EP1917520A2 - Gas sensors - Google Patents
Gas sensorsInfo
- Publication number
- EP1917520A2 EP1917520A2 EP06813732A EP06813732A EP1917520A2 EP 1917520 A2 EP1917520 A2 EP 1917520A2 EP 06813732 A EP06813732 A EP 06813732A EP 06813732 A EP06813732 A EP 06813732A EP 1917520 A2 EP1917520 A2 EP 1917520A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- solid electrolyte
- electrolyte layer
- carbon dioxide
- energy
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/48—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
- G01N25/4846—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation for a motionless, e.g. solid sample
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
- G01N33/004—Specially adapted to detect a particular component for CO, CO2
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Definitions
- This invention generally relates to gas sensors, and more specifically, to gas sensors for detecting one or more gases in a sample of an environment or flow stream.
- the present invention is directed toward a gas sensor, and more specifically, a gas sensor for detecting carbon dioxide and other gases in a gas sample, and in some cases humidity.
- the gas sensor includes a sensor for sensing a desired gas and a heater for heating the sensor.
- a controller provides power to the heater to heat the sensor to an operating temperature, which is above ambient temperature.
- the sensor and heater are thermally isolated from some or all of the remainder of the sensor, such as the sensor substrate. This may help reduce the amount of power that is required to heat the heater and sensor to the operating temperature. This may make it more energy efficient to heat the sensor to an operating temperature at spaced time intervals.
- the gas sensor of the present invention may be ideally suited for battery powered and/or wireless applications.
- One illustrative method includes the steps of providing a solid electrolyte layer including lanthanum oxide, contacting the solid electrolyte layer with a gas sample, heating the solid electrolyte layer from 100 degrees Celsius to an operating temperature with a first amount of energy, and determining a concentration of carbon dioxide in the gas sample based on first amount of energy.
- Another illustrative method includes the steps of providing a solid electrolyte layer including lanthanum oxide, contacting the solid electrolyte layer with a gas sample, heating the solid electrolyte layer to about 100 degrees Celsius with a water desorbing amount of energy, heating the solid electrolyte layer from about 100 degrees Celsius to a carbon dioxide desorbing temperature with a carbon dioxide desorbing amount of energy, and then determining a humidity level in the gas sample based on the water desorbing amount of energy and determining a concentration of carbon dioxide in the gas sample based on the carbon dioxide amount of energy.
- Figure 1 is a cross-sectional side view of an illustrative gas sensor in accordance with the present invention
- Figure 2 is a schematic top view of the illustrative gas sensor of Figure 1 ;
- Figure 3 is a cross-sectional side view of another illustrative gas sensor in accordance with the present invention.
- Figure 4 is a time verses temperature graph showing differential thermal analysis for determining a concentration of carbon dioxide in a gas sample
- Figure 5 is a time verses temperature graph showing differential thermal analysis for determining a concentration of water and carbon dioxide in a gas sample.
- FIG. 6 is a schematic side view of an illustrative gas sensor assembly in accordance with the present invention.
- FIG. 1 is a cross-sectional side view of one illustrative gas sensor.
- Figure 2 is a schematic top view of the illustrative gas sensor of Figure 1 .
- the illustrative gas sensor is generally shown at 10, and includes a sensor 12 formed on or above a substrate 14.
- the illustrative sensor 1 2 includes a heater layer 16, a buffer layer 1 8, a lower electrode layer 20, a solid electrolyte layer 22, and an upper electrode layer 24, as best shown in Figure 1 .
- the heater layer 1 6 is thermally coupled to the solid electrolyte layer 22, and contacts are provided from the solid electrolyte layer 22.
- the heater layer 16 is made from a resistive material that generates heat when a current is passed therethrough. To increase the heat the can be delivered to the sensor 1 2, as well as the uniformity of the heat, the heater layer 16 may be configured to meander back and fourth along the area of the sensor 1 2, as better shown in Figure 2.
- the solid electrolyte layer 22 may be made from a suitable solid electrolyte material.
