EP1954946A2 - Systeme et procede permettant de commander la position d'un piston mecanique dans une pompe - Google Patents

Systeme et procede permettant de commander la position d'un piston mecanique dans une pompe

Info

Publication number
EP1954946A2
EP1954946A2 EP06838071A EP06838071A EP1954946A2 EP 1954946 A2 EP1954946 A2 EP 1954946A2 EP 06838071 A EP06838071 A EP 06838071A EP 06838071 A EP06838071 A EP 06838071A EP 1954946 A2 EP1954946 A2 EP 1954946A2
Authority
EP
European Patent Office
Prior art keywords
pump
dispense
motor
brushless
piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06838071A
Other languages
German (de)
English (en)
Other versions
EP1954946A4 (fr
EP1954946B1 (fr
Inventor
George Gonnella
James Cedrone
Iraj Gashgaee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2005/042127 external-priority patent/WO2006057957A2/fr
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of EP1954946A2 publication Critical patent/EP1954946A2/fr
Publication of EP1954946A4 publication Critical patent/EP1954946A4/fr
Application granted granted Critical
Publication of EP1954946B1 publication Critical patent/EP1954946B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/12—Parameters of driving or driven means
    • F04B2201/1208—Angular position of the shaft

Definitions

  • This invention relates generally to fluid pumps. More particularly, embodiments of the present invention relate to system and method for position control of a mechanical piston in a motor-driven single-stage or multi-stage pump useful in semiconductor manufacturing.
  • pressure spikes and subsequent drops in pressure may be damaging to the fluid (i.e., may change the physical characteristics of the fluid unfavorably). Additionally, pressure spikes can lead to built up fluid pressure that may cause a dispense pump to dispense more fluid than intended or dispense the fluid in a manner that has unfavorable dynamics. Furthermore, because these obstacles are interrelated, sometimes solving one many cause many more problems and/or make the matter worse.
  • Embodiments of the present invention provide systems and methods for precise and repeatable position control of a mechanical piston in a pump that substantially eliminate or reduce the disadvantages of previously developed pumping systems and methods used in semiconductor manufacturing. More particularly, embodiments of the present invention provide a pumping system with a motor- driven pump.
  • the motor-driven pump is a dispense pump.
  • the dispense pump can be part of a multistage or single stage pump.
  • a two-stage dispense pump is driven by a permanent-magnet synchronous motor (PMSM) and a digital signal processor (DSP) utilizing field-oriented control (FOC),
  • PMSM permanent-magnet synchronous motor
  • DSP digital signal processor
  • FOC field-oriented control
  • the dispense pump is driven by a brushless DC motor (BLDCM) with a position sensor for real time position feedback.
  • BLDCM brushless DC motor
  • Advantages of the embodiments of the invention disclosed herein include the ability to provide real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts.
  • An object of the invention is to reduce heat generation without undesirably compromising the precise position control of the dispense pump. This object is achievable in embodiments of the invention with a custom control scheme configured to increase the operating frequency of the motor's position control algorithm for critical functions such as dispensing and reduce the operating frequency to an optimal range for non-critical functions.
  • Another advantage provided by embodiments of the present invention is the enhanced speed control.
  • the custom control scheme disclosed herein can run the motor at very low speeds and still maintain a constant velocity, which enables the new pumping system disclosed herein to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
  • FIGURE 1 is a diagrammatic representation of a motor assembly with a brushless DC motor, according to one embodiment of the invention
  • FIGURE 2 is a diagrammatic representation of a multiple stage pump ("multi-stage pump") implementing a brushless DC motor, according to one embodiment of the present invention
  • FIGURE 3 is a diagrammatic representation of a pumping system implementing a multi-stage pump, according to one embodiment of the present invention
  • FIGURE 4 is a diagrammatic representation of valve and motor timings for one embodiment of the present invention.
  • FIGURE 5 is a plot diagram comparing average torque output and speed range of a brushless DC motor and a stepper motor, according to one embodiment of the invention.
  • FIGURE 6 is a plot diagram comparing average motor current and load between a brushless DC motor and a stepper motor, according to one embodiment of the invention.
  • FIGURE 7 is a plot diagram showing the difference between 30 kHz motor operation and 10 kHz motor operation
  • FIGURE 8 is a chart diagram illustrating cycle timing of a brushless DC motor and a stepper motor in various stages, according to one embodiment of the invention.
  • FIGURE 9 is a chart diagram exemplifying the pressure control timing of a stepper motor and a brushless DC motor at the start of a filtration process, according to one embodiment of the invention.
  • FIGURE 10 is a diagrammatic representation of a single stage pump implementing a brushless DC motor, according to one embodiment of the present invention.
  • Embodiments of the present invention are directed to a pumping system with a multiple stage (“multi-stage”) pump for feeding and dispensing fluid onto wafers during semiconductor manufacturing.
  • a pumping system ' implementing a multi-stage pump comprising a feed stage pump driven by a stepper motor and a dispense stage pump driven by a brushless DC motor for extremely accurate and repeatable control over fluid movements and dispense amounts of the fluid onto wafers.
  • the multi-stage pump and the pumping system embodying such a pump as described herein are provided by way of example, but not limitation, and embodiments of the present invention can be implemented for other multi-stage pump configurations. Embodiments of a motor driven pumping system with precise and repeatable position control will be described in more details below.
