Classifications

• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
  • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
  • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
  • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/24—Coupling light guides
  • G02B6/26—Optical coupling means
  • G02B6/35—Optical coupling means having switching means
  • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
  • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/24—Coupling light guides
  • G02B6/26—Optical coupling means
  • G02B6/35—Optical coupling means having switching means
  • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
  • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
  • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/24—Coupling light guides
  • G02B6/26—Optical coupling means
  • G02B6/35—Optical coupling means having switching means
  • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
  • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
  • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/24—Coupling light guides
  • G02B6/26—Optical coupling means
  • G02B6/35—Optical coupling means having switching means
  • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
  • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/24—Coupling light guides
  • G02B6/26—Optical coupling means
  • G02B6/35—Optical coupling means having switching means
  • G02B6/3586—Control or adjustment details, e.g. calibrating
  • G02B6/359—Control or adjustment details, e.g. calibrating of the position of the moving element itself during switching, i.e. without monitoring the switched beams

Definitions

• the present invention relates to an optical deflection matrix comprising optical deflection modules.
• An optical deflection module makes it possible to deflect an incident optical beam.
• the fields of application of these deflection matrices are numerous, for example, the routing of information transported by optical fibers, the storage of information, the surface inspection by optical channels, telemetry and more particularly all the sectors requiring a spatial scanning, in particular incremental scanning of optical beams.
• Analog control requires very complex electronic controls that are difficult to manage. In all cases, the deflection module and its actuation are difficult to integrate into systems for which the size is a critical parameter. These components are not compatible with collective manufacturing methods used in microtechnologies, their manufacturing efficiency is low. This type of optical component has limitations in terms of industrialization due to its complexity both in terms of manufacturing and operation. Their cost accordingly is high. Optical deflection matrices comprising such modules therefore have all these drawbacks. It has also been proposed in particular in documents [2] and [3], the references of which are found at the end of the description, an optical deflection module and an optical routing device using such optical deflection modules. An optical deflection module is a simple deflection element capable of taking a limited number of angular positions.
• FIGS. 13A, 13B show a routing device derived from the teaching of these documents.
• FIGS. 13A, 13B show a routing device derived from the teaching of these documents.
• FIGS. 13A, 13B show a routing device derived from the teaching of these documents.
• FIGS. 13A, 13B show a routing device derived from the teaching of these documents.
• the two deflection elements 100 separated by an optical conjugation element 108.
• the last deflection element 100 is followed by an optical conjugation element 108.
• Upstream of the deflection elements 100 is placed a shaping element 104.
• FIGS. 13A, 13B are distinguished from one another by the fact that the deflection elements 100 are orientable along axes y, x distinct perpendicular.
• Each deflection element 100 is capable of supplying from an input optical beam ⁇ la having a given direction ⁇ l an output optical beam ⁇ 2a having a direction of propagation taken from a set of potential directions ⁇ 20, ⁇ 21, ...
• Such a routing device makes it possible, with several deflection modules 100, to multiply the number of potential angular positions for the optical beam output from the module.
• These deflection modules are designed to develop a three-dimensional architecture.
• the optical conjugation elements 108 and the shaping element 104 are positioned along separate intersecting axes. This architecture poses a problem during manufacture, due to the complexity of the encapsulation.
• These routing devices are therefore also bulky. Their use is not easy either, they require an adjustment of the positioning of the deflection elements which is delicate.
• the same deflection element can have two distinct axes of rotation.
• PRESENTATION OF THE INVENTION The object of the present invention is precisely to propose an optical deflection matrix capable of entering into the composition of routing devices which does not have the drawbacks mentioned above, in particular the bulk, the manufacturing complexity and operation and high cost. Another object of the invention is to propose an optical deflection matrix which is easily achievable in micro-technology. Another object of the invention is to provide an optical deflection matrix allowing significant integration and capable of processing a maximum of signals over a reduced space. It makes it possible to design devices presenting a maximum of optical elements in the same substrate.
• Another object of the invention is to propose an optical deflection matrix comprising optical deflection modules having a deflection element capable of taking predetermined discrete deflection positions, perfectly reproducible, which do not require any electronic control.
• the invention provides an optical deflection matrix comprising at least two optical deflection modules, each with a deflection element and two deflection elements arranged so as to each have a single optical axis.
• Such a deflection matrix has a simple and compact structure.
• the present invention relates to an optical deflection matrix comprising at least at least two optical deflection modules capable of providing each: - from an input optical beam having a given propagation direction, an output optical beam having a propagation direction taken in a first set of potential directions, or - from an input optical beam having a direction of propagation taken in a second set of potential directions, an output optical beam having a given direction of propagation.
• Each module comprises a single deflection element of the input optical beam capable of taking several potential positions which are in relation to the potential directions of the first set or of the second set and two fixed deflection elements arranged on either side of the deflection element, a main potential position of the deflection element leading to a main direction of the first set or of the second set, this main direction being collinear with the given direction of propagation of the input optical beam or of the optical beam of output, the main directions of the modules being located in the same plane.
