EP1843043A2 - Vacuum pump with drive device - Google Patents

Vacuum pump with drive device Download PDF

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Publication number
EP1843043A2
EP1843043A2 EP07006199A EP07006199A EP1843043A2 EP 1843043 A2 EP1843043 A2 EP 1843043A2 EP 07006199 A EP07006199 A EP 07006199A EP 07006199 A EP07006199 A EP 07006199A EP 1843043 A2 EP1843043 A2 EP 1843043A2
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EP
European Patent Office
Prior art keywords
vacuum pump
interior
circuit board
separating element
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP07006199A
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German (de)
French (fr)
Other versions
EP1843043A3 (en
EP1843043B1 (en
Inventor
Timo Birkenstock
Dirk Hopf
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
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Publication of EP1843043A3 publication Critical patent/EP1843043A3/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/068—Mechanical details of the pump control unit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump, which is arranged in an environment with a housing, an interior and a drive unit, which contains electronic circuits for controlling arranged in the interior electronic and electrical components, wherein there is negative pressure in the interior, and with a separating element, which Interior and surroundings separate.
  • Vacuum pumps have an interior in which an increasing number of electronic components is arranged. Such components are, for example, the electric coils of the motor or Hall probes, which detect the rotation of the shaft, and the like. These arranged within the vacuum pump components are controlled by located outside of the vacuum pump, electronic circuits. These circuits are often placed in a driver. The interior of such a vacuum pump is at a pressure level which is below the atmospheric pressure. This means that the electrical lines that make electrical contact between the electronic circuits and the components arranged in the interior, must be performed by a hermetically sealed passage from the interior to the exterior.
  • a common solution in the art is to provide a hermetically sealed plug on the vacuum pump.
  • This plug has in the direction of the interior of the vacuum pump pins on which cables are soldered, which lead to the electronic components.
  • the size and shape of the vacuum pump has gained in importance in recent years.
  • the drive unit should adapt to the housing of the vacuum pump so that it must be constructed around it. Put another way: the housing of the vacuum pump sets the framework for the drive unit.
  • the connector used in the prior art turns out to be disadvantageous because it is complicated and has a large footprint.
  • the object of the invention is therefore to present a vacuum pump with a separating element between the interior and the environment, which allows the construction of a vacuum-tight and less prone to assembly errors implementation that allows a more flexible design of the electrical signal routing.
  • a vacuum pump with the features of the first claim.
  • the signal routing can be much better adapted to the spatial specifications.
  • the assembly of a board is simpler and less prone to error during assembly due to the more spacious space. It is possible to route signals on the board from the point of implementation to another point on the board to connect to the drive unit from it. Boards themselves are available inexpensively in a wide range of geometric shapes. In addition, they are sufficiently vacuum-tight.
  • a first development relates to the design of means for carrying electrical currents and voltages.
  • a technically simple and inexpensive solution is to pierce the printed circuit board, pins stuck in these holes and to solder. In this case, a vacuum-tight implementation is guaranteed by the soldering.
  • Another development of the means for carrying out the electrical currents and voltages is to provide a hermetically sealed plug on the board. This has contact pins in the direction of the interior of the vacuum pump. On the side facing away from this interior, contacts in the printed circuit board are soldered. With this variant, the vacuum tightness is further increased.
  • the invention can be further developed by constructing the printed circuit board from at least two layers. This makes it possible to provide connectors on the surface, which are in electrical contact with an inner, located between the layers and electrically conductive layer. This avoids providing through holes in the printed circuit board for the means for passing the electrical currents and voltages. It is increased in this way, the vacuum-tightness of the arrangement.
  • Functions such as fault memory, pump type detection, temperature measurement and the like can be realized without leading electrical signals through a vacuum-tight implementation. Only the unavoidable lines are led into the fore-vacuum area of the vacuum pump, for example for the engine. Everything else can be arranged on the board, which is cheaper and technically easier.
  • the number of electronic components that are operated in negative pressure is minimized.
  • a temperature sensor is arranged on the board, which is in thermal contact with the housing of the vacuum pump. This can be realized by a direct mechanical contact, even a mechanically deformable thermal conductor between the temperature sensor and the housing is a favorable design. A complex wiring of this sensor in the interior of the vacuum pump is eliminated, a defective temperature sensor can be easily replaced. Safe monitoring of the pump temperature and thus avoiding excessive temperatures can thus be ensured.
  • An advantageous development is to releasably attach the drive unit to the vacuum pump, wherein it covers the partition at least partially. As a result, a compact overall system is created and at the same time the separating element is protected against external influences.
  • the invention can be further developed by being used on a turbomolecular vacuum pump, since these have a particularly large number of electronic components and require complex control.
  • the first figure shows an example of a vacuum pump, a turbomolecular vacuum pump 1, in short: turbo pump. It has a suction flange 3, via which it is connected to a recipient in which a high vacuum is to be generated.
  • the extracted gas is compressed by blades bearing rotor disks 5 and also bearing blades stator 6.
  • the rotor disks 5 are set in rapid rotation via a shaft 4 to which they are attached.
  • the compressed gas which usually still has a pressure in the coarse / fine vacuum range, is discharged via the gas outlet 17 to a backing pump.
