EP1629254A1 - Dispositif et procede pour reconnaitre des couches qui sont appliquees a la surface de pieces, et determination de leurs proprietes - Google Patents

Dispositif et procede pour reconnaitre des couches qui sont appliquees a la surface de pieces, et determination de leurs proprietes

Info

Publication number
EP1629254A1
EP1629254A1 EP04734224A EP04734224A EP1629254A1 EP 1629254 A1 EP1629254 A1 EP 1629254A1 EP 04734224 A EP04734224 A EP 04734224A EP 04734224 A EP04734224 A EP 04734224A EP 1629254 A1 EP1629254 A1 EP 1629254A1
Authority
EP
European Patent Office
Prior art keywords
layer
examined
detector unit
detector
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04734224A
Other languages
German (de)
English (en)
Inventor
Manfred Fritsch
Nico Correns
Felix Kerstan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of EP1629254A1 publication Critical patent/EP1629254A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/024—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using means for illuminating a slit efficiently (e.g. entrance slit of a spectrometer or entrance face of fiber)
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G01N2021/945—Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G01N2021/9586—Windscreens

Definitions

  • the invention relates to an arrangement and a method for recognizing layers which are arranged on surfaces of components, and determining their properties, in particular water, ice and dirt layers on surfaces, preferably in the case of components of vehicles. Above all, the chemical properties and the surface properties of the layers, in particular the roughness, are to be determined.
  • these layers are usually irradiated or irradiated with optical radiation and the radiation reflected or transmitted by these layers is measured and evaluated in different spectral ranges. These measurements can then be used to infer the presence of layers and, if such layers are present, their properties, in particular also their chemical properties, can be determined.
  • DE 199 27 015 A1 discloses a method and a device for determining the thickness and growth rate of an ice layer on components of aircraft, in which the layer on the component surface before falling radiation is broken down into wavelength ranges by a holographic grating connected to a photoelectric line receiver and the measured radiation is compared with the line receiver with a stored reflection curve of the component surface without coating.
  • the growth rate of such a layer can also be determined in several temporally staggered measuring intervals.
  • the device for carrying out the measurements has a window through which the radiation influenced by the surface reaches the grating via an optical imaging system and a fully illuminated input slit, is spectrally broken down there by wavelengths and is imaged by the grating onto the line receiver.
  • the signals of the elements of the line receiver are evaluated by means of a control and evaluation unit which is connected to the line receiver.
  • the results of the measurements are made visible on a display.
  • a disadvantage of this method is the fact that the mechanical appearance of these layers cannot be distinguished. Only total thickness or concentration are determined. In particular, layers of ice, snow or hoarfrost cannot be distinguished spectroscopically or only with great effort. The roughness of a layer cannot be determined in this way.
  • a spectrometer with a two-dimensional detector is known from FR 2 810 732 AI.
  • the signal of several, one of which is perpendicular to the dispersion direction of the spectrometer, is Chen wavelength associated detector elements added.
  • the spectrum obtained is evaluated.
  • CCD or CMOS elements are provided as detector elements.
  • the object of the invention is to create an arrangement and a method for recognizing layers and determining their properties on components, with which, in addition to the thickness and the chemical composition, the surface shape of such layers with a little can also be achieved in a simple manner complex detector can be determined.
  • the detector arrangement consists of detector elements arranged in a matrix. These can advantageously be CCD or CMOS elements.
  • the particular feature of the arrangement according to the invention and of the method carried out with it in contrast to the state of the art, is that the entrance slit is not completely illuminated by the light scattered or reflected by the layer, in particular by its surface. Thus, if there is no layer or a layer with a smooth surface on the component in question, only a relatively small part of the entrance slit is illuminated.
  • the mapping of the gap through the imaging grid onto the flat, two-dimensionally resolved Transmitting detector arrangement creates a spectrum in the form of a narrow strip.
  • the light that is no longer reflected or scattered at it will illuminate a more or less large area of the entrance slit depending on the degree of roughness, which is imaged by the imaging grating on the two-dimensionally resolving detector arrangement.
  • the spectrum is created there in the form of a broad strip. From the signals supplied by the areally arranged detector elements, u. a. the roughness of the examined layer can be determined.
  • the wavelength-dependent imaging of the illuminated part of the entrance slit takes place, in particular, by means of an imaging hologitter on the detector elements of the detector unit such that, depending on the roughness of the surface to be examined, a more or less wide area of the detector unit is irradiated.
  • the holographic grating also spectrally decomposes the light influenced by the layer.
  • the evaluation of the signals of the exposed detector elements and the determination and output of measured values relating to the properties of the layer under investigation are carried out in an evaluation unit.
  • the illumination of the layer can follow in transmitted or incident light.
  • measured values for the roughness of the layer surface are determined from the width of the exposed area of the detector unit. From the spectral distribution z. B. the chemical composition of the layer can be determined.