• the given direction is either a fixed direction or is taken from among several potential directions. It is advantageous that the first or the second set of potential directions comprises predetermined discrete directions so as to reduce the complexity of the control circuits of the deflection element. The control is then advantageously digital.
• the deflection element of a module can be a mirror. It is the same for the return element.
• at least one potential position of the deflection element of a module is a mechanically predetermined discrete position. The operation of such a deflection element is perfectly reproducible from one use to another or else from a deflection element to a neighboring deflection element.
• a stop can define at least one mechanically predetermined position of the deflection element by stopping it. To increase the number of mechanically predetermined positions, the stop can be a double stop comprising a tongue able to take two distinct positions, in one of the positions the tongue being bent.
• a tongue integral with the deflection element can be used, this tongue being able to take two distinct positions bearing on the stop, in one of these positions the tongue being bent.
• the main potential position of the deflection element of a module is a position in which it is at rest.
• the deflection element of a module can move in rotation around an axis perpendicular to at least one of the potential directions.
• the deflection element of a module can move in rotation around an axis contained in a plane formed by the given direction and the main potential direction.
• the deflection element of a module comprises at least two reflecting faces positioned in different planes, this element being able to move in translation so as to generate a rotation of the planes along an axis formed by the intersection of said planes.
• the translation is equivalent to a rotation of the planes along an axis formed by the intersection of said planes.
• the deflection element of a module may include a link arm which connects it to a fixed part.
• the deflection element of a module can be placed on a mobile base. In this latter configuration, the mobile base can be secured to at least one connecting arm which connects it to a fixed part.
• An optical deflection module also comprises means for actuating the deflection element which can be of the electrostatic type and comprise at least one pair of electrodes, possibly in interdigitated comb.
• An optical deflection module can also include conduits to allow the propagation of the optical beams of entry and exit.
• An optical deflection module can be made at least partially by techniques used in microelectrics and / or by molding techniques and / or by transfer techniques. It is preferable that the return elements of a module are symmetrical with respect to a plane perpendicular to the main potential direction of propagation. In the matrix, the modules are placed in the same plane. Thus, the deflection planes of the deflection elements in their main position can be parallel or coincident.
• optical deflection modules of the matrix will advantageously be arranged in at least one row and / or at least one column. Two successive optical deflection modules in a line can be separated by an optical conjugation element. In the same line, optical conjugation elements have collinear optical axes. When the matrix includes several optical deflection modules in columns and the optical beams each have a fixed direction of propagation, the directions of propagation are preferably parallel. When the optical deflection matrix comprises several columns, the optical conjugation elements separating two optical deflection modules belonging to successive columns can be grouped in bars.
• the deflection elements of the matrix deflection modules can be grouped on the same substrate. This substrate can include at least one housing for an optical conjugation element.
• the deflection elements of the modules can also be grouped on the same substrate.
• the deflection element is attached so as to face the return elements.
• At. at least a part of the deflection modules is grouped on a common substrate, this substrate comprising means for supporting the rest of the modules and at least one housing for receiving one or more optical conjugation elements.
• the present invention also relates to a routing device intended to couple each of a plurality of optical input channels to any one of a plurality of optical output channels carrying beams: optical.
• the routing device preferably comprises, upstream of the input deflection matrix, a module for shaping the optical beams conveyed by the input channels. Similarly, it may include, downstream of the optical deflection output matrix, a module for shaping the optical beams to be conveyed by the output channels.
• the optical input channels and the optical output channels are mutually parallel. At least one deflection device can be placed between the input optical deflection matrix and the connection module and / or between the connection module and the output optical deflection matrix.
• FIGS. 1A, 1B, 1C show in top view several examples of an optical deflection module useful for understanding the invention
• - Figure 2 shows a first example of an optical deflection matrix according to the invention
• FIGS. 3A, 3B, 3C show examples of optical deflection matrices according to the invention used in routing devices according to the invention
• FIGS. 1A, 1B, 1C show in top view several examples of an optical deflection module useful for understanding the invention
• FIGS. 3A, 3B, 3C show examples of optical deflection matrices according to the invention used in routing devices according to the invention
• FIGS. 5A to 5D illustrate different stages of manufacturing an optical deflection module which can be used in an optical deflection matrix of the invention
• FIGS. 6A to 6F illustrate two examples of optical deflection modules with double stop which can be used in an optical deflection matrix of the invention
• FIGS. 7A and 7B show another example of an optical deflection module, with actuation means of the intergigitated comb type, which can be used in an optical deflection matrix according to
• FIG. 8A illustrates an optical deflection module in which the deflection element is movable in translation
• FIG. 8B showing a deflection element capable of replacing the deflection element of FIG. 8A, these optical deflection modules being able to be used in an optical deflection matrix according to the invention
• FIG. 9 illustrates an optical deflection matrix according to the invention, the optical beams of input and output of which are not parallel to each other
• - Figure 10 illustrates a routing device according to the invention in which the optical deflection matrices are in non-parallel planes
• FIGS. 11A, 11B show two examples of optical deflection matrices according to the invention
• FIGS. 11A, 11B show two examples of optical deflection matrices according to the invention
• FIG. 12A, 12B respectively show an example of a deflection module used in the composition of an optical deflection matrix of the embodiment illustrated in FIG. 11B, and in three dimensions a deflection matrix employing such a deflection module;
• - Figures 13A, 13B, already described, show two examples of routing device of the prior art based on simple deflection elements;
• Identical, similar or equivalent parts of the different figures described below have the same reference numerals so as to facilitate the passage from one figure to another. The different parts shown in the figures are not necessarily shown on a uniform scale, to make the figures more readable.