  • FIGURE 1 is a schematic representation of a motor assembly 3000 with a motor
  • a diaphragm assembly 3010 is connected to motor 3030 via a lead screw 3020.
  • motor 3030 is a permanent magnet synchronous motor ("PMSM").
  • PMSM permanent magnet synchronous motor
  • the current polarity is altered by the commutator and brushes.
  • the polarity reversal is performed by power transistors switching in synchronization with the rotor position.
  • a PMSM can be characterized as "brushless” and is considered more reliable than brush DC motors.
  • a PMSM can achieve higher efficiency by generating the rotor magnetic flux with rotor magnets.
  • PMSM low vibration, reduced noises (by the elimination of brushes), efficient heat dissipation, smaller foot prints and low rotor inertia.
  • the back-electromagnetic force which is induced in the stator by the motion of the rotor, can have different profiles.
  • One profile may have a trapezoidal shape and another profile may have a sinusoidal shape.
  • the term PMSM is intended to represent all types of brushless permanent magnet motors and is used interchangeably with the term brushless DC motors ("BLDCM").
  • BLDCM 3030 can be utilized as a feed motor and/or a dispense motor in a pump such as a multi-stage pump 100 shown in FIGURE 2.
  • multi-stage pump 100 includes a feed stage portion 105 and a separate dispense stage portion 110.
  • Feed stage 105 and dispense stage 110 can include rolling diaphragm pumps to pump fluid in multi-stage pump 100.
  • Feed-stage pump 150 (“feed pump 150"), for example, includes a feed chamber 155 to collect fluid, a feed stage diaphragm 160 to move within feed chamber 155 and displace fluid, a piston 165 to move feed stage diaphragm 160, a lead screw 170 and a feed motor 175.
  • Lead screw 170 couples to feed motor 175 through a nut, gear or other mechanism for imparting energy from the motor to lead screw 170.
  • Feed motor 175 rotates a nut that, in turn, rotates lead screw 170, causing piston 165 to actuate.
  • Feed motor 175 can be any suitable motor (e.g., a stepper motor, BLDCM, etc.). In one embodiment of the invention, feed motor 175 implements a stepper motor.
  • Dispense-stage pump 180 may include a dispense chamber 185, a dispense stage diaphragm 190, a piston 192, a lead screw 195, and a dispense motor 200.
  • Dispense motor 200 can be any suitable motor, including BLDCM. In one embodiment of the invention, dispense motor 200 implements BLDCM 3030 of FIGURE 1.
  • Dispense motor 200 can be controlled by a digital signal processor ("DSP") utilizing Field-Oriented Control (“FOC”) at dispense motor 200, by a controller onboard multi-stage pump 100, or by a separate pump controller (e.g., external to pump 100).
  • DSP digital signal processor
  • FOC Field-Oriented Control
  • Dispense motor 200 can further include an encoder (e.g., a fine line rotary position encoder or position sensor 3040) for real time feedback of dispense motor 200's position.
  • an encoder e.g., a fine line rotary position encoder or position sensor 3040
  • the use of a position sensor gives an accurate and repeatable control of the position of piston 192, which leads to accurate and repeatable control over fluid movements in dispense chamber 185.
  • a 2000 line encoder which according to one embodiment gives 8000 pulses to the DSP, it is possible to accurately measure to and control at .045 degrees of rotation.
  • a BLDCM can run at low velocities with little or no vibration.
  • Dispense stage portion 110 can further include a pressure sensor 112 that determines the pressure of fluid at dispense stage 110. The pressure determined by pressure sensor 112 can be used to control the speed of the various pumps. Suitable pressure sensors include ceramic- and polymer-based piezoresistive and capacitive pressure sensors, including those manufactured
  • filter 120 Located between feed stage portion 105 and dispense stage portion 110, from a fluid flow perspective, is filter 120 to filter impurities from the process fluid.
  • a number of valves e.g., inlet valve 125, isolation valve 130, barrier valve 135, purge valve 140, vent valve 145 and outlet valve 147) can be appropriately positioned to control how fluid flows through multi-stage pump 100.
  • the valves of multi-stage pump 100 are opened or closed to allow or restrict fluid flow to various portions of multi-stage pump 100.
  • These valves can be pneumatically actuated (e.g., gas driven) diaphragm valves that open or close depending on whether pressure or a vacuum is asserted. Other suitable valves are possible.
  • multi-stage pump 100 can include a ready segment, dispense segment, fill segment, pre-filtration segment, filtration segment, vent segment, purge segment and static purge segment (see FIGURE 4).
  • inlet valve 125 is opened and feed stage pump 150 moves (e.g., pulls) feed stage diaphragm 160 to draw fluid into feed chamber 155. Once a sufficient amount of fluid has filled feed chamber 155, inlet valve 125 is closed.
  • feed-stage pump 150 moves feed stage diaphragm 160 to displace fluid from feed chamber 155.
  • Isolation valve 130 and barrier valve 135 are opened to allow fluid to flow through filter 120 to dispense chamber 185.
  • Isolation valve 130 can be opened first (e.g., in the "pre- filtration segment") to allow pressure to build in filter 120 and then barrier valve 135 opened to allow fluid flow into dispense chamber 185.
