EP2094028B8 - Ensemble de microphone miniature avec un anneau de scellage à souder - Google Patents

Ensemble de microphone miniature avec un anneau de scellage à souder Download PDF

Info

Publication number
EP2094028B8
EP2094028B8 EP09153067.5A EP09153067A EP2094028B8 EP 2094028 B8 EP2094028 B8 EP 2094028B8 EP 09153067 A EP09153067 A EP 09153067A EP 2094028 B8 EP2094028 B8 EP 2094028B8
Authority
EP
European Patent Office
Prior art keywords
sealing ring
microphone assembly
miniature microphone
solder sealing
solder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP09153067.5A
Other languages
German (de)
English (en)
Other versions
EP2094028B1 (fr
EP2094028A1 (fr
Inventor
Leif Steen Johansen
Per Flemming Høvesten
Gino Rocca
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of EP2094028A1 publication Critical patent/EP2094028A1/fr
Publication of EP2094028B1 publication Critical patent/EP2094028B1/fr
Application granted granted Critical
Publication of EP2094028B8 publication Critical patent/EP2094028B8/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
    • B81C1/0023—Packaging together an electronic processing unit die and a micromechanical structure die
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
EP09153067.5A 2008-02-22 2009-02-18 Ensemble de microphone miniature avec un anneau de scellage à souder Active EP2094028B8 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6674708P 2008-02-22 2008-02-22

Publications (3)

Publication Number Publication Date
EP2094028A1 EP2094028A1 (fr) 2009-08-26
EP2094028B1 EP2094028B1 (fr) 2016-11-02
EP2094028B8 true EP2094028B8 (fr) 2017-03-29

Family

ID=40671778

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09153067.5A Active EP2094028B8 (fr) 2008-02-22 2009-02-18 Ensemble de microphone miniature avec un anneau de scellage à souder

Country Status (4)

Country Link
US (1) US8406437B2 (fr)
EP (1) EP2094028B8 (fr)
KR (1) KR101572186B1 (fr)
CN (1) CN101552941B (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8542850B2 (en) * 2007-09-12 2013-09-24 Epcos Pte Ltd Miniature microphone assembly with hydrophobic surface coating
DE102007058951B4 (de) * 2007-12-07 2020-03-26 Snaptrack, Inc. MEMS Package
KR101108385B1 (ko) * 2010-01-19 2012-01-30 에스텍 주식회사 스피커
DE102010006132B4 (de) 2010-01-29 2013-05-08 Epcos Ag Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC
WO2012094722A1 (fr) * 2011-01-12 2012-07-19 Research In Motion Limited Carte de circuits imprimés présentant un canal acoustique pour un microphone
KR102062195B1 (ko) * 2012-09-10 2020-02-11 로베르트 보쉬 게엠베하 성형 인터커넥트 디바이스를 갖는 mems 마이크로폰 패키지
CN106658287A (zh) * 2016-11-11 2017-05-10 北京卓锐微技术有限公司 麦克风系统和放大电路
CN106658303A (zh) * 2016-12-01 2017-05-10 北京卓锐微技术有限公司 麦克风系统和放大电路
US10129623B2 (en) 2017-03-15 2018-11-13 Microsoft Technology Licensing, Llc Electronic device having covering substrate carrying acoustic transducer and related technology
EP3404422B1 (fr) * 2017-05-19 2019-11-13 NXP USA, Inc. Système comprenant un transducteur capacitif et un circuit d'excitation pour un tel transducteur et procédé pour mesurer accélération avec un tel système

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2176369B (en) 1985-05-09 1988-10-05 Plessey Co Plc Improvements in and relating to microphones
US6522762B1 (en) * 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
PL209935B1 (pl) * 1999-09-06 2011-11-30 Sonionmems As Układ czujnika na bazie krzemu do mikrofonu
US6853067B1 (en) * 1999-10-12 2005-02-08 Microassembly Technologies, Inc. Microelectromechanical systems using thermocompression bonding
DE10343292B3 (de) 2003-09-18 2004-12-02 Siemens Audiologische Technik Gmbh Hörgerät ohne separates Mikrofongehäuse
US20050063431A1 (en) * 2003-09-19 2005-03-24 Gallup Kendra J. Integrated optics and electronics
WO2005055406A1 (fr) * 2003-12-01 2005-06-16 Audioasics A/S Microphone a pompe de tension
US6992400B2 (en) 2004-01-30 2006-01-31 Nokia Corporation Encapsulated electronics device with improved heat dissipation
US20050189635A1 (en) * 2004-03-01 2005-09-01 Tessera, Inc. Packaged acoustic and electromagnetic transducer chips
CN2817273Y (zh) 2005-06-23 2006-09-13 潍坊怡力达电声有限公司 长声道硅麦克风
KR100722687B1 (ko) 2006-05-09 2007-05-30 주식회사 비에스이 부가적인 백 챔버를 갖는 지향성 실리콘 콘덴서 마이크로폰
DE112007002856T5 (de) 2006-11-23 2009-10-29 Pulse Mems Aps Platinenmontage eines Mikrophonwandlers

Also Published As

Publication number Publication date
US8406437B2 (en) 2013-03-26
KR101572186B1 (ko) 2015-11-26
EP2094028B1 (fr) 2016-11-02
KR20090091072A (ko) 2009-08-26
CN101552941B (zh) 2016-04-06
US20090214061A1 (en) 2009-08-27
CN101552941A (zh) 2009-10-07
EP2094028A1 (fr) 2009-08-26

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