• the optical deflection module comprises a single deflection element 1 associated with at least one return element 2, 2a, 2b.
• the return element can be a mirror.
• FIG. 1A there is only one return element 2, placed upstream of the deflection element 3.
• FIG. 1B there is only one return element 2 placed in downstream of the deflection element 3.
• FIG. 1C the deflection element 3 is placed between two return elements 2a, 2b. It is such an optical deflection module which will enter the optical deflection matrix object of the invention.
• Such an optical deflection module is intended to receive at least one input optical beam f1, of given direction dl, and to supply an output optical beam £ 2 in a direction d2 taken from a set of potential directions d2, d3, d4.
• the set of potential directions can contain an infinity of potential directions comprised between extreme directions which serve as limits or on the contrary a finite number of discrete potential directions comprised between limits.
• This set of potential directions corresponds to a set of angular positions that in theory the deflection element could take during a displacement. In the example, these potential directions are coplanar, all of these directions substantially form a fan. In the examples of FIGS. 1, the deflection element 1 is able to take several potential angular positions.
• positions are related to the potential directions d2, d3, d4 of the output optical beam f2. These positions are included between terminals which correspond to extreme positions of the deflection element.
• the direction dl of the input optical beam fl is parallel to one of the potential directions d2, d3, d. This potential direction d2 is called the main potential direction.
• the position of the deflection element 1 which leads to this main potential position is called the main potential position.
• the direction d1 of the input optical beam is collinear with the main potential direction d2. By collinear we mean that the two directions belong to the same line, they are an extension of one another.
• the deflection element 1 is movable about an axis, directed along oy, perpendicular to at least one of the potential directions of the assembly. These angular positions can be obtained by rotation of the deflection element 1. In a variant described later, the rotation can take place around an axis which is included in a plane formed by the given direction dl and the main potential direction d2 .
• the deflection element 1 has a deflection plane, for a mirror it is a reflecting face. This plan is oriented in the example of FIG. 1C according to the plan yoz. In the variants described later, the positions can no longer be obtained by rotation of the deflection element but by translation of the deflection element in a direction any.
• the potential positions that the deflection element can take can advantageously be predetermined discrete positions.
• the deflection element can move continuously and take a plurality of continuous positions.
• the main potential position can be a middle position between the two extreme positions in abutment.
• the main potential position may not be a position chosen for the deflection element. More than two or three predetermined discrete positions can be used as will be seen in FIGS. 6.
• the return element 2 is fixed to it, it can be placed downstream of the deflection element 1 as in FIG. 1A or upstream as in Figure 1B.
• One advantage of these structures is that it is possible that the input optical beam fl has a direction of propagation parallel to that taken by the output optical beam f2 when the deflection element is in the main potential position.
• Two deflection elements 2a, 2b can be provided, one upstream and the other downstream of the deflection element. This configuration guarantees the collinearity between the directions and not only the parallelism mentioned above.
• the optical beam which arrives on the deflection element 1 is an intermediate incident optical beam fl ′ because the input optical beam fl has been oriented by the return element 2 placed upstream of the element of deflection 1.
• the output optical beam f2 is directly the optical beam deflected by the deflection element 1.
• the optical beam which arrives on the deflection element 1 is the input beam f 1 of the module of optical deflection.
• the optical beam which is deflected by the deflection element 1 is an intermediate deflected beam f'2 different from the output optical beam f2.
• the output optical beam f2 is the intermediate deflected optical beam f'2 redirected by the return element 2.
• FIG. 1C combines the structures of FIGS.
• the optical beam which arrives on the deflection element 1 is an intermediate incident optical beam fl corresponding to the input optical beam fl after orientation by the deflection element 2a
• the optical beam f'2 deflected by the deflection element 1 is an optical beam deflected intermediate which will be returned by the return element 2b to give the optical output beam f2 of the optical deflection module.
• the deflection element 1 can for example be a deflection mirror. These mirrors have a deflection plane (in this case of reflection) which corresponds to the plane of their reflecting face. In FIGS.
