EP1835222B1 - Gas cabinet - Google Patents

Gas cabinet Download PDF

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Publication number
EP1835222B1
EP1835222B1 EP20070005328 EP07005328A EP1835222B1 EP 1835222 B1 EP1835222 B1 EP 1835222B1 EP 20070005328 EP20070005328 EP 20070005328 EP 07005328 A EP07005328 A EP 07005328A EP 1835222 B1 EP1835222 B1 EP 1835222B1
Authority
EP
European Patent Office
Prior art keywords
housing
flow
displacement body
gas
cabinet according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP20070005328
Other languages
German (de)
French (fr)
Other versions
EP1835222A1 (en
Inventor
Stefan GRÖZINGER
Martin Beigl
Denis Simonovic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M & W Zander Fe GmbH
M+W Zander Facility Engineering GmbH and Co KG
Original Assignee
M & W Zander Fe GmbH
M+W Zander Facility Engineering GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by M & W Zander Fe GmbH, M+W Zander Facility Engineering GmbH and Co KG filed Critical M & W Zander Fe GmbH
Publication of EP1835222A1 publication Critical patent/EP1835222A1/en
Application granted granted Critical
Publication of EP1835222B1 publication Critical patent/EP1835222B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/08—Mounting arrangements for vessels
    • F17C13/084—Mounting arrangements for vessels for small-sized storage vessels, e.g. compressed gas cylinders or bottles, disposable gas vessels, vessels adapted for automotive use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
    • F17C13/123—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures for gas bottles, cylinders or reservoirs for tank vehicles or for railway tank wagons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/03—Orientation
    • F17C2201/032—Orientation with substantially vertical main axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/056—Small (<1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0103—Exterior arrangements
    • F17C2205/0111—Boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0142—Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0153—Details of mounting arrangements
    • F17C2205/0176—Details of mounting arrangements with ventilation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/035—High pressure (>10 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/042—Reducing risk of explosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/044—Avoiding pollution or contamination
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y10T137/4245—Cleaning or steam sterilizing
    • Y10T137/4259—With separate material addition

