Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
  • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
  • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
  • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
  • G01C19/5733—Structural details or topology
  • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
  • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
  • H03H9/02—Details
  • H03H9/02244—Details of microelectro-mechanical resonators
  • H03H9/02259—Driving or detection means
  • H03H9/02275—Comb electrodes
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
  • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
  • H03H9/02—Details
  • H03H9/02244—Details of microelectro-mechanical resonators
  • H03H9/02338—Suspension means
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
  • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
  • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
  • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
  • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
  • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
  • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
  • H03H9/2431—Ring resonators
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
  • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
  • H03H9/02—Details
  • H03H9/02244—Details of microelectro-mechanical resonators
  • H03H9/02338—Suspension means
  • H03H2009/02346—Anchors for ring resonators
  • H03H2009/02354—Anchors for ring resonators applied along the periphery, e.g. at nodal points of the ring
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
  • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
  • H03H9/02—Details
  • H03H9/02244—Details of microelectro-mechanical resonators
  • H03H2009/02488—Vibration modes
  • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
  • H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
• • H—ELECTRICITY
  • H03—ELECTRONIC CIRCUITRY
  • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
  • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
  • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
  • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
  • H03H2009/2442—Square resonators

Definitions

• the subject of the invention is a resonator with oscillating masses.
• This type of machine is commonly manufactured by micromechanical techniques and is used in accelerometers and more specifically gyrometers. It essentially comprises two oscillating masses bonded to a substrate by an elastic structure as well as means for oscillating the masses and means for measuring the oscillations. If the masses oscillate in one direction and the object on which the resonator is placed rotates about a second direction, the Coriolis forces produce a displacement of the masses in the third principal direction, perpendicular to the previous ones. It is this displacement that is measured. Its amplitude makes it possible to deduce the speed of rotation to which the resonator is subjected.
• Displacements in the third direction are generally measured through the change of capacitance between electrodes placed under the oscillating masses and on the substrate.
• the displacements in the measuring direction and the capacitance variations are opposite so that a measure differential allows to accumulate the two capacitance variations associated with each of the masses while freeing themselves from certain measurement errors, resulting for example from an overall displacement of the masses relative to the substrate.
• the oscillating displacement of the masses is made possible by fine structures, called beams, by which the masses are suspended from the substrate and which have the capacity to flex easily in the direction of the oscillations.
• Some advanced resonators also include other beams of a similar nature, which are coupling beams and connect the masses to each other, and sometimes to the substrate. These coupling beams are arranged to deform easily when the masses oscillate in the desired phase relationship, but to oppose a high stiffness to oscillations in other phase relationships, to promote oscillations in the desired phase relationship and thus to reduce the consequences of a failure to synchronize the oscillations on the measurements.
• US 5,635,638 A discloses such a resonator.
• the oscillation means are electric exciters placed behind the oscillating masses.
• the suspension beams are also arranged at the rear of the oscillating masses and extend perpendicular to the main direction of oscillation so as to flex the most easily in this direction.
• the coupling beams comprise arcuate beams joining the front faces of the two masses and connected by their means to other beams joined at their ends to the substrate and which extend in the direction of oscillation.
• the phase opposition of the mass movement produces a simple bending of the arched beams and the beams connected to the substrate, whereas a phase movement of the masses produces a traction and a compression almost without displacement of the beams connected to the substrate and inflections in complex modes.
• the system of coupling beams is therefore much more rigid for oscillations in phase and does not let them easily appear.
• the object of the invention is to provide a resonator to the structure of beams simpler, less cumbersome and where the coupling between the oscillations of the masses is well made for a unique and determined phase relationship.
• the suspension beams are all connected to the masses through the beams coupling.
• the beam network thus obtained generally has two axes of symmetry, in the main direction of the oscillations and in a direction perpendicular to the previous, but also parallel to the substrate.
• the network of suspension beams and coupling beams is unique and continuous and comprises beams for attaching to the substrate, beams for attachment to the masses, and, more particularly, a junction beam extending over a closed line to which all the attachment beams connect.