• the optical beam which arrives on the deflection element 1 whether it is the input optical beam fl or the intermediate optical beam fl has an incidence equal to ⁇ (angle made by the optical beam on the element deflection with respect to a normal to the deflection plane). If the deflection element rotates by an angle ⁇ ⁇ around the y axis, the beam deflected by the deflection element 1 undergoes a deflection of 2 ⁇ .
• ⁇ angle made by the optical beam on the element deflection with respect to a normal to the deflection plane.
• an angle ⁇ equal to ⁇ / 4 has been chosen. But of course this value is not limiting.
• the given direction of the input optical beam is a fixed direction.
• an optical deflection module is reversible. This means that it can also receive an input optical beam 37 which has a direction taken from a set of potential directions and deliver an output optical beam 35 having a fixed direction as illustrated by the optical deflection module M'a or M'b of the MAS output matrix of FIG. 3A.
• the output optical beam is collinear with the main potential direction of the set of potential directions obtained with the deflection element in the main potential position.
• Such an optical deflection module then straightens the input optical beam 37 to make it collinear with the input optical beam fia, flb of an optical deflection module Ma, Mb of the input matrix MAE.
• the optical deflection module can intercept an input optical beam having a direction taken from a set of potential directions and deliver an output optical beam having a direction also taken from another set of potential directions.
• This variant is illustrated by the optical deflection modules M21 of the second column of the input matrix MAE or the optical deflection modules M '11 of the first column of the output matrix MAS of FIG. 3B.
• the present invention relates to an optical deflection matrix which comprises at least two optical deflection modules with two deflection elements thus defined.
• FIG. 2 shows a first example of a matrix according to the invention.
• FIG. 3A illustrates another example of such an optical deflection matrix within a routing device which will be described later.
• the optical deflection matrix therefore comprises several optical deflection modules which are contained in the same plane xoz materialized in the example of FIGS. 2 and 3A, 3B by the plane of the sheet.
• the deflection elements 1 therefore have deflection planes which are preferably parallel or coincident when they are all in the main potential position. This configuration corresponds to the case where there are two forwarding elements.
• These optical deflection modules are arranged in at least one line and / or at least one column. In FIG.
• the optical deflection modules M1, M2 are in cascade. They have two reference elements.
• the first optical module M1 supplies, from an input optical beam fl, a first output optical beam f2 able to take n (n integer greater than or equal to two) predetermined discrete potential directions (corresponding to n discrete mechanically determined positions of the deflection element of the module M1).
• the optical deflection module M2, next in the cascade, supplies, from a second wire input beam, a second output optical beam f22 capable of taking, for a position of the second wire input optical beam, m directions predetermined discrete potentials (m integer greater than or equal to 2) corresponding to m mechanically determined discrete positions of the deflection element of the module M2.
• the second wire input optical beam corresponds to the first output beam f2 having passed through an optical conjugation element 8. It can take n predetermined potential discrete directions, deduced from those of the first output optical beam f2. Overall in the matrix, the second optical output beam f22 is capable of taking xn predetermined discrete potential directions.
• the optical conjugation element 8, inserted between two successive modules M1, M2 of the cascade ensures an angular enlargement between the different optical deflection modules.
• This optical conjugation element 8 can be produced by a pair of lenses for example.
• the optical deflection modules can be identical or not. Such a matrix has the role of a multiplier of directions.
• FIG. 3A shows a 2x2 routing device according to the invention. It includes an MAE input optical deflection matrix and a MAS output optical deflection matrix, these matrices being in accordance with the invention.
• the optical deflection matrices are arranged in the same plane.
• the input optical deflection matrix MAE comprises several k (two) optical deflection modules Ma, Mb arranged in a column.
• each of the modules Ma, Mb intercepts one of the input optical beams fia, flb and provides a deflected output optical beam f2a, f2b.
• Each of the optical output beams f2a, f2b is able to take 1 predetermined potential directions corresponding to 1 mechanically predetermined positions of the deflection element of the modules Ma, Mb and there are k optical output beams f2a, f2b.
• Figures 11A, 11B show in the manner of Figures 13A, 13B already described, in three dimensions, two examples of a line of a matrix according to the invention.
• a line comprises in cascade a shaping element 33, a first module of deflection Ma with two deflection elements, a first optical conjugation element 34, a second deflection module M'a with two deflection elements, a second optical conjugation element 34, a third deflection module follows but it has not been shown so as not to overload the figures.
• Two deflection modules Ma, M'a frame an optical conjugation element 34.
• the conjugation elements are aligned, their optical axes are collinear.
• the shaping element 33 is also aligned with the conjugation elements 34.
• the deflection element 1 of each of the deflection modules Ma, M'a is able to move in rotation around an axis y which is perpendicular to at least one of the potential directions, namely the main direction. It is clear in this example that the structure is linear, which was not the case in the prior art.
• the main directions of the two deflection modules Ma, Ma ' are collinear.