  • the shaft is supported rotatably by bearings 7, which are designed, for example, as ball bearings or magnetic bearings.
  • the rotation is effected by a drive motor 9.
  • the turbo pump has an interior space 8, in which there is a negative pressure compared to the environment of the pump.
  • This negative pressure is often in the range of Vorvakuums, which prevails at the gas outlet 17, since the interior and gas outlet are connected to each other via engine and bearing gaps.
  • the electrical lines are arranged, via which the electrical power required to generate the rotation is transmitted to the motor 9.
  • the drive unit 11 is arranged, which is connected via, for example, releasably connected to the housing of the turbo pump.
  • electronic circuits 16 are provided. These circuits take on a variety of tasks, such as the generation of currents and voltages with which the coils of the motor are driven. It can also be provided a mains voltage conditioning, in addition to come integrated circuits and / or controllers, the peripheral devices, such as fans and the like, control. Operating data of the turbo pump can also be monitored or flood processes and the like can be controlled.
  • the housing can be sealed via an outer seal 15. This makes it possible to protect the electronic circuit from splashing water, the outer seal is not used to achieve a vacuum tightness.
  • the drive unit has the same conditions as the environment, ie normally air at atmospheric pressure.
  • the circuits 16 within the drive unit electrical currents and voltages must be fed into the interior 8 of the turbo pump. The pressure difference between the environment and the interior must be maintained.
  • a separating element which is provided with means 12 for carrying electrical currents and voltages and covers the opening 23 in the housing of the turbo pump.
  • a part of this separator is a printed circuit board 10. This circuit board is pierced in some places. Through the holes electrically conductive pins are inserted and then soldered, so that the holes are sealed vacuum-tight. The pins are connected to the drive unit side facing electrical conductors that make electrical contact with the circuits 16.
  • the printed circuit board of the separator is bolted to the pump housing 2 with screws.
  • an elastomeric sealing ring 13 surrounds the opening 23.
  • the vacuum tightness can be further improved by providing a coating 14 in the region where the elastomeric seal rests on the printed circuit board.
  • FIG. 2 A second example of a separating element is shown in Figure 2, in which only the lower part of the pump and the upper part of the drive unit are shown in section.
  • the separator here comprises a printed circuit board 10 and a hermetically sealed plug 12c as means for passing electrical currents and voltages.
  • This plug has contact pins which sit in holes of the circuit board and are soldered therein. The contact pins lead to the side facing the opening 23 and are connected there to the lines 21.
  • An elastomeric sealing ring 24 is disposed between the plug and housing 2 of the turbo pump and seals the interior. To ensure mechanical safety and vacuum tightness, the plug itself is bolted to the pump housing.
  • the printed circuit board is also detachable with screws connected to the housing of the vacuum pump.
  • On the circuit board further electronic components 31 are arranged. These can be used, for example, to store pump-related data, such as pump type, serial number, etc.
  • FIG. 3 Another example of a separating element is shown in Figure 3, in which only the lower part of the pump and the upper part of the drive unit are shown in section.
  • the printed circuit board 10 contained in the separating element is constructed here from two layers 10a and 10b, wherein a higher number of layers can also be used. Between the layers, an inner, electrically conductive layer is provided, that is, there are interconnects between the layers 10a and 10b.
  • the means for passing electrical currents and voltages herein include connectors 12f mounted on the surface of the printed circuit board, fabricated, for example, in "surface mounting technology” (SMT) technology. These connectors are used in the area of the board that is exposed to negative pressure. The requirements for mechanical stability are low at this point.
  • SMT surface mounting technology
  • the "surface mounted device” (SMD) connectors can be used wherever high mechanical stability is not required.
  • SMD surface mounted device
  • a matching plug 20 is plugged, which sits at the ends of the lines 21, which lead to the electrical and electronic components in the interior of the turbo pump.
  • Only one layer 10a or 10b penetrating blind holes 12d establish an electrical connection to a conductor track 12b located between the layers. From this conductor track, an electrical connection can be guided via further blind holes and blind holes to the surface of the circuit board facing the drive unit.
  • connectors are to be used on the surface facing the drive unit, it is advantageous to first lead the electrical currents and voltages out of the region of the elastomer ring 13 via the conductor track 12b and to bring them to pins 12e, which are soldered into through holes.
  • the conductor 12b then ends in a range in which there is no difference between the gas pressure on the surfaces of the layers 10a and 10b, or none of the surfaces is subjected to a negative pressure. Through holes can be used easily in this area. This makes it possible to produce mechanically strong loadable connectors for connection to the circuits 16. With the measures presented in this example, it is possible to avoid holes that pass through the entire printed circuit board in the vacuum critical area within the elastomer seal 13.
  • a temperature sensor 30 is also provided on the board.
  • This temperature sensor allows the safe monitoring of the pump temperature, so that an excessive operating temperature of the pump detected and countermeasures can be taken. For example, the power fed into the drive can be reduced or the pump even stopped.
  • the temperature sensor is in thermal contact with the housing 2. This contact can be achieved in various ways. So it is conceivable to bring the temperature sensor in direct mechanical contact, to press it against the housing. It is also conceivable to provide thermally highly conductive means 32 between the temperature sensor and the housing. It is advantageous to make these means mechanically elastically deformable, so that there is a secure thermal transition from temperature sensor to means and from means to housing.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)