• the elastic deformations produced at the oscillations concentrate essentially on the junction beam; it is favorably curved so as not to produce a concentration of constraints.
• it is arranged around the two masses; if they have a half-moon shape, with opposite straight sides and curved sides opposite to the connecting beam, a resonator of great compactness is obtained.
• the substrate attachment beams may include anchor beams, extending generally in the direction of alignment of the masses between two substrate attachment regions, and connecting beams perpendicular to the anchor and joining beams. anchoring beams at mid-distance from attachment regions. This arrangement tends to reduce the oscillations produced in the direction perpendicular to the main direction.
• the oscillation elements can be placed between the junction beam surrounding the masses and the masses themselves, which contributes to the desired compactness.
• the substrate may include a decoupling frame surrounding the masses, the oscillation means, and the beams, which is attached to an underlying portion of the substrate by two frame anchor regions aligned in a principal direction of oscillation of the masses. If the mass attachment beams are then in alignment with the anchoring regions of the frame, the frame and the connecting beam can be designed to form stops in front of the frame anchoring regions; and if the oscillating masses have opposite sides designed to form a mutual abutment, the oscillation movements of the masses can be limited in this way.
• the masses extend between the oscillating elements and have mutually opposed sides which are provided with interlocking electric combs. It will be seen that this arrangement enhances the stability of the oscillating movement.
• the masses may each be composed of two sub-masses placed symmetrically to a principal direction of oscillation of the masses
• the coupling beams comprise for each of the masses a subset of beams extending between the sub-masses and comprising two beams connected respectively to the sub-masses and to an interconnection beam, the beams connected to the sub-masses extending in a main direction of oscillation of the masses.
• the sub-masses can then oscillate mutually in a direction to move perpendicular to the main direction of oscillation and provide an accelerometer with two axes of measurement.
• the coupling beams may advantageously extend along rigid beams (at least in the range of frequencies considered) each extending around a mass and carrying elements of oscillation means masses.
• the rigid beams may advantageously extend on closed lines and have opposite portions between them provided with interleaved electrostatic combs, common to the two masses instead of being placed around the masses themselves as in other less compact embodiments .
• Measurement of the oscillations in the second direction can be performed with capacitance measuring electrodes with the masses, the electrodes being fixed to the substrate and arranged in housings of the masses and having an asymmetrical shape in a direction of oscillation of the masses.
• the asymmetrical shape reinforces the variation of capacity consecutive to the oscillations.
• FIG. 1 is a view of an embodiment of the invention
• FIG. 2 illustrates the deformations of this embodiment when the masses oscillate
• FIGS. 3, 4, 5, 6 and 7 illustrate other embodiments of the invention
• FIG. 8 is an enlargement of a part of FIG. 7; and FIG. 9 illustrates another way of designing measuring electrodes.
• FIG. 1 thus represents a particularly simple embodiment, where two masses 1 and 2 arranged side by side are connected to anchoring points 3 to an underlying substrate 9, not shown in detail and which extends under all the device.
• the anchoring points 3 are arranged in quadrilateral at the outer corners of the masses 1 and 2 by a single network of beams comprising anchor beams 4, two in number and each connected to two respective anchoring points 3 ' extending in parallel the alignment of the masses 1 and 2, two short fastening beams 5 perpendicular to the preceding and connected to their respective media, a junction beam 6 in the form of a rectangle extending around the masses 1 and 2 and the points of anchor 3 and 4, and two beams for attachment to the masses 7 extending between the junction beam 6 and the masses 1 and 2, short, whose direction coincides with the alignment of the masses 1 and 2 and which extend to the posterior faces of the masses 1 and 2.
• This network of beams ensures both the suspension of the masses 1 and 2 to the substrate by anchoring points 3, and the coupling of the masses 1 and 2 between them: when the masses 1 and 2 oscillate in the main direction of oscillation (corresponding to the direction of the alignment of the masses) and in opposition of phase, when approaching or moving away from each other, the network of beams is deforms as shown in Figure 2: the rectangle of the junction beam is deformed, d their sides becoming convex and the other two concaves, and the anchor beams 4 deform substantially like the sides of the junction beam 6 which are parallel and adjacent thereto.
