EP1891405A4 - Verfahren und vorrichtung zum messen der schichtdicke und des wachstums der schichtdicke - Google Patents

Verfahren und vorrichtung zum messen der schichtdicke und des wachstums der schichtdicke

Info

Publication number
EP1891405A4
EP1891405A4 EP06773455.8A EP06773455A EP1891405A4 EP 1891405 A4 EP1891405 A4 EP 1891405A4 EP 06773455 A EP06773455 A EP 06773455A EP 1891405 A4 EP1891405 A4 EP 1891405A4
Authority
EP
European Patent Office
Prior art keywords
film thickness
growth
measuring
measuring film
thickness growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06773455.8A
Other languages
English (en)
French (fr)
Other versions
EP1891405A2 (de
Inventor
Scott F Grimshaw
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tangidyne Corp
Original Assignee
Tangidyne Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tangidyne Corp filed Critical Tangidyne Corp
Publication of EP1891405A2 publication Critical patent/EP1891405A2/de
Publication of EP1891405A4 publication Critical patent/EP1891405A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/12—Analysing solids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0251—Solidification, icing, curing composites, polymerisation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Physical Vapour Deposition (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
EP06773455.8A 2005-06-17 2006-06-19 Verfahren und vorrichtung zum messen der schichtdicke und des wachstums der schichtdicke Withdrawn EP1891405A4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69163805P 2005-06-17 2005-06-17
PCT/US2006/023678 WO2006138678A2 (en) 2005-06-17 2006-06-19 Method and apparatus for measuring film thickness and film thickness growth

Publications (2)

Publication Number Publication Date
EP1891405A2 EP1891405A2 (de) 2008-02-27
EP1891405A4 true EP1891405A4 (de) 2014-01-22

Family

ID=37571271

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06773455.8A Withdrawn EP1891405A4 (de) 2005-06-17 2006-06-19 Verfahren und vorrichtung zum messen der schichtdicke und des wachstums der schichtdicke

Country Status (2)

Country Link
EP (1) EP1891405A4 (de)
WO (1) WO2006138678A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6564745B2 (ja) * 2016-09-06 2019-08-21 株式会社アルバック 膜厚センサ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2743144A (en) * 1951-04-07 1956-04-24 Motorola Inc Zero temperature coefficient piezoelectric crystal
JPS58223009A (ja) * 1982-06-18 1983-12-24 Nippon Soken Inc 水晶発振式膜厚モニタ
US4561286A (en) * 1983-07-13 1985-12-31 Laboratoire Suisse De Recherches Horlogeres Piezoelectric contamination detector
US5112642A (en) * 1990-03-30 1992-05-12 Leybold Inficon, Inc. Measuring and controlling deposition on a piezoelectric monitor crystal
WO2004094936A2 (en) * 2003-04-21 2004-11-04 Tangidyne Corporation Method and apparatus for measuring film thickness and film thickness growth

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3283493B2 (ja) * 1999-02-02 2002-05-20 東洋通信機株式会社 高安定度圧電発振器
JP2003309432A (ja) * 2002-04-17 2003-10-31 Toyo Commun Equip Co Ltd 高安定圧電発振器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2743144A (en) * 1951-04-07 1956-04-24 Motorola Inc Zero temperature coefficient piezoelectric crystal
JPS58223009A (ja) * 1982-06-18 1983-12-24 Nippon Soken Inc 水晶発振式膜厚モニタ
US4561286A (en) * 1983-07-13 1985-12-31 Laboratoire Suisse De Recherches Horlogeres Piezoelectric contamination detector
US5112642A (en) * 1990-03-30 1992-05-12 Leybold Inficon, Inc. Measuring and controlling deposition on a piezoelectric monitor crystal
WO2004094936A2 (en) * 2003-04-21 2004-11-04 Tangidyne Corporation Method and apparatus for measuring film thickness and film thickness growth

Also Published As

Publication number Publication date
EP1891405A2 (de) 2008-02-27
WO2006138678A2 (en) 2006-12-28
WO2006138678A3 (en) 2007-02-08

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20071217

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DAX Request for extension of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20140103

RIC1 Information provided on ipc code assigned before grant

Ipc: G01H 13/00 20060101AFI20131218BHEP

Ipc: G01B 7/06 20060101ALI20131218BHEP

Ipc: G01N 29/12 20060101ALI20131218BHEP

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20140801