Definitions

  • the invention relates to a gas cabinet according to the preamble of claim 1.
  • gas cabinets US-A-5,151,395 .
  • the gases can be toxic, corrosive or flammable.
  • a minimum air velocity in the free cross-section of the gas cabinet must be maintained for the safe removal of emerging from leaks in connections and piping above the gas cylinder gases, large quantities of air are required in known designs of gas cabinets, which lead to significant operating costs.
  • the invention has the object of providing the generic gas cabinet in such a way that the installation and operating costs are reduced.
  • the required volume flow of the purging air is reduced by the cross-sectional constriction.
  • the flow area for the scavenging air can be minimized so that just a reliable flushing is possible.
  • the scavenging air to be sucked off is reduced to a minimum, without this being delayed Spülluftmenge reduced to a minimum, without this having adverse effects on the safety of the gas cabinet according to the invention.
  • At least one displacement body is provided in the housing.
  • the displacement body is gas-tight or airtight, so that the gases can not penetrate into the displacement body, but are reliably dissipated by the purging air.
  • the displacement body may also be part of the housing, for example the housing rear wall, whereby the housing volume is reduced.
  • the housing may have smaller width and / or depth in the corresponding area.
  • the gas cabinet has a housing 1 with a rear wall 2, side walls 3, 4, a front wall 5, a bottom 6 and a ceiling 7.
  • two gas cylinders 8 and 9 are housed, which stand up on the floor 6 and in a known manner in Housing 1 are secured.
  • the two gas cylinders 8, 9 are at a small distance next to each other and contain gas which is supplied in a known manner a (not shown) consumer. Suitable gases are a wide variety of substances, such as NH 3 or BCl 3 .
  • the gas cylinders 8, 9 each have a gas valve 10, 11, with which they are connected to a gas line system 12.
  • the gas line system 12 has two line branches 13, 14, which are connected to a common output line 15.
  • the two line branches 13, 14 can be closed, for example, by a respective valve 16, 17 against the output line 15.
  • the line branch 13 or 14 of the other gas cylinder is closed, for example by the valve 16, 17 with respect to the output line 15.
  • the gas cabinet in deviation from the illustrated preferred embodiment, may also have only one gas cylinder or more than two gas cylinders.
  • a gas-tight displacement body 18 which is designed as a hollow body.
  • the displacement body 18 extends from the region of the gas cylinders 8, 9 to close to the housing cover 7.
  • the displacement body 18 extends over its length between the opposite housing side walls 3, 4.
  • the displacement body 18 rectangular cross-section ( Fig. 4 ).
  • the rear side 19 of the displacement body 18 is flat and extends at a small distance parallel to the back of the housing 2.
  • side walls 20, 21 which are perpendicular to the back and parallel to each other.
  • the side walls 20, 21 are advantageously on the inside of the housing side walls 3, 4 and are flat.
  • the displacement body 18 has greater depth than in the adjoining lower area (FIG. Fig. 1 ).
  • About halfway up the front wall 22 is parallel to the rear wall 19 via an obliquely rearward toward the rear wall 19 directed wall surface 23 in a lower flat wall surface 24 via ( Fig. 1 ).
  • the displacement body 18 is by way of example only half as thick as in the upper region of the front wall 22.
  • the displacement body 18 is closed at the top by a level ceiling 25 and at the bottom by a level bottom 26.
  • the displacement body 18 is provided at the level of the gas cylinders 8, 9 each with a recess 27, 28 ( Fig. 3 ) extending upwardly in the wall surface 24 from the bottom 26 of the displacer 18.
  • the recesses 27, 28 are sufficiently wide and deep, so that the gas cylinders 8, 9 can be accommodated easily in the housing 1.
  • the gas cylinders 8, 9 project with their upper end into the depressions 27, 28 of the displacement body 18.
  • the depressions 27, 28 can extend to the oblique surface 23.
  • the recesses 27, 28 have rectangular cross-section in the embodiment. They may also have a non-cornered cross section, for example a semicircular, which orients itself to the outer shape of the gas cylinder.
  • the front wall 5 of the housing 1 may have a further gastight displacement body 18 ', which may be provided on its outside with a control panel 29 having, for example, a touch-sensitive screen.
  • the control panel 29 back with the Provided electronics for the gas cabinet.
  • the housing front wall 5 is provided in the region of the control panel 29 with an opening. It is also possible to arrange the control panel 29 in the front wall 5 of the housing 1.
  • the displacement body 18 ' is also provided at its the gas cylinders 8, 9 facing inside 30 with two recesses 31, 32 into which the gas cylinders 8, 9 protrude with its upper portion.
  • the recesses 31, 32 are the same size as the opposite recesses 27, 28 of the displacement body 18.
  • the front wall 5 of the housing 1 can be pivoted at least in the lower region from a closed to an open position, so that the gas cylinders 8, 9 are easily replaced can.
  • the displacement body 18 ' is fixed to this wegschwenkbaren part of the front wall 5, so that it is pivoted away together with this front wall part. In principle, it is possible that the entire front wall 5 can be opened. In Fig. 3 the open position of the front wall 5 is shown.
  • the rear portion of the front wall 5 may be made slightly less wide to ensure an opening even when closely spaced housings (opening radius).
  • the displacer 18 'fixed to the inside of the front wall 5 is spaced from the lower part of the displacer 18.
  • the displacement body 18 ' extends approximately from the height of the bottom 26 to approximately half the height of the inclined surface 23 of the displacement body 18.
  • a flow-through space 33 is formed which is transverse to the flow direction of the wall surfaces 23rd , 24 of the displacement body 18 and the inner side 30 of the displacement body 18 'is limited.
  • the flow-through space 33 is bounded by the housing side walls 3, 4.
  • the flow cross-section is reduced steadily by way of example.
  • the flow cross-section of the flow-through space 39 increases again, in this area of the front wall 22 of the displacement body 18, the front wall 5 of the housing and a part of the housing side walls 3, 4 is limited.
  • the flow space 33 connects down to a flow space 34, which is bounded below by the housing bottom 6 and at the periphery by a part of the housing side walls 3, 4, the rear wall 2 and the front wall 5.
  • a closable inlet opening 35, 36 is provided near the lower end of the flow space 34 in each case. They are advantageously formed by sliding grid, which can be adjusted in an open and a closed position. Further inlet openings 37, 38 are located at the upper end of the flow space 39, which is flow-connected through the flow space 33 with the lower flow space 34.
  • the two inlet openings 37, 38 are also advantageously formed by sliding grid, which can be adjusted from a closed to an open position.
  • the inlet opening 37 is located in the housing front wall 5.
  • the inlet opening 38 located at a distance from behind separates the flow space 39 from a flow space 40 which is located between the cover 25 of the displacement body 18 and the housing cover 7.
  • the inlet opening 38 is provided in a partition wall 47, which extends in the amount of the front wall 22 of the displacement body 18 from the ceiling 25 to the housing cover 7 and between the housing side walls 3, 4.
  • the two displacement body 18, 18 'of the free flow area for the purging air within the housing 1 is reduced.
  • the free flow cross-section is only so large that with the scavenging air 41 from the gas cylinders 8, 9 and / or the conduit system 12 possibly leaking harmful gases can be reliably sucked off.
  • the critical area of the gas cylinders 8, 9, namely the area around the gas cylinder valves 10, 11, lies in the flow space 33, whose cross-section is chosen to be optimally small.
  • the inlet opening 35 in the lower region of the flow space 34 is open, so that over them the scavenging air 41 can get into the flow space 34.
  • the purge air flows upwards and enters the flow space 33, which is optimized so that only the amount of gas necessary for flushing is needed.
  • the purge air 41 flows from the flow space 34 via the flow space 33 into the flow space 39.
  • the inlet opening 37 is closed, while the inlet opening 38 is open.
  • the scavenging air 41 therefore flows through the inlet opening 38 to an outlet 42 provided on the housing cover 7, to which a blower (not shown) is connected. In the manner described, the purge air 41 flows in the gas cabinet from bottom to top.
  • Fig. 5 shows that the purging air can flow through the gas cabinet in another way.
  • the inlet opening 37 is opened and the inlet opening 38 is closed.
  • the inlet opening 35 is closed and the inlet opening 36 is opened.
  • the scavenging air flows through the upper inlet opening 37 and enters the flow space 39 in which it flows downwards.
  • the purge air 41 enters the flow space 33 and from there into the lower flow space 34. Since the inlet opening 36 is open, the purge air 41 flows into a narrow flow space 43 which extends from the bottom 6 of the housing to the ceiling 7. It is bounded by the housing rear wall 2, a part of the housing side walls 3, 4, the displacement body 18 and the intermediate wall 44, in which the inlet opening 36 is located.
  • the intermediate wall 44 is parallel to the housing rear wall 2 and is aligned with the rear side 19 of the displacement body 18.
  • the intermediate wall 44 extends from the bottom 26 of the displacement body 18 to the housing bottom 6.
  • the scavenging air 41 flows upwards and enters the transverse to him From there, the purge air 41 exits via the outlet 42. Even with this flow guidance, the potential leakage points in the gas cabinet are completely flushed by the scavenging air 41, so that a hazard due to leakage of gases is reliably prevented.
  • the displacer 18 may be purged with an inert gas, such as nitrogen, to prevent flammable gases in the displacer 18 from igniting or from accumulating hazardous gases.
  • an inert gas such as nitrogen
  • the displacer 18 may be purged with an inert gas, such as nitrogen, to prevent flammable gases in the displacer 18 from igniting or from accumulating hazardous gases.
  • an inert gas such as nitrogen
  • the flushing valve 46 which is provided near the ceiling 25 of the displacement body 18, passes the inert gas into the upward-purging air flow, with which it is mixed and, together with it, is led out through the outlet 42. If the purge air 41 is guided from top to bottom ( Fig. 5 ), then the inert gas via the upper open purge valve 46 is supplied, which exits via the lower open purge valve 45 from the displacement body 18 and mixes with the purge air 41 flowing in the flow space 34.
  • the displacement body 18 ' may be provided with two flush valves, so that it can also be flushed with inert gas.
  • Above the housing bottom 6 can be mounted in addition a height-adjustable bottle storage area.
  • the displacement body 18 is part of the rear wall 2 of the housing 1.
  • the displacement body 18 is formed by a corresponding shape of the rear wall 2 of the housing.
  • the displacement body 18 is therefore open at the back.
  • the front wall 22 of the displacement body 18 extends from its bottom 26 obliquely upwards to the ceiling 25 of the displacement body 18.
  • Wie Fig. 6 shows, the front wall 22 is planar and inclined in the direction of the front wall 5 of the housing 1.
  • the displacement body 18 in turn extends between the side walls 3, 4 of the housing 1. Due to the flat front wall 22nd the displacement body 18 has a simple design.
  • the displacer 18 ' has a flat back 30 that is parallel to its front.
  • the displacer 18 ' is formed the same as in the previous embodiment.
  • the displacement body 18 ' is formed by a corresponding shape of the housing front wall 5. The displacement body 18 'is therefore open on the front side for this reason.
  • the purge air 41 enters through the lower inlet opening 36 in the housing front wall 5 in the lower flow space 34 and flows into the flow-through space 33 between the two displacement bodies 18, 18 '. In contrast to the previous embodiment, the flow cross-section of the space 33 decreases steadily in the flow direction. The purge air 41 then passes into the upper flow space 39, which is located above the displacement body 18 'and in front of the displacement body 18.
  • the inlet opening 37 is closed in accordance with the previous embodiment and the inlet opening 38 is opened. The scavenging air 41 thereby passes into the flow space 40 above the ceiling 25 of the displacement body 18 and exits upwards through the outlet 42.
  • the displacement body 18 is provided on the housing rear wall 2 and may be attached to it as a separate body. However, it is also possible in an advantageous manner to form the displacement body 18 in one piece with the rear wall 2 of the housing.
  • valves 10, 11 of the gas cylinders 8, 9 are located in the flow-through space 33. Since the gas valves 10, 11 are the first possible leakage area, the leakage is reliably entrained by the scavenging air 41 and in the described manner via the outlet 42 discharged.

Abstract

Gas cabinet used in the semiconductor industry, comprises housing (1) in which a gas bottle (9) that is accommodated, is attached to duct system, an inlet port, an outlet port, a flow displacement hollow body, a recess, and an inert gas connection. The duct system is present in the housing and lies in a flow of scavenging air, which enters into the housing through the inlet port and leaves the housing through the outlet port. The housing exhibits a range with a correspondingly reduced cross-section for the delimitation of the flow cross-section. The gas cabinet useful in the semiconductor industry, comprises housing (1) in which a gas bottle (9) that is accommodated, is attached to duct system, an inlet port, an outlet port, a flow displacement hollow body, a recess, and an inert gas connection. The duct system is present in the housing and lies in a flow of scavenging air, which enters into the housing through the inlet port and leaves the housing through the outlet port. The housing exhibits a range with a correspondingly reduced cross-section for the delimitation of the flow cross-section. The gas cabinet is designed in such a manner that the free-flow cross-section of the scavenging air is limited in the housing to a quantity that is needed for a reliable purification. The flow displacement hollow body is accommodated for the delimitation of the flow cross-section in the housing, exhibits the inert gas connection for its purification, exhibits unequal cross-section along its height, and extends up to the region of the gas bottle. In the housing two flow displacement bodies that face one another with an intermediate distance between them are intended. Both the flow displacement hollow bodies protrude into the region of the gas bottle and are provided respectively at their sides facing the gas bottle with the recess, into which the gas bottle protrudes. The recesses in both the flow displacement bodies have the same size. One of the flow displacement bodies is longer in the direction of flow of the scavenging air than the other flow displacement body. The longer flow displacement hollow body has a smaller cross-section in the segment facing the other flow displacement body than in the rest of the segment. The flow displacement body partially separates two flow spaces for scavenging air. Both the flow spaces are separable from each other by closable inlet ports.