- the solid electrolyte may be lanthanum oxide, La2U3 (CAS No.: 1 31 2-81 -8) available from Sigma Aldrich Chemical Company, Milwaukee Wl.
- the solid electrolyte layer 22 can be a layer of La2U3 or a layer of material (such as silica, for example) doped with La2 ⁇ 3, as desired.
- Lanthanum oxide is a useful solid electrolyte since it absorbs water and carbon dioxide at ambient temperature and desorbs water as it is heated to 100 degrees Celsius and then desorbs carbon dioxide as it is heated above 100 degrees Celsius.
- a single heating cycle of the gas senor can provide accurate concentration measurements of both water (e.g., humidity) and carbon dioxide in a gas sample.
- concentration of both water and carbon dioxide can be determined based on the change in thermal mass with differential thermal analysis.
- One illustrative differential thermal analysis sensor is described in US 6,238,085, and is incorporated by reference herein.
- Control electronics 28 may be provided on or in the substrate 14, or elsewhere, as desired. Control electronics 28 can be coupled to the heater layer 1 6 via traces 30a and 32b, and the lower electrode layer 20 and the upper electrode layer 24 via traces 32a and 32b, as best shown in Figure 2. During operation, control electronics 28 can provide power to the heater layer 16 to heat the sensor 12 to an operating temperature, which is above an ambient temperature. The application of heat to the sensor 12, and more specifically, to the solid electrolyte layer 22, causes the absorbed gases to desorb.
- the control electronics 28 may provide power to the heater layer 1 6 to heat the sensor to the operating temperature during a first period of time with a first amount of energy.
- Figure 4 shows an illustrative time verses temperature graph of a control sensor and a CO 2 sensor according to the present disclosure. At time zero, the sensors are at ambient temperature. Energy (i.e., current) is applied to both sensors at a constant rate and at a constant voltage, thus providing a constant power to the heater.
- Energy i.e., current
- Both sensors reach 100 degrees Celsius at about the same time, with about the same amount of energy (which can be calculated by integrating the area under each curve.)
- carbon dioxide begins to desorb from the CO2 sensor, causing the CO2 sensor to heat up at a slower rate than the control sensor.
- the control sensor reaches a temperature of 500 degrees Celsius.
- the CO2 sensor reaches a temperature of 500 degrees Celsius.
- At a temperature of about 500 degrees Celsius substantially all of the carbon dioxide has desorbed from the sensor.
- the difference in the areas under each curve (AC02) corresponds to the amount of energy required to desorb the carbon dioxide from the sensor.
- FIG. 18 shows an illustrative time verses temperature graph of a control sensor and a relative humidity (RH) and CO2 sensor according to the present disclosure. At time zero, the sensors are at ambient temperature. Power (i.e., current/voltage) is applied to both sensors at a constant rate.
- RH relative humidity
- the RH/CO2 sensor reaches and begins to rise above 100 degrees Celsius at time equal to TH2O, and the control sensor reaches 100 degrees Celsius at time equal to Tci .
- the difference in the total amount of energy required for each sensor to reach and just exceed 100 degrees Celsius is related to the amount of water that desorbed from the RH/CO2 sensor. Knowing the physical properties of the solid electrolyte and water, a total amount of water desorbed from the sensor can be determined. A concentration of water in the gas sample can then be determined based on known equilibrium constants of water and the solid electrolyte at ambient absorption temperatures and pressures. Relative humidity can then be determined using known techniques.
- a control sensor may, or may not, be provided.
- the control sensor can be identical in construction to the gas sensor without the lanthanum oxide.
- the control sensor can be coupled to the controller and provide a control heating profile for the gas sensor.
- a differential heating profile, or differential energy amount can be determined and used to determine desorbed carbon dioxide and/or humidity from the gas sensor.
- the desorbed carbon dioxide and/or humidity can be determined from calculated sensor characteristic data previously known or determined and may be stored in a memory within the controller.
- the sensor 12 may be thermally isolated from some or all of the remainder of the gas sensor 10.
