JP4211658B2 - Turbo molecular pump - Google Patents

Description

  The present invention relates to a turbo molecular pump used in a semiconductor manufacturing apparatus or the like.

  Conventionally, a turbo-molecular pump includes a pump unit that performs evacuation and a drive control unit that supplies power to the pump unit to perform control. Each unit is configured separately, and the units are connected by a cable that supplies drive power and transmits a control signal. In such a turbo molecular pump, it is necessary to adjust the control parameters of the drive control unit depending on the length of the cable connecting the units. For this reason, in order to eliminate such troublesome adjustment, a unit in which a pump unit and a drive control unit are integrated has been proposed (for example, see Patent Document 1). That is, the drive control unit housing is directly connected to the pump unit.

Japanese Patent No. 3165857

  However, when the semiconductor manufacturing apparatus or the like to which the pump unit is attached is a plasma film forming apparatus or an ion implantation apparatus, electromagnetic noise caused by these apparatuses becomes a problem. In particular, in the case of an integrated turbo molecular pump, the drive control unit is connected to a semiconductor manufacturing apparatus or the like via the pump unit, so that electromagnetic noise is directly applied to the drive control unit itself, and there is an adverse effect due to electromagnetic noise. It becomes easy to receive.

The invention according to claim 1, a pump unit for evacuation, applies a drive control unit for driving and controlling the pump unit to the turbomolecular pump with integrated, formed in a metal base in the pump unit space to provided an electrically insulated state, and the electromagnetic noise shielding case for the drive control unit is accommodated, is arranged in a space formed in the metal base, a noise blocking provided in the power supply input line of the drive control unit A line filter and a noise filter disposed in a drive control line of the drive control unit are provided in a space formed in the metal base .
A second aspect of the present invention, in the turbo molecular pump according to claim 1, formed of a metal to shield the voltage noise metal base, and current noise shielding case the case for electromagnetic noise shielding

According to the present invention, the drive control unit has a double electromagnetic shield structure by the metal base and the electromagnetic noise shielding case, and the input line and the drive control line are provided with a filter for blocking noise. Yes. As a result, electromagnetic noise from the device can be effectively blocked.

  Hereinafter, the best mode for carrying out the present invention will be described with reference to the drawings. FIG. 1 is a sectional view showing a schematic configuration of a turbo molecular pump 1 according to the present invention. The turbo molecular pump 1 corresponds to the conventional pump unit above the broken line and corresponds to the drive control unit below the broken line. Inside the casing 20 provided in the turbo molecular pump 1, the rotor 4 in which a plurality of stages of rotor blades 21 and screw groove portions 22 are formed, and stator blades 23 arranged alternately with respect to the rotor blades 21; A cylindrical member 24 is provided so as to face the screw groove 22. The stator blade 23 and the cylindrical member 24 are provided so as to be fixed to the base 25 of the turbo molecular pump 1.

  This turbo molecular pump 1 is a magnetic bearing type turbo molecular pump, and the rotor 4 is supported in a non-contact manner by electromagnets 51 and 52 constituting a radial magnetic bearing and an electromagnet 53 constituting an axial magnetic bearing. Corresponding to the radial electromagnets 51 and 52 and the axial electromagnet 53, radial displacement sensors 54 and 55 and an axial displacement sensor 56 are provided. 27 and 28 are emergency mechanical bearings. When the rotor 4 is not magnetically levitated, the rotor 4 is supported by these bearings 27 and 28.

  When the rotor 4 is rotationally driven by the motor 6 while being supported in a non-contact manner by the electromagnets 51, 52, 53, the gas on the inlet flange 20 side fixed to the vacuum chamber of the semiconductor manufacturing apparatus is on the back pressure side (space S1 ). The gas exhausted to the back pressure side is discharged outside the pump by an auxiliary pump connected to the exhaust port flange 26.