Description

Die Erfindung betrifft ein Gaskabinett nach dem Oberbegriff des Anspruches 1.The invention relates to a gas cabinet according to the preamble of claim 1.

Insbesondere in der Halbleiterindustrie werden Gaskabinette ( US-A-5 151 395 ) eingesetzt, in denen sich Gasflaschen mit Gasen befinden, die über ein Leitungssystem Verbrauchern zugeführt werden. Die Gase können giftig, korrosiv oder brennbar sein. Aus diesem Grunde ist es notwendig, dass das Gaskabinett mit Spülluft durchströmt wird, um als Leckage gegebenenfalls austretende Gase abzuführen, ohne dass sie unkontrolliert an die Umwelt gelangen. Da für die sichere Abführung der aus Leckagen in Anschlüssen und Rohrleitungen oberhalb der Gasflasche austretenden Gase eine Mindestluftgeschwindigkeit im freien Querschnitt des Gaskabinetts eingehalten werden muss, sind bei bekannten Ausführungen von Gaskabinetten große Luftmengen notwendig, die zu erheblichen Betriebskosten führen.Especially in the semiconductor industry, gas cabinets ( US-A-5,151,395 ) are used, in which there are gas cylinders with gases that are supplied via a line system consumers. The gases can be toxic, corrosive or flammable. For this reason, it is necessary that the gas cabinet is flowed through with scavenging air to dissipate any leaking gases as leakage, without they get uncontrolled to the environment. Since a minimum air velocity in the free cross-section of the gas cabinet must be maintained for the safe removal of emerging from leaks in connections and piping above the gas cylinder gases, large quantities of air are required in known designs of gas cabinets, which lead to significant operating costs.

Der Erfindung liegt die Aufgabe zugrunde, das gattungsgemäße Gaskabinett so auszubilden, dass die Installations- und Betriebskosten verringert werden.The invention has the object of providing the generic gas cabinet in such a way that the installation and operating costs are reduced.

Diese Aufgabe wird beim gattungsgemäßen Gaskabinett erfindungsgemäß mit den kennzeichnenden Merkmalen des Anspruches 1 gelöst.This object is achieved in the generic gas cabinet according to the invention with the characterizing features of claim 1.

Beim erfindungsgemäßen Gaskabinett wird der erforderliche Volumenstrom der Spülluft durch die Querschnittsverengung vermindert. Dadurch kann der Durchströmquerschnitt für die Spülluft so minimiert werden, dass gerade noch eine zuverlässige Spülung möglich ist. Auf diese Weise wird die abzusaugende Spülluftmenge auf ein Minimum reduziert, ohne dass dies nachteisaugende Spülluftmenge auf ein Minimum reduziert, ohne dass dies nachteilige Auswirkungen auf die Sicherheit des erfindungsgemäßen Gaskabinetts hat.In the gas cabinet according to the invention, the required volume flow of the purging air is reduced by the cross-sectional constriction. As a result, the flow area for the scavenging air can be minimized so that just a reliable flushing is possible. In this way, the scavenging air to be sucked off is reduced to a minimum, without this being delayed Spülluftmenge reduced to a minimum, without this having adverse effects on the safety of the gas cabinet according to the invention.

Zur Begrenzung des Strömungsquerschnittes ist mindestens ein Verdrängungskörper im Gehäuse vorgesehen. Der Verdrängungskörper ist gasdicht bzw. luftdicht ausgebildet, so dass die Gase nicht in den Verdrängungskörper eindringen können, sondern durch die Spülluft zuverlässig abgeführt werden.To limit the flow cross-section at least one displacement body is provided in the housing. The displacement body is gas-tight or airtight, so that the gases can not penetrate into the displacement body, but are reliably dissipated by the purging air.

Der Verdrängungskörper kann auch Teil des Gehäuses, beispielsweise der Gehäuserückwand, sein, wodurch das Gehäusevolumen verringert wird. Das Gehäuse kann in diesem Fall im entsprechenden Bereich geringere Breite und/oder Tiefe haben.The displacement body may also be part of the housing, for example the housing rear wall, whereby the housing volume is reduced. In this case, the housing may have smaller width and / or depth in the corresponding area.

Weitere Merkmale der Erfindung ergeben sich aus den weiteren Ansprüchen, der Beschreibung und den Zeichnungen.Further features of the invention will become apparent from the other claims, the description and the drawings.

Die Erfindung wird anhand eines in den Zeichnungen dargestellten Ausführungsbeispieles näher erläutert. Es zeigen

Fig. 1
in schematischer Darstellung und in Seitenansicht ein erfindungsgemäßes Gaskabinett,
Fig. 2
in einer Darstellung entsprechend Fig. 1 eine Vorderansicht des erfindungsgemäßen Gaskabinetts,
Fig. 3
einen Schnitt längs der Linie A-A in Fig. 1,
Fig. 4
einen Schnitt längs der Linie B-B in Fig. 1,
Fig. 5
in einer Darstellung entsprechend Fig. 1 das erfindungsgemäße Gaskabinett mit einer anderen Luftführung,
Fig. 6 bis Fig. 9
in Darstellungen entsprechend den Fig. 1 bis 4 eine weitere Ausführungsform eines erfindungsgemäßen Gaskabinetts.
The invention will be explained in more detail with reference to an embodiment shown in the drawings. Show it
Fig. 1
in a schematic representation and in side view of an inventive gas cabinet,
Fig. 2
in a representation accordingly Fig. 1 a front view of the gas cabinet according to the invention,
Fig. 3
a section along the line AA in Fig. 1 .
Fig. 4
a section along the line BB in Fig. 1 .
Fig. 5
in a representation accordingly Fig. 1 the gas cabinet according to the invention with a different air flow,
FIG. 6 to FIG. 9
in representations according to the Fig. 1 to 4 a further embodiment of a gas cabinet according to the invention.