- a pit 52 may be etched into the substrate below the sensor 12 leaving a gap or space between the sensor 1 2 and the substrate 14.
- the gap may be an air gap, or filled with a material with a low coefficient of thermal conductivity.
- Supporting legs 50a-d may be left in tact to support the sensor 12 above the pit 52.
- the sensor 12, which includes the heater 1 6 and the solid electrolyte layer 22, is suspended above the substrate, which helps thermally isolate the sensor 12 from the remainder of the gas sensor 10. This may help reduce the amount of power and time that is required to heat the sensor 1 2 to the operating temperature.
- FIG. 22 Because the amount of power required to heat the sensor 12 to the operating temperature is reduced, and/or because the sensor 1 2 is only heated when a reading is desired, the gas sensor 10 may be suited for battery powered and/or wireless applications.
- the control electronics 28 may be powered by a battery 56, and/or the control electronics 28 may wirelessly transmit an output signal from the gas sensor 10 via an antenna 58.
- Figure 3 is a cross-sectional side view of another illustrative gas sensor in accordance with the present invention.
- the illustrative gas sensor is generally shown at 80, and includes a substrate 82, a support structure 84, a sensor 86 and control electronics 88. This embodiment is similar to that shown and described above with respect to Figures 1 -2.
- FIG. 1 is a schematic side view of an illustrative gas sensor assembly in accordance with the present invention.
- the gas sensor assembly is generally shown at 100, and includes a housing 102, a gas sensor 104, and an absorber 106.
- the gas sensor may be similar to those shown and described above with respect to Figures 1 -5.
- a gas sample 1 10 from an environment may be provided to the gas sensor 104 through the absorber 106.
- the absorber may include an absorbent material that absorbs unwanted constituents or gases from the sample 1 10 before the sample 1 10 reaches the gas sensor 104.
- the absorber may absorb one or more interference gases. In some cases, interference gases can reduce the reliability or accuracy of the measurements made by the gas sensor 104.
- the gas sensor assembly 1 00 may further include a number of leads 108.
- the leads 108 may provide a mechanical and/or electrical connection between the gas sensor assembly 100 and an external board or the like, when desired.
- Numerous advantages of the invention covered by this document have been set forth in the foregoing description. It will be understood, however, that this disclosure is, in many respects, only illustrative. Changes may be made in details, particularly in matters of shape, size, and arrangement of parts without exceeding the scope of the invention. The invention's scope is, of course, defined in the language in which the appended claims are expressed.
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/162,060 US7628907B2 (en) | 2005-08-26 | 2005-08-26 | Gas sensor |
PCT/US2006/033173 WO2007025100A2 (en) | 2005-08-26 | 2006-08-25 | Gas sensors |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1917520A2 true EP1917520A2 (en) | 2008-05-07 |
EP1917520B1 EP1917520B1 (en) | 2017-04-26 |
Family
ID=37600874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP06813732.2A Expired - Fee Related EP1917520B1 (en) | 2005-08-26 | 2006-08-25 | A method of sensing CO2 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7628907B2 (en) |
EP (1) | EP1917520B1 (en) |
JP (1) | JP2009506326A (en) |
CN (1) | CN101300481A (en) |
WO (1) | WO2007025100A2 (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2469275B1 (en) | 2010-12-24 | 2015-12-23 | Honeywell Romania S.R.L. | Cantilevered carbon dioxide sensor |
