EP1710440A3 - Vacuum pumping with energy limitation - Google Patents

Vacuum pumping with energy limitation Download PDF

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Publication number
EP1710440A3
EP1710440A3 EP06300288A EP06300288A EP1710440A3 EP 1710440 A3 EP1710440 A3 EP 1710440A3 EP 06300288 A EP06300288 A EP 06300288A EP 06300288 A EP06300288 A EP 06300288A EP 1710440 A3 EP1710440 A3 EP 1710440A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pumping
pump
pumping
energy limitation
optimize
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06300288A
Other languages
German (de)
French (fr)
Other versions
EP1710440A2 (en
Inventor
Jean-Luc Rival
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of EP1710440A2 publication Critical patent/EP1710440A2/en
Publication of EP1710440A3 publication Critical patent/EP1710440A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/10—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by changing the positions of the inlet or outlet openings with respect to the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/05—Speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/58—Valve parameters

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

Un dispositif de pompage à vide selon l'invention comprend un moteur (1) entraînant une pompe mécanique sèche (2) multi-étagée dans laquelle les étages (5, 6, 7, 8) sont connectés successivement en parallèle puis en série, selon plusieurs configurations successives que l'on choisit chacune pour optimiser le débit de pompage dans la plage de pression en cours. Cela permet de descendre rapidement la pression dans une enceinte (100), tout en réduisant d'environ 40 % le volume de la pompe et l'énergie consommée par rapport à une pompe traditionnelle de débit suffisant pour atteindre la même rapidité de pompage.

Figure imgaf001
A vacuum pumping device according to the invention comprises a motor (1) driving a multi-stage dry mechanical pump (2) in which the stages (5, 6, 7, 8) are successively connected in parallel and then in series, according to several successive configurations that are each chosen to optimize the pumping rate in the current pressure range. This makes it possible to quickly lower the pressure in a chamber (100), while reducing by about 40% the volume of the pump and the energy consumed compared to a traditional pump of sufficient flow to achieve the same speed of pumping.
Figure imgaf001
EP06300288A 2005-04-05 2006-03-27 Vacuum pumping with energy limitation Withdrawn EP1710440A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0503352A FR2883934B1 (en) 2005-04-05 2005-04-05 QUICK ENCLOSURE PUMPING WITH ENERGY LIMITATION

Publications (2)

Publication Number Publication Date
EP1710440A2 EP1710440A2 (en) 2006-10-11
EP1710440A3 true EP1710440A3 (en) 2008-02-06

Family

ID=35427303

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06300288A Withdrawn EP1710440A3 (en) 2005-04-05 2006-03-27 Vacuum pumping with energy limitation

Country Status (5)

Country Link
US (1) US20060222506A1 (en)
EP (1) EP1710440A3 (en)
JP (1) JP2006291952A (en)
CN (1) CN100559028C (en)
FR (1) FR2883934B1 (en)