Das Gaskabinett hat ein Gehäuse 1 mit einer Rückwand 2, Seitenwänden 3, 4, einer Vorderwand 5, einem Boden 6 und einer Decke 7. Im Gehäuse 1 sind zwei Gasflaschen 8 und 9 untergebracht, die auf dem Boden 6 aufstehen und in bekannter Weise im Gehäuse 1 gesichert sind. Die beiden Gasflaschen 8, 9 stehen mit geringem Abstand nebeneinander und enthalten Gas, das in bekannter Weise einem (nicht dargestellten) Verbraucher zugeführt wird. Als Gas kommen unterschiedlichste Substanzen in Betracht, wie etwa NH3 oder BCl3. Die Gasflaschen 8, 9 haben jeweils ein Gasventil 10, 11, mit dem sie an ein Gasleitungssystem 12 angeschlossen werden. Das Gasleitungssystem 12 hat zwei Leitungszweige 13, 14, die an eine gemeinsame Ausgangsleitung 15 angeschlossen sind. Die beiden Leitungszweige 13, 14 können z.B. durch jeweils ein Ventil 16, 17 gegen die Ausgangsleitung 15 verschlossen werden. Während des Einsatzes des Gaskabinetts ist vorteilhaft nur eine der beiden Gasflaschen 8 oder 9 in Betrieb. Der Leitungszweig 13 bzw. 14 der jeweils anderen Gasflasche ist z.B. durch das Ventil 16, 17 gegenüber der Ausgangsleitung 15 geschlossen.The gas cabinet has a housing 1 with a rear wall 2, side walls 3, 4, a front wall 5, a bottom 6 and a ceiling 7. In the housing 1, two gas cylinders 8 and 9 are housed, which stand up on the floor 6 and in a known manner in Housing 1 are secured. The two gas cylinders 8, 9 are at a small distance next to each other and contain gas which is supplied in a known manner a (not shown) consumer. Suitable gases are a wide variety of substances, such as NH 3 or BCl 3 . The gas cylinders 8, 9 each have a gas valve 10, 11, with which they are connected to a gas line system 12. The gas line system 12 has two line branches 13, 14, which are connected to a common output line 15. The two line branches 13, 14 can be closed, for example, by a respective valve 16, 17 against the output line 15. During the use of the gas cabinet is advantageous only one of the two gas cylinders 8 or 9 in operation. The line branch 13 or 14 of the other gas cylinder is closed, for example by the valve 16, 17 with respect to the output line 15.

Das Gaskabinett kann abweichend von der dargestellten bevorzugten Ausführungsform auch nur eine Gasflasche oder mehr als zwei Gasflaschen aufweisen.The gas cabinet, in deviation from the illustrated preferred embodiment, may also have only one gas cylinder or more than two gas cylinders.

Im Bereich zwischen dem Gasleitungssystem 12 und der Gehäuserückwand 2 befindet sich ein gasdichter Verdrängungskörper 18, der als Hohlkörper ausgebildet ist. Wie sich aus den Fig. 1 und 2 ergibt, erstreckt sich der Verdrängungskörper 18 vom Bereich der Gasflaschen 8, 9 aus bis nahe an die Gehäusedecke 7. Der Verdrängungskörper 18 erstreckt sich über seine Länge zwischen den einander gegenüberliegenden Gehäuseseitenwänden 3, 4. Im Bereich oberhalb der Gasflaschen 8, 9 hat der Verdrängungskörper 18 rechteckigen Querschnitt (Fig. 4). Die Rückseite 19 des Verdrängungskörpers 18 ist eben ausgebildet und erstreckt sich mit geringem Abstand parallel zur Gehäuserückseite 2. An die Rückseite 19 des Verdrängungskörpers schließen Seitenwände 20, 21 an, die rechtwinklig zur Rückseite und parallel zueinander liegen. Die Seitenwände 20, 21 liegen vorteilhaft an der Innenseite der Gehäuseseitenwände 3, 4 an und sind eben. Im Bereich oberhalb der Gasflaschen 8, 9 hat der Verdrängungskörper 18 größere Tiefe als im daran anschließenden unteren Bereich (Fig. 1). Etwa in halber Höhe geht die parallel zur Rückwand 19 liegende Vorderwand 22 über einen schräg nach hinten in Richtung auf die Rückwand 19 gerichtete Wandfläche 23 in eine untere ebene Wandfläche 24 über (Fig. 1). Im Bereich dieser Wandfläche 24 ist der Verdrängungskörper 18 beispielhaft nur halb so dick wie im oberen Bereich der Vorderwand 22. Der Verdrängungskörper 18 ist oben durch eine ebene Decke 25 und unten durch einen ebenen Boden 26 geschlossen.In the area between the gas line system 12 and the rear wall 2 is a gas-tight displacement body 18, which is designed as a hollow body. As is clear from the Fig. 1 and 2 The displacement body 18 extends from the region of the gas cylinders 8, 9 to close to the housing cover 7. The displacement body 18 extends over its length between the opposite housing side walls 3, 4. In the area above the gas cylinders 8, 9, the displacement body 18 rectangular cross-section ( Fig. 4 ). The rear side 19 of the displacement body 18 is flat and extends at a small distance parallel to the back of the housing 2. At the back 19 of the displacement body close to side walls 20, 21 which are perpendicular to the back and parallel to each other. The side walls 20, 21 are advantageously on the inside of the housing side walls 3, 4 and are flat. In the area above the gas cylinders 8, 9, the displacement body 18 has greater depth than in the adjoining lower area (FIG. Fig. 1 ). About halfway up the front wall 22 is parallel to the rear wall 19 via an obliquely rearward toward the rear wall 19 directed wall surface 23 in a lower flat wall surface 24 via ( Fig. 1 ). In the area of this wall surface 24, the displacement body 18 is by way of example only half as thick as in the upper region of the front wall 22. The displacement body 18 is closed at the top by a level ceiling 25 and at the bottom by a level bottom 26.

Da die Wandfläche 24 sich zwischen den Gasflaschen 8, 9 und der Gehäuserückwand 2 erstreckt, ist der Verdrängungskörper 18 in Höhe der Gasflaschen 8, 9 jeweils mit einer Vertiefung 27, 28 versehen (Fig. 3), die sich vom Boden 26 des Verdrängungskörpers 18 aus aufwärts in der Wandfläche 24 erstrecken. Die Vertiefungen 27, 28 sind ausreichend breit und tief, so dass die Gasflaschen 8, 9 problemlos im Gehäuse 1 untergebracht werden können. Die Gasflaschen 8, 9 ragen mit ihrem oberen Ende in die Vertiefungen 27, 28 des Verdrängungskörpers 18. Die Vertiefungen 27, 28 können bis zur Schrägfläche 23 reichen. Die Vertiefungen 27, 28 haben im Ausführungsbeispiel rechteckigen Querschnitt. Sie können auch einen nichteckigen Querschnitt aufweisen, beispielsweise einen halbrunden, der sich an der äußeren Form der Gasflasche orientiert.Since the wall surface 24 extends between the gas cylinders 8, 9 and the rear wall 2 of the housing, the displacement body 18 is provided at the level of the gas cylinders 8, 9 each with a recess 27, 28 ( Fig. 3 ) extending upwardly in the wall surface 24 from the bottom 26 of the displacer 18. The recesses 27, 28 are sufficiently wide and deep, so that the gas cylinders 8, 9 can be accommodated easily in the housing 1. The gas cylinders 8, 9 project with their upper end into the depressions 27, 28 of the displacement body 18. The depressions 27, 28 can extend to the oblique surface 23. The recesses 27, 28 have rectangular cross-section in the embodiment. They may also have a non-cornered cross section, for example a semicircular, which orients itself to the outer shape of the gas cylinder.

