EP2095199A2 - Ensemble soupape - Google Patents

Ensemble soupape

Info

Publication number
EP2095199A2
EP2095199A2 EP07725397A EP07725397A EP2095199A2 EP 2095199 A2 EP2095199 A2 EP 2095199A2 EP 07725397 A EP07725397 A EP 07725397A EP 07725397 A EP07725397 A EP 07725397A EP 2095199 A2 EP2095199 A2 EP 2095199A2
Authority
EP
European Patent Office
Prior art keywords
valve
valve device
pressure sensor
force
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07725397A
Other languages
German (de)
English (en)
Inventor
Johannes Volzer
Wolfang Mechler
Markus Weber
Bernd Kärcher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP2095199A2 publication Critical patent/EP2095199A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/202—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means actuated by an electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
    • F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D15/00—Control of mechanical force or stress; Control of mechanical pressure
    • G05D15/01—Control of mechanical force or stress; Control of mechanical pressure characterised by the use of electric means

Definitions

  • the invention relates to a valve device, comprising a valve unit having a valve chamber in which a valve member by means of an actuator between an open position and a closed position, in which the valve member for fluid-tight closing of the passage through the valve chamber with contact force to a valve seat comes into contact and corresponding sealing surfaces on valve member and valve seat are pressed together, is movable, and with a coupled to the actuator control means for controlling the contact pressure.
  • a valve device of the type mentioned which has a valve which is located in a passageway between two vacuum chambers.
  • the valve is designed as a slide valve, wherein a valve slide in its closed position blocks the passage through the passageway fluid-tight.
  • On the valve spool is a seal, which is pressed when closing with a contact force on a valve seat.
  • the contact pressure required to achieve a sealing effect depends largely on the differential pressure between the two vacuum chambers. At a smaller differential pressure, a smaller contact force is required to achieve the desired sealing effect, while at a larger differential pressure accordingly a larger contact force is necessary.
  • each vacuum chamber is assigned a pressure sensor, so that the differential pressure between the two vacuum chambers can be determined. Via a control unit, which is coupled to the actuator, the contact pressure can then be controlled in dependence on the determined differential pressure. In concrete terms, this means that the closing position of the valve spool is defined defined as a function of the determined differential pressure.
  • the lo ratios in the passage are not taken into account in such differential pressure measurements. For example, frictions that are not taken into account occur there, so that such measurements are faulty.
  • the object of the invention is to provide a valve device of the type mentioned, with which the contact pressure when closing the valve member can be controlled reliably and with simple means.
  • the valve device is characterized in that the control device has a valve element arranged on the valve element. Neten load cell for receiving the force acting on the valve member, wherein the force via transmission medium to a pressure sensor located outside the valve chamber is transferable.
  • the force acting on the valve member can be the contact pressure force on contact with the sealing surface on the valve seat or, in the case of a position of the valve member lifted off the valve seat, the force acting on the valve chamber due to the pressure conditions in the valve chamber.
  • the measurement is thus carried out directly at the point of action, namely on the valve member, which is pressed when closing with contact force on the valve seat.
  • the pressure sensor is located outside the valve chamber, so that cable routing from the valve chamber is avoided when the signal is transmitted by cable. High temperatures can prevail in the valve chamber, which can impair the functionality of a pressure sensor arranged in the valve chamber. If the pressure sensor is located outside the valve chamber, this problem does not arise.
  • the transmission means serving for force transmission between the force transducer and the pressure sensor can be formed by at least one fluid column, in particular a fluid column, coupled on the one hand to the force transducer and, on the other hand, to the pressure sensor.
  • the incompressibility of the liquid causes a direct, independent of the transmission medium power transmission.
  • a liquid for example, oil, preferably hydraulic oil, may be provided.
  • transmission means at least one on the one hand with the force transducer and on the other hand with the pressure sensor coupled rigid transmission member, for example in the form of a plunger, is provided.
  • the transmission means are arranged in a projecting into the valve chamber via a passage output member of the actuator.
  • a fluid-operated working cylinder is provided as the actuator, which has a cylinder housing in which a fluidbeauftschter working piston is movably guided, which in turn is connected to a the output member forming piston rod.
  • an electric linear drive for example a linear motor, as the actuator.
  • the transmission means can be arranged in a sensor carrier projecting beyond a passage into the valve chamber and receiving the pressure sensor in a region outside the valve chamber.
  • the pressure sensor is located outside the valve chamber. As already mentioned above, it can be attached to a sensor carrier. Alternatively, it is possible that the pressure sensor is seated on the actuator, for example on the output member, during
  • the load cell is formed by a bellows which hermetically seals a fluid-filled pressure chamber.
  • a fluid-filled bellows is used.
  • other types of force sensors can also be used, for example a deformation body with strain gauges (DMS) or the like.
  • DMS deformation body with strain gauges
  • the force transducer is expediently located at the connection point between valve member and driven member or sensor carrier. By varying the force application surface of the force transducer, different force translations are possible between the force acting on the valve member and the force transmitted by the force transducer to the pressure sensor.
  • a control module for processing signals transmitted by the pressure sensor by means of signal transmission and corresponding to actual actual contact forces, and for controlling the actuator. Since the pressure sensor is located outside the valve chamber, a simple, cable-controlled signal transmission from the pressure sensor to the control module is also possible. Alternatively, a wireless signal transmission, in particular signal transmission by means of radio, conceivable.
  • an elastic seal which is claimed when pressing the valve member to the valve seat.
  • the valve device may further comprise a passageway which connects two working chambers, for example vacuum chambers, to each other.
  • the valve chamber of the valve unit may be arranged.
  • FIG. 1 shows a schematic representation of a first embodiment of the valve device according to the invention, wherein only a part of the valve unit is shown,
  • FIG. 2 shows an enlarged view of the valve device of FIG. 1 with all the components of the valve unit in a schematic illustration