  • both isolation valve 130 and barrier valve 135 can be opened and the feed pump moved to build pressure on the dispense side of the filter.
  • dispense pump 180 can be brought to its home position.
  • the home position of the dispense pump can be a position that gives the greatest available volume at the dispense pump for the dispense cycle, but is less than the maximum available volume that the dispense pump could provide.
  • the home position is selected based on various parameters for the dispense cycle to reduce unused hold up volume of multi-stage pump 100.
  • Feed pump 150 can similarly be brought to a home position that provides a volume that is less than its maximum available volume.
  • dispense stage pump 180 begins to withdraw dispense stage diaphragm 190.
  • dispense stage pump 180 increases the available volume of dispense chamber 185 to allow fluid to flow into dispense chamber 185. This can be done, for example, by reversing dispense motor 200 at a predefined rate, causing the pressure in dispense chamber 185 to decrease. If the pressure in dispense chamber 185 falls below the set point (within the tolerance of the system), the rate of feed motor 175 is increased to cause the pressure in dispense chamber 185 to reach the set point. If the pressure exceeds the set point (within the tolerance of the system) the rate of feed motor 175 is decreased, leading to a lessening of pressure in downstream dispense chamber 185. The process of increasing and decreasing the speed of feed motor 175 can be repeated until the dispense stage pump reaches a home position, at which point both motors can be stopped.
  • the speed of the first-stage motor during the filtration segment can be controlled using a "dead band" control scheme.
  • dispense stage pump can move dispense stage diaphragm 190 to allow fluid to more freely flow into dispense chamber 185, thereby causing the pressure in dispense chamber 185 to drop.
  • the speed of feed motor 175 is increased, causing the pressure in dispense chamber 185 to increase.
  • the speed of feed motor 175 is decreased. Again, the process of increasing and decreasing the speed of feed motor 175 can be repeated until the dispense stage pump reaches a home position.
  • isolation valve 130 is opened, barrier valve 135 closed and vent valve 145 opened.
  • barrier valve 135 can remain open during the vent segment and close at the end of the vent segment.
  • the pressure can be understood by the controller because the pressure in the dispense chamber, which can be measured by pressure sensor 112, will be affected by the pressure in filter 120.
  • Feed-stage pump 150 applies pressure to the fluid to remove air bubbles from filter 120 through open vent valve 145.
  • Feed-stage pump 150 can be controlled to cause venting to occur at a predefined rate, allowing for longer vent times and lower vent rates, thereby allowing for accurate control of the amount of vent waste.
  • feed pump is a pneumatic style pump
  • a fluid flow restriction can be placed in the vent fluid path, and the pneumatic pressure applied to feed pump can be increased or decreased in order to maintain a "venting" set point pressure, giving some control of an otherwise un-controlled method.
  • isolation valve 130 is closed, barrier valve 135, if it is open in the vent segment, is closed, vent valve 145 closed, and purge valve 140 opened and inlet valve 125 opened.
  • Dispense pump 180 applies pressure to the fluid in dispense chamber 185 to vent air bubbles through purge valve 140.
  • purge valve 140 remains open to continue to vent air.
  • any excess fluid removed during the purge or static purge segments can be routed out of multi-stage pump 100 (e.g., returned to the fluid source or discarded) or recycled to feed-stage pump 150.
  • inlet valve 125, isolation valve 130 and barrier valve 135 can be opened and purge valve 140 closed so that feed-stage pump 150 can reach ambient pressure of the source (e.g., the source bottle). According to other embodiments, all the valves can be closed at the ready segment.
  • outlet valve 147 opens and dispense pump 180 applies pressure to the fluid in dispense chamber 185. Because outlet valve 147 may react to controls more slowly than dispense pump 180, outlet valve 147 can be opened first and some predetermined period of time later dispense motor 200 started. This prevents dispense pump 180 from pushing fluid through a partially opened outlet valve 147. Moreover, this prevents fluid moving up the dispense nozzle caused by the valve opening (it's a mini-pump), followed by forward fluid motion caused by motor action. In other embodiments, outlet valve 147 can be opened and dispense begun by dispense pump 180 simultaneously.
  • An additional suckback segment can be performed in which excess fluid in the dispense nozzle is removed.
  • outlet valve 147 can close and a secondary motor or vacuum can be used to suck excess fluid out of the outlet nozzle.
  • outlet valve 147 can remain open and dispense motor 200 can be reversed to such fluid back into the dispense chamber.
  • the suckback segment helps prevent dripping of excess fluid onto the wafer.
  • FIGURE 3 is a diagrammatic representation of a pumping system 10 embodying multi-stage pump 100.
  • Pumping system 10 can further include a fluid source 15 and a pump controller 20 which work together with multi-stage pump 100 to dispense fluid onto a wafer 25.
  • the operation of multi-stage pump 100 can be controlled by pump controller 20.
  • Pump controller 20 can include a computer readable medium 27 (e.g., RAM, ROM, Flash memory, optical disk, magnetic drive or other computer readable medium) containing a set of control instructions 30 for controlling the operation of multi-stage pump 100.
  • a processor 35 e.g., CPU, ASIC, RISC, DSP, or other processor
  • Pump controller 20 can be internal or external to pump 100.
