EP1941543A4 - Sram cell with asymmetrical transistors for reduced leakage - Google Patents

Sram cell with asymmetrical transistors for reduced leakage

Info

Publication number
EP1941543A4
EP1941543A4 EP06804051A EP06804051A EP1941543A4 EP 1941543 A4 EP1941543 A4 EP 1941543A4 EP 06804051 A EP06804051 A EP 06804051A EP 06804051 A EP06804051 A EP 06804051A EP 1941543 A4 EP1941543 A4 EP 1941543A4
Authority
EP
European Patent Office
Prior art keywords
sram cell
reduced leakage
asymmetrical transistors
asymmetrical
transistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06804051A
Other languages
German (de)
French (fr)
Other versions
EP1941543A2 (en
Inventor
Shyh-Horng Yang
Kayvan Sadra
Theodore W Houston
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of EP1941543A2 publication Critical patent/EP1941543A2/en
Publication of EP1941543A4 publication Critical patent/EP1941543A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26586—Bombardment with radiation with high-energy radiation producing ion implantation characterised by the angle between the ion beam and the crystal planes or the main crystal surface
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1025—Channel region of field-effect devices
    • H01L29/1029—Channel region of field-effect devices of field-effect transistors
    • H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
    • H01L29/1041—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface
    • H01L29/1045—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface the doping structure being parallel to the channel length, e.g. DMOS like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66568—Lateral single gate silicon transistors
    • H01L29/66659—Lateral single gate silicon transistors with asymmetry in the channel direction, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B10/00—Static random access memory [SRAM] devices
    • H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Semiconductor Memories (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)
EP06804051A 2005-09-29 2006-09-22 Sram cell with asymmetrical transistors for reduced leakage Withdrawn EP1941543A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/239,626 US7384839B2 (en) 2005-09-29 2005-09-29 SRAM cell with asymmetrical transistors for reduced leakage
PCT/US2006/037021 WO2007041029A2 (en) 2005-09-29 2006-09-22 Sram cell with asymmetrical transistors for reduced leakage

Publications (2)

Publication Number Publication Date
EP1941543A2 EP1941543A2 (en) 2008-07-09
EP1941543A4 true EP1941543A4 (en) 2011-03-09

Family

ID=37892804

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06804051A Withdrawn EP1941543A4 (en) 2005-09-29 2006-09-22 Sram cell with asymmetrical transistors for reduced leakage

Country Status (5)

Country Link
US (2) US7384839B2 (en)
EP (1) EP1941543A4 (en)
KR (1) KR100992203B1 (en)
CN (1) CN101529580A (en)
WO (1) WO2007041029A2 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8216903B2 (en) * 2005-09-29 2012-07-10 Texas Instruments Incorporated SRAM cell with asymmetrical pass gate
US7414877B2 (en) * 2006-01-23 2008-08-19 Freescale Semiconductor, Inc. Electronic device including a static-random-access memory cell and a process of forming the electronic device
US7977178B2 (en) * 2009-03-02 2011-07-12 International Business Machines Corporation Asymmetric source/drain junctions for low power silicon on insulator devices
CN102479718B (en) * 2010-11-29 2014-03-26 中芯国际集成电路制造(上海)有限公司 Manufacturing method of metal-oxide-semiconductor field effect transistor (MOSFET)
US9059032B2 (en) 2011-04-29 2015-06-16 Texas Instruments Incorporated SRAM cell parameter optimization
CN103703556B (en) * 2011-07-29 2017-02-22 瑞萨电子株式会社 Semiconductor device and method for producing same
CN102610507A (en) * 2012-03-23 2012-07-25 上海华力微电子有限公司 Method for reducing gate-induced drain leakage of semiconductor device, and manufacturing method of MOS (metal oxide semiconductor) device
CN102779837B (en) * 2012-08-15 2015-04-08 中国科学院上海微系统与信息技术研究所 Six-transistor static random access memory unit and manufacturing method thereof
US8947122B2 (en) 2013-01-14 2015-02-03 Cypress Semiconductor Corporation Non-volatile latch structures with small area for FPGA
US8897067B2 (en) 2013-01-18 2014-11-25 Cypress Semiconductor Corporation Nonvolatile memory cells and methods of making such cells
US9589652B1 (en) * 2015-09-24 2017-03-07 Cypress Semiconductor Corporation Asymmetric pass field-effect transistor for non-volatile memory
US9496024B1 (en) * 2015-12-18 2016-11-15 Texas Instruments Incorporated Automatic latch-up prevention in SRAM

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5886921A (en) * 1996-12-09 1999-03-23 Motorola, Inc. Static random access memory cell having graded channel metal oxide semiconductor transistors and method of operation
US6566204B1 (en) * 2000-03-31 2003-05-20 National Semiconductor Corporation Use of mask shadowing and angled implantation in fabricating asymmetrical field-effect transistors

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06140631A (en) * 1992-10-28 1994-05-20 Ryoden Semiconductor Syst Eng Kk Field-effect thin film transistor and manufacture thereof
US6008080A (en) * 1997-11-21 1999-12-28 United Microelectronics Corp. Method of making a low power SRAM
US6667512B1 (en) * 2000-01-28 2003-12-23 Advanced Micro Devices, Inc. Asymmetric retrograde halo metal-oxide-semiconductor field-effect transistor (MOSFET)
US6466489B1 (en) * 2001-05-18 2002-10-15 International Business Machines Corporation Use of source/drain asymmetry MOSFET devices in dynamic and analog circuits
US6894356B2 (en) * 2002-03-15 2005-05-17 Integrated Device Technology, Inc. SRAM system having very lightly doped SRAM load transistors for improving SRAM cell stability and method for making the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5886921A (en) * 1996-12-09 1999-03-23 Motorola, Inc. Static random access memory cell having graded channel metal oxide semiconductor transistors and method of operation
US6566204B1 (en) * 2000-03-31 2003-05-20 National Semiconductor Corporation Use of mask shadowing and angled implantation in fabricating asymmetrical field-effect transistors

Also Published As

Publication number Publication date
US20070069277A1 (en) 2007-03-29
CN101529580A (en) 2009-09-09
EP1941543A2 (en) 2008-07-09
WO2007041029A2 (en) 2007-04-12
US20080237745A1 (en) 2008-10-02
KR20080058447A (en) 2008-06-25
WO2007041029A3 (en) 2009-04-16
US7384839B2 (en) 2008-06-10
KR100992203B1 (en) 2010-11-04

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