Abstract

The pump (1) has a drive device (11) comprising electronic circuits (16) for controlling a drive motor (9), which are arranged in an internal space (8), where low pressure prevails in the internal space. A separating unit has a printed circuit board (10), which separates the internal space from the surrounding. The printed circuit board includes a generating unit (12) for generating electric current and voltages in the internal space, where the generating unit includes a hermetically sealed connector or a stud soldered in a borehole of the board.

Description

Die Erfindung betrifft eine Vakuumpumpe, die in einer Umgebung angeordnet ist, mit einem Gehäuse, einem Innenraum und einem Antriebsgerät, welches elektronische Schaltungen zur Ansteuerung von im Innenraum angeordneten elektronischen und elektrischen Komponenten enthält, wobei im Innenraum Unterdruck herrscht, und mit einem Trennelement, welches Innenraum und Umgebung voneinander trennt.The invention relates to a vacuum pump, which is arranged in an environment with a housing, an interior and a drive unit, which contains electronic circuits for controlling arranged in the interior electronic and electrical components, wherein there is negative pressure in the interior, and with a separating element, which Interior and surroundings separate.

Vakuumpumpen weisen einen Innenraum auf, in welchem eine zunehmende Zahl elektronischer Bauteile angeordnet ist. Solche Bauteile sind beispielsweise die elektrischen Spulen des Motors oder Hallsonden, die die Drehung der Welle nachweisen, und dergleichen. Diese innerhalb der Vakuumpumpe angeordneten Bauteile werden von außerhalb der Vakuumpumpe befindlichen, elektronischen Schaltungen angesteuert. Diese Schaltungen sind oft in einem Ansteuergerät platziert. Der Innenraum einer solchen Vakuumpumpe ist auf einem Druckniveau, welches unterhalb des Atmosphärendruckes liegt. Das bedeutet, dass die elektrischen Leitungen, die zwischen den elektronischen Schaltungen und den im Innenraum angeordneten Bauteilen einen elektrischen Kontakt herstellen, durch eine hermetisch dichte Durchführung vom Innenraum zum Außenraum geführt werden müssen.Vacuum pumps have an interior in which an increasing number of electronic components is arranged. Such components are, for example, the electric coils of the motor or Hall probes, which detect the rotation of the shaft, and the like. These arranged within the vacuum pump components are controlled by located outside of the vacuum pump, electronic circuits. These circuits are often placed in a driver. The interior of such a vacuum pump is at a pressure level which is below the atmospheric pressure. This means that the electrical lines that make electrical contact between the electronic circuits and the components arranged in the interior, must be performed by a hermetically sealed passage from the interior to the exterior.

Eine im Stand der Technik übliche Lösung ist, einen hermetisch dichten Stecker an der Vakuumpumpe vorzusehen. Dieser Stecker weist in Richtung Innenraum der Vakuumpumpe Stifte auf, an die Kabel angelötet werden, welche zu den elektronischen Bauteilen führen. Die Größe und Form der Vakuumpumpe hat in den letzten Jahren an Bedeutung gewonnen. Obwohl die gewünschten Funktionen von Vakuumpumpe und Antriebsgerät umfangreicher geworden sind, soll sich in der Summe ein zunehmend kompakteres Gesamtsystem ergeben. Das Antriebsgerät soll sich an das Gehäuse der Vakuumpumpe anpassen, so dass es um dieses herum konstruiert werden muss. Andersherum gesagt: Das Gehäuse der Vakuumpumpe gibt die Rahmenbedingungen für das Antriebsgerät vor. Hierbei stellt sich der im Stand der Technik benutzte Stecker als nachteilig heraus, da er kompliziert aufgebaut ist und einen großen Platzbedarf hat.A common solution in the art is to provide a hermetically sealed plug on the vacuum pump. This plug has in the direction of the interior of the vacuum pump pins on which cables are soldered, which lead to the electronic components. The size and shape of the vacuum pump has gained in importance in recent years. Although the desired functions of vacuum pump and drive unit have become more extensive, the overall result is an increasingly compact overall system. The drive unit should adapt to the housing of the vacuum pump so that it must be constructed around it. Put another way: the housing of the vacuum pump sets the framework for the drive unit. Here, the connector used in the prior art turns out to be disadvantageous because it is complicated and has a large footprint.

Aufgabe der Erfindung ist es daher, eine Vakuumpumpe mit einem Trennelement zwischen Innenraum und Umgebung vorzustellen, welches den Aufbau einer vakuumdichten und gegen Montagefehler weniger anfälligen Durchführung erlaubt, die eine flexiblere Gestaltung der elektrischen Signalführung gestattet.The object of the invention is therefore to present a vacuum pump with a separating element between the interior and the environment, which allows the construction of a vacuum-tight and less prone to assembly errors implementation that allows a more flexible design of the electrical signal routing.

Gelöst wird diese Aufgabe durch eine Vakuumpumpe mit den Merkmalen des ersten Anspruches. Dadurch, dass eine gedruckte Schaltungsplatine in dem Trennelement verwendet wird, welches den Innenraum der Vakuumpumpe von der Umgebung trennt, kann die Signalführung wesentlich besser den räumlichen Vorgaben angepasst werden. Die Bestückung einer Platine ist einfacher und aufgrund der großzügigeren Platzverhältnisse weniger fehleranfällig bei der Montage. Es ist möglich, Signale auf der Platine von der Stelle der Durchführung an einen anderen Punkt auf der Platine zu führen, um von diesem eine Verbindung zum Antriebsgerät aufzubauen. Platinen selbst sind einer weiten Bandbreite von geometrischen Formen kostengünstig erhältlich. Zudem sind sie in ausreichendem Maße vakuumdicht.This object is achieved by a vacuum pump with the features of the first claim. By using a printed circuit board in the separator that separates the interior of the vacuum pump from the environment, the signal routing can be much better adapted to the spatial specifications. The assembly of a board is simpler and less prone to error during assembly due to the more spacious space. It is possible to route signals on the board from the point of implementation to another point on the board to connect to the drive unit from it. Boards themselves are available inexpensively in a wide range of geometric shapes. In addition, they are sufficiently vacuum-tight.

Die abhängigen Ansprüche 2 bis 11 stellen vorteilhafte Weiterbildungen der Erfindung dar.The dependent claims 2 to 11 represent advantageous developments of the invention.

Eine erste Weiterbildung bezieht sich auf die Gestaltung der Mittel zur Durchführung elektrischer Ströme und Spannungen. Eine technisch einfache und kostengünstige Lösung ist, die gedruckte Schaltungsplatine zu durchbohren, Stifte in diese Bohrungen zu stecken und zu verlöten. Dabei ist eine vakuumdichte Durchführung durch die Verlötung gewährleistet.A first development relates to the design of means for carrying electrical currents and voltages. A technically simple and inexpensive solution is to pierce the printed circuit board, pins stuck in these holes and to solder. In this case, a vacuum-tight implementation is guaranteed by the soldering.