  • the invention will be explained in more detail below using an exemplary embodiment. In the drawing show in
  • Fig. 2 simplifies an arrangement according to the invention
  • Incident light illumination of the layer and Fig. 3 an arrangement, which on a transparent
  • Disc is arranged.
  • the arrangement shown in FIG. 1 for the detection of layers and the determination of their properties on surfaces, in particular water, ice and dirt layers on objects and components of vehicles basically represents a spectrometer.
  • This arrangement comprises a housing 1, in which to illuminate an object or object 2, for example on a transparent or non-transparent object.
  • the light source 4 is collimated with the optical element 5 ', that is, imaged to infinity.
  • the other optical link 5 "then focuses the beam path onto the entrance slit 7. Both lenses and mirrors can be provided as optical links 5 'and 5".
  • a flat detector unit 8 which is composed of matrix-like detector elements 9, for example CCD or CMOS elements, an imaging grating 10, e.g. B. a holographic grid, also arranged in the housing 1.
  • the detector unit 8 is connected to an evaluation unit 11 such that the signals of each individual detector element 9 can be processed in this unit 11.
  • the layer 3 to be examined is illuminated through the object 2 carrying it.
  • 1 shielding elements 13 are arranged within the housing.
  • the arrangement shown in simplified form in FIG. 2 has the same components and assemblies as the arrangement according to FIG. 1. The same reference numerals are also used for elements with the same function.
  • a layer 14 located on the object 2 is illuminated in incident light. The light reflected from the surface 14 'is directed to the entrance slit 7 as in the arrangement according to FIG. 1 and is imaged onto the detector unit 8 by a holographic grating (not shown in FIG. 2 for the sake of simplicity).
  • the light source 4 is replaced by the elements 5 '; 5 "existing imaging optics or through the lens 16 (FIG. 3) on the way via the layer 3 to be examined; 14 (FIG. 2) onto the entrance slit 7.
  • the light is thereby transmitted through the surface 3 'or 14' of the respective layer 3 or 14.
  • the nature (roughness) of the exposed surface 3 'or 14' of layer 3 or 14 only part 6 of the entry gap 7 or, if roughness is present, another part 6 '; 6 "illuminated on both sides of part 6.
  • a smooth surface 3 'or 14' only part 6 of the entrance slit 7 is illuminated.
  • the signals of the detector elements (pixels) 9 belonging to a wavelength ⁇ are added as usual.
  • the width and position of the spectra strips on the detector unit 8 are additionally calculated, e.g. B. by adding the signal values of all detector elements 9 in the dispersion direction. Then the width and position (position) of the center of gravity are calculated transversely to Dispersion direction and thus the determination of values for the roughness of the surface 3 'or 14' of the layer 3 or 14 to be examined.
  • the output signals of each individual detector element 9 are fed to the evaluation unit 11, and by adding the signal values belonging to a wavelength ⁇ in the direction of dispersion, the chemical composition and the thickness of the layer 3 'or 14' are obtained according to known methods.
  • a narrow distribution of this sum is a characteristic of a smooth layer surface and a broad distribution of the sum characterizes the measure for a rough surface.
  • FIG. 3 shows, in a highly simplified manner, a further embodiment of the arrangement, which is arranged, for example, on a transparent windscreen 17 of a vehicle.
  • the lighting of a sharply defined area The layer 3 to be examined by the light source 4 and the imaging of the light source 4 onto the entry slit 7 (shown in dashed lines) in the interior of the housing 1 of the arrangement takes place through a common lens 16.
  • the light beam emitted by the light source 4 passes through the Front pane 15 and layer 3 and is reflected on its surface 3 'and imaged by the lens 16 onto the entry slit 7. Collimation and focusing of the imaging beam path take place here through the common lens 16.
  • the light reaches the imaging grating 10 through the entrance slit 7 and is imaged from there onto the detector unit 8.
  • the data supplied by the detector unit 8 are fed to the evaluation unit 11 and processed there.
  • a shielding element 13 is also provided here, as already explained in connection with the description of FIGS. 1 and 2.
  • the position of the layer 3 to be examined ie the actual measurement object, can also be determined from the position and position of the strip imaged on the detector unit 8.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un dispositif qui sert à reconnaître des couches (3,14) qui sont appliquées à la surface de pièces ou d'objets (2), et la détermination des propriétés chimiques et de la structure de surface de ces couches (3,14). Le dispositif comprend une source de lumière (4) qui sert à éclairer la couche à analyser (3,14) à la surface de la pièce, et des éléments qui servent à projeter la lumière de la source de lumière (4) sur une fente d'entrée (7) en passant par la surface à analyser (3') de la couche (3,14). La fente d'entrée (7) est représentée en fonction de la longueur d'onde à travers une grille (10) sur une unité de détection bidimensionnelle (8). Une unité d'évaluation (11) qui est reliée électriquement à l'unité de détection (8), sert à évaluer et à traiter les signaux issus d'éléments de détection éclairés (9) de l'unité de détection (8).
EP04734224A 2003-06-03 2004-05-21 Dispositif et procede pour reconnaitre des couches qui sont appliquees a la surface de pieces, et determination de leurs proprietes Withdrawn EP1629254A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10324934A DE10324934A1 (de) 2003-06-03 2003-06-03 Anordnung und ein Verfahren zur Erkennung von Schichten, die auf Oberflächen von Bauteilen angeordnet sind, und Bestimmung deren Eigenschaften
PCT/EP2004/005446 WO2004106853A1 (fr) 2003-06-03 2004-05-21 Dispositif et procede pour reconnaitre des couches qui sont appliquees a la surface de pieces, et determination de leurs proprietes