• the direction of propagation of the input optical beam fia is also collinear with these main directions.
• FIG. 11B is similar to FIG. 11A except for the fact that the deflection element 1 of the deflection modules is movable around an axis x which is parallel to at least one of the potential directions.
• This axis is contained in a plane formed by the given direction and by the main potential direction.
• the main potential positions are not always discrete positions given to the deflection element during operation. The latter may take only two extreme positions. If the main position is used, this adds additional direction to the output optical beam. In the main position, the deflection planes of the deflection elements of all the modules are parallel or coincident. In other configurations, this will not be the case.
• optical deflection matrices with several lines and several columns similar to that of MAE in FIG. 3A. All of its optical deflection modules Mil, M21 are placed in the same plane xoz, within the same base substrate 100 (of main plane xoz), and are distributed in four rows and two columns. The matrix therefore comprises 4x2 optical deflection modules. The modules of one column are referenced Mil and the modules of the other column M21. Each of the modules is similar to that of FIG. 1C with two return elements 2a, 2b placed on either side of a deflection element 1 of the mirror type. These optical deflection modules are etched or molded into the thickness of the base substrate 100.
• Conduits 101 are also etched or molded into the base substrate 100 to allow propagation of the input optical beams, the optical beams of output whatever their direction and the intermediate optical beams.
• the reference elements 2a, 2b are produced by two V-shaped walls obtained by etching or molding. They are substantially perpendicular to the plane xoz of the base substrate 100 in FIG. 4A.
• the return elements 2a, 2b are integrated into the base substrate 100 and extend to the bottom of the conduits 101.
• the return elements 2a, 2b are symmetrical with respect to a plane which is perpendicular to the direction main potential in both examples.
• the deflection mirror 1 is placed in a cavity 4 hollowed out in the base substrate 100 having a bottom and walls. It comprises a plate 5 having a reflective front face, facing the deflection elements 2a, 2b and a rear face secured to a connecting arm 6 intended to connect it to the base substrate 100, at a wall of the cavity 4.
• the reflecting face is substantially perpendicular to the xoz plane.
• This link arm 6 acts as a hinge, it allows the plate 5 to pivot about an axis directed along oy and passing indifferently through the end of the link arm 6 secured to the base substrate 100 or through the end of the link arm 6 secured to the plate 5.
• the plate 5 and the link arm 6 are spaced from the bottom of the cavity 4.
• the movement of the plate 5 is done, in the manner of a pendulum, in the plane xoz and the reflecting face of the plate 5 remains substantially perpendicular to the oz plane.
• the deflection element 1 can take several angular positions which are advantageously discreet and predetermined and of which certain extremes are materialized by stops 3 formed by zones, of appropriate geometry, of the wall of the cavity situated opposite the rear face of the wafer 5. In FIG.
• the deflection elements 1 are in an angular position of rest without contact with the stops 3, in this middle position the link arm 6 is in the rest position without stress.
• these are electrostatic means with several pairs of electrodes formed by a fixed electrode and a mobile electrode.
• the rear face of the plate 5 is provided on either side of the connecting arm 6 with two mobile electrodes el, e2. These may be metallized areas.
• the wall of the cavity 4 comprises, opposite each of these mobile electrodes el, e2, a fixed electrode cel, ce2 respectively so as to form the pair.
• the fixed electrodes are connected by conductors 7 to a control circuit (not shown) intended to supply signals of control of the position to be taken by the deflection element 1.
• the fixed electrodes cel, ce2 and the conductors 7 can be produced on an auxiliary substrate 102 such as that shown in the figure
• the deflection element 1 In the absence of a signal, the deflection element 1 is in its median rest position.
• a signal is applied to the fixed electrode cel, there is attraction of the movable electrode el facing and pivoting of the link arm 6 so that the end of the plate 5 being on the side of the mobile electrode el comes to be pressed against the stopper 3 opposite.
• the plate 5 remains in abutment.
• the same phenomenon occurs at the other stop.
• the presence of the two return elements 2a, 2b allows the different modules of the matrix to be arranged in parallel lines and in columns parallel to each other respectively.
• One or more housings 103 may be provided in the base substrate 100 which must accommodate optical conjugation elements 8, each inserted between two successive modules of the same line. These housings can be V-shaped grooves which facilitates precise positioning and adjustment of the optical conjugation elements 8 in the form of a cylinder of revolution. If necessary, the entire substrate 100 is metallized to have as good a reflection coefficient as possible.
• the fact that the modules Mil, M21 are distributed in several substantially parallel columns makes it possible to use optical conjugation elements, for example in the form of lens doublets, grouped in a strip placed substantially parallel to a column of modules as illustrated in the Figure 3A described later. Here too, this bar makes it possible to facilitate the adjustment and positioning of these lens pairs.
• a single optical deflection element 1 which is attached above the substrate 100 so as to face the return elements 2a, 2b with which it will cooperate.