Eine andere Weiterbildung der Mittel zur Durchführung der elektrischen Ströme und Spannungen besteht darin, auf der Platine einen hermetisch dichten Stecker vorzusehen. Dieser weist Kontaktstifte in Richtung Innenraum der Vakuumpumpe auf. Auf der diesem Innenraum abgewandten Seite sind Kontakte in der gedruckten Schaltungsplatine eingelötet. Mit dieser Variante wird die Vakuumdichtheit weiter erhöht.Another development of the means for carrying out the electrical currents and voltages is to provide a hermetically sealed plug on the board. This has contact pins in the direction of the interior of the vacuum pump. On the side facing away from this interior, contacts in the printed circuit board are soldered. With this variant, the vacuum tightness is further increased.

Die Erfindung lässt sich weiterbilden, indem die gedruckte Schaltungsplatine aus mindestens zwei Schichten aufgebaut ist. Dies erlaubt es, Steckverbinder auf der Oberfläche vorzusehen, die mit einer inneren, zwischen den Schichten befindlichen und elektrisch leitenden Schicht in elektrischem Kontakt stehen. Dies vermeidet es, für die Mittel zur Durchführung der elektrischen Ströme und Spannungen durchgehende Löcher in der gedruckten Schaltungsplatine vorzusehen. Es wird auf diese Weise die Vakuumdichtheit der Anordnung erhöht.The invention can be further developed by constructing the printed circuit board from at least two layers. This makes it possible to provide connectors on the surface, which are in electrical contact with an inner, located between the layers and electrically conductive layer. This avoids providing through holes in the printed circuit board for the means for passing the electrical currents and voltages. It is increased in this way, the vacuum-tightness of the arrangement.

Durch das Anordnen eines Elastomerrings in dem Spalt zwischen Trennelement und Gehäuse kann eine einfache und sichere Abdichtung erreicht werden. Diese wird noch weiter verbessert, in dem auf der gedruckten Schaltungsplatine eine beschichtete Fläche vorgesehen wird, auf der der Elastomerring aufliegt. Diese Fläche ist eben ausgeführt, so dass Stellen vermieden werden, an denen der Elastomerring nur schlecht aufliegt. Die Beschichtung kann aus Gold oder einer Goldlegierung bestehen. Solche Beschichtungen sind im Herstellungsprozess der gedruckten Schaltungsplatinen üblich und daher kostengünstig.By arranging an elastomeric ring in the gap between the separating element and the housing, a simple and reliable sealing can be achieved. This is further improved by providing on the printed circuit board a coated surface on which the elastomeric ring rests. This surface is flat, so that places are avoided where the elastomer ring rests poorly. The coating may consist of gold or a gold alloy. Such coatings are common in the printed circuit board manufacturing process and therefore cost effective.

Die Weiterbildung nach Anspruch 8, die weitere elektronische Bauteile auf der gedruckten Schaltungsplatine vorsieht, erlaubt es, die Vakuumpumpe mit zusätzlichen Funktionen auszustatten, ohne weitere Elektronikbauteile innerhalb des Unterdruckbereichs, dem Innenraum, anzuordnen. Funktionen wie Fehlerspeicher, Pumpentyperkennung, Temperaturmessung und ähnliches können verwirklicht werden, ohne elektrische Signale über eine vakuumdichte Durchführung zu führen. Es werden nur noch die unvermeidlichen Leitungen in den Vorvakuumbereich der Vakuumpumpe geführt, beispielsweise für den Motor. Alles andere kann auf der Platine angeordnet werden, was kostengünstiger und technisch einfacher ist. Außerdem wird die Zahl der elektronischen Bauteile minimiert, die im Unterdruck betrieben werden.The development according to claim 8, which provides further electronic components on the printed circuit board, allows the vacuum pump with to equip additional functions, without arranging further electronic components within the negative pressure area, the interior. Functions such as fault memory, pump type detection, temperature measurement and the like can be realized without leading electrical signals through a vacuum-tight implementation. Only the unavoidable lines are led into the fore-vacuum area of the vacuum pump, for example for the engine. Everything else can be arranged on the board, which is cheaper and technically easier. In addition, the number of electronic components that are operated in negative pressure is minimized.

In einer Weiterbildung dieses Gedankens wird ein Temperaturfühler auf der Platine angeordnet, der mit dem Gehäuse der Vakuumpumpe in thermischem Kontakt steht. Dieser kann durch einen direkten mechanischen Kontakt realisiert sein, auch ein mechanisch deformierbarer thermischer Leiter zwischen dem Temperaturfühler und dem Gehäuse stellt eine günstige Ausgestaltung dar. Eine aufwändige Verkabelung dieses Fühlers im Innenraum der Vakuumpumpe entfällt, ein defekter Temperaturfühler kann problemlos ausgetauscht werden. Eine sichere Überwachung der Pumpentemperatur und damit eine Vermeidung von überhohen Temperaturen kann so gewährleistet werden.In a development of this idea, a temperature sensor is arranged on the board, which is in thermal contact with the housing of the vacuum pump. This can be realized by a direct mechanical contact, even a mechanically deformable thermal conductor between the temperature sensor and the housing is a favorable design. A complex wiring of this sensor in the interior of the vacuum pump is eliminated, a defective temperature sensor can be easily replaced. Safe monitoring of the pump temperature and thus avoiding excessive temperatures can thus be ensured.

Eine vorteilhafte Weiterbildung besteht darin, das Antriebsgerät lösbar an der Vakuumpumpe zu befestigen, wobei es das Trennelement wenigstens teilweise abdeckt. Dadurch wird ein kompaktes Gesamtsystem geschaffen und gleichzeitig das Trennelement gegen äußere Einwirkungen geschützt.An advantageous development is to releasably attach the drive unit to the vacuum pump, wherein it covers the partition at least partially. As a result, a compact overall system is created and at the same time the separating element is protected against external influences.

Die Erfindung lässt sich weiterbilden, indem sie an einer Turbomolekularvakuumpumpe eingesetzt wird, da diese besonders viele elektronische Komponenten aufweisen und eine aufwändige Ansteuerung benötigen.The invention can be further developed by being used on a turbomolecular vacuum pump, since these have a particularly large number of electronic components and require complex control.