Publications (1)

Publication Number Publication Date
EP1629254A1 true EP1629254A1 (fr) 2006-03-01

Family

ID=33482387

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04734224A Withdrawn EP1629254A1 (fr) 2003-06-03 2004-05-21 Dispositif et procede pour reconnaitre des couches qui sont appliquees a la surface de pieces, et determination de leurs proprietes

Country Status (5)

Country Link
US (1) US7502108B2 (fr)
EP (1) EP1629254A1 (fr)
JP (1) JP2006526769A (fr)
DE (1) DE10324934A1 (fr)
WO (1) WO2004106853A1 (fr)

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DE102005050795A1 (de) * 2005-10-24 2007-04-26 Leopold Kostal Gmbh & Co. Kg Meßvorrichtung zur Bestimmung der Dicke und/oder der optischen Transmissionseigenschaften einer Scheibe, vorzugsweise einer Fahrzeugscheibe
DE102010041749A1 (de) 2010-09-30 2012-04-05 Carl Zeiss Microlmaging Gmbh Messeinrichtungen und Vorrichtungen zur spektroskopischen Untersuchung von Proben
DE102010041748A1 (de) 2010-09-30 2012-04-05 Carl Zeiss Microimaging Gmbh Vorrichtungen und Verfahren zur spektroskopischen Untersuchung von Proben
JP5838466B2 (ja) * 2011-03-11 2016-01-06 ナノフォトン株式会社 光学顕微鏡、及び分光測定方法
US10126560B2 (en) * 2016-02-18 2018-11-13 National Engineering Research Center for Optical Instrumentation Spectrum-generation system based on multiple-diffraction optical phasometry
DE102019100615A1 (de) * 2019-01-11 2020-07-16 NoKra Optische Prüftechnik und Automation GmbH Verfahren und Vorrichtung zur Erfassung einer Beschichtung auf einer Oberfläche

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Also Published As

Publication number Publication date
DE10324934A1 (de) 2004-12-23
US7502108B2 (en) 2009-03-10
JP2006526769A (ja) 2006-11-24
US20070195323A1 (en) 2007-08-23
WO2004106853A1 (fr) 2004-12-09

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