• it includes a plate 5 having a reflective front face which is opposite the deflection elements 2a, 2b.
• the plate 5, in the main position, is parallel to the plane xoz.
• the deflection element 1 can take several predetermined positions by rotation about an axis directed along the axis oz.
• An optical beam is represented, it carries the reference F. The potential directions that it can take are materialized.
• FIG. 11B in which the deflection element is able to move in rotation around an axis which is contained in a plane formed by the main potential direction and the direction given.
• Figure 12A Only part of the deflection module found on the base substrate 100, these are the return elements 2a, 2b. The optical beams are not shown.
• the deflection element 1 is placed on an auxiliary substrate 102. Actuating means, shown diagrammatically by a block, for example of a similar nature to those described above, can also be placed on the auxiliary substrate 102.
• the deflection element 1 is secured to two hinges 1.3 which connect it to the auxiliary substrate 102.
• the auxiliary substrate 102 is hollowed out in the vicinity of the deflection element to allow its rotation.
• the base substrate 100 comprises means 105 for supporting the auxiliary substrate 102.
• the base substrate 100 comprises a cavity 106 in which the return elements 2a, 2b are placed, this cavity is delimited by walls 105 which materialize the support means.
• the return elements 2a, 2b are symmetrical with respect to a plane which is perpendicular to the main potential direction of propagation.
• the auxiliary substrate 102 is attached and fixed for example by bonding to the base substrate 100.
• the opening referenced 101 in one of the walls 105 materializes a conduit allowing the propagation of an input optical beam or an output optical beam whatever their propagation directions.
• FIG. 12B shows, in the manner of FIG. 4A, an example of a matrix according to the invention using deflection modules similar to those of FIG. 12A.
• This matrix has only one column of deflection modules Mil. It is easy to produce, on the same base substrate 100, by conventional techniques in microelectronics, several pairs of deflection elements 2a, 2b. Placing the deflection elements 1 on the auxiliary substrate 102 enables them to be produced easily by conventional planar technology in microelectronics.
• the base substrate 100 may include, as mentioned above, housings 103 for one or more optical conjugation elements 8. Upstream of the deflection modules, shaping elements 107 have been shown. We will now see an example of method of manufacturing an optical deflection module according to the invention, this method uses the techniques of microelectronics.
• This optical deflection module has a deflection element 1 similar to that shown on the zoom of FIG. 4A.
• the pattern of the cavity 4 and the stops 3 has been simplified compared to the example of FIG. 4A.
• this method can be used to produce a matrix of modules and even a routing device comprising a matrix of optical deflection modules at the input and a matrix of optical deflection modules at the output.
• the engraving of the different modules is done simultaneously. It suffices also to provide locations or housings for the other optical elements which make up the optical deflection matrix (like that referenced 4 in FIG. 4A) or which make up the routing. These other optical elements will be described later with reference to FIGS. 3B, 3C. Reference is made to FIGS. 5A to 5D.
• FIG. 5A shows the lower layer 20 of the sandwich and the sacrificial layer 22, while FIG. 5B shows the entire sandwich, but in this case the sacrificial layer is no longer visible.
• the V-shaped surfaces leading to the return elements 2a, 2b are also produced (FIG. 5C).
• the link arm 6 has one end secured to the upper substrate 23 of the pair.
• the outline of the stops 3 is also provided.
• the sacrificial layer 22 is then eliminated under the plate 5 and under the connecting arm 6 so as to release them.
• the plate 5 and the link arm 6 are overhanging above the lower layer 20.
• the reflective surfaces are obtained by metallization. Other production techniques can be used.
• the deflection element 1 of the mirror type takes the form of a plate 5 secured to a connecting arm 6 connected to a fixed support 110.
• the support was materialized by the base substrate.
• the deflection element or elements would also be integral with this support 110.
• the deflection element 1 is capable of taking four predetermined discrete angular positions defined mechanically by two double stops 30a, 30b, integral with the support 110. These double stops are positioned as the simple stops 3 in FIG. 4A.
• the expression double stop means a stop which is able to take two distinct positions depending on the level of stress it receives.
• FIG. 6A shows the deflection element 1 in the main position, without contact with the double stops 20a, 20b.
• Each double stop 20a, 20b has a first stop 20.1a, 20.1b and a second stop 20.2a, 20.2b in cascade.
• the first stop 20.1a, 20.1b in the form of a tongue, is capable of stopping the plate 5, thus defining for the deflection element 1 a first position defined mechanically. This position is illustrated in FIG. 6B, the plate 5 coming into abutment on the first abutment 20.1a.
• the plate 5 has rotated by an angle ⁇ l relative to the rest position of Figure 6A. This rotation takes place around an axis directed perpendicular to the plane of the sheet passing through the end of the link arm 6 on the wafer side 5.
• the first stop 20.1a, 20.1b thanks to its tongue shape is able to bend if a pressure above a threshold applies to it.