Die Vorderwand 5 des Gehäuses 1 kann einen weiteren gasdichten Verdrängungskörper 18' aufweisen, der an seiner Außenseite mit einer Bedientafel 29 versehen sein kann, die beispielsweise einen berührungssensitiven Bildschirm aufweist. Außerdem ist die Bedientafel 29 rückseitig mit der Elektronik für das Gaskabinett versehen. Die Gehäusevorderwand 5 ist im Bereich der Bedientafel 29 mit einer Öffnung versehen. Es ist auch möglich, die Bedientafel 29 in der Vorderwand 5 des Gehäuses 1 anzuordnen. Wie sich aus Fig. 3 ergibt, ist der Verdrängungskörper 18' an seiner den Gasflaschen 8, 9 zugewandten Innenseite 30 ebenfalls mit zwei Vertiefungen 31, 32 versehen, in die die Gasflaschen 8, 9 mit ihrem oberen Bereich ragen. Vorteilhaft sind die Vertiefungen 31, 32 gleich groß wie die gegenüberliegenden Vertiefungen 27, 28 des Verdrängungskörpers 18. Die Vorderwand 5 des Gehäuses 1 kann zumindest im unteren Bereich aus einer Schließ- in eine Offenstellung geschwenkt werden, damit die Gasflaschen 8, 9 einfach ausgetauscht werden können. Der Verdrängungskörper 18' ist an diesem wegschwenkbaren Teil der Vorderwand 5 befestigt, so dass er zusammen mit diesem Vorderwandteil weggeschwenkt wird. Grundsätzlich ist es möglich, dass die gesamte Vorderwand 5 geöffnet werden kann. In Fig. 3 ist die geöffnete Stellung der Vorderwand 5 dargestellt.The front wall 5 of the housing 1 may have a further gastight displacement body 18 ', which may be provided on its outside with a control panel 29 having, for example, a touch-sensitive screen. In addition, the control panel 29 back with the Provided electronics for the gas cabinet. The housing front wall 5 is provided in the region of the control panel 29 with an opening. It is also possible to arrange the control panel 29 in the front wall 5 of the housing 1. As it turned out Fig. 3 shows, the displacement body 18 'is also provided at its the gas cylinders 8, 9 facing inside 30 with two recesses 31, 32 into which the gas cylinders 8, 9 protrude with its upper portion. Advantageously, the recesses 31, 32 are the same size as the opposite recesses 27, 28 of the displacement body 18. The front wall 5 of the housing 1 can be pivoted at least in the lower region from a closed to an open position, so that the gas cylinders 8, 9 are easily replaced can. The displacement body 18 'is fixed to this wegschwenkbaren part of the front wall 5, so that it is pivoted away together with this front wall part. In principle, it is possible that the entire front wall 5 can be opened. In Fig. 3 the open position of the front wall 5 is shown.

Der hintere Bereich der Vorderwand 5 kann etwas weniger breit ausgeführt sein, um ein Öffnen auch bei dicht nebeneinander stehenden Gehäusen zu gewährleisten (Öffnungsradius).The rear portion of the front wall 5 may be made slightly less wide to ensure an opening even when closely spaced housings (opening radius).

Der Verdrängungskörper 18', der an der Innenseite der Vorderwand 5 befestigt ist, liegt mit Abstand dem unteren Teil des Verdrängungskörpers 18 gegenüber. Der Verdrängungskörper 18' erstreckt sich etwa von Höhe des Bodens 26 bis etwa in halbe Höhe der Schrägfläche 23 des Verdrängungskörpers 18. Zwischen dem Verdrängungskörper 18' und dem gegenüberliegenden Bereich des Verdrängungskörpers 18 wird ein Durchströmraum 33 gebildet, der quer zur Strömungsrichtung von den Wandflächen 23, 24 des Verdrängungskörpers 18 und der Innenseite 30 des Verdrängungskörpers 18' begrenzt wird. Seitlich wird der Durchströmraum 33 durch die Gehäuseseitenwände 3, 4 begrenzt. Im Bereich der Schrägwand 23 des Verdrängungskörpers 18 verringert sich der Strömungsquerschnitt beispielhaft stetig. Im Bereich oberhalb des Verdrängungskörpers 18' nimmt der Strömungsquerschnitt des Durchströmraumes 39 wieder zu, der in diesem Bereich von der Vorderwand 22 des Verdrängungskörpers 18, der Vorderwand 5 des Gehäuses und einem Teil der Gehäuseseitenwände 3, 4 begrenzt wird.The displacer 18 'fixed to the inside of the front wall 5 is spaced from the lower part of the displacer 18. The displacement body 18 'extends approximately from the height of the bottom 26 to approximately half the height of the inclined surface 23 of the displacement body 18. Between the displacement body 18' and the opposite region of the displacement body 18, a flow-through space 33 is formed which is transverse to the flow direction of the wall surfaces 23rd , 24 of the displacement body 18 and the inner side 30 of the displacement body 18 'is limited. Laterally, the flow-through space 33 is bounded by the housing side walls 3, 4. In the region of the oblique wall 23 of the displacement body 18, the flow cross-section is reduced steadily by way of example. In the area above the displacement body 18 ', the flow cross-section of the flow-through space 39 increases again, in this area of the front wall 22 of the displacement body 18, the front wall 5 of the housing and a part of the housing side walls 3, 4 is limited.

Der Strömungsraum 33 schließt nach unten an einen Strömungsraum 34 an, der nach unten durch den Gehäuseboden 6 und am Umfang durch einen Teil der Gehäuseseitenwände 3, 4, der Rückwand 2 und der Vorderwand 5 begrenzt wird. In der Vorderwand 5 und in einer Zwischenwand 44 des Gehäuses 1 ist nahe dem unteren Ende des Strömungsraumes 34 jeweils eine verschließbare Einlassöffnung 35, 36 vorgesehen. Sie werden vorteilhaft durch Schiebegitter gebildet, die in eine Offen- und in eine Schließstellung verstellt werden können. Weitere Einlassöffnungen 37, 38 befinden sich am oberen Ende des Strömungsraumes 39, der durch den Strömungsraum 33 mit dem unteren Strömungsraum 34 strömungsverbunden ist. Die beiden Einlassöffnungen 37, 38 werden ebenfalls vorteilhaft durch Schiebegitter gebildet, die aus einer Schließ- in eine Offenstellung verstellt werden können. Die Einlassöffnung 37 befindet sich in der Gehäusevorderwand 5. Die mit Abstand dahinter liegende Einlassöffnung 38 trennt den Strömungsraum 39 von einem Strömungsraum 40, der sich zwischen der Decke 25 des Verdrängungskörper 18 und der Gehäusedecke 7 befindet. Die Einlassöffnung 38 ist in einer Trennwand 47 vorgesehen, die sich in Höhe der Vorderwand 22 des Verdrängungskörpers 18 von dessen Decke 25 bis zur Gehäusedecke 7 sowie zwischen den Gehäuseseitenwänden 3, 4 erstreckt.The flow space 33 connects down to a flow space 34, which is bounded below by the housing bottom 6 and at the periphery by a part of the housing side walls 3, 4, the rear wall 2 and the front wall 5. In the front wall 5 and in an intermediate wall 44 of the housing 1, a closable inlet opening 35, 36 is provided near the lower end of the flow space 34 in each case. They are advantageously formed by sliding grid, which can be adjusted in an open and a closed position. Further inlet openings 37, 38 are located at the upper end of the flow space 39, which is flow-connected through the flow space 33 with the lower flow space 34. The two inlet openings 37, 38 are also advantageously formed by sliding grid, which can be adjusted from a closed to an open position. The inlet opening 37 is located in the housing front wall 5. The inlet opening 38 located at a distance from behind separates the flow space 39 from a flow space 40 which is located between the cover 25 of the displacement body 18 and the housing cover 7. The inlet opening 38 is provided in a partition wall 47, which extends in the amount of the front wall 22 of the displacement body 18 from the ceiling 25 to the housing cover 7 and between the housing side walls 3, 4.