  A cavity constituting the drive control unit storage space 250 is formed in the lower part of the base 25, and a lid 25 a that shields the cavity opening is fixed to the lower surface of the base 25. In the drive control unit space 250, a drive control unit chassis 252 in which the drive control unit circuit 251 is accommodated is disposed. The drive control unit chassis 252 is a case for shielding electromagnetic noise, and is formed of a metal such as an aluminum alloy or iron, for example. The drive control unit circuit 251 constitutes an AC / DC converter 301, an inverter / motor driver 302, a magnetic bearing driver 303, and the like as will be described later (see FIG. 4). Generally, an aluminum alloy is often used for the base 25, and the drive control unit chassis 252 is fixed to the base 25 via a support member 253 made of an electrically insulating member.

  Connectors 254 and 255 are provided between the drive control unit circuit 251 and the base 25. The connector 254 connects a power line and a signal line between the motor system and the drive control unit circuit 251. A connector 255 connects a power line and a signal line between the magnetic bearing system and the drive control unit circuit 251. To do. Each connector 254, 255 is provided with each connector part 257 fixed to each of the base 25 and the drive control unit chassis 252, and a noise filter 258 provided in the line. As the connectors 254 and 255, a connector with a built-in noise filter 258 may be used, and the connector portion 257 and the noise filter 258 may be separate.

  A noise blocking line filter 256 is provided between the base 25 and the drive control unit chassis 252. AC power or DC power input to the turbo molecular pump 1 is supplied to the drive control unit circuit 251 in the drive control unit chassis 252 via the line filter 256. The line filter 256 is grounded together with the base 25.

  The line filter 256 is basically cut off of high frequency noise by an inductor using a coil or a ferrite core, but may be an LC filter having a capacitor connected to cut off a specific frequency. As an example of capacitor connection, it is effective to use a T-type or π-type as shown in FIG. 2 (e) or FIG. 2 (f). FIG. 2 shows an example of a general filter. (A) is an L filter, (b) is a C filter, (c) is an R filter, (d) is an LC filter, and (e) is a T type. Filter (f) shows a π-type filter.

  FIG. 3 is a block diagram showing a configuration of a conventional turbomolecular pump in which a drive control unit and a pump unit are connected by a cable, and FIG. 4 is a block diagram showing a configuration of a turbomolecular pump according to the present invention. In the conventional turbo molecular pump shown in FIG. 3, the drive control unit 300 is provided with an AC / DC converter 301, an inverter / motor driver 302, and a magnetic bearing driver 303. The inverter / motor driver 302 is connected to the motor 311 of the pump unit 310 via a cable 304, and the magnetic bearing driver 303 is connected to the magnetic bearing system 312 of the pump unit 310 via a cable 305. AC power is input to the AC / DC converter 301 from the outside.

  On the other hand, FIG. 4 is a block diagram of the turbo-molecular pump 1 shown in FIG. 1, (a) shows a first example, and (b) shows a second example. In the example shown in FIG. 4A, in addition to the motor 6 and the magnetic bearing system 5 (51 to 56), an inverter / motor driver 302 and a magnetic bearing driver 303 are also provided on the turbo molecular pump 1 side. The inverter / motor driver 302 and the magnetic bearing driver 303 are housed in the drive control unit chassis 252. Furthermore, a line filter 256 is provided on the DC input line on the turbo molecular pump 1 side.

  In the configuration shown in FIG. 4A, the AC / DC converter 301 is provided separately from the turbo molecular pump 1, and DC power from the AC / DC converter 301 is input to the line filter 256. In the case of a relatively small turbo molecular pump, if the AC / DC converter 301 is also integrated, the pump base portion becomes too large, and the configuration is as shown in FIG. On the other hand, in the case of a large turbo molecular pump, an AC / DC converter 301 can also be provided on the turbo molecular pump 1 side as shown in FIG. AC power is input to the line filter 256, and the AC power is supplied to the AC / DC converter 301 provided in the drive control unit chassis 252 via the line filter 256.

[Modification]
FIG. 5 shows a modification of the turbo molecular pump 1 shown in FIG. The drive control unit chassis 252 and the line filter 256 are housed in an external chassis 260 for blocking electromagnetic noise. The external chassis 260 is fixed to the bottom surface of the base 25 of the turbo molecular pump 1 using bolts 261. The drive control unit chassis 252 is fixed to the external chassis 260 by an electrically insulating support member 262.