• FIGS. 6D to 6F A variant of this embodiment is illustrated in FIGS. 6D to 6F.
• the deflection element 1 which is provided with at least one tongue 5.1 which, when it cooperates with a simple stop 20 secured to the substrate 110, is capable of take two separate positions.
• FIG. 6D the deflection element 1 is in the rest position, none of its stops 5.1 being in contact with the stop 20 of the substrate 110.
• FIG. 6E the deflection element has pivoted by an angle ⁇ l and the tongue 5.1 has come into contact with the stop 20 of the substrate. A force F has been applied to the deflection element 1 near the tongue 5.1.
• FIGS. 7A, 7B show another embodiment of the optical deflection module according to the invention with reference to FIGS. 7A, 7B.
• the deflection element is a mirror.
• the deflection element rests on a base 31 directed along the plane xoz able to move in rotation around an axis substantially perpendicular to the xoz plane.
• the base 31 is connected by a fine hook 6.1 to the support 110.
• the axis of rotation passes through this hook 6.1.
• the means for actuating the deflection element 1 comprise two sets of comb electrodes 9.1, 9.2 intended to cooperate.
• the base 31 is also connected to a 9.1 of the sets of comb electrodes which is mobile. This connection is made via a link arm 6.2.
• the other set of comb electrodes 9.2 is fixed and is integral with the support 110.
• the attachment of the link arm 6.2 with the base 31 is offset from the point of attachment of the fine attachment 6.1 so that a movement of the rotating base can be done.
• the base 31 is shown rectangular, the point of attachment of the fine hook 6.1 is on one side of the rectangle and the point of attachment of the link arm 6.2 on another side.
• the mobile set of electrodes 9.1 moves in translation causing the base 31 to tilt around in its movement.
• FIG. 8A is a top view of the optical deflection module.
• mirror-type deflection elements have had only one reflection face.
• the deflection element 1 is of the mirror type with two reflecting faces 1.1, 1.2 arranged in a V and therefore positioned in different planes. The intersection of the two reflecting faces 1.1, 1.2 forms an edge which is perpendicular to the plane xoz.
• the potential directions d2, d3, d4 of propagation of the output optical beam f2 are contained in the plane xoz.
• the direction dl of the input optical beam fl is collinear with the main potential direction d2 which is median with the potential directions d3, d4. In this example, it is the main direction d2 which is obtained when an optical beam strikes the deflection element 1 at the edge of the V.
• the deflection element is then in its main position.
• the displacement of the deflection element 1 takes place in the plane xoz in a direction parallel to at least one of the potential directions. More particularly, this translation takes place parallel to the main direction d2 and therefore parallel to the direction dl of the input optical beam fl.
• This translation takes place between two fixed stops 3 which materialize two extreme discrete potential positions defined mechanically and which limit all of the potential positions. These extreme positions lead to the two potential directions d3 and d4.
• the main direction is a middle direction.
• the means for actuating the deflection element can be produced by pairs of electrodes similar to those of FIGS. 4A, 4B.
• the fixed electrodes would be located on the stops 3 and the mobile electrodes on the end faces of the deflection element, opposite the fixed electrodes.
• the electrodes have not been shown so as not to overload the figure.
• This deflection module is of course also reversible.
• FIG. 8B only another embodiment of the deflection element 1 has been shown, capable of replacing that of FIG. 8A. Instead of moving in translation parallel to one of the potential directions, it is able to move in translation perpendicular to at least one of the potential directions. In this example it is still the main direction d2.
• the deflection element comprises, in this example, two reflecting faces 1.1, 1.2 inclined according to different planes whose intersection defines an axis R.
• the axis R is an axis of rotation of the reflecting faces 1.1, 1.2. These faces are side by side in the direction of travel and head to tail. The direction of movement is parallel to the axis R of rotation. The translation of said faces 1.1, 1.2 along the direction is equivalent to a rotation of said faces 1.1, 1.2 along the axis R.
• FIG. 9 illustrates a variant of a matrix with two optical deflection modules Ml, M2.
• This optical deflection matrix comprises two optical deflection modules arranged in a column with for each: a deflection element 1 and two return elements 2a, 2b.
• the directions dla, dlb of the input beams fia, flb are not parallel to each other.
• the deflection elements 1 are mirrors with a reflecting face and in the rest position the reflecting faces are not parallel to each other.
• the deflection of the deflection elements 1 is not identical from one optical deflection module Ml to the other M2.
• the stops 3 which materialize mechanically determined extreme positions of the two deflection elements 1 are not identical. Their thickness is different which means that, in the rest position, the space 10.1, 10.2 which separates the deflection element 1 from a stop 3 is not the same as an optical deflection module Ml at the other M2.
• the routing device of FIG. 3A is a point-to-point routing device, it has a very simple structure with two input channels and two output channels. This routing device makes it possible to couple each of n (two) optical input channels 32 to any one of n '(two) optical output channels 36. From more generally, the number of input channels n is not necessarily equal to the number n 'of output channels. The number of input channels n is less than or equal to the number n 'of output channels.