Durch die beiden Verdrängungskörper 18, 18' wird der freie Strömungsquerschnitt für die Spülluft innerhalb des Gehäuses 1 verkleinert. Der freie Strömungsquerschnitt ist nur noch so groß, dass mit der Spülluft 41 aus den Gasflaschen 8, 9 und/oder dem Leitungssystem 12 eventuell austretende schädliche Gase zuverlässig abgesaugt werden können. Der kritische Bereich der Gasflaschen 8, 9, nämlich der Bereich um die Gasflaschenventile 10, 11, liegt im Strömungsraum 33, dessen Querschnitt optimal klein gewählt ist. Wie durch die Strömungspfeile in Fig. 1 kenntlich gemacht ist, ist die Einlassöffnung 35 im unteren Bereich des Strömungsraumes 34 offen, so dass über sie die Spülluft 41 in den Strömungsraum 34 gelangen kann. Hier strömt die Spülluft aufwärts und gelangt in den Strömungsraum 33, der so optimiert ist, dass nur die zur Spülung notwendige Gasmenge benötigt wird. Die Spülluft 41 strömt aus dem Strömungsraum 34 über den Strömungsraum 33 in den Strömungsraum 39. Die Einlassöffnung 37 ist geschlossen, während die Einlassöffnung 38 offen ist. Die Spülluft 41 strömt darum durch die Einlassöffnung 38 zu einem auf der Gehäusedecke 7 vorgesehenen Auslass 42, an den ein (nicht dargestelltes) Gebläse angeschlossen ist. In der beschriebenen Weise strömt die Spülluft 41 im Gaskabinett von unten nach oben.By the two displacement body 18, 18 'of the free flow area for the purging air within the housing 1 is reduced. The free flow cross-section is only so large that with the scavenging air 41 from the gas cylinders 8, 9 and / or the conduit system 12 possibly leaking harmful gases can be reliably sucked off. The critical area of the gas cylinders 8, 9, namely the area around the gas cylinder valves 10, 11, lies in the flow space 33, whose cross-section is chosen to be optimally small. As indicated by the flow arrows in Fig. 1 is indicated, the inlet opening 35 in the lower region of the flow space 34 is open, so that over them the scavenging air 41 can get into the flow space 34. Here, the purge air flows upwards and enters the flow space 33, which is optimized so that only the amount of gas necessary for flushing is needed. The purge air 41 flows from the flow space 34 via the flow space 33 into the flow space 39. The inlet opening 37 is closed, while the inlet opening 38 is open. The scavenging air 41 therefore flows through the inlet opening 38 to an outlet 42 provided on the housing cover 7, to which a blower (not shown) is connected. In the manner described, the purge air 41 flows in the gas cabinet from bottom to top.

Fig. 5 zeigt, dass die Spülluft auch in einer anderen Weise das Gaskabinett durchströmen kann. In diesem Falle ist die Einlassöffnung 37 geöffnet und die Einlassöffnung 38 geschlossen. Im unteren Strömungsraum 34 ist die Einlassöffnung 35 geschlossen und die Einlassöffnung 36 geöffnet. Die Spülluft strömt durch die obere Einlassöffnung 37 und gelangt in den Strömungsraum 39, in dem sie nach unten strömt. Die Spülluft 41 gelangt in den Strömungsraum 33 und von dort in den unteren Strömungsraum 34. Da die Einlassöffnung 36 offen ist, strömt die Spülluft 41 in einen schmalen Strömungsraum 43, der sich vom Boden 6 des Gehäuses bis zu dessen Decke 7 erstreckt. Er ist von der Gehäuserückwand 2, einem Teil der Gehäuseseitenwände 3, 4, dem Verdrängungskörper 18 sowie der Zwischenwand 44 begrenzt, in der sich die Einlassöffnung 36 befindet. Die Zwischenwand 44 liegt parallel zur Gehäuserückwand 2 und liegt fluchtend zur Rückseite 19 des Verdrängungskörpers 18. Die Zwischenwand 44 reicht vom Boden 26 des Verdrängungskörpers 18 bis zum Gehäuseboden 6. In dem schmalen Strömungsraum 43 strömt die Spülluft 41 aufwärts und gelangt in den quer zu ihm liegenden Strömungsraum 40. Von ihm aus tritt die Spülluft 41 über den Auslass 42 aus. Auch bei dieser Strömungsführung werden die potentiellen Leckagestellen im Gaskabinett von der Spülluft 41 vollständig umspült, so dass eine Gefährdung durch als Leckage austretende Gase zuverlässig verhindert wird. Fig. 5 shows that the purging air can flow through the gas cabinet in another way. In this case, the inlet opening 37 is opened and the inlet opening 38 is closed. In the lower flow space 34, the inlet opening 35 is closed and the inlet opening 36 is opened. The scavenging air flows through the upper inlet opening 37 and enters the flow space 39 in which it flows downwards. The purge air 41 enters the flow space 33 and from there into the lower flow space 34. Since the inlet opening 36 is open, the purge air 41 flows into a narrow flow space 43 which extends from the bottom 6 of the housing to the ceiling 7. It is bounded by the housing rear wall 2, a part of the housing side walls 3, 4, the displacement body 18 and the intermediate wall 44, in which the inlet opening 36 is located. The intermediate wall 44 is parallel to the housing rear wall 2 and is aligned with the rear side 19 of the displacement body 18. The intermediate wall 44 extends from the bottom 26 of the displacement body 18 to the housing bottom 6. In the narrow flow space 43, the scavenging air 41 flows upwards and enters the transverse to him From there, the purge air 41 exits via the outlet 42. Even with this flow guidance, the potential leakage points in the gas cabinet are completely flushed by the scavenging air 41, so that a hazard due to leakage of gases is reliably prevented.

Der Verdrängungskörper 18 kann mit einem Inertgas, zum Beispiel Stickstoff, gespült bzw. befüllt werden, so dass verhindert wird, dass sich im Verdrängungskörper 18 befindliche brennbare Gase entzünden oder gefährliche Gase ansammeln können. Im Boden 26 und an der Vorderwand 22 des Verdrängungskörpers 18 ist beispielhaft jeweils ein Spülventil 45, 46 (Fig. 1) vorgesehen. Dadurch ist es möglich, das Inertgas bei gleichzeitig oder abwechselnd geöffneten Spülventilen 45, 46 durch den Verdrängungskörper 18 strömen zu lassen. Bei einer Spülluftführung entsprechend Fig. 1 wird das Inertgas über das Spülventil 45 zugeführt. Über das geöffnete, nahe der Decke 25 des Verdrängungskörpers 18 vorgesehene Spülventil 46 gelangt das Inertgas in den nach oben strömenden Spülluftstrom, mit dem es sich vermischt und zusammen mit ihm durch den Auslass 42 nach außen geführt wird. Erfolgt die Führung der Spülluft 41 von oben nach unten (Fig. 5), dann wird das Inertgas über das obere geöffnete Spülventil 46 zugeführt, das über das untere geöffnete Spülventil 45 aus dem Verdrängungskörper 18 austritt und sich mit der im Strömungsraum 34 strömenden Spülluft 41 vermischt.The displacer 18 may be purged with an inert gas, such as nitrogen, to prevent flammable gases in the displacer 18 from igniting or from accumulating hazardous gases. In the bottom 26 and on the front wall 22 of the displacement body 18, for example, in each case a flush valve 45, 46 (FIG. Fig. 1 ) intended. This makes it possible for the inert gas to flow through the displacement body 18 when the flushing valves 45, 46 are opened simultaneously or alternately. For a purge air guide accordingly Fig. 1 the inert gas is supplied via the purge valve 45. The flushing valve 46, which is provided near the ceiling 25 of the displacement body 18, passes the inert gas into the upward-purging air flow, with which it is mixed and, together with it, is led out through the outlet 42. If the purge air 41 is guided from top to bottom ( Fig. 5 ), then the inert gas via the upper open purge valve 46 is supplied, which exits via the lower open purge valve 45 from the displacement body 18 and mixes with the purge air 41 flowing in the flow space 34.