• the fastening beams 5 and 7 undergo almost no deformation.
• This system is flexible for the deformations represented in phase opposition, but much more rigid for movements of the masses in phase, in the same direction, because the overall movements of the junction beam 6 which would be proposed in the direction of oscillation are made almost impossible at the junctions to the fastening beams 5.
• the network of beams thus ensures the coupling of the masses 1 and 2 which promotes the desired oscillation phase relationship.
• the rectangular shape of the junction beam 6 has angles in which complex stress concentrations or deformations can occur. It is possible to prefer a curved junction beam, like that of Figure 3, which is arranged around two masses 11 and 12 in half-moon and which has an oval shape, at will elliptical or circular at will.
• the anchoring points 13, the anchor beams 14, the substrate attachment beams 15 and the beams for attachment to the masses 17 are not modified with respect to the previous embodiment. However, the anchor beams 14 extend here outside the junction beam 16, which is therefore close to the masses 11 and 12, which is shaped in the form of a half moon to improve the compactness of the together.
• FIG. 4 illustrates an embodiment similar to FIG. 3, except that, strictly speaking, anchoring points 13 are not found but a decoupling frame 18 which is connected to an underlying substrate 19 by means of opposed anchoring points 20 and located in the alignment of the masses 11 and 12, at a short distance from the junction beam 16 and the beams
• the masses 11 and 12 and the beams are housed in a hollow of the decoupling frame 18. This structure has the advantage of greater decoupling between the substrate 19 and the oscillating system.
• FIG. 5 A different embodiment variant is shown in FIG. 5.
• the junction beam 16 is replaced by a junction beam 26 disposed between the masses 21 and 22, which can without a problem take on the shape of a parallelepiped like the masses 1 and 2 encountered at beginning.
• the junction beam 26 is rounded, oval, circular, elliptical, etc. Like the junction beam 16.
• FIG. 6 A more complete description of a simple embodiment of the invention is made by means of FIG. 6. The characteristics of the embodiment of FIG.
• the oscillation means which are conventionally formed of combs with nested teeth or extensions 28 and 29, or "interdigitated" according to FIG. a term common in art, and which are the seat of electric forces of attraction.
• Some of the teeth 28 are placed on the posterior face of the half-moon masses 11 and 12 and the complementary teeth 29 are placed on stationary elements 30 in the form of an arc, extending between the masses 11 and 12 and the connecting beam 16 to the beams of attachment to the masses 17 and retained on the substrate 19 by anchoring points 31.
• the masses 11 and 12 are provided with other extensions in the form of comb teeth imbricated in each other at their anterior faces. They have the reference 32. The nesting of these combs produce stabilizing electrostatic forces which counteract the unwanted movements of the masses 11 and 12 perpendicular to the main direction of oscillation x, in the vertical axis y of the figure.
• the masses 11 and 12 are strictly balanced so that their main axis of inertia is on the center line of alignment.
• the extensions 28 and 32 are in particular placed symmetrically on each side of this line.
• the extensions 32 of the anterior sides be in the extension of the extensions 28 of the posterior sides; the sum of the mass of the elements 28 and 17 in extension on the posterior side of the masses 11 and 12 oscillating gives the same mass as the set of extensions 32 located on the front side.
• the fastening beams 15 and 17 are here split into two parallel beam members in order to provide better resistance to torsion. It has already been noted that the fastening beams are not very deformable because of their short length, and it is also desirable to avoid their deformations, in particular those expressed outside the plane of the figure, in the third direction Z which could produce only oscillatory movements additional, harmful measures.
• Limiters for limiting the movement of the masses 11 and 12 are provided by the contact of the teeth 32 with the opposite mass and, in the other direction, by the contact of the connecting beam 16 which deforms against the decoupling frame 18 to the anchoring points 20. These abutments always involve parts with the same electrical potential and therefore do not disturb the operation of the machine.