  • FIG. 3 shows a second embodiment of the valve device according to the invention in a schematic representation
  • Figure 4 shows a third embodiment of the valve device according to the invention in a schematic representation.
  • FIGS 1 and 2 show a first embodiment of the valve device 11 according to the invention the heart of the valve device 11 is a valve unit 12, which could also be referred to as a process valve.
  • the valve unit 12 has a valve chamber 13, in which a valve member 14 by means of an actuator 15 between an open position and a closed position is movable.
  • the valve chamber 13 is located in a passage 16 which connects two working chambers 17, 18 with each other. In the working chambers 17, 18 process gases may be located. An exchange is possible via the passage 16.
  • the task of the valve unit 12 is, if necessary, to close the passage through the passageway 16 in a fluid-tight manner.
  • valve member 14 is moved by means of the actuator 15 in its closed position, in which it comes with contact pressure on a valve seat 19 to the plant.
  • mutually corresponding sealing surfaces are pressed together.
  • the Valve member-side sealing surface is formed by an elastic seal 20 which is attached to the outside of the valve member 14, in particular vulcanized to the outside.
  • the valve member 14 may have a wedge-shaped cross section, wherein the tip of the valve member 14 is immersed in the closed position in the corresponding thereto also wedge-shaped valve seat 19.
  • a control device 21 is used to set a defined contact force.
  • This comprises a force transducer 22 for receiving the force acting on the valve member 14 which can be transmitted via transmission means to a pressure sensor 23 located outside the valve chamber 13.
  • a bellows As a load cell, a bellows is provided, which hermetically seals a liquid-filled pressure chamber.
  • the liquid used here is oil.
  • the transmission means are also formed in this case by a liquid column 29, which communicates on the one hand with the pressure chamber of the bellows and on the other hand with the
  • Pressure sensor 23 is coupled. As a liquid is also here Used oil.
  • the bellows is located at the junction between valve member 14 and a driven member 24 of the actuator 15th
  • the actuator 15 is shown here by way of example in the form of a fluid-operated working cylinder, which has a cylinder housing 25 in which a working piston 26 which can be loaded with fluid is movably guided.
  • the working piston 26 is connected to a piston rod which forms the output member 24 and which projects into the valve chamber 13 via a passage 28 which is sealed by means of a seal 27.
  • the bellows is located at the piston-remote end of the piston rod.
  • the liquid column 29 is located inside the hollow piston rod.
  • the piston rod can pass through the rear side of the cylinder housing 25, in which case the pressure sensor 23 is seated on the bellows-distal end of the piston rod. It can also be provided two piston rods, of which a first piston rod connects the bellows with the piston and the other piston rod connecting the piston with the pressure sensor 23. In an alternative, not shown, the pressure sensor may also be located in the working piston. A continuation of the piston rod or a second piston rod is then not necessary.
  • the pressure sensor 23 comprises a P / U converter, which detects the force transmitted by the liquid column 29 in the form of a pressure and converts it into a voltage.
  • a control module 30 which receives the voltage signals of the pressure sensor 23 and the working cylinder conveniently via a control valve (not shown) controls.
  • the signal transmission from the pressure sensor 23 to the control module 30 is carried out according to the first embodiment by cable. Alternatively, however, a wireless or wireless signal transmission would be possible.
  • Figure 3 shows a second embodiment of the invention. It differs from the first exemplary embodiment described above in that a sensor carrier 31 is provided, which protrudes into the valve chamber 13 via a passage 28 which is sealed by means of a seal 27.
  • the senlo sorrien 31 carries on the one hand the bellows, which in turn is in contact with the valve member 14, while on the other hand is coupled to the piston rod of the working cylinder.
  • the pressure sensor 23 is fastened to the sensor carrier 31, to be precise in an area located outside of the valve chamber 13.
  • the pressure space of the bellows and the pressure sensor are in turn connected to each other by means of a liquid column 29, wherein the liquid column 29 is located in a channel 32 formed in the sensor carrier 31.
  • the signal transmission from the pressure sensor 23 to the likewise
  • 20 existing control module 30 is done by cable.
  • FIG. 4 shows a third exemplary embodiment of the invention, which is constructed identically to the second exemplary embodiment, with the exception that the signal transmission from the pressure sensor 23 to the control module 30 takes place by means of radio.
  • valve device The function of the valve device is described in more detail below:
  • valve member 14 is initially in its open position shown in Figure 1. In this case, the valve member 14 has moved completely out of the through-channel 16, so that there is no flow resistance for flow in the through-channel 16. forming process fluid.
  • the working cylinder is activated, wherein the piston rod remote side of the piston 26 with fluid, in particular with compressed air is applied, so that the piston, for example, as shown in Figures 2 to 4, after is moved above, whereby the piston rod extends out of the working cylinder and the valve member 14 is moved in the direction of the valve seat 19.
  • the speed with which the valve member 14 moves in the direction of the valve seat is chosen to be relatively high, but only until the seal 20 located on the valve member contacts the sealing surface on the valve seat 19. If the valve member 14 is now moved further, the contact pressure increases.
  • the actual contact pressure is transmitted to the pressure chamber of the bellows and from there via the liquid column 29 to the pressure sensor 23.
  • the actual contact pressure is detected as a contact pressure and converted into a corresponding voltage signal.
  • This voltage signal is then transmitted by cable or wireless to the control module 30, where a comparison of the actual contact pressure with a minimum contact force and a maximum contact force takes place.
  • the minimum contact pressure must be exceeded for a fluid-tight seal of the valve chamber 13 takes place.
  • the maximum contact pressure must not be exceeded, otherwise the elastic seal 20 will be damaged.
  • the contact pressure also depends on the pressure conditions in the passage, which are also taken into account, as they ultimately represent nothing else than a force acting on the valve member 14. Is the minimum
  • the pressure sensor 23 is seated outside the valve chamber 13, whereby it is protected from high temperatures and aggressive process media.
  • the position of the pressure sensor 23 also brings the advantage that a complex cable management out of the valve chamber 13 out - in this case, in turn, should pay attention to the fluid tightness of the cable gland - be avoided.
  • the position of the pressure sensor 23 outside the valve chamber 13 opens the possibility of wireless signal transmission to the control module 30. If the pressure sensor 23 within the valve chamber 13 would be due to the valve chamber 13 surrounding, shielding material wireless signal transmission only limited or not possible ,