Mit Hilfe der Abbildungen soll die Erfindung an Ausführungsbeispielen näher erläutert und ihre Vorteile vertieft werden. Die Abbildungen zeigen:

Fig. 1:
Schnitt durch eine Turbomolekularvakuumpumpe mit Antriebsgerät nach einem ersten Ausführungsbeispiel.
Fig. 2:
Schnittdarstellung des Bereichs des Trennelements zwischen Innenraum der Vakuumpumpe und Umgebung gemäß eines zweiten Ausführungsbeispiels.
Fig. 3:
Schnittdarstellung des Bereichs des Trennelements zwischen Innenraum der Vakuumpumpe und Umgebung gemäß eines dritten Ausführungsbeispiels.
With the help of the figures, the invention will be explained in more detail in exemplary embodiments and their advantages will be deepened. The pictures show:
Fig. 1:
Section through a turbomolecular vacuum pump with drive unit according to a first embodiment.
Fig. 2:
Sectional view of the region of the separating element between the interior of the vacuum pump and the environment according to a second embodiment.
3:
Sectional view of the region of the separating element between the interior of the vacuum pump and the environment according to a third embodiment.

Die erste Abbildung zeigt als Beispiel für eine Vakuumpumpe eine Turbomolekularvakuumpumpe 1, kurz: Turbopumpe. Sie besitzt einen Ansaugflansch 3, über den sie mit einem Rezipienten verbunden wird, in dem ein Hochvakuum erzeugt werden soll. Das abgesaugte Gas wird durch Schaufeln tragende Rotorscheiben 5 und ebenfalls Schaufeln tragende Statorscheiben 6 verdichtet. Hierzu werden die Rotorscheiben 5 über eine Welle 4, an der sie befestigt sind, in schnelle Drehung versetzt. Das verdichtete Gas, welches meist noch immer einen Druck im Grob-/Feinvakuumbereich hat, wird über den Gasauslass 17 an eine Vorvakuumpumpe abgegeben. Drehbar unterstützt wird die Welle von Lagern 7, die beispielsweise als Kugellager oder Magnetlager ausgeführt sind. Die Drehung wird durch einen Antriebsmotor 9 bewirkt. Die Turbopumpe weist einen Innenraum 8 auf, in dem im Vergleich zur Umgebung der Pumpe ein Unterdruck herrscht. Dieser Unterdruck liegt oft im Bereich des Vorvakuums, welches am Gasauslass 17 herrscht, da Innenraum und Gasauslass über Motor- und Lagerspalte miteinander verbunden sind. In diesem Innenraum sind die elektrischen Leitungen angeordnet, über die die zur Erzeugung der Drehung benötigte elektrische Leistung in den Motor 9 übertragen wird.The first figure shows an example of a vacuum pump, a turbomolecular vacuum pump 1, in short: turbo pump. It has a suction flange 3, via which it is connected to a recipient in which a high vacuum is to be generated. The extracted gas is compressed by blades bearing rotor disks 5 and also bearing blades stator 6. For this purpose, the rotor disks 5 are set in rapid rotation via a shaft 4 to which they are attached. The compressed gas, which usually still has a pressure in the coarse / fine vacuum range, is discharged via the gas outlet 17 to a backing pump. The shaft is supported rotatably by bearings 7, which are designed, for example, as ball bearings or magnetic bearings. The rotation is effected by a drive motor 9. The turbo pump has an interior space 8, in which there is a negative pressure compared to the environment of the pump. This negative pressure is often in the range of Vorvakuums, which prevails at the gas outlet 17, since the interior and gas outlet are connected to each other via engine and bearing gaps. In this interior, the electrical lines are arranged, via which the electrical power required to generate the rotation is transmitted to the motor 9.

An dem dem Ansaugflansch gegenüberliegenden Ende der Turbopumpe ist das Antriebsgerät 11 angeordnet, welches über beispielsweise Schrauben lösbar mit dem Gehäuse der Turbopumpe verbunden ist. In diesem Antriebsgerät sind elektronische Schaltungen 16 vorgesehen. Diese Schaltungen übernehmen vielfältige Aufgaben, beispielsweise die Erzeugung der Ströme und Spannungen mit denen die Spulen des Motors angesteuert werden. Es kann auch eine Netzspannungsaufbereitung vorgesehen sein, hinzu kommen Integrierte Schaltungen und/oder Kontroller, die Peripheriegeräte, wie beispielsweise Lüfter und dergleichen, ansteuern. Es können auch Betriebsdaten der Turbopumpe überwacht werden oder Flutvorgänge und ähnliches gesteuert werden. Das Gehäuse kann über eine äußere Dichtung 15 abgedichtet werden. Hierdurch ist es möglich, die elektronische Schaltung vor Spritzwasser zu schützen, die äußere Dichtung dient nicht dem Erreichen einer Vakuumdichtheit.At the opposite end of the suction flange of the turbo pump, the drive unit 11 is arranged, which is connected via, for example, releasably connected to the housing of the turbo pump. In this drive unit electronic circuits 16 are provided. These circuits take on a variety of tasks, such as the generation of currents and voltages with which the coils of the motor are driven. It can also be provided a mains voltage conditioning, in addition to come integrated circuits and / or controllers, the peripheral devices, such as fans and the like, control. Operating data of the turbo pump can also be monitored or flood processes and the like can be controlled. The housing can be sealed via an outer seal 15. This makes it possible to protect the electronic circuit from splashing water, the outer seal is not used to achieve a vacuum tightness.

