EP1908121A4 - Drain-extended mosfets with diode clamp - Google Patents
Drain-extended mosfets with diode clampInfo
- Publication number
- EP1908121A4 EP1908121A4 EP05772304A EP05772304A EP1908121A4 EP 1908121 A4 EP1908121 A4 EP 1908121A4 EP 05772304 A EP05772304 A EP 05772304A EP 05772304 A EP05772304 A EP 05772304A EP 1908121 A4 EP1908121 A4 EP 1908121A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- drain
- diode clamp
- mosfets
- extended
- extended mosfets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7816—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/7817—Lateral DMOS transistors, i.e. LDMOS transistors structurally associated with at least one other device
- H01L29/7818—Lateral DMOS transistors, i.e. LDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors with potential-jump barrier or surface barrier
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
- H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
- H01L29/1083—Substrate region of field-effect devices of field-effect transistors with insulated gate with an inactive supplementary region, e.g. for preventing punch-through, improving capacity effect or leakage current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66681—Lateral DMOS transistors, i.e. LDMOS transistors
- H01L29/66689—Lateral DMOS transistors, i.e. LDMOS transistors with a step of forming an insulating sidewall spacer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42364—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity
- H01L29/42368—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the insulating layer, e.g. thickness or uniformity the thickness being non-uniform
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2005/025396 WO2007011354A1 (en) | 2005-07-18 | 2005-07-18 | Drain-extended mosfets with diode clamp |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1908121A1 EP1908121A1 (en) | 2008-04-09 |
EP1908121A4 true EP1908121A4 (en) | 2009-09-30 |
Family
ID=37669121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP05772304A Ceased EP1908121A4 (en) | 2005-07-18 | 2005-07-18 | Drain-extended mosfets with diode clamp |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1908121A4 (en) |
JP (1) | JP2009502041A (en) |
KR (1) | KR100985373B1 (en) |
WO (1) | WO2007011354A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009059949A (en) * | 2007-08-31 | 2009-03-19 | Sharp Corp | Semiconductor device and manufacturing method for the semiconductor device |
US7838940B2 (en) | 2007-12-04 | 2010-11-23 | Infineon Technologies Ag | Drain-extended field effect transistor |
KR100943504B1 (en) | 2007-12-31 | 2010-02-22 | 주식회사 동부하이텍 | Method for manufacturing |
JP5534298B2 (en) * | 2009-06-16 | 2014-06-25 | ルネサスエレクトロニクス株式会社 | Semiconductor device |
US8344472B2 (en) * | 2010-03-30 | 2013-01-01 | Freescale Semiconductor, Inc. | Semiconductor device and method |
KR101302108B1 (en) | 2011-12-30 | 2013-08-30 | 주식회사 동부하이텍 | Drain exteneded mos transistor and method for fabricating the same |
JP5960445B2 (en) * | 2012-02-23 | 2016-08-02 | ラピスセミコンダクタ株式会社 | Semiconductor device |
JP2013247188A (en) * | 2012-05-24 | 2013-12-09 | Toshiba Corp | Semiconductor device |
US9129990B2 (en) * | 2012-06-29 | 2015-09-08 | Freescale Semiconductor, Inc. | Semiconductor device and driver circuit with drain and isolation structure interconnected through a diode circuit, and method of manufacture thereof |
KR101694092B1 (en) * | 2016-03-03 | 2017-01-17 | 강희복 | A power supply circuit system using a negative threshold five-terminal NMOS FET device for three-phase Flyback inductor schematic application |
KR101694091B1 (en) * | 2016-03-03 | 2017-01-17 | 강희복 | A power supply circuit system using a negative threshold five-terminal NMOS FET device for Flyback inductor schematic application |
JP6920137B2 (en) * | 2017-08-31 | 2021-08-18 | ルネサスエレクトロニクス株式会社 | Semiconductor devices and their manufacturing methods |
CN112713182B (en) * | 2020-12-29 | 2022-06-28 | 浙大城市学院 | Silicon carbide cellular level power integrated chip structure |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030173624A1 (en) * | 2002-02-23 | 2003-09-18 | Fairchild Korea Semiconductor Ltd. | High breakdown voltage low on-resistance lateral DMOS transistor |
US20040159891A1 (en) * | 2003-02-18 | 2004-08-19 | Kabushiki Kaisha Toshiba | Semiconductor device |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69834315T2 (en) | 1998-02-10 | 2007-01-18 | Stmicroelectronics S.R.L., Agrate Brianza | Integrated circuit with a VDMOS transistor, which is protected against overvoltages between source and gate |
US6924531B2 (en) * | 2003-10-01 | 2005-08-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | LDMOS device with isolation guard rings |
-
2005
- 2005-07-18 EP EP05772304A patent/EP1908121A4/en not_active Ceased
- 2005-07-18 WO PCT/US2005/025396 patent/WO2007011354A1/en active Application Filing
- 2005-07-18 KR KR1020087003859A patent/KR100985373B1/en active IP Right Grant
- 2005-07-18 JP JP2008522752A patent/JP2009502041A/en not_active Abandoned
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030173624A1 (en) * | 2002-02-23 | 2003-09-18 | Fairchild Korea Semiconductor Ltd. | High breakdown voltage low on-resistance lateral DMOS transistor |
US20040159891A1 (en) * | 2003-02-18 | 2004-08-19 | Kabushiki Kaisha Toshiba | Semiconductor device |
Non-Patent Citations (2)
Title |
---|
PARTHASARATHY V ET AL: "Drain profile engineering of resurf LDMOS devices for ESD ruggedness", PROCEEDINGS OF THE 14TH. INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES & ICS. ISPSD'02. SANTA FE, NM, JUNE 4 - 7, 2002; [INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES & IC'S], NEW YORK, NY : IEEE, US, 4 June 2002 (2002-06-04), pages 265 - 268, XP010591617, ISBN: 978-0-7803-7318-1 * |
See also references of WO2007011354A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP2009502041A (en) | 2009-01-22 |
KR100985373B1 (en) | 2010-10-04 |
WO2007011354A1 (en) | 2007-01-25 |
KR20080033423A (en) | 2008-04-16 |
EP1908121A1 (en) | 2008-04-09 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20080218 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB |
|
RBV | Designated contracting states (corrected) |
Designated state(s): DE FR GB |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20090827 |
|
17Q | First examination report despatched |
Effective date: 20091029 |
|
DAX | Request for extension of the european patent (deleted) | ||
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R003 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED |
|
18R | Application refused |
Effective date: 20170925 |