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DE102006050943B4 (en) * 2006-10-28 2020-04-16 Pfeiffer Vacuum Gmbh Vacuum pump and method for operating the same
JP4820304B2 (en) * 2007-01-18 2011-11-24 株式会社荏原製作所 Vacuum pump unit
US8864476B2 (en) * 2011-08-31 2014-10-21 Flow Control Llc. Portable battery operated bilge pump
CA2795964C (en) * 2011-11-18 2017-04-11 Flow Control Llc. Rechargeable battery powered utility pump with series centrifugal pump configuration
FR2984423A1 (en) * 2011-12-15 2013-06-21 Adixen Vacuum Products PUMPING DEVICE AND EQUIPMENT FOR MANUFACTURING FLAT SCREENS THEREFOR
JP5099573B1 (en) * 2012-01-23 2012-12-19 有限会社スコットプランニング Vacuum pump system for energy saving of multiple vacuum devices
DE102012220442A1 (en) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vacuum pump system for evacuating a chamber and method for controlling a vacuum pump system
DE102013223556A1 (en) * 2013-11-19 2015-05-21 Oerlikon Leybold Vacuum Gmbh Vacuum pump system and method for operating a vacuum pump system
EP3094849A4 (en) * 2014-01-15 2017-11-15 Eaton Corporation Method of optimizing supercharger performance
FR3017425A1 (en) * 2014-02-12 2015-08-14 Adixen Vacuum Products PUMPING SYSTEM AND PRESSING DESCENT METHOD IN LOADING AND UNLOADING SAS
DE202015004596U1 (en) * 2015-06-26 2015-09-21 Oerlikon Leybold Vacuum Gmbh vacuum pump system
WO2017031807A1 (en) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 Non-coaxial vacuum pump with multiple driving chambers
DE202016001950U1 (en) * 2016-03-30 2017-07-03 Leybold Gmbh vacuum pump
GB2558626A (en) * 2017-01-11 2018-07-18 Edwards Ltd A multiple stage vacuum pump and pump configuring method
FR3065040B1 (en) 2017-04-07 2019-06-21 Pfeiffer Vacuum PUMPING GROUP AND USE
DE202017003212U1 (en) * 2017-06-17 2018-09-18 Leybold Gmbh Multi-stage Roots pump
EP3489516B1 (en) * 2017-11-24 2021-09-01 Pfeiffer Vacuum Gmbh Vacuum pump
CN108194353B (en) * 2018-02-02 2019-12-13 中山市天元真空设备技术有限公司 Multistage roots dry vacuum pump with independent paired rotor rotating shafts and capable of directly discharging air
GB2572958C (en) * 2018-04-16 2021-06-23 Edwards Ltd A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
FR3094762B1 (en) * 2019-04-05 2021-04-09 Pfeiffer Vacuum Dry type vacuum pump and pumping installation
CN110594156B (en) 2019-09-23 2021-05-25 兑通真空技术(上海)有限公司 Driving structure of three-axis multistage roots pump
CN210629269U (en) 2019-09-23 2020-05-26 兑通真空技术(上海)有限公司 Motor connection transmission structure of roots pump
CN110500275B (en) 2019-09-23 2021-03-16 兑通真空技术(上海)有限公司 Pump housing structure of triaxial multistage roots pump
CN110685912A (en) 2019-10-10 2020-01-14 兑通真空技术(上海)有限公司 Structure for connecting multi-shaft multi-stage roots pump rotors
BE1028087B1 (en) * 2020-02-24 2021-09-21 Atlas Copco Airpower Nv Method for controlling a vacuum system and vacuum system
CN112594544B (en) * 2020-12-11 2022-07-19 宜春市富锐气体有限责任公司 Filling and exhausting vacuum-pumping equipment for argon production
FR3128747A1 (en) * 2021-11-03 2023-05-05 Pfeiffer Vacuum Multi-stage vacuum pump

Citations (9)

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GB738377A (en) * 1951-03-22 1955-10-12 Syntron Co Improvements in or relating to coating apparatus
US5039280A (en) * 1988-12-16 1991-08-13 Alcatel Cit Pump assembly for obtaining a high vacuum
EP0730093A1 (en) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Control of a two-stage vacuum pump
US6196810B1 (en) * 1997-09-22 2001-03-06 Aisin Seiki Kabushiki Kaisha Multistage vacuum pump assembly
EP1314890A2 (en) * 2001-11-21 2003-05-28 Kabushiki Kaisha Toyota Jidoshokki Control system for vacuum pump
US20040028532A1 (en) * 2000-04-18 2004-02-12 Christian Beyer Oscillation piston pump
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DE10308420A1 (en) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Test gas leak detector

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GB738377A (en) * 1951-03-22 1955-10-12 Syntron Co Improvements in or relating to coating apparatus
US5039280A (en) * 1988-12-16 1991-08-13 Alcatel Cit Pump assembly for obtaining a high vacuum
EP0730093A1 (en) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Control of a two-stage vacuum pump
US6196810B1 (en) * 1997-09-22 2001-03-06 Aisin Seiki Kabushiki Kaisha Multistage vacuum pump assembly
US20040028532A1 (en) * 2000-04-18 2004-02-12 Christian Beyer Oscillation piston pump
EP1314890A2 (en) * 2001-11-21 2003-05-28 Kabushiki Kaisha Toyota Jidoshokki Control system for vacuum pump
US20040136835A1 (en) * 2002-10-22 2004-07-15 Eckhard Bez Multi-stage reciprocating vacuum pump and method of operating the same
JP2004150329A (en) * 2002-10-30 2004-05-27 Erc:Kk Vacuum device
DE10308420A1 (en) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Test gas leak detector

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Also Published As

Publication number Publication date
CN100559028C (en) 2009-11-11
FR2883934A1 (en) 2006-10-06
CN1847660A (en) 2006-10-18
JP2006291952A (en) 2006-10-26
US20060222506A1 (en) 2006-10-05
EP1710440A2 (en) 2006-10-11
FR2883934B1 (en) 2010-08-20

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