Das Antriebsgerät weist dieselben Bedingungen wie die Umgebung auf, also im Normalfall Luft unter Atmosphärendruck. Von den Schaltungen 16 innerhalb des Antriebsgeräts müssen elektrische Ströme und Spannungen in den Innenraum 8 der Turbopumpe geführt werden. Dabei muss der Druckunterschied zwischen Umgebung und Innenraum aufrecht erhalten werden. Hierzu dient ein Trennelement, welches mit Mitteln 12 zur Durchführung elektrischer Ströme und Spannungen versehen ist und die Öffnung 23 im Gehäuse der Turbopumpe abdeckt. Ein Teil dieses Trennelements ist eine gedruckte Schaltungsplatine 10. Diese Schaltungsplatine ist an einigen Stellen durchbohrt. Durch die Bohrungen sind elektrisch leitende Stifte gesteckt und anschließend eingelötet, so dass die Bohrungen vakuumdicht verschlossen sind. Die Stifte werden an der dem Antriebsgerät zugewandten Seite mit elektrischen Leitern verbunden, die den elektrischen Kontakt zu den Schaltungen 16 herstellen. Diese elektrischen Leiter enden an verschiedenen, von einander beabstandeten Kontaktierungsstellen 25a, 25b. Statt eine direkte Verbindung der Stifte und elektrischen Leiter herzustellen, kann auch für einen Teil der notwendigen Verbindungen eine Leiterbahn 12f vorgesehen sein, über die die elektrische Ströme und Spannungen an einen anderen Punkt der gedruckten Schaltungsplatine geführt wird. Dies erlaubt eine optimale, flexible räumliche Anordnung der verschiedenen Schaltungsteile im Antriebsgerät. Für die Kontaktherstellung zwischen Leitungen und Stiften können beispielsweise einfache Steckkontakte verwendet werden. Auf der dem Innenraum der Turbopumpe zugewandten Seite werden Stecker auf die Stifte gesteckt, die an den Enden von Leitungen 21 vorgesehen sind. Diese Leitungen führen zu den elektronischen und elektrischen Komponenten im Innenraum der Turbopumpe, beispielsweise dem Motor. Solche Steckkontakte vereinfachen die Montage und Demontage des Trennelements an der Pumpe. Die gedruckte Schaltungsplatine des Trennelement ist mit Schrauben am Pumpengehäuse 2 festgeschraubt. Um die Vakuumdichtheit der Anordnung zu erhöhen, umgibt ein Elastomerdichtring 13 die Öffnung 23. Die Vakuumdichtheit kann weiter verbessert werden, indem eine Beschichtung 14 in dem Bereich vorgesehen ist, in dem die Elastomerdichtung auf der gedruckten Schaltungsplatine aufliegt.The drive unit has the same conditions as the environment, ie normally air at atmospheric pressure. Of the circuits 16 within the drive unit electrical currents and voltages must be fed into the interior 8 of the turbo pump. The pressure difference between the environment and the interior must be maintained. For this purpose, a separating element, which is provided with means 12 for carrying electrical currents and voltages and covers the opening 23 in the housing of the turbo pump. A part of this separator is a printed circuit board 10. This circuit board is pierced in some places. Through the holes electrically conductive pins are inserted and then soldered, so that the holes are sealed vacuum-tight. The pins are connected to the drive unit side facing electrical conductors that make electrical contact with the circuits 16. These electrical conductors terminate at different, spaced-apart contacting points 25a, 25b. Instead of producing a direct connection of the pins and electrical conductors, it is also possible for a part of the necessary connections to be provided with a conductor 12f via which the electrical currents and voltages are conducted to another point on the printed circuit board. This allows an optimal, flexible spatial arrangement of the various circuit parts in the drive unit. For the contact between leads and pins, for example, simple plug contacts can be used. On the side facing the interior of the turbopump plug are plugged onto the pins, which are provided at the ends of lines 21. These lines lead to the electronic and electrical components in the interior of the turbo pump, such as the engine. Such plug contacts simplify the assembly and disassembly of the separator on the pump. The printed circuit board of the separator is bolted to the pump housing 2 with screws. To increase the vacuum tightness of the assembly, an elastomeric sealing ring 13 surrounds the opening 23. The vacuum tightness can be further improved by providing a coating 14 in the region where the elastomeric seal rests on the printed circuit board.

Ein zweites Beispiel eines Trennelements zeigt die Abbildung 2, in der nur der untere Teil der Pumpe und der obere Teil des Antriebsgeräts im Schnitt gezeigt sind. Das Trennelement weist hier eine gedruckte Schaltungsplatine 10 und einen hermetisch dichten Stecker 12c als Mittel zur Durchführung elektrischer Ströme und Spannungen auf. Dieser Stecker besitzt Kontaktstifte, die in Bohrungen der Schaltungsplatine sitzen und darin verlötet sind. Die Kontaktstifte führen auf die der Öffnung 23 zugewandten Seite und sind dort mit den Leitungen 21 verbunden. Eine elastomerer Dichtring 24 ist zwischen Stecker und Gehäuse 2 der Turbopumpe angeordnet und dichtet den Innenraum ab. Um die mechanische Sicherheit und Vakuumdichtheit zu gewährleisten, ist der Stecker selbst mit dem Pumpengehäuse verschraubt. Die gedruckte Schaltungsplatine ist ebenfalls mit Schrauben lösbar mit dem Gehäuse der Vakuumpumpe verbunden. Auf der Schaltungsplatine sind weitere elektronische Bauteile 31 angeordnet. Diese können beispielsweise der Speicherung von pumpenbezogenen Daten dienen, wie Pumpentyp, Seriennummer, etc.A second example of a separating element is shown in Figure 2, in which only the lower part of the pump and the upper part of the drive unit are shown in section. The separator here comprises a printed circuit board 10 and a hermetically sealed plug 12c as means for passing electrical currents and voltages. This plug has contact pins which sit in holes of the circuit board and are soldered therein. The contact pins lead to the side facing the opening 23 and are connected there to the lines 21. An elastomeric sealing ring 24 is disposed between the plug and housing 2 of the turbo pump and seals the interior. To ensure mechanical safety and vacuum tightness, the plug itself is bolted to the pump housing. The printed circuit board is also detachable with screws connected to the housing of the vacuum pump. On the circuit board further electronic components 31 are arranged. These can be used, for example, to store pump-related data, such as pump type, serial number, etc.

