EP1800797A4 - Polishing apparatus and polishing method - Google Patents

Polishing apparatus and polishing method

Info

Publication number
EP1800797A4
EP1800797A4 EP05781363A EP05781363A EP1800797A4 EP 1800797 A4 EP1800797 A4 EP 1800797A4 EP 05781363 A EP05781363 A EP 05781363A EP 05781363 A EP05781363 A EP 05781363A EP 1800797 A4 EP1800797 A4 EP 1800797A4
Authority
EP
European Patent Office
Prior art keywords
polishing
polishing apparatus
polishing method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05781363A
Other languages
German (de)
French (fr)
Other versions
EP1800797A1 (en
Inventor
A Ejimatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of EP1800797A1 publication Critical patent/EP1800797A1/en
Publication of EP1800797A4 publication Critical patent/EP1800797A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Liquid Crystal (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
EP05781363A 2004-09-03 2005-09-01 Polishing apparatus and polishing method Withdrawn EP1800797A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004291950 2004-09-03
PCT/JP2005/016045 WO2006025507A1 (en) 2004-09-03 2005-09-01 Polishing apparatus and polishing method

Publications (2)

Publication Number Publication Date
EP1800797A1 EP1800797A1 (en) 2007-06-27
EP1800797A4 true EP1800797A4 (en) 2011-01-26

Family

ID=36000156

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05781363A Withdrawn EP1800797A4 (en) 2004-09-03 2005-09-01 Polishing apparatus and polishing method

Country Status (7)

Country Link
US (1) US20090029627A1 (en)
EP (1) EP1800797A4 (en)
JP (1) JP4920416B2 (en)
KR (1) KR101213017B1 (en)
CN (1) CN101005921B (en)
TW (1) TWI394638B (en)
WO (1) WO2006025507A1 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8585467B2 (en) * 2008-10-31 2013-11-19 Corning Incorporated Linear pressure feed grinding with voice coil
JP5321813B2 (en) * 2009-03-11 2013-10-23 株式会社東京精密 Chamfering apparatus and chamfering method
JP2010264549A (en) * 2009-05-14 2010-11-25 Olympus Corp Workpiece pasting member and polishing method
JP5384220B2 (en) * 2009-06-22 2014-01-08 東京応化工業株式会社 Alignment apparatus and alignment method
KR101377819B1 (en) 2012-04-25 2014-03-25 현대제철 주식회사 slab manufacturing device having an edge defect reforming function and controlling method therefor
US20140080384A1 (en) * 2012-09-17 2014-03-20 Shenzhen China Star Optoelectronics Technology Co., Ltd. Edge-grinding machine for liquid crystal panel
JP6050086B2 (en) * 2012-10-30 2016-12-21 ＡｖａｎＳｔｒａｔｅ株式会社 Manufacturing method of glass substrate
CN103273394B (en) * 2013-05-08 2015-11-25 深圳市华星光电技术有限公司 A kind of edge polisher and price fixing device thereof
JP6398902B2 (en) 2014-08-19 2018-10-03 信越化学工業株式会社 Rectangular substrate for imprint lithography and method for manufacturing the same
JP6344566B2 (en) * 2014-09-26 2018-06-20 日本電気硝子株式会社 End processing apparatus and end processing method for glass plate
CN105729267B (en) * 2016-02-03 2018-06-12 华中科技大学 A kind of edging device and method of view-based access control model control
US10685863B2 (en) 2018-04-27 2020-06-16 Semiconductor Components Industries, Llc Wafer thinning systems and related methods
CN109333317B (en) * 2018-12-10 2019-12-27 江西立德传动设备有限公司 Mechanical equipment processing burnishing device
CN109434664A (en) * 2018-12-25 2019-03-08 广东大雅智能厨电股份有限公司 A kind of burnishing device automatically tracking profile
JP2020163529A (en) * 2019-03-29 2020-10-08 株式会社荏原製作所 Polishing head for holding base board and base board processing device
CN112476151B (en) * 2020-11-23 2022-02-11 华辰精密装备（昆山）股份有限公司 Roll supporting method and center rest system for supporting roll
KR102531086B1 (en) * 2021-01-06 2023-05-11 (주)미래컴퍼니 Polishing apparatus and polishing method
CN113118893B (en) * 2021-04-19 2022-04-22 秦皇岛永祯钢结构制造有限公司 Assembled steel construction prefab finish machining system
CN113211286A (en) * 2021-06-03 2021-08-06 陈平 Export timber is automatic polishing equipment for furniture
CN115026697B (en) * 2022-06-10 2023-12-22 宁夏钢铁(集团)有限责任公司 Preparation device and application method of corrosion-resistant stainless steel cladding reinforcing steel bar

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0393939U (en) * 1990-01-12 1991-09-25
JP2503832B2 (en) * 1992-03-30 1996-06-05 坂東機工株式会社 Glass plate numerical control processing equipment
EP0703497A1 (en) * 1994-09-22 1996-03-27 Eastman Kodak Company Apparatus for separating a multi-image, parent sheet into discrete, single-image, finished sheets
JPH08197402A (en) * 1995-01-25 1996-08-06 Mitsuboshi Daiyamondo Kogyo Kk Polishing method and device for glass substrate
JPH10138105A (en) * 1996-11-11 1998-05-26 Nippon Steel Corp End part grinding device of plate material
JP3587104B2 (en) * 1999-10-12 2004-11-10 坂東機工株式会社 Glass plate processing machine
US6306015B1 (en) 2000-01-03 2001-10-23 Machine And Wheels, Inc. Method for grinding rigid materials
JP4084753B2 (en) * 2002-01-16 2008-04-30 三星ダイヤモンド工業株式会社 Brittle material substrate scriber, brittle material substrate processing machine, brittle material substrate polishing apparatus, and brittle material substrate cutting system
JP2003251551A (en) * 2002-02-28 2003-09-09 Nakamura Tome Precision Ind Co Ltd Working method for liquid crystal substrate, or the like and its device
JP2003275995A (en) * 2002-03-25 2003-09-30 Access Consulting:Kk Circular sheet cutting method and device
JP2004099424A (en) * 2002-07-16 2004-04-02 Shiraitekku:Kk Device for working glass
US7125319B2 (en) * 2003-10-27 2006-10-24 Corning Incorporated Apparatus and method for grinding and/or polishing an edge of a glass sheet
JP2005324291A (en) * 2004-05-14 2005-11-24 Hitachi Zosen Corp Assistant device for polishing, and polishing apparatus having the same
JP4037386B2 (en) * 2004-05-18 2008-01-23 中村留精密工業株式会社 Work side processing method and apparatus
JP4290611B2 (en) * 2004-07-13 2009-07-08 中村留精密工業株式会社 Side processing device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
CN101005921A (en) 2007-07-25
US20090029627A1 (en) 2009-01-29
TWI394638B (en) 2013-05-01
KR20070046886A (en) 2007-05-03
JP4920416B2 (en) 2012-04-18
WO2006025507A1 (en) 2006-03-09
CN101005921B (en) 2010-10-27
JPWO2006025507A1 (en) 2008-05-08
EP1800797A1 (en) 2007-06-27
KR101213017B1 (en) 2012-12-17
TW200618936A (en) 2006-06-16

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Legal Events

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Effective date: 20070402

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Effective date: 20101227

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Effective date: 20110724