EP1797489A4 - Verfahren und system zur strömungsmessung und validierung einer massenströmungssteuerung - Google Patents

Verfahren und system zur strömungsmessung und validierung einer massenströmungssteuerung

Info

Publication number
EP1797489A4
EP1797489A4 EP05772286A EP05772286A EP1797489A4 EP 1797489 A4 EP1797489 A4 EP 1797489A4 EP 05772286 A EP05772286 A EP 05772286A EP 05772286 A EP05772286 A EP 05772286A EP 1797489 A4 EP1797489 A4 EP 1797489A4
Authority
EP
European Patent Office
Prior art keywords
validation
mass flow
flow controller
flow measurement
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05772286A
Other languages
English (en)
French (fr)
Other versions
EP1797489A2 (de
Inventor
Stuart A Tison
Sandeep Sukumaran
James Barker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Celerity Inc
Original Assignee
Celerity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/887,591 external-priority patent/US7412986B2/en
Application filed by Celerity Inc filed Critical Celerity Inc
Publication of EP1797489A2 publication Critical patent/EP1797489A2/de
Publication of EP1797489A4 publication Critical patent/EP1797489A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
EP05772286A 2004-07-09 2005-07-07 Verfahren und system zur strömungsmessung und validierung einer massenströmungssteuerung Withdrawn EP1797489A4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/887,591 US7412986B2 (en) 2004-07-09 2004-07-09 Method and system for flow measurement and validation of a mass flow controller
US10/946,031 US7424895B2 (en) 2004-07-09 2004-09-21 Method and system for flow measurement and validation of a mass flow controller
PCT/US2005/024084 WO2006017116A2 (en) 2004-07-09 2005-07-07 Method and system for flow measurement and validation of a mass flow controller

Publications (2)

Publication Number Publication Date
EP1797489A2 EP1797489A2 (de) 2007-06-20
EP1797489A4 true EP1797489A4 (de) 2008-07-30

Family

ID=35839722

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05772286A Withdrawn EP1797489A4 (de) 2004-07-09 2005-07-07 Verfahren und system zur strömungsmessung und validierung einer massenströmungssteuerung

Country Status (4)

Country Link
EP (1) EP1797489A4 (de)
JP (1) JP2008506116A (de)
TW (1) TWI278606B (de)
WO (1) WO2006017116A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7474968B2 (en) * 2005-03-25 2009-01-06 Mks Instruments, Inc. Critical flow based mass flow verifier
US7757554B2 (en) 2005-03-25 2010-07-20 Mks Instruments, Inc. High accuracy mass flow verifier with multiple inlets
TWI416619B (zh) * 2006-11-17 2013-11-21 Lam Res Corp 執行實際流動驗證的方法
CN101903840B (zh) * 2007-12-27 2012-09-05 株式会社堀场Stec 流量比率控制装置
US7891228B2 (en) * 2008-11-18 2011-02-22 Mks Instruments, Inc. Dual-mode mass flow verification and mass flow delivery system and method
JP5442413B2 (ja) * 2009-12-03 2014-03-12 ルネサスエレクトロニクス株式会社 半導体製造装置および流量制御装置
GB201108854D0 (en) * 2011-05-26 2011-07-06 Spp Process Technology Systems Uk Ltd Mass flow controller monitoring
US10031005B2 (en) 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684245A (en) * 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
WO2002033361A2 (en) * 2000-10-13 2002-04-25 Mks Instruments, Inc. Apparatus and method for maintaining a constant pressure drop across a gas metering unit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3363461A (en) * 1965-05-26 1968-01-16 Peerless Paint & Varnish Corp Method for measuring flow
US4146051A (en) * 1976-01-10 1979-03-27 Lucas Industries Limited Fluid flow control system
EP0547617B1 (de) * 1991-12-18 1996-07-10 Pierre Delajoud Massenströmungsmesser mit einschnürendem Element
US6119710A (en) * 1999-05-26 2000-09-19 Cyber Instrument Technologies Llc Method for wide range gas flow system with real time flow measurement and correction
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684245A (en) * 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
WO2002033361A2 (en) * 2000-10-13 2002-04-25 Mks Instruments, Inc. Apparatus and method for maintaining a constant pressure drop across a gas metering unit

Also Published As

Publication number Publication date
TW200613700A (en) 2006-05-01
TWI278606B (en) 2007-04-11
JP2008506116A (ja) 2008-02-28
WO2006017116A3 (en) 2007-03-01
EP1797489A2 (de) 2007-06-20
WO2006017116A2 (en) 2006-02-16

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