DE102011003291B4 (en) * | 2011-01-28 | 2021-12-30 | Robert Bosch Gmbh | Operating procedures for a gas sensor and a gas sensor |
US10393666B2 (en) | 2012-03-12 | 2019-08-27 | Respirion, LLC | Methods, devices, systems, and compositions for detecting gases |
EP2642289A1 (en) * | 2012-03-20 | 2013-09-25 | Sensirion AG | Portable electronic device |
US9453807B2 (en) * | 2014-04-08 | 2016-09-27 | Ams International Ag | Thermal conductivity gas sensor with amplification material |
JP6359049B2 (en) * | 2016-05-09 | 2018-07-18 | Nissha株式会社 | Gas sensor device and manufacturing method thereof |
CA3034248A1 (en) | 2016-08-18 | 2018-02-22 | Carrier Corporation | Isolated sensor and method of isolating a sensor |
TWI633046B (en) * | 2016-12-29 | 2018-08-21 | 財團法人工業技術研究院 | Micro-electromechanical apparatus for heating energy control |
US10393718B2 (en) | 2016-12-29 | 2019-08-27 | Industrial Technology Research Institute | Micro-electromechanical apparatus for thermal energy control |
WO2018140874A1 (en) | 2017-01-30 | 2018-08-02 | Aromatix, Inc. | Ultrasound gas sensor system using machine learning |
EP3835774A4 (en) * | 2018-08-10 | 2022-04-20 | TDK Corporation | Gas sensor |
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US4937059A (en) * | 1988-09-26 | 1990-06-26 | Phillips Petroleum Company | Absorption and desorption of carbon dioxide |
JPH03130657A (en) * | 1989-10-17 | 1991-06-04 | Tokuyama Soda Co Ltd | Oxygen sensor |
US5273779A (en) * | 1991-12-09 | 1993-12-28 | Industrial Technology Research Institute | Method of fabricating a gas sensor and the product fabricated thereby |
US5397541A (en) * | 1993-09-10 | 1995-03-14 | National Research Council Of Canada | Thin film oxygen sensor |
US5448905A (en) * | 1993-11-26 | 1995-09-12 | Transducer Research, Inc. | Solid-state chemical sensor apparatus and methods |
US5695624A (en) * | 1995-01-30 | 1997-12-09 | The Regents Of The Univeristy Of California | Solid state oxygen sensor |
JPH10239276A (en) * | 1996-12-27 | 1998-09-11 | Ngk Insulators Ltd | Carbon monoxide gas sensor and measuring device using it |
JP3874947B2 (en) * | 1997-12-01 | 2007-01-31 | 日本碍子株式会社 | Sulfur dioxide gas sensor |
JP3268252B2 (en) * | 1997-12-12 | 2002-03-25 | 株式会社トクヤマ | Solid electrolyte type carbon dioxide sensor element |
US6006582A (en) * | 1998-03-17 | 1999-12-28 | Advanced Technology Materials, Inc. | Hydrogen sensor utilizing rare earth metal thin film detection element |
JP2000065789A (en) * | 1998-08-25 | 2000-03-03 | Ngk Insulators Ltd | Carbon monoxide sensor, its production and its use |
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US7006926B2 (en) * | 2003-02-07 | 2006-02-28 | Tdk Corporation | Carbon dioxide sensor |
JP4228975B2 (en) * | 2004-04-15 | 2009-02-25 | 株式会社デンソー | Multilayer gas sensor element |
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US20050241136A1 (en) * | 2004-04-30 | 2005-11-03 | Ming-Cheng Wu | Method for making sensors, and sensors made therefrom |
-
2005
- 2005-08-26 US US11/162,060 patent/US7628907B2/en not_active Expired - Fee Related
-
2006
- 2006-08-25 CN CNA2006800404314A patent/CN101300481A/en active Pending
- 2006-08-25 WO PCT/US2006/033173 patent/WO2007025100A2/en active Application Filing
- 2006-08-25 EP EP06813732.2A patent/EP1917520B1/en not_active Expired - Fee Related
- 2006-08-25 JP JP2008528169A patent/JP2009506326A/en not_active Withdrawn
Non-Patent Citations (1)
Title |
---|
See references of WO2007025100A2 * |
Also Published As
Publication number | Publication date |
---|---|
EP1917520B1 (en) | 2017-04-26 |
WO2007025100A2 (en) | 2007-03-01 |
CN101300481A (en) | 2008-11-05 |
JP2009506326A (en) | 2009-02-12 |
US20070045129A1 (en) | 2007-03-01 |
US7628907B2 (en) | 2009-12-08 |
WO2007025100A3 (en) | 2007-04-26 |
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