Auch der Verdrängungskörper 18' kann mit zwei Spülventilen versehen sein, so dass auch er mit Inertgas durchspült werden kann.Also, the displacement body 18 'may be provided with two flush valves, so that it can also be flushed with inert gas.

Oberhalb des Gehäusebodens 6 kann zusätzlich eine höhenverstellbare Flaschenaufstellfläche angebracht sein.Above the housing bottom 6 can be mounted in addition a height-adjustable bottle storage area.

Bei der Ausführungsform nach den Fig. 6 bis 9 ist der Verdrängungskörper 18 Teil der Rückwand 2 des Gehäuses 1. Vorteilhaft wird der Verdrängungskörper 18 durch eine entsprechende Ausformung der Gehäuserückwand 2 gebildet. Der Verdrängungskörper 18 ist aus diesem Grunde rückseitig offen. Im Unterschied zur vorigen Ausführungsform erstreckt sich die Vorderwand 22 des Verdrängungskörpers 18 von dessen Boden 26 aus schräg nach oben bis zur Decke 25 des Verdrängungskörpers 18. Wie Fig. 6 zeigt, ist die Vorderwand 22 eben und in Richtung auf die Vorderwand 5 des Gehäuses 1 geneigt. Der Verdrängungskörper 18 erstreckt sich wiederum zwischen den Seitenwänden 3, 4 des Gehäuses 1. Aufgrund der ebenen Vorderwand 22 hat der Verdrängungskörper 18 eine einfache Bauform. Da er an der Gehäuserückwand 2 vorgesehen ist, sind an der Vorderseite 22 des Verdrängungskörpers 18 keine Vertiefungen für die Gasflaschen 8, 9 notwendig, wie dies bei der vorigen Ausführungsform der Fall ist. Dadurch kann bei dieser Ausführungsform auch die Zwischenwand 44 zwischen dem Boden 26 des Verdrängungskörpers und dem Boden 6 des Gehäuses 1 entfallen. Dementsprechend ist bei der Ausführungsform nach den Fig. 6 bis 9 auch die Einlassöffnung 36 nicht mehr notwendig.In the embodiment of the Fig. 6 to 9 the displacement body 18 is part of the rear wall 2 of the housing 1. Advantageously, the displacement body 18 is formed by a corresponding shape of the rear wall 2 of the housing. The displacement body 18 is therefore open at the back. In contrast to the previous embodiment, the front wall 22 of the displacement body 18 extends from its bottom 26 obliquely upwards to the ceiling 25 of the displacement body 18. Wie Fig. 6 shows, the front wall 22 is planar and inclined in the direction of the front wall 5 of the housing 1. The displacement body 18 in turn extends between the side walls 3, 4 of the housing 1. Due to the flat front wall 22nd the displacement body 18 has a simple design. Since it is provided on the rear wall 2, no recesses for the gas cylinders 8, 9 are necessary on the front side 22 of the displacement body 18, as is the case in the previous embodiment. As a result, in this embodiment, the intermediate wall 44 between the bottom 26 of the displacement body and the bottom 6 of the housing 1 can be omitted. Accordingly, in the embodiment according to the Fig. 6 to 9 also the inlet opening 36 no longer necessary.

Sollen entsprechend Fig.5 im unteren Bereich des Gaskabinetts vorhandene Gase abgesaugt werden, dann wird die Einlassöffnung 36 verwendet. An sie schließt ein (nicht dargestellter) Kanal an, der in den Strömungsraum 40 mündet.Should be accordingly Figure 5 In the lower area of the gas cabinet existing gases are sucked, then the inlet opening 36 is used. It is followed by a channel (not shown), which opens into the flow space 40.

Der Verdrängungskörper 18' hat eine ebene Rückseite 30, die parallel zu seiner Vorderseite verläuft. Im Übrigen ist der Verdrängungskörper 18' gleich ausgebildet wie bei der vorigen Ausführungsform. Vorteilhaft wird der Verdrängungskörper 18' durch eine entsprechende Ausformung der Gehäusevorderwand 5 gebildet. Der Verdrängungskörper 18' ist aus diesem Grunde vorderseitig offen.The displacer 18 'has a flat back 30 that is parallel to its front. Incidentally, the displacer 18 'is formed the same as in the previous embodiment. Advantageously, the displacement body 18 'is formed by a corresponding shape of the housing front wall 5. The displacement body 18 'is therefore open on the front side for this reason.

Die Spülluft 41 tritt durch die untere Einlassöffnung 36 in der Gehäusevorderwand 5 in den unteren Strömungsraum 34 ein und strömt in den Durchströmraum 33 zwischen den beiden Verdrängungskörpern 18, 18'. Im Unterschied zur vorigen Ausführungsform nimmt der Durchströmquerschnitt des Raumes 33 in Strömungsrichtung stetig ab. Die Spülluft 41 gelangt anschließend in den oberen Strömungsraum 39, der sich oberhalb des Verdrängungskörpers 18' und vor dem Verdrängungskörper 18 befindet. Die Einlassöffnung 37 ist entsprechend der vorhergehenden Ausführungsform geschlossen und die Einlassöffnung 38 geöffnet. Die Spülluft 41 gelangt dadurch in den Strömungsraum 40 oberhalb der Decke 25 des Verdrängungskörpers 18 und tritt nach oben durch den Auslass 42 aus.The purge air 41 enters through the lower inlet opening 36 in the housing front wall 5 in the lower flow space 34 and flows into the flow-through space 33 between the two displacement bodies 18, 18 '. In contrast to the previous embodiment, the flow cross-section of the space 33 decreases steadily in the flow direction. The purge air 41 then passes into the upper flow space 39, which is located above the displacement body 18 'and in front of the displacement body 18. The inlet opening 37 is closed in accordance with the previous embodiment and the inlet opening 38 is opened. The scavenging air 41 thereby passes into the flow space 40 above the ceiling 25 of the displacement body 18 and exits upwards through the outlet 42.

Die Ausführungsform nach den Fig. 6 bis 9 entspricht im Übrigen dem vorigen Ausführungsbeispiel.The embodiment according to the Fig. 6 to 9 otherwise corresponds to the previous embodiment.

Der Verdrängungskörper 18 ist an der Gehäuserückwand 2 vorgesehen und kann als gesonderter Körper an ihr befestigt sein. Es ist in vorteilhafter Weise aber auch möglich, den Verdrängungskörper 18 einstückig mit der Gehäuserückwand 2 auszubilden.The displacement body 18 is provided on the housing rear wall 2 and may be attached to it as a separate body. However, it is also possible in an advantageous manner to form the displacement body 18 in one piece with the rear wall 2 of the housing.

Bei den beschriebenen Ausführungsformen befinden sich die Ventile 10, 11 der Gasflaschen 8, 9 im Durchströmraum 33. Da die Gasventile 10, 11 der erste mögliche Leckagebereich sind, wird die Leckage durch die Spülluft 41 zuverlässig mitgenommen und in der beschriebenen Weise über den Auslass 42 ausgetragen.In the described embodiments, the valves 10, 11 of the gas cylinders 8, 9 are located in the flow-through space 33. Since the gas valves 10, 11 are the first possible leakage area, the leakage is reliably entrained by the scavenging air 41 and in the described manner via the outlet 42 discharged.