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

L'invention concerne un ensemble soupape comprenant une unité de distribution qui présente une chambre de distribution (13) dans laquelle un obturateur (14) peut être déplacé au moyen d'un mécanisme d'actionnement (15) entre une position d'ouverture et une position de fermeture dans laquelle l'obturateur (14) vient en contact contre un siège de soupape (19) avec une force de pression pour bloquer hermétiquement le passage à travers la chambre de distribution (13), des surfaces d'étanchéité correspondantes de l'obturateur (14) et du siège de soupape (19) étant alors plaquées l'une contre l'autre. L'ensemble soupape comprend par ailleurs un dispositif de commande (21) qui est couplé au mécanisme d'actionnement (15) et sert à commander la force de pression. Selon l'invention, le dispositif de commande (21) présente un capteur de force (22) disposé sur l'obturateur (14) pour capter la force agissant sur ce dernier, cette force pouvant être transmise à un capteur de pression (23) se trouvant à l'extérieur de la chambre de distribution (13) par l'intermédiaire de moyens de transmission.
EP07725397A 2007-05-21 2007-05-21 Ensemble soupape Withdrawn EP2095199A2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2007/004490 WO2008141661A2 (fr) 2007-05-21 2007-05-21 Ensemble soupape

Publications (1)

Publication Number Publication Date
EP2095199A2 true EP2095199A2 (fr) 2009-09-02

Family

ID=39875133

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07725397A Withdrawn EP2095199A2 (fr) 2007-05-21 2007-05-21 Ensemble soupape

Country Status (2)

Country Link
EP (1) EP2095199A2 (fr)
WO (1) WO2008141661A2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105865543A (zh) * 2016-04-12 2016-08-17 北京华热科技发展有限公司 水力平衡阀及其串联末端的检测调节方法和检测调节装置
EP3392541A1 (fr) * 2017-04-19 2018-10-24 VAT Holding AG Reniflard doté d'un capteur de force
DE102021000787A1 (de) * 2021-02-17 2022-08-18 Vat Holding Ag Ventil mit Funkanordnung

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5029597A (en) * 1990-01-22 1991-07-09 Liberty Technology Center, Inc. Controller for controlling the operation of a motor operated valve combination
DE4446538A1 (de) * 1994-12-24 1996-06-27 Bosch Gmbh Robert Hydraulische Spanneinrichtung
US7036794B2 (en) 2004-08-13 2006-05-02 Vat Holding Ag Method for control of a vacuum valve arranged between two vacuum chambers
US20080191155A1 (en) * 2007-02-09 2008-08-14 Intevac, Inc. Magnetically coupled valve actuator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2008141661A2 *

Also Published As

Publication number Publication date
WO2008141661A2 (fr) 2008-11-27
WO2008141661A3 (fr) 2009-05-22

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