  • pump controller may reside onboard multi-stage pump 100 or be connected to multi-stage pump 100 via one or more communications links for communicating control signals, data or other information.
  • pump controller 20 is shown in FIGURE 3 as communicatively coupled to multi-stage pump 100 via communications links 40 and 45.
  • Communications links 40 and 45 can be networks (e.g., Ethernet, wireless network, global area network, DeviceNet network or other network known or developed in the art), a bus (e.g., SCSI bus) or other communications link.
  • Pump controller 20 can be implemented as an onboard PCB board, remote controller or in other suitable manner.
  • Pump controller 20 can include appropriate interfaces (e.g., network interfaces, I/O interfaces, analog to digital converters and other components) to allow pump controller 20 to communicate with multi-stage pump 100.
  • Pump controller 20 can include a variety of computer components known in the art, including processors, memories, interfaces, display devices, peripherals or other computer components.
  • Pump controller 20 can control various valves and motors in multi-stage pump to cause multi-stage pump to accurately dispense fluids, including low viscosity fluids (i.e., less than 100 centipoire) or other fluids.
  • An I/O interface connector as described in United States Provisional Patent Application No.
  • FIGURE 4 provides a diagrammatic representation of valve and dispense motor timings for various segments of the operation of multi-stage pump 100. While several valves are shown as closing simultaneously during segment changes, the closing of valves can be timed slightly apart (e.g., 100 miliseconds) to reduce pressure spikes. For example, between the vent and purge segment, isolation valve 130 can be closed shortly before vent valve 145. It should be noted, however, other valve timings can be utilized in various embodiments of the present invention. Additionally, several of the segments can be performed together (e.g., the fill/dispense stages can be performed at the same time, in which case both the inlet and outlet valves can be open in the dispense/fill segment). It should be further noted that specific segments do not have to be repeated for each cycle. For example, the purge and static purge segments may not be performed every cycle. Similarly, the vent segment may not be performed every cycle. Also, multiple dispenses can be performed before recharge.
  • the purge and static purge segments may not be performed every cycle.
  • valve 140 The opening and closing of various valves can cause pressure spikes in the fluid. Closing of purge valve 140 at the end of the static purge segment, for example, can cause a pressure increase in dispense chamber 185. This can occur, because each valve may displace a small volume of fluid when it closes. Purge valve 140, for example, can displace a small volume of fluid into dispense chamber 185 as it closes. Because outlet valve 147 is closed when the pressure increases occur due to the closing of purge valve 140, "spitting" of fluid onto the wafer may occur during the subsequent dispense segment if the pressure is not reduced.
  • dispense motor 200 may be reversed to back out piston 192 a predetermined distance to compensate for any pressure increase caused by the closure of barrier valve 135 and/or purge valve 140.
  • a valve e.g., purge valve 140
  • One embodiment of correcting for pressure increases caused by the closing of a valve is described in the United States Provisional Patent Application No. 60/741 ,681 , entitled “SYSTEM AND METHOD FOR CORRECTING FOR PRESSURE VARIATIONS USING A MOTOR", by Gonnella et a!., filed December 2, 2005 [Atty. Dkt No. ENTG1420-3] incorporated herein by reference.
  • the pressure in dispense chamber 185 can change based on the properties of the diaphragm, temperature or other factors.
  • Dispense motor 200 can be controlled to compensate for this pressure drift as described in the United States Provisional Patent Application No. 60/741 ,682, entitled “SYSTEM AND METHOD FOR PRESSURE COMPENSATION IN A PUMP", by James Cedrone, filed December 2, 2005, [Atty. Dkt. No. ENTG1800], incorporated herein by reference.
  • embodiments of the present invention provide a multi-stage pump with gentle fluid handling characteristics that can avoid or mitigate potentially damaging pressure changes.
  • Embodiments of the present invention can also employ other pump control mechanisms and valve linings to help reduce deleterious effects of pressure on a process fluid. Additional examples of a pump assembly for multi-stage pump 100 can be found in U.S. Patent Application No. 11/051 ,576 entitled “PUMP CONTROLLER FOR PRECISION PUMPING APPARATUS", by Zagars et al., filed February 4, 2005 [Atty. Dkt. No. ENTG1420-2] incorporated herein by reference.
  • multi-stage pump 100 incorporates a stepper motor as feed motor 175 and BLDCM 3030 as dispense motor 200. Suitable motors and associated parts may be obtained from EAD Motors of Dover, NH, USA or the like.
  • the stator of BLDCM 3030 generates a stator flux and the rotor generates a rotor flux. The interaction between the stator flux and the rotor flux defines the torque and hence the speed of BLDCM 3030.
  • a digital signal processor is used to implement all of the field-oriented control (FOC).
  • the FOC algorithms are realized in computer-executable software instructions embodied in a computer-readable medium.
  • Digital signal processors alone with on-chip hardware peripherals, are now available with the computational power, speed, and programmability to control the BLDCM 3030 and completely execute the FOC algorithms in microseconds with relatively insignificant add-on costs.
  • One v example of a DSP that can be utilized to implement embodiments of the invention disclosed herein is a 16-bit DSP available from Texas Instruments, Inc. based in Dallas, TX, USA (part number TMS320F2812PGFA ).
  • BLDCM 3030 can incorporate at least one position sensor to sense the actual rotor position.
  • the position sensor may be external to BLDCM 3030.