• the monolithic masses 11 and 12 are here replaced by complex masses 41 and 42 in the general form of a half-moon.
• these oscillating elements are here composed of sub-masses 43 in quarter-moon, two in number for each of the masses 41 and 42.
• the masses 41 and 42 complexes are surrounded by support elements 44 extending on a line closed composed of a diameter and a half-perimeter of a circle. These beams have teeth 28 and 32 nested similar to those of the previous realization.
• the fastening beams 17 extend by connecting to the support members 44 and are attached only indirectly to the weights 41 and 42.
• the support members 44 resemble closed-contour beams and may be considered as beams. coupling, but are substantially thicker than other beams, to the point that they are almost not deformed.
• the support beams 44 thus belong to the network of beams connecting the masses 41 and 42 oscillating to the substrate.
• the network also comprises beams extending between the sub-masses 43 in quarter-moon, and more precisely: two bending beams 45 whose ends of each are connected to a respective sub-mass 43 and which extend in the direction main oscillating mass 41 and 42, a connecting beam 46 joining two opposite points of the support member 44 and extending in the extension of the attachment beams 17, in the main direction of oscillation between a pair bending beams 45, and a short interconnection beam 47, oriented perpendicular to the main direction of oscillation and connecting the pair of bending beams 45 to the connecting beam 46.
• the measuring device is composed of fixed electrodes 48 arranged in housings of the sub-masses 43.
• the fixed electrodes 48 make it possible to measure the electrical capacitances between them and the sub-masses 43.
• the fixed electrodes 48 approach some portions of their housing and move away from others, the total capacity is changed according to the movements of sub-masses 43.
• a sensible measurement can be obtained if the fixed electrodes 48 are asymmetrical, for example example crenellated on one side and smooth on the other.
• the castellated side is oriented in the direction perpendicular to the main direction of oscillation to measure the movements of the quarter-moon in this perpendicular direction.
• the fixed electrodes 48 are arranged symmetrically at the center of inertia of the quarter-moons with respect to the two directions of oscillation.
• the slots can be of varied shape and opening.
• Another embodiment of the fixed electrodes would be to have two flat electrodes 49 and 50 paired according to Figure 9, and whose capacity relative to the housing 51 would be measured independently.
• the movement of the sub-mass 43 would cause a decrease in one of the capacities and a correlative increase in the other.
• a subtraction measurement of the abilities would give a sensible evaluation of the movement.
• the total capacitance variations recorded at the fixed electrodes 48 of each total sub-mass 43 are measured, and subtracted from one another to obtain a larger result and a finer measurement, because of the substantially equal (antisymmetric) movements of the sub-masses 43 combined with the symmetrical arrangement of the fixed electrodes 49 between the sub-masses 43 of each mass 41 or 42.
• the subtraction measurement also eliminates the effect of a harmful oscillation of the sub-masses 43 in the Y direction relative to each other.
• the measurements on each of the masses 41 and 42 must also give opposite results. It can be correlated by another subtractive measure to eliminate the effect of parasitic accelerations in the Y direction.
• Combs encountered in this invention have teeth overlap lengths substantially larger than those ordinarily employed. Additional electrostatic forces between the combs keep them in a centering position against disturbances to the oscillating system. For an oscillation amplitude of 5 ⁇ m, for example, teeth of 7 ⁇ m in length are usual. Total lengths of about 97 ⁇ m, either
• resonators can be constructed by conventional deposition and etching techniques, etc. usual in micromechanics, so we will not give a description here.

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• 2004
  • 2004-10-06 FR FR0452276A patent/FR2876180B1/fr not_active Expired - Fee Related
• 2005
  • 2005-10-05 US US11/576,777 patent/US7637155B2/en not_active Expired - Fee Related
  • 2005-10-05 JP JP2007535218A patent/JP2008516217A/ja active Pending
  • 2005-10-05 EP EP05810750A patent/EP1797395A1/de not_active Withdrawn
  • 2005-10-05 WO PCT/FR2005/050815 patent/WO2006037928A1/fr active Application Filing

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