  Also in this case, the connectors 254 and 255 are provided between the drive control unit circuit 251 and the base 25, the power line and the signal line between the motor system and the drive control unit circuit 251 are connected by the connector 254, and the connector 255 is connected. A power line and a signal line between the magnetic bearing system and the drive control unit circuit 251 are connected. The line filter 256 provided in the external chassis 260 is grounded together with the external chassis 260.

  As described above, in the present embodiment, the drive control unit chassis 252 in which the drive control unit circuit 251 is housed is housed in the base 25 formed of a metal such as an aluminum alloy or is fixed to the base 25. It is housed in the external chassis 260. Therefore, the drive control unit chassis 252 is shielded by the base 25 and the external chassis 260, and electromagnetic noise from the semiconductor manufacturing apparatus is not directly applied to the drive control unit chassis 252.

  Further, since the line filter 256 and the noise filter 258 are provided in the power / control line between the base 25 or the chassis 260 and the drive control unit chassis 252, noises that enter through the line are filtered out by these filters 256 and 256. Can be blocked by H.258. As a result, the drive control unit circuit 251 provided in the drive control unit chassis 252 is cut off from electromagnetic noise.

  Note that, when an aluminum alloy is used as the material of the external chassis 260, it is particularly suitable for shielding an electric field (voltage noise) among electromagnetic noises. Even when a copper alloy is used instead of the aluminum alloy, the same effect is obtained. Furthermore, by using stainless steel or iron for the drive control unit chassis 252, a shield case excellent in shielding of magnetic fields (current noise) can be configured. Thus, by changing the materials of the external chassis 260 and the drive control unit chassis 252, it is possible to effectively block both electric and magnetic field noises.

  In the embodiment described above, the drive control unit chassis 252 is not grounded. However, for example, the drive control unit chassis 252 and the lid 25a provided on the base 25 or the external chassis 260 may be connected by a ground wire. . In that case, it is preferable to provide a ferrite core for electromagnetic noise countermeasures on the ground wire. In addition, the present invention is not limited to the above embodiment as long as the characteristics of the present invention are not impaired. For example, although the magnetic bearing type turbo molecular pump has been described as an example in the above-described embodiment, the present invention can be applied not only to the magnetic bearing type but also to a turbo molecular pump using a mechanical or fluid type bearing.

In correspondence with the elements of the range of the described embodiment and appended claims or the drive control unit chassis 252 is conductive magnetic noise shielding case, drive kinematic control unit circuit 251 constitute a drive control unit, respectively.

It is sectional drawing which shows schematic structure of the turbo-molecular pump by this invention. It is a figure which shows the example of a general filter, and various filters were shown to (a)-(f). It is a block diagram which shows the structure of the conventional turbo molecular pump. It is a block diagram which shows the structure of the turbo-molecular pump by this invention, (a) shows a 1st example, (b) shows a 2nd example. It is a figure which shows the modification of the turbo-molecular pump.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Turbo molecular pump 4 Rotor 5,312 Magnetic bearing system 25 Base 51-53 Electromagnet 250 Drive control unit storage space 251 Drive control unit circuit 252 Drive control unit chassis 254, 255 Connector 256 Line filter 258 Noise filter 260 External chassis 301 AC / DC converter 302 Inverter / motor driver 303 Magnetic bearing driver

Claims (2)

In a turbo molecular pump integrally comprising a pump unit that performs evacuation and a drive control unit that drives and controls the pump unit,
An electromagnetic noise shielding case that is provided in an electrically insulated state in a space formed in the metal base of the pump unit, and in which the drive control unit is housed ;
A noise blocking line filter disposed in a space formed in the metal base and provided in a power input line of the drive control unit;
A turbo-molecular pump comprising a noise filter disposed in a space formed in the metal base and provided in a drive control line of the drive control unit. The turbo molecular pump according to claim 1 ,
A turbo molecular pump characterized in that a metal base is formed of a metal that shields voltage noise, and the electromagnetic noise shielding case is a current noise shielding case.

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