CN102225389B - 电容式超音波换能装置及其制作方法 - Google Patents

电容式超音波换能装置及其制作方法 Download PDF

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Publication number
CN102225389B
CN102225389B CN 201110099228 CN201110099228A CN102225389B CN 102225389 B CN102225389 B CN 102225389B CN 201110099228 CN201110099228 CN 201110099228 CN 201110099228 A CN201110099228 A CN 201110099228A CN 102225389 B CN102225389 B CN 102225389B
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China
Prior art keywords
patterned
metal level
layer
insulating barrier
metal
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Expired - Fee Related
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CN 201110099228
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English (en)
Chinese (zh)
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CN102225389A (zh
Inventor
张明暐
郭忠柱
邓泽民
钟祯元
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Industrial Technology Research Institute ITRI
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Industrial Technology Research Institute ITRI
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Priority to CN 201110099228 priority Critical patent/CN102225389B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
CN 201110099228 2005-11-24 2006-11-22 电容式超音波换能装置及其制作方法 Expired - Fee Related CN102225389B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201110099228 CN102225389B (zh) 2005-11-24 2006-11-22 电容式超音波换能装置及其制作方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN200510123960 2005-11-24
CN200510123960.8 2005-11-24
CN 201110099228 CN102225389B (zh) 2005-11-24 2006-11-22 电容式超音波换能装置及其制作方法

Related Parent Applications (1)

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CN2006101456394A Division CN1970172B (zh) 2005-11-24 2006-11-22 电容式超音波换能装置及其制作方法

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CN102225389A CN102225389A (zh) 2011-10-26
CN102225389B true CN102225389B (zh) 2013-09-18

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CN 201110099228 Expired - Fee Related CN102225389B (zh) 2005-11-24 2006-11-22 电容式超音波换能装置及其制作方法

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EP (1) EP1790419A3 (de)
CN (1) CN102225389B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110510573B (zh) * 2019-08-30 2023-01-10 中国科学院深圳先进技术研究院 一种电容式微机械超声换能器及其制备方法和应用

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1117275A (zh) * 1993-01-29 1996-02-21 帕罗尔设计公司 超声转换器阵列及其制造方法
CN1531020A (zh) * 2003-03-15 2004-09-22 ���ǵ�����ʽ���� 用于电子束投影式微影系统的发射器及其制造方法
CN1637503A (zh) * 2003-12-26 2005-07-13 夏普株式会社 滤色镜基板、设置有该滤色镜的液晶显示装置及滤色镜基板的制造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1975801A (en) * 1930-12-15 1934-10-09 Sound Lab Corp Ltd Microphone
US4262399A (en) * 1978-11-08 1981-04-21 General Electric Co. Ultrasonic transducer fabricated as an integral park of a monolithic integrated circuit
JP3440037B2 (ja) * 1999-09-16 2003-08-25 三洋電機株式会社 半導体装置、半導体エレクトレットコンデンサマイクロホンおよび半導体エレクトレットコンデンサマイクロホンの製造方法。
JP4193615B2 (ja) * 2003-07-04 2008-12-10 セイコーエプソン株式会社 超音波変換装置
WO2005077012A2 (en) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods
JP4123192B2 (ja) * 2004-06-03 2008-07-23 セイコーエプソン株式会社 超音波トランスデューサ、および超音波トランスデューサの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1117275A (zh) * 1993-01-29 1996-02-21 帕罗尔设计公司 超声转换器阵列及其制造方法
CN1531020A (zh) * 2003-03-15 2004-09-22 ���ǵ�����ʽ���� 用于电子束投影式微影系统的发射器及其制造方法
CN1637503A (zh) * 2003-12-26 2005-07-13 夏普株式会社 滤色镜基板、设置有该滤色镜的液晶显示装置及滤色镜基板的制造方法

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Publication number Publication date
CN102225389A (zh) 2011-10-26
EP1790419A2 (de) 2007-05-30
EP1790419A3 (de) 2010-05-12

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Granted publication date: 20130918

Termination date: 20191122