Ein weiteres Beispiel eines Trennelements zeigt die Abbildung 3, in der nur der untere Teil der Pumpe und der obere Teil des Antriebsgeräts im Schnitt gezeigt sind. Die im Trennelement enthaltene gedruckte Schaltungsplatine 10 ist hier aus zwei Schichten 10a und 10b aufgebaut, wobei auch eine höhere Schichtzahl verwendet werden kann. Zwischen den Schichten ist eine innere, elektrisch leitende Schicht vorgesehen, d.h. es sind zwischen den Schichten 10a und 10b Leiterbahnen vorhanden. Die Mittel zur Durchführung elektrischer Ströme und Spannungen umfassen hier auf der Oberfläche der gedruckten Schaltungsplatine montierte Steckverbinder 12f, die beispielsweise in "surface mounting technology" (SMT) Technologie hergestellt sind. Diese Steckverbinder werden in dem Bereich der Platine eingesetzt, die Unterdruck ausgesetzt ist. Die Anorderungen an die mechanische Stabiltät sind an dieser Stelle gering. Generell können die "surface mounted device" (SMD)-Stecker überall dort eingesetzt werden, wo keine hohe mechanische Stabilität gefragt ist. Auf die Steckverbinder 12f wird ein passender Stecker 20 aufgesteckt, der an den Enden der Leitungen 21 sitzt, welche zu den elektrischen und elektronischen Komponenten im Innenraum der Turbopumpe führen. Nur eine Schicht 10a oder 10b durchsetzende Sacklöcher 12d stellen eine elektrische Verbindung zu einer zwischen den Schichten befindlichen Leiterbahn 12b her. Von dieser Leiterbahn kann eine elektrische Verbindung über weitere Blindlöcher und Sacklöcher an die dem Antriebsgerät zugewandten Oberfläche der Schaltungsplatine geführt werden. Wenn Steckverbinder auf der dem Antriebsgerät zugewandten Oberfläche verwendet werden sollen, ist es vorteilhaft, die elektrischen Ströme und Spannungen zunächst über die Leiterbahn 12b aus dem Bereich des Elastomerrings 13 herauszuführen und an Stifte 12e heranzuführen, die in durchgehende Bohrungen eingelötet sind. Die Leiterbahn 12b endet dann in einem Bereich, in dem es keinen Unterschied zwischen dem Gasdruck auf die Oberflächen der Schichten 10a und 10b gibt, bzw. keine der Oberflächen einem Unterdruck ausgesetzt ist. In diesem Bereich können durchgehende Bohrungen problemlos eingesetzt werden. Hierdurch ist es möglich, mechanisch stark belastbare Steckverbindungen für die Verbindung zu den Schaltungen 16 herzustellen. Mit den in diesem Beispiel vorgestellten Maßnahmen ist es möglich, Bohrungen zu vermeiden, die die gesamte gedruckte Schaltungsplatine im vakuumtechnisch kritischen Bereich innerhalb der Elastomerdichtung 13 durchsetzen. Die Vakuumdichtheit des in diesem Beispiel vorgestellten Trennelements ist es sehr hoch. Gleichzeitig ist es leicht möglich, die Leiterbahnen zwischen den Schichten so zu legen, dass die Kontakte auf der Seite des Antriebsgeräts an solche Kontaktierungsstellen 25a, 25b, 25c geführt werden, an denen sie den Schaltungsteilen im Antriebsgerät räumlich nahe sind.Another example of a separating element is shown in Figure 3, in which only the lower part of the pump and the upper part of the drive unit are shown in section. The printed circuit board 10 contained in the separating element is constructed here from two layers 10a and 10b, wherein a higher number of layers can also be used. Between the layers, an inner, electrically conductive layer is provided, that is, there are interconnects between the layers 10a and 10b. The means for passing electrical currents and voltages herein include connectors 12f mounted on the surface of the printed circuit board, fabricated, for example, in "surface mounting technology" (SMT) technology. These connectors are used in the area of the board that is exposed to negative pressure. The requirements for mechanical stability are low at this point. In general, the "surface mounted device" (SMD) connectors can be used wherever high mechanical stability is not required. On the connector 12f a matching plug 20 is plugged, which sits at the ends of the lines 21, which lead to the electrical and electronic components in the interior of the turbo pump. Only one layer 10a or 10b penetrating blind holes 12d establish an electrical connection to a conductor track 12b located between the layers. From this conductor track, an electrical connection can be guided via further blind holes and blind holes to the surface of the circuit board facing the drive unit. If connectors are to be used on the surface facing the drive unit, it is advantageous to first lead the electrical currents and voltages out of the region of the elastomer ring 13 via the conductor track 12b and to bring them to pins 12e, which are soldered into through holes. The conductor 12b then ends in a range in which there is no difference between the gas pressure on the surfaces of the layers 10a and 10b, or none of the surfaces is subjected to a negative pressure. Through holes can be used easily in this area. This makes it possible to produce mechanically strong loadable connectors for connection to the circuits 16. With the measures presented in this example, it is possible to avoid holes that pass through the entire printed circuit board in the vacuum critical area within the elastomer seal 13. The vacuum tightness of the presented in this example separator is very high. At the same time, it is easily possible to lay the interconnects between the layers so that the contacts on the side of the drive unit are guided to those contacting points 25a, 25b, 25c at which they are spatially close to the circuit parts in the drive unit.