• This routing device comprises, in cascade, an optical deflection matrix input MAE connected to the optical input channels 32, a link module 34, an optical deflection matrix output MAS connected to the optical output channels 36.
• the input channels 32 are materialized in this example by optical fibers. They are each capable of conveying an input optical beam fia, flb entering the optical deflection matrix input MAE. All the optical deflection modules constituting the optical input deflection matrix MAE and the optical deflection matrix output MAS are arranged in the same plane xoz or in parallel planes.
• the optical deflection modules Ma, Mb of the input matrix MAE and the optical deflection modules M'a, M'b of the output matrix MAS form two by two lines which are parallel.
• the MAE input optical deflection matrix has already been described above.
• the directions of propagation of the input beams fia, flb are collinear with a direction of potential propagation of the output beams f2a, f2b.
• the connection module 34 is intended to bring together in a one-to-one fashion on 1 spatial focal points the 1 potential directions of the MAE input optical deflection matrix. It is able to generate kxl intermediate optical beams 37 of directions included in a set of 1 directions. It can be formed from one or more lenses or from one or more mirrors.
• the MAS output optical deflection matrix is similar to the MAE input optical deflection matrix but works in reverse.
• each optical deflection module M'a, M'b receives an input beam (an intermediate beam 37), this intermediate beam 37 can propagate in a direction taken from among 1 potential directions.
• Each optical deflection module M'a, M'b provides an output beam 38 propagating in a given fixed direction which is the direction of the input beams fia, flb of the MAE input matrix.
• This MAS output matrix has a role of angular position divider.
• the input beams in the MAE input matrix are contained in a plane.
• the output beams of the MAE input matrix are contained in another plane. The planes are parallel or confused.
• the input beams 37 in the output matrix MAS are contained in a plane.
• the output beams 38 of the output matrix MAS are contained in another plane.
• the planes are merged or parallel.
• the plane of the output beams of the input matrix and the plane of the input beams of the output matrix MAS are also coincident or parallel.
• the k input optical beams fia, flb pass through a shaping module 33.
• the shaping module 33 is used to image the optical beams fia, flb coming from the input optical fibers 32 on the deflection elements optical.
• the shaping module 33 may include a lens or a mirror for each of the input beams fia, flb.
• the optical beams before and after shaping bear the same reference so as not to unnecessarily multiply the notations.
• the optical beams 38 which emerge from the optical output deflection matrix MAS pass through an output shaping module 35. This output shaping module 35 is similar to the input shaping module 33 and it has the same role.
• FIGS. 3B and 3C a routing device has been represented in top view and in three dimensions. slightly more complex with four optical input channels and four optical output channels parallel to each other.
• the MAE input matrix is comparable to that illustrated in Figure 4A.
• the MAS output matrix is comparable to the MAE input matrix but it works in reverse.
• the input matrix has a role of multiplier of potential directions and that of MAS output of divider of potential directions.
• the input beams of the optical deflection modules Mil of the first column of the input matrix MAE have a given given direction.
• the output beams of the optical deflection modules Mil of the first column of the optical input deflection matrix MAE are capable of taking two discrete potential directions determined mechanically.
• the input beams of the optical deflection modules M21 of the second column of the input matrix MAE are able to take two discrete potential directions determined mechanically.
• the output beams of the optical deflection modules M21 of the second column of the input matrix MAE are capable of taking four discrete potential directions determined mechanically.
• the input beams of the optical deflection modules M '11 of the first column of the output matrix MAS are able to take four discrete potential directions determined mechanically.
• the output beams of the optical deflection modules M '11 of the first column of the optical output deflection matrix MAS are able to take two discrete potential directions determined mechanically.
• the input beams of the optical deflection modules M ′ 21 of the second column of the output matrix MAS are able to take two discrete potential directions determined mechanically.
• the output beams of the optical deflection modules M ′ 21 of the second column of the output matrix MAS are able to take a given given direction.
• FIG. 3C there is shown supported by a common substrate 120, in cascade, an input shaping module 33 taking the appearance of a bar, an MAE input matrix (similar to that of FIG. 4A), a connection module 34 taking the appearance of a bar, an MAS output matrix (similar to that of FIG.
• a delivery module in the form of an outlet 35 taking the appearance of a bar.
• Optical fibers 32 are connected at the input of the input shaping module 33, optical fibers 36 emerge from the output shaping module 35.
• the MAE input and MAS output matrices of a routing device according to the invention are not always coplanar or placed in parallel planes as illustrated in FIG. 10.
• At least one deflection device 11 can be inserted either upstream or downstream of the connection module 34, that is to say either between the input optical deflection matrix MAE and the connection module 34, or between the connection module 34 and the optical deflection matrix output MAS.

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• Mechanical Light Control Or Optical Switches (AREA)

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• 2003
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