  • the position sensor may be internal to BLDCM 3030.
  • BLDCM 3030 may be sensorless.
  • position sensor 3040 is coupled to BLDCM 3030 for real time feedback of BLDCM 3030's actual rotor position, which is used by the DSP to control BLDCM 3030.
  • position sensor 3040 is a fine line rotary position encoder.
  • position sensor 3040 is a 2000 line encoder.
  • a 2000 line encoder can provide 8000 pulses or counts to a DSP, according to one embodiment of the invention. Using a 2000 line encoder, it is possible to accurately measure to and control at .045 degrees of rotation. Other suitable encoders can also be used.
  • position sensor 3040 can be a 1000 or 8000 line encoder.
  • BLDCM 3030 can be run at very low speeds and still maintain a constant velocity, which means little or no vibration. In other technologies such as stepper motors it has been impossible to run at lower speeds without introducing vibration into the pumping system, which was caused by poor constant velocity control. This variation would cause poor dispense performance and results in a very narrow window range of operation. Additionally, the vibration can have a deleterious effect on the process fluid. Table 1 below and FIGURES 5-9 compare a stepper motor and a BLDCM and demonstrate the numerous advantages of utilizing BLDCM 3030 as dispense motor 200 in multi-stage pump 100.
  • a BLDCM can provide substantially increased resolution with continuous rotary motion, lower power consumption, higher torque delivery, and wider speed range.
  • BLDCM resolution can be about 10 times more or better than what is provided by the stepper motor.
  • the smallest unit of advancement that can be provided by BLDCM is referred to as a "motor increment,” distinguishable from the term "step”, which is generally used in conjunction with a stepper motor.
  • the motor increment is smallest measurable unit of movement as a BLDCM, according to one embodiment, can provide continuous motion, whereas a stepper motor moves in discrete steps.
  • FIGURE 5 is a plot diagram comparing average torque output and speed range of a stepper motor and a BLDCM, according to one embodiment of the invention.
  • the BLDCM can maintain a nearly constant high torque output at higher speeds than those of the stepper motor.
  • the speed range of the BLDCM is wider (e.g., about 1000 times or more) than that of the stepper motor.
  • the stepper motor tends to have lower torque output which tends to undesirably fall off with increased speed (i.e., torque output is reduced at higher speed).
  • FIGURE 6 is a plot diagram comparing average motor current and load between a stepper motor and a BLDCM, according to one embodiment of the invention.
  • the BLDCM can adapt and adjust to load on system and only uses power required to carry the load.
  • the stepper motor uses current that is set for maximum conditions.
  • the peak current of a stepper motor is 150 milliamps (mA).
  • the same 150 mA is used to move a 1-lb. load as well as a 10-Ib. load, even though moving a 1- Ib. load does not need as much current as a 10-Ib. load. Consequently, in operation, the stepper motor consumes power for maximum conditions regardless of load, causing inefficient and wasteful use of energy.
  • the BLDCM 1 With the BLDCM 1 current is adjusted with an increase or decrease in load. At any particular point in time, the BLDCM will self-compensate and supply itself with the amount of current necessary to turn itself at the speed requested and produce the force to move the load as required.
  • the current can be very low (under 10 mA) when the motor is not moving. Because a BLDCM with control is self-compensating (i.e., it can adaptively adjust current according to load on system), it is always on, even when the motor is not moving. In comparison, the stepper motor could be turned off when the stepper motor is not moving, depending upon applications.
  • the control scheme for the BLDCM needs to be run very often.
  • the control loop is run at 30 kHz, about 33 ms per cycle. So, every 33 ms, the control loop checks to see if the BLDCM is at the right position. If so, try not to do anything. If not, it adjusts the current and tries to force the BLDCM to the position where it should be. This rapid self-compensating action enables a very precise position control, which is highly desirable in some applications.
  • Running the control loop at a speed higher (e.g., 30 kHz) than normal (e.g., 10 kHz) could mean extra heat generation in the system. This is because the more often the BLDCM switches current, the more opportunity to generate heat.
  • the BLDCM is configured to take heat generation into consideration.
  • the control loop is configured to run at two different speeds during a single cycle. During the dispense portion of the cycle, the control loop is run at a higher speed (e.g., 30 kHz). During the rest of the non-dispense portion of the cycle, the control loop is run at a lower speed (e.g., 10 kHz).
  • This configuration can be particularly useful in applications where super accurate position control during dispense is critical.
  • the control loop runs at 30 kHz, which provides an excellent position control. The rest of the time the speed is cut back to 10 kHz. By doing so, the temperature can be significantly dropped.
  • the dispense portion of the cycle could be customized depending upon applications.
  • a dispense system may implement 20-second cycles. On one 20-second cycle, 5 seconds may be for dispensing, while the rest 15 seconds may be for logging or recharging, etc. In between cycles, there could be a 15-20 seconds ready period.
  • the control loop of the BLDCM would run a small percentage of a cycle (e.g., 5 seconds) at a higher frequency (e.g., 30 kHz) and a larger percentage (e.g., 15 seconds) at a lower frequency (e.g., 10 kHz).