Ebenfalls auf der Platine vorgesehen ist ein Temperaturfühler 30. Dieser Temperaturfühler erlaubt die sichere Überwachung der Pumpentemperatur, so dass eine zu hohe Betriebstemperatur der Pumpe detektiert und Gegenmaßnahmen ergriffen werden können. Beispielsweise kann die in den Antrieb eingespeiste Leistung reduziert oder die Pumpe sogar angehalten werden. Der Temperaturfühler steht in thermischem Kontakt mit dem Gehäuse 2. Dieser Kontakt kann auf verschiedene Weisen erreicht werden. So ist es denkbar, den Temperaturfühler in direkten mechanischen Kontakt zu bringen, ihn gegen das Gehäuse zu drücken. Auch ist es denkbar, thermisch gut leitfähige Mittel 32 zwischen dem Temperaturfühler und dem Gehäuse vorzusehen. Günstig ist es, diese Mittel mechanisch elastisch deformierbar zu gestalten, so dass ein sicherer thermischer Übergang von Temperaturfühler zu Mittel und von Mittel zu Gehäuse besteht.Also provided on the board is a temperature sensor 30. This temperature sensor allows the safe monitoring of the pump temperature, so that an excessive operating temperature of the pump detected and countermeasures can be taken. For example, the power fed into the drive can be reduced or the pump even stopped. The temperature sensor is in thermal contact with the housing 2. This contact can be achieved in various ways. So it is conceivable to bring the temperature sensor in direct mechanical contact, to press it against the housing. It is also conceivable to provide thermally highly conductive means 32 between the temperature sensor and the housing. It is advantageous to make these means mechanically elastically deformable, so that there is a secure thermal transition from temperature sensor to means and from means to housing.

Claims (11)

Vakuumpumpe (1), die in einer Umgebung angeordnet ist, mit einem Gehäuse (2), einem Innenraum (8) und einem Antriebsgerät (11), welches elektronische Schaltungen (16) zur Ansteuerung von im Innenraum (8) angeordneten elektronischen und elektrischen Komponenten (9) enthält, wobei im Innenraum Unterdruck herrscht, mit einem Trennelement, welches Innenraum und Umgebung voneinander trennt, dadurch gekennzeichnet, dass das Trennelement eine gedruckte Schaltungsplatine (10) umfasst, welche Mittel (12) zur Durchführung elektrischer Ströme und Spannungen in den Innenraum aufweist.Vacuum pump (1), which is arranged in an environment with a housing (2), an interior (8) and a drive unit (11), which electronic circuits (16) for controlling in the interior (8) arranged electronic and electrical components (9), wherein there is negative pressure in the interior, with a separating element which separates the interior and the environment from each other, characterized in that the separating element comprises a printed circuit board (10), which means (12) for carrying electrical currents and voltages in the interior having. Vakuumpumpe (1) nach Anspruch 1, dadurch gekennzeichnet, dass die Mittel (12) zur Durchführung einen in einer Bohrung der gedruckten Schaltungsplatine (10) eingelöteten Stift umfassen.A vacuum pump (1) according to claim 1, characterized in that said means (12) for passing comprises a pin soldered in a bore of the printed circuit board (10). Vakuumpumpe (1) nach Anspruch 1, dadurch gekennzeichnet, dass die Mittel zur Durchführung einen hermetisch dichten Stecker (12c) umfassen.Vacuum pump (1) according to claim 1, characterized in that the means for passage comprise a hermetically sealed plug (12c). Vakuumpumpe (1) nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die gedruckte Schaltungsplatine (10) mindestens zwei Schichten (10a, 10b) aufweist.Vacuum pump (1) according to one of claims 1 to 3, characterized in that the printed circuit board (10) has at least two layers (10a, 10b). Vakuumpumpe (1) nach Anspruch 4, dadurch gekennzeichnet, dass die Mittel zur Durchführung einen auf der Oberfläche befestigte Steckverbinder (12f) umfassen, der mit einer inneren, elektrisch leitenden Schicht (12b) in elektrischem Kontakt steht.Vacuum pump (1) according to claim 4, characterized in that said means for passage comprise a surface-mounted connector (12f) in electrical contact with an inner, electrically conductive layer (12b). Vakuumpumpe (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Trennelement durch einen Elastomerring (13) gegen das Gehäuse (2) abgedichtet ist.Vacuum pump (1) according to one of the preceding claims, characterized in that the separating element is sealed by an elastomeric ring (13) against the housing (2). Vakuumpumpe (1) nach Anspruch 6, dadurch gekennzeichnet, dass der Elastomerring (13) auf einer beschichteten Fläche (14) des Trennelements aufliegt.Vacuum pump (1) according to claim 6, characterized in that the elastomeric ring (13) rests on a coated surface (14) of the separating element. Vakuumpumpe (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Trennelement auf der dem Gehäuse (2) zugewandten Seite mindestens ein weiteres elektronisches Bauteil (31) aufweist.Vacuum pump (1) according to one of the preceding claims, characterized in that the separating element on the housing (2) side facing at least one further electronic component (31). Vakuumpumpe (1) nach Anspruch 8, dadurch gekennzeichnet, dass das weitere elektronische Bauteil ein Temperaturfühler (30) ist, der mit dem Gehäuse (2) in thermischem Kontakt steht.Vacuum pump (1) according to claim 8, characterized in that the further electronic component is a temperature sensor (30) which is in thermal contact with the housing (2). Vakuumpumpe (1) nach einem der vorhergehenden Ansprüche dadurch gekennzeichnet, dass das Antriebsgerät (11) lösbar an der Vakuumpumpe (1) befestigt ist und das Trennelement wenigstens teilweise abdeckt.Vacuum pump (1) according to one of the preceding claims, characterized in that the drive unit (11) is releasably attached to the vacuum pump (1) and at least partially covers the separating element. Vakuumpumpe (1) nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Vakuumpumpe (1) eine Turbomolekularpumpe ist.Vacuum pump (1) according to one of the preceding claims, characterized in that the vacuum pump (1) is a turbomolecular pump.
EP07006199.9A 2006-04-07 2007-03-27 Vacuum pump with drive device Active EP1843043B1 (en)

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Also Published As

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EP1843043A3 (en) 2014-04-23
US8651838B2 (en) 2014-02-18
DE102006016405A1 (en) 2007-10-11
EP1843043B1 (en) 2018-05-16
DE102006016405B4 (en) 2024-08-01
JP5303114B2 (en) 2013-10-02
JP2007278278A (en) 2007-10-25
US20070237650A1 (en) 2007-10-11

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