Technology (AREA)
  • X-Ray Techniques (AREA)

Claims (16)

  1. Feldeffekt-Emitter für ein Feldemissionstriebwerk oder Kolloid-Triebwerk, umfassend einen ersten und einen zweiten Teil (110, 120), die eine Rotationssymmetrie aufweisen und einen Innenbehälter (160) für das Zuführen von Flüssigmetall oder von leitender ionischer Flüssigkeit und einen Verbindungsspalt (170) zwischen dem Innenbehälter (160) und einer Austrittsöffnung (171) begrenzen, wobei der erste Teil (110) einen äußeren Teil mit einer geglätteten Außenseite (111) und einer Innenseite (112), welche durch Präzisionsbearbeitung hergestellt ist und konische Abschnitte mit einer bestimmten einheitlichen Neigung zwischen 5 und 8° aufweist, bildet, der zweite Teil (120) einen inneren Teil mit einer Innenseite (121) und einer Außenseite (122), welche durch Präzisionsbearbeitung hergestellt ist und konische Abschnitte mit einer einheitlichen Neigung zwischen 5 und 8° aufweist, bildet, wobei die Innenseite (112) des äußeren Teils (110) und die Außenseite (122) des inneren Teils (120) den Innenbehälter (160) und den Spalt (170) begrenzen, Metallklötze (123, 124, 125) durch Abscheiden auf der Außenseite (122) des inneren Teils (120) ausgebildet sind, um eine Dicke des Spalts (170) im Bereich zwischen 1 und 2 Mikrometern zu definieren, der äußere Teil (110) an dem inneren Teil (120) durch Verbindungsmittel (140) angelegt gehalten ist, und ferner umfassend einen Kapillarzuführkanal (161) mit einer Dicke im Bereich zwischen 10 und 15 Mikrometern, welcher zwischen dem Innenbehälter (160) und dem Spalt (170) ausgebildet und durch konische Flächen der Innenseite (112) des äußeren Teils (110) bzw. der Außenseite (122) des inneren Teils (120) begrenzt ist, um diesen Spalt (170) von dem Behälter (160) aus durch Kapillarwirkung zu versorgen.
  2. Emitter nach Anspruch 1, dadurch gekennzeichnet, dass die Austrittsöffnung (171) des Spalts (170) eine kreisförmige Öffnung bildet, deren Radius zwischen 5 und 50 mm beträgt und die durch einen äußeren und einen inneren Schnabel (116, 126) begrenzt ist, welche durch Enden des äußeren und des inneren Teils (110, 120) gebildet sind und deren Ausrichtung durch einen Dichtungskeil (130) einstellbar ist, welcher zwischen Auflageflächen (117, 127) des ersten und des zweiten Teils (110, 120), die sich senkrecht zu der Symmetrieachse des ersten und des zweiten Teils (110, 120) erstrecken, eingefügt ist.
  3. Emitter nach Anspruch 1 oder Anspruch 2, dadurch gekennzeichnet, dass die konische Fläche der Innenseite (112) des äußeren Teils (110) drei konische Abschnitte mit gleicher Neigung aufweist, die jedoch zwischen sich schrittweise konische Übergänge aufweisen, um den Kapillarzuführkanal (161), den Innenbehälter (160) und den Spalt (170) zu begrenzen.
  4. Emitter nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass er ferner einen Zuführkanal (150) mit einem Durchmesser zwischen 1 und 2 Millimetern umfasst, der in dem zweiten Teil (120) ausgebildet ist und in den Innenbehälter (160) mündet, um diesen von einer äußeren Fluidquelle aus zu versorgen.
  5. Emitter nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Mittel zum mechanischen Verbinden eine Mutter (140) umfassen.
  6. Emitter nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Mittel zum mechanischen Verbinden Schrauben umfassen.
  7. Emitter nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Mittel zum mechanischen Verbinden eine Lötverbindung umfassen.
  8. Emitter nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass der erste und der zweite Teil (110, 120) aus einer Nickel-Superlegierung hergestellt sind.
  9. Emitter nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass der erste und der zweite Teil (110, 120) aus einem rostfreien, gehärteten Stahl hergestellt sind.
  10. Emitter nach einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass er ein Getter-Material zur Entgasung umfasst, das in den zwischen dem ersten und dem zweiten Teil (110, 120) ausgebildeten Hohlraum eingebettet ist.
  11. Emitter nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass die Metallklötze (123, 124, 125) aus Nickel bestehen.
  12. Emitter nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass die Metallklötze (123, 124, 125) durch Direktbearbeitung hergestellt sind.
  13. Emitter nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, dass der zweite Teil (120) steifer als der erste Teil (110) ist.
  14. Emitter nach Anspruch 2, dadurch gekennzeichnet, dass der Dichtungskeil (130) aus Nickel besteht.
  15. Emitter nach einem der Ansprüche 1 bis 14, dadurch gekennzeichnet, dass er ferner einen Heizwiderstand (195), welcher in der Nähe des zweiten Teils (120) angeordnet ist, umfasst.
  16. Feldemissions- oder Kolloid-Triebwerk,
    dadurch gekennzeichnet, dass es einen Emitter nach einem der Ansprüche 1 bis 15 umfasst, welcher Emitter in der Nähe einer Beschleunigungselektrodenstruktur (200) angebracht ist, die selbst von einem mit der Masse verbundenen Schild (300) umgeben ist, wobei Isolationsklötze (401, 402) zwischen dem Emitter (100) und der Beschleunigungselektrodenstruktur (200) sowie zwischen der Beschleunigungselektrodenstruktur (200) und dem mit der Masse verbundenen Schild (300) eingefügt sind.
EP08762138.9A 2007-02-21 2008-02-21 Emitter für ionenantrieb Active EP2115301B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0753407A FR2912836B1 (fr) 2007-02-21 2007-02-21 Emetteur pour propulseur ionique.
PCT/FR2008/050292 WO2008113942A1 (fr) 2007-02-21 2008-02-21 Emetteur pour propulseur ionique