  • these parameters are meant to be exemplary and non-limiting. Operating speed and time can be adjusted or otherwise configured to suit so long as they are within the scope and spirit of the invention disclosed herein. Empirical methodologies may be utilized in determining these programmable parameters. For example, 10 kHz is a fairly typical frequency to drive the BLDCM. Although a different speed could be used, running the control loop of the BLDCM slower than 10 kHz could run the risk of losing position control. Since it is generally difficult to regain the position control, it is desirable for the BLDCM to hold the position.
  • One goal of this aspect of the invention is to reduce speed as much as possible during the non-dispense phase of the cycle without undesirably compromising the position control.
  • This goal is achievable in embodiments disclosed herein via a custom control scheme for the BLDCM.
  • the custom control scheme is configured to increase the frequency (e.g., 30 kHz) in order to gain some extra/increased position control for critical functions such as dispensing.
  • the custom control scheme is also configured to reduce heat generation by allowing non-critical functions to be run at a lower frequency (e.g., 10 kHz). Additionally, the custom control scheme is configured to minimize any position control losses caused by running at the lower frequency during the non-dispense cycle.
  • the custom control scheme is configured to provide a desirable dispense profile, which can be characterized by pressure.
  • the characterization can be based on deviation of the pressure signal. For example, a flat pressure profile would suggest smooth motion, less vibration, and therefore better position control. Contrastingly, deviating pressure signals would suggest poor position control.
  • FIGURE 7 is a plot diagram which exemplifies the difference between 30 kHz motor operation and 10 kHz motor operation (1OmL at 0.5 mL/s).
  • the first 20 second is the dispense phase. As it can be seen in FIGURE 7, during the dispense phase, dispensing at 30 kHz has a pressure profile that is less noisy and smoother than that of dispensing at 10 kHz.
  • the difference between running the BLDCM at 10 kHz and at 15 kHz can be insignificant. However, if the speed drops below 10 kHz (e.g., 5 kHz), it may not be fast enough to retain good position control.
  • one embodiment of the BLDCM is configured for dispensing fluids. When the position loop runs under 1 ms (i.e., at about 10 kHz or more), no effects are visible to the human eye. However, when it gets up to the 1 , 2, or 3 ms range, effects in the fluid become visible. As another example, if the timing of the valve varies under 1 ms, any variation in the results of the fluid may not be visible to the human eye. In the 1, 2, or 3 ms range, however, the variations can be visible.
  • the custom control scheme preferably runs time critical functions (e.g., timing the motor, valves, etc.) at about 10 kHz or more.
  • the exemplary dispense system disclosed herein uses an encoder which has a number of lines (e.g., 8000 lines). The time between each line is the speed. Even if the BLDCM is running fairly slowly, these are very fine lines so they can come very fast, basically pulsing to the encoder. If the BLDCM runs one revolution per a second, that means 8000 lines and hence 8000 pulses in that second. If the widths of the pulses do not vary (i.e., they are right at the target width and remain the same over and over), it is an indication of a very good speed control. If they oscillate, it is an indication of a poorer speed control, not necessarily bad, depending on the system design (e.g., tolerance) and application.
  • DSP digital signal processor
  • one solution is to configure the BLDCM to run at a higher frequency (e.g., 30 kHz) during dispensing and drop down or cut back to a lower frequency (e.g., 10 kHz) during non-dispensing operations (e.g., recharge).
  • Factors to consider in configuring the custom control scheme and associated parameters include position control performance and speed of calculation, which relates to the processing power of a processor, and heat generation, which relates to the number of times the current is switched after calculation.
  • the loss of position performance at 10 kHz is insignificant for non-dispense operations
  • the position control at 30 kHz is excellent for dispensing
  • the overall heat generation is significantly reduced.
  • embodiments of the invention can provide a technical advantage in preventing temperature changes from affecting the fluid being dispensed. This can be particularly useful in applications involving dispensing sensitive and/or expensive fluids, in which case, it would be highly desirable to avoid any possibility that heat or temperature change may affect the fluid.
  • Heating a fluid can also affect the dispense operation.
  • One such effect is called the natural suck-back effect.
  • the suck-back effect explains that when the dispense operation warms, it expands the fluid. As it starts to cool outside the pump, the fluid contracts and is retracted from the end of the nozzle. Therefore, with the natural suck-back effect the volume may not be precise and may be inconsistent.
  • FIGURE 8 is a chart diagram illustrating cycle timing of a stepper motor and a BLDCM in various stages, according to one embodiment of the invention.
  • the stepper motor implements feed motor 175 and the BLDCM implements dispense motor 200.
  • the shaded area in FIGURE 8 indicates that the motor is in operation.
  • the stepper motor and the BLDCM can be configured in a manner that facilitates pressure control during the filtration cycle.
  • FIGURE 9 One example of the pressure control timing of the stepper motor and the BLDCM is provided in FIGURE 9 where the shaded area indicates that the motor is in operation.
  • FIGURES 8 and 9 illustrate an exemplary configuration of feed motor 175 and dispense motor 200. More specifically, once the set point is reached, the BLDCM (i.e., dispense motor 200) can start reversing at the programmed filtration rate. In the mean time, the stepper motor (i.e., feed motor 175) rate varies to maintain the set point of pressure signal.
  • the BLDCM i.e., dispense motor 200
  • the stepper motor i.e., feed motor 175
  • This configuration provides several advantages. For instance, there are no pressure spikes on the fluid, the pressure on the fluid is constant, no adjustment is required for viscosity changes, no variation from system to system, and vacuum will not occur on the fluid.