Claims (24)

  1. A gas cabinet having a housing (1) in which is accommodated at least one gas cylinder (8, 9) connected to piping (13, 14) which is provided in the housing (1) and lies in a scavenging air flow (41) which enters the housing (1) through at least one inlet opening (36, 37) and leaves the housing (1) through at least one outlet opening (42), wherein the gas cabinet is formed so that the free cross-section of flow for the scavenging air (41) in the housing (1) is restricted to the size necessary for reliable scavenging, characterised in that at least one displacement body (18, 18') is provided for limiting the cross-section of flow in the housing (1).
  2. A gas cabinet according to claim 1, characterised in that the displacement body (18, 18') is a hollow body.
  3. A gas cabinet according to claim 1 or 2, characterised in that the displacement body (18, 18') has at least one connection (45, 46) for an insert gas for flushing the displacement body.
  4. A gas cabinet according to any one of claims 1 to 3, characterised in that the displacement body (18) has a non-uniform cress-section over its height.
  5. A gas cabinet according to any one of claims. 1 to 4, characterised in that the displacement body (18, 18') extends into the region of the gas cylinder (8, 9).
  6. A gas cabinet according to any one of claims 1 to 5, characterised in that the displacement body (18, 18') is provided, on its side facing the gas cylinder (8, 9), with at least one recess (27, 28, 31, 32), into which the gas cylinder (8, 9) projects.
  7. A gas cabinet according to any one of claims 1 to 6, characterised in that two spaced displacement bodies (18, 18') lying opposite one another are provided in the housing (1).
  8. A gas cabinet according to claim 7, characterised in that both displacement bodies (18, 18') project into the region of the gas cylinder (8, 9).
  9. A gas cabinet according to claim 7 or 8, characterised in that the two displacement bodies (18, 18') are each provided, on their sides facing the gas cylinder (8, 9), with at least one recess (27, 28, 31, 32), into which the gas cylinder (8, 9) projects.
  10. A gas cabinet according to claim 9, characterised in that the recesses (27, 28, 31, 32) in the two displacement bodies (18, 18') are equally large.
  11. A gas cabinet according to any one of claims 7 to 10, characterised in that the one displacement body (18) is longer in the flow direction of the scavenging air (41) than the other displacement body (18').
  12. A gas cabinet according to claim 11, characterised in that the longer displacement body (18) has a smaller cross-sectional area in the region in which it lies opposite the other displacement body (18') than in the remaining region.
  13. A gas cabinet according to any one of claims 1 to 12, characterised in that the displacement body (18, 18') partially bounds a flow chamber (33, 34, 39, 43) for the scavenging air (41).
  14. A gas cabinet according to any one of claims 1 to 13, characterised in that the displacement body (18) partially separates two flow chambers (33, 34, 39; 43) for the scavenging air (41).
  15. A gas cabinet according to claim 14, characterised in that the two flow chambers (33, 34, 39; 43) can be separated from one another by closable inlet opening (36, 38).
  16. A gas cabinet according to claim 1, characterised in that the displacement body (18, 18') is part of the housing (1).
  17. A gas cabinet according to any one of claims 1 to 16, characterised in that a flow chamber (43) for the scavenging air (41) is provided on the side of the one displacement body (18) that is remote from the other displacement body (18').
  18. A gas cabinet according to claim 17, characterised in that the flow chamber (43) is bounded by a rear wall (2) of the housing (1).
  19. A gas cabinet according to claim 17 or 18, characterise in that, between the displacement body (18) and the bottom (6) of the housing (1), a partition (44) is provided which bounds the flow chamber (43) in the region underneath the displacement body (18) and in which the at least one closable inlet opening (36) is provided.
  20. A gas cabinet according to any one of claims 1 to 5, 7, 8 and 11 to 19, characterised in that the flow chamber (33) between the displacement bodies (18, 18') has a continuously degreasing cross-section in the flow direction of the scavenging air (41).
  21. A gas cabinet according to any one of claims 1 to 5, 7, 8 and 11 to 20, characterises in that the front surface (22) of the one displacement body (18) that faces the other displacement body (18') extends in a flat and inclined manner.
  22. A gas cabinet according to any one of claims 1 to 5, 7, 8 and 11 to 21, characterised in that the other displacement body (18') has a flat rear surface (30).
  23. A gas cabinet according to any one of claims 1 to 16 and 20 to 22, characterised in that the one displacement body (18) is provided on the rear wall (2) of the housing (1).
  24. A gas cabinet according to any one of claims 1 to 16 and 20 to 23, characterised in that the one displacement body (18) is part of the rear wall (2) of the housing (1).
EP20070005328 2006-03-17 2007-03-15 Gas cabinet Not-in-force EP1835222B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200610013942 DE102006013942A1 (en) 2006-03-17 2006-03-17 gas cabinet

Publications (2)

Publication Number Publication Date
EP1835222A1 EP1835222A1 (en) 2007-09-19
EP1835222B1 true EP1835222B1 (en) 2009-05-13

Family

ID=38279358

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20070005328 Not-in-force EP1835222B1 (en) 2006-03-17 2007-03-15 Gas cabinet

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US (1) US8047220B2 (en)
EP (1) EP1835222B1 (en)
AT (1) ATE431523T1 (en)
DE (2) DE102006013942A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9222407B2 (en) 2012-11-12 2015-12-29 Wayne Fueling Systems Llc Dispenser for compressed natural gas (CNG) filling station
KR102331968B1 (en) * 2020-06-08 2021-11-25 엄도윤 Gas cabinet with purification filter applied inside

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3394645A (en) * 1967-03-27 1968-07-30 Mc Graw Edison Co Cooling baffle and tamper shield for underground transformer vaults
DE3021747C2 (en) * 1980-06-10 1983-11-10 Siemens AG, 1000 Berlin und 8000 München Transport container with a cylindrical wall, which is used to remove a damaged transportable pressure vessel
US4603707A (en) * 1983-08-02 1986-08-05 Motorola, Inc. Purge block for gas systems
US4625627A (en) * 1985-05-20 1986-12-02 Matheson Gas Products, Inc. Ventilated cabinet for containing gas supply vessels
US5151395A (en) 1987-03-24 1992-09-29 Novapure Corporation Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor
DE4215131C2 (en) * 1992-05-08 1997-02-06 Jehl Hans Juergen System for the safe disposal of hazardous gases stored in a compressed gas container
US5320817A (en) * 1992-08-28 1994-06-14 Novapure Corporation Process for sorption of hazardous waste products from exhaust gas streams
US5707424A (en) * 1994-10-13 1998-01-13 Advanced Technology Materials, Inc. Process system with integrated gas storage and delivery unit
DE19508046C2 (en) * 1995-03-07 1997-10-02 Fraunhofer Ges Forschung Safety cell for the safe holding of compressed gas cylinders
GB9724168D0 (en) * 1997-11-14 1998-01-14 Air Prod & Chem Gas control device and method of supplying gas
EP1037269A4 (en) * 1998-09-03 2007-05-02 Taiyo Nippon Sanso Corp Feed device for large amount of semiconductor process gas
FR2837904B1 (en) * 2002-03-27 2005-12-09 Gaz De Petrole DEVICE FOR SUPPLYING LIQUEFIED PETROLEUM GAS TO A FAN, IN PARTICULAR ON BOARD ON A MOTOR VEHICLE
US6880592B2 (en) * 2003-06-26 2005-04-19 Advanced Technology Materials, Inc. Canister guard

Also Published As

Publication number Publication date
US8047220B2 (en) 2011-11-01
DE102006013942A1 (en) 2007-09-20
DE502007000711D1 (en) 2009-06-25
ATE431523T1 (en) 2009-05-15
EP1835222A1 (en) 2007-09-19
US20080012458A1 (en) 2008-01-17

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