Publications (2)

Publication Number Publication Date
EP2115301A1 EP2115301A1 (de) 2009-11-11
EP2115301B1 true EP2115301B1 (de) 2017-07-05

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EP08762138.9A Active EP2115301B1 (de) 2007-02-21 2008-02-21 Emitter für ionenantrieb

Country Status (5)

Country Link
US (1) US8365512B2 (de)
EP (1) EP2115301B1 (de)
JP (1) JP2010519456A (de)
FR (1) FR2912836B1 (de)
WO (1) WO2008113942A1 (de)

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FR2950115B1 (fr) * 2009-09-17 2012-11-16 Snecma Propulseur plasmique a effet hall
AT512617B1 (de) * 2012-03-13 2016-04-15 Fotec Forschungs Und Technologietransfer Gmbh Ionenquelle
CN102678501A (zh) * 2012-05-24 2012-09-19 中国科学院力学研究所 镓离子场发射微推进器
CN103244310B (zh) * 2013-05-07 2015-07-29 中国科学院力学研究所 一种用于液态金属离子推进器的推进剂管理系统
FI127307B (en) 2017-01-27 2018-03-15 Neste Oyj Fuel compositions with improved boiling properties and processes for their preparation
FR3066557B1 (fr) * 2017-05-16 2019-05-10 Safran Aircraft Engines Dispositif de regulation de debit de fluide propulsif pour propulseur electrique
CN110360073B (zh) * 2019-07-19 2020-05-05 北京航空航天大学 一种电推力器阳极气体分配器
KR102569007B1 (ko) * 2022-11-25 2023-08-22 서울대학교산학협력단 전계방출 추력기 원주형슬릿에미터장치
KR102623629B1 (ko) * 2022-12-09 2024-01-11 서울대학교산학협력단 전계방출 추력기 프리웨팅장치
KR102623630B1 (ko) * 2022-12-09 2024-01-11 서울대학교산학협력단 전계방출 추력시스템
KR102623628B1 (ko) * 2022-12-09 2024-01-11 서울대학교산학협력단 전계방출 추진장치

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US4318028A (en) * 1979-07-20 1982-03-02 Phrasor Scientific, Inc. Ion generator
JPS57205953A (en) * 1981-06-12 1982-12-17 Jeol Ltd Ion source
FR2510304A1 (fr) * 1981-07-24 1983-01-28 Europ Agence Spatiale Source ionique a emission de champ, notamment pour propulseur ionique a applications spatiales
JPS6043620B2 (ja) * 1982-11-25 1985-09-28 日新ハイボルテージ株式会社 マイクロ波イオン源
US6516604B2 (en) * 2000-03-27 2003-02-11 California Institute Of Technology Micro-colloid thruster system
CN1983504B (zh) * 2005-12-14 2010-05-26 鸿富锦精密工业(深圳)有限公司 离子源及使用所述离子源的模具抛光装置
US7827779B1 (en) * 2007-09-10 2010-11-09 Alameda Applied Sciences Corp. Liquid metal ion thruster array

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Also Published As

Publication number Publication date
FR2912836B1 (fr) 2012-11-30
FR2912836A1 (fr) 2008-08-22
JP2010519456A (ja) 2010-06-03
US20100018185A1 (en) 2010-01-28
US8365512B2 (en) 2013-02-05
WO2008113942A1 (fr) 2008-09-25
EP2115301A1 (de) 2009-11-11

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