  • FIGURE 10 is a diagrammatic representation of a pump assembly for a pump 4000.
  • Pump 4000 can be similar to one stage, say the dispense stage, of multi-stage pump 100 described above and can include a single chamber and a rolling diaphragm pump driven by embodiments of a BLDCM as described herein, with the same or similar control scheme for position control.
  • Pump 4000 can include a dispense block 4005 that defines various fluid flow paths through pump 4000 and at least partially defines a pump chamber.
  • Dispense pump block 4005 can be a unitary block of PTFE, modified PTFE or other material.
  • Dispense block 4005 consequently reduces the need for piping by providing an integrated fluid manifold.
  • Dispense block 4005 can also include various external inlets and outlets including, for example, inlet 4010 through which the fluid is received, purge/vent outlet 4015 for purging/venting fluid, and dispense outlet 4020 through which fluid is dispensed during the dispense segment.
  • Dispense block 4005, in the example of FIGURE 10 includes the external purge outlet 4010 as the pump only has one chamber.
  • Dispense block 4005 routes fluid from the inlet to an inlet valve (e.g., at least partially defined by valve plate 4030), from the inlet valve to the pump chamber, from the pump chamber to a vent/purge valve and from the pump chamber to outlet 4020.
  • a pump cover 4225 can protect a pump motor from damage, while piston housing 4027 can provide protection for a piston and can be formed of polyethylene or other polymer.
  • Valve plate 4030 provides a valve housing for a system of valves (e.g., an inlet valve, and a purge/vent valve) that can be configured to direct fluid flow to various components of pump 4000.
  • Valve plate 4030 and the corresponding valves can be formed similarly to the manner described in conjunction with valve plate 230, discussed above.
  • Each of the inlet valve and the purge/vent valve is at least partially integrated into valve plate 4030 and is a diaphragm valve that is either opened or closed depending on whether pressure or vacuum is applied to the corresponding diaphragm.
  • some of the valves may be external to dispense block 4005 or arranged in additional valve plates.
  • a sheet of PTFE is sandwiched between valve plate 4030 and dispense block 4005 to form the diaphragms of the various valves.
  • Valve plate 4030 includes a valve control inlet (not shown) for each valve to apply pressure or vacuum to the corresponding diaphragm.
  • pump 4000 can include several features to prevent fluid drips from entering the area of multi-stage pump 100 housing electronics.
  • the "drip proof features can include protruding lips, sloped features, seals between components, offsets at metal/polymer interfaces and other features described above to isolate electronics from drips.
  • the electronics and manifold can be configured similarly to the manner described above to reduce the effects of heat on fluid in the pump chamber.
  • the BLDCM to drive a single-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing.
  • the BLDCM may employ a position sensor for real time position feedback to a processor executing a custom FOC scheme.
  • the same or similar FOC scheme is applicable to single-stage and multi-stage pumps.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Des modes de réalisation des systèmes et des procédés selon l'invention utilisent un moteur CC sans balais (BLDCM) pour entraîner une pompe à étage unique ou à plusieurs étages dans un système de pompage, afin de commander la position de mouvements de fluides et de quantités à distribuer qui sont utiles dans la fabrication de micro-processeurs, de manière répétée et extrêmement précise, en temps réel et par déplacement progressif. Le BLDCM peut utiliser un capteur de position pour agir par rétroaction en temps réel sur la position d'un processeur exécutant un programme de commande sur mesure à orientation de champ. Des modes de réalisation de l'invention permettent de réduire la production de chaleur sans compromettre de manière non désirable la commande de position précise de la pompe de distribution en augmentant et en diminuant, via un programme de commande sur mesure, la fréquence de fonctionnement du BLDCM en fonction du caractère critique de la(des) fonction(s) sous-jacente(s). Le programme de commande peut exploiter le BLDCM à des vitesses très faibles tout en maintenant une vélocité constante, ce qui permet au système de pompage de fonctionner dans une plage de vitesse étendue avec une variation minimale, et par conséquent, d'augmenter considérablement les performances de distribution et les capacités de fonctionnement.
