EP1790419A3 - Kapazitiver Ultraschallwandler und Verfahren zu dessen Herstellung - Google Patents

Kapazitiver Ultraschallwandler und Verfahren zu dessen Herstellung Download PDF

Info

Publication number
EP1790419A3
EP1790419A3 EP06013590A EP06013590A EP1790419A3 EP 1790419 A3 EP1790419 A3 EP 1790419A3 EP 06013590 A EP06013590 A EP 06013590A EP 06013590 A EP06013590 A EP 06013590A EP 1790419 A3 EP1790419 A3 EP 1790419A3
Authority
EP
European Patent Office
Prior art keywords
electrode
ultrasonic transducer
capacitive ultrasonic
same
fabricating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06013590A
Other languages
English (en)
French (fr)
Other versions
EP1790419A2 (de
Inventor
Ming-Wei Chang
Tse-Min Deng
Tsung-Ju Gwo
Zhen-Yuan Chung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industrial Technology Research Institute ITRI
Original Assignee
Industrial Technology Research Institute ITRI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Industrial Technology Research Institute ITRI filed Critical Industrial Technology Research Institute ITRI
Publication of EP1790419A2 publication Critical patent/EP1790419A2/de
Publication of EP1790419A3 publication Critical patent/EP1790419A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
EP06013590A 2005-11-24 2006-06-30 Kapazitiver Ultraschallwandler und Verfahren zu dessen Herstellung Withdrawn EP1790419A3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200510123960 2005-11-24

Publications (2)

Publication Number Publication Date
EP1790419A2 EP1790419A2 (de) 2007-05-30
EP1790419A3 true EP1790419A3 (de) 2010-05-12

Family

ID=37846053

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06013590A Withdrawn EP1790419A3 (de) 2005-11-24 2006-06-30 Kapazitiver Ultraschallwandler und Verfahren zu dessen Herstellung

Country Status (2)

Country Link
EP (1) EP1790419A3 (de)
CN (1) CN102225389B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110510573B (zh) * 2019-08-30 2023-01-10 中国科学院深圳先进技术研究院 一种电容式微机械超声换能器及其制备方法和应用

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1975801A (en) * 1930-12-15 1934-10-09 Sound Lab Corp Ltd Microphone
US4432007A (en) * 1978-11-08 1984-02-14 General Electric Company Ultrasonic transducer fabricated as an integral part of a monolithic integrated circuit
EP1085784A2 (de) * 1999-09-16 2001-03-21 Sanyo Electric Co., Ltd. Halbleitervorrichtung,Halbleiterelektret-Kondensator Mikrofon und Verfahren zur Herstellung von einem Halbleiterelektret-Kondensator Mikrofon
JP2005027186A (ja) * 2003-07-04 2005-01-27 Seiko Epson Corp 超音波変換装置
WO2005077012A2 (en) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5423220A (en) * 1993-01-29 1995-06-13 Parallel Design Ultrasonic transducer array and manufacturing method thereof
KR100935934B1 (ko) * 2003-03-15 2010-01-11 삼성전자주식회사 전자빔 리소그라피 시스템의 에미터 및 그 제조방법
JP4044090B2 (ja) * 2003-12-26 2008-02-06 シャープ株式会社 カラーフィルタ基板及びそれを備えた液晶表示装置、並びにカラーフィルタ基板の製造方法
JP4123192B2 (ja) * 2004-06-03 2008-07-23 セイコーエプソン株式会社 超音波トランスデューサ、および超音波トランスデューサの製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1975801A (en) * 1930-12-15 1934-10-09 Sound Lab Corp Ltd Microphone
US4432007A (en) * 1978-11-08 1984-02-14 General Electric Company Ultrasonic transducer fabricated as an integral part of a monolithic integrated circuit
EP1085784A2 (de) * 1999-09-16 2001-03-21 Sanyo Electric Co., Ltd. Halbleitervorrichtung,Halbleiterelektret-Kondensator Mikrofon und Verfahren zur Herstellung von einem Halbleiterelektret-Kondensator Mikrofon
JP2005027186A (ja) * 2003-07-04 2005-01-27 Seiko Epson Corp 超音波変換装置
WO2005077012A2 (en) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods

Also Published As

Publication number Publication date
CN102225389A (zh) 2011-10-26
CN102225389B (zh) 2013-09-18
EP1790419A2 (de) 2007-05-30

Similar Documents

Publication Publication Date Title
EP1585218A3 (de) Volumenwellenresonator und Herstellungsverfahren dafür
EP1471637A3 (de) Freitragender Dünnschicht-Volumenwellen-Resonator (FBAR) und Methode zu seiner Herstellung
WO2007023409A3 (en) Acoustic light-emitting device
EP1061645A3 (de) Akustisches Oberflächenwellen-Bauelement, Verfahren zur Herstellung desselben und akustische Oberflächenwellenvorrichtung mit einem solchen Bauelement
EP1955783A3 (de) Flexibler kapazitiver Ultraschallwandler und Herstellungsverfahren dafür
TW200801458A (en) Capacitive ultrasonic transducer and method of fabricating the same
EP1667244A3 (de) Phasenwechselspeichervorrichtung mit Phasenwechselmaterialschicht aus Phasenwechselnanopartikeln und Herstellungsverfahren dafür
WO2005084284A3 (en) Multiple element electrode cmut devices and fabrication methods
EP1406386A3 (de) Piezoelektrischer Resonator, piezoelektrischer Filter und Kommunikationsvorrichtung
EP2202783A3 (de) Kondensator und Verfahren zu dessen Herstellung
EP1761104A4 (de) Ultraschallvibrator des elektrostatischen kapazitätstyps, herstellungsverfahren dafür und ultraschallsonde des elektrostatischen kapazitätstyps
ITMI20032335A1 (it) Materiale di supporto per dispositivi trasduttori ultrasonici microlavorati.
AU2003301975A1 (en) An integrated structure and method for fabricating the same
ITTO20010253A0 (it) Elemento strutturale per una sospensione di un autoveicolo e procedimento per la sua realizzazione.
EP1830417A3 (de) Halbleitervorrichtung und Herstellungsverfahren dafür
PL347765A1 (en) Sound-shielding element, use thereof and method for producing the same
EP1746722A3 (de) Dünnschicht-Volumenwellen-Resonator (FBAR) und sein Herstellungsverfahren
AU2472202A (en) Method for determining an acoustic environment situation, application of the method and hearing aid
EP1737011A3 (de) Elektronenemitter
EP1783902A3 (de) Gehäuse auf der Waferebene für ein akustisches Oberflächenwellenbauelement und Verfahren zu dessen Herstellung
EP1729333A3 (de) Verfahren zur Herstellung einer ferroelektrischen Schicht und Verfahren zur Herstellung einer elektronischen Anordnung
EP2182348A3 (de) Oberflächenschallwellenelement, Oberflächenschallwellenvorrichtung und Herstellungsverfahren dafür
EP1689080A3 (de) Akustischer Dünnschicht-Volumenwellenresonator und sein Herstellungsverfahren.
ITRM20010243A0 (it) Procedimento micromeccanico superficiale per la realizzazione di trasduttori elettro-acustici, in particolare trasduttori ad ultrasuoni, rel
EP1566831A3 (de) Halbleiteranordnung und deren Herstellungsverfahren

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK YU

RIC1 Information provided on ipc code assigned before grant

Ipc: G01H 11/06 20060101ALI20100125BHEP

Ipc: B06B 1/02 20060101AFI20070320BHEP

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK RS

17P Request for examination filed

Effective date: 20101012

AKX Designation fees paid

Designated state(s): DE GB

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20130103