EP06838071.6A 2005-11-21 2006-11-20 Systeme et procede permettant de commander la position d'un piston mecanique dans une pompe Active EP1954946B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
PCT/US2005/042127 WO2006057957A2 (fr) 2004-11-23 2005-11-21 Systeme et procede pour systeme de distribution a position initiale variable
US74166005P 2005-12-02 2005-12-02
US84172506P 2006-09-01 2006-09-01
PCT/US2006/044907 WO2007061957A2 (fr) 2005-11-21 2006-11-20 Systeme et procede permettant de commander la position d'un piston mecanique dans une pompe

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EP1954946A2 true EP1954946A2 (fr) 2008-08-13
EP1954946A4 EP1954946A4 (fr) 2010-05-26
EP1954946B1 EP1954946B1 (fr) 2014-11-05

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EP (1) EP1954946B1 (fr)
JP (2) JP5339915B2 (fr)
KR (2) KR101279747B1 (fr)
CN (1) CN103016324B (fr)
TW (2) TWI405905B (fr)
WO (1) WO2007061957A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9753443B2 (en) * 2014-04-21 2017-09-05 Synerject Llc Solenoid systems and methods for detecting length of travel
DE102015201884B4 (de) * 2015-02-04 2023-07-27 Schaeffler Technologies AG & Co. KG Fluidische Betätigungsanordnung
FR3050513B1 (fr) * 2016-04-26 2018-11-16 Erca Dispositif de distribution de produit liquide ou pateux
DE102017112975B3 (de) * 2017-06-13 2018-10-25 KNF Micro AG Membranpumpe
JP6920923B2 (ja) * 2017-08-25 2021-08-18 株式会社Ｓｃｒｅｅｎホールディングス ポンプ装置および基板処理装置
DE102019117731A1 (de) * 2019-07-01 2021-01-07 Ebm-Papst St. Georgen Gmbh & Co. Kg Verfahren zur Positionserfassung der Membran einer elektromotorisch angetriebenen Membranpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312233A (en) * 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US20050244276A1 (en) * 2004-04-06 2005-11-03 Jean-Francois Pfister Pump drive

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5018A (en) * 1847-03-13 Improvement in machinery for combing wool
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
US5167837A (en) * 1989-03-28 1992-12-01 Fas-Technologies, Inc. Filtering and dispensing system with independently activated pumps in series
US5336884A (en) * 1992-07-01 1994-08-09 Rockwell International Corporation High resolution optical hybrid absolute incremental position encoder
US5947702A (en) * 1996-12-20 1999-09-07 Beco Manufacturing High precision fluid pump with separating diaphragm and gaseous purging means on both sides of the diaphragm
JPH11356081A (ja) * 1998-06-09 1999-12-24 Matsushita Electric Ind Co Ltd インバータ装置
US6390780B1 (en) * 1998-09-24 2002-05-21 Rule Industries, Inc. Pump and controller system and method
TW593888B (en) * 1998-11-23 2004-06-21 Mykrolis Corp Pump controller for precision pumping apparatus
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US6203288B1 (en) 1999-01-05 2001-03-20 Air Products And Chemicals, Inc. Reciprocating pumps with linear motor driver
US6575264B2 (en) * 1999-01-29 2003-06-10 Dana Corporation Precision electro-hydraulic actuator positioning system
US6464464B2 (en) * 1999-03-24 2002-10-15 Itt Manufacturing Enterprises, Inc. Apparatus and method for controlling a pump system
AU776367B2 (en) * 1999-09-03 2004-09-09 Fenwal, Inc. Systems and methods for control of pumps
US6348124B1 (en) 1999-12-14 2002-02-19 Applied Materials, Inc. Delivery of polishing agents in a wafer processing system
JP2001342989A (ja) * 2000-05-30 2001-12-14 Matsushita Electric Ind Co Ltd Ｄｃポンプの駆動制御方法
JP2002106467A (ja) * 2000-09-28 2002-04-10 Techno Excel Co Ltd トラバース機構駆動式流体ポンプ
US6520520B2 (en) * 2000-10-31 2003-02-18 Durrell U. Howard Steering stabilizer with trimming accumulator
JP4576739B2 (ja) * 2001-04-02 2010-11-10 パナソニック電工株式会社 ポンプ用モータ駆動制御装置
JP4684478B2 (ja) * 2001-07-04 2011-05-18 株式会社荏原製作所 給水装置の制御方法
GB0130602D0 (en) * 2001-12-21 2002-02-06 Johnson Electric Sa Brushless D.C. motor
US6914543B2 (en) * 2002-06-03 2005-07-05 Visteon Global Technologies, Inc. Method for initializing position with an encoder
JP4191437B2 (ja) * 2002-06-26 2008-12-03 並木精密宝石株式会社 基板一体型ブラシレスモータ
JP2004225672A (ja) * 2003-01-27 2004-08-12 Ebara Densan Ltd 回転機械の運転制御装置
US20050173463A1 (en) * 2004-02-09 2005-08-11 Wesner John A. Dispensing pump having linear and rotary actuators

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5312233A (en) * 1992-02-25 1994-05-17 Ivek Corporation Linear liquid dispensing pump for dispensing liquid in nanoliter volumes
US20050244276A1 (en) * 2004-04-06 2005-11-03 Jean-Francois Pfister Pump drive

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *
See also references of WO2007061957A2 *

Also Published As

Publication number Publication date
TWI405905B (zh) 2013-08-21
WO2007061957A8 (fr) 2007-08-16
KR20130036380A (ko) 2013-04-11
CN103016324B (zh) 2016-08-10
EP1954946A4 (fr) 2010-05-26
TW201350680A (zh) 2013-12-16
JP5674853B2 (ja) 2015-02-25
JP2009529847A (ja) 2009-08-20
TWI493107B (zh) 2015-07-21
TW200726914A (en) 2007-07-16
KR101279747B1 (ko) 2013-06-27
CN103016324A (zh) 2013-04-03
KR20080068918A (ko) 2008-07-24
JP2013150549A (ja) 2013-08-01
JP5339915B2 (ja) 2013-11-13
WO2007061957A2 (fr) 2007-05-31
KR101283259B1 (ko) 2013-07-11
WO2007061957A3 (fr) 2007-10-04
WO2007061957B1 (fr) 2007-12-06
EP1954946B1 (fr) 2014-11-05

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