FR2810732B1 - Procede de mesure spectroscopique a definition spectrale amelioree - Google Patents

Procede de mesure spectroscopique a definition spectrale amelioree

Info

Publication number
FR2810732B1
FR2810732B1 FR0008273A FR0008273A FR2810732B1 FR 2810732 B1 FR2810732 B1 FR 2810732B1 FR 0008273 A FR0008273 A FR 0008273A FR 0008273 A FR0008273 A FR 0008273A FR 2810732 B1 FR2810732 B1 FR 2810732B1
Authority
FR
France
Prior art keywords
measurement method
spectroscopic measurement
improved spectral
spectral definition
definition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0008273A
Other languages
English (en)
Other versions
FR2810732A1 (fr
Inventor
Silva Edouard Da
Juichiro Ukon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Priority to FR0008273A priority Critical patent/FR2810732B1/fr
Publication of FR2810732A1 publication Critical patent/FR2810732A1/fr
Application granted granted Critical
Publication of FR2810732B1 publication Critical patent/FR2810732B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
FR0008273A 2000-06-27 2000-06-27 Procede de mesure spectroscopique a definition spectrale amelioree Expired - Fee Related FR2810732B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0008273A FR2810732B1 (fr) 2000-06-27 2000-06-27 Procede de mesure spectroscopique a definition spectrale amelioree

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0008273A FR2810732B1 (fr) 2000-06-27 2000-06-27 Procede de mesure spectroscopique a definition spectrale amelioree

Publications (2)

Publication Number Publication Date
FR2810732A1 FR2810732A1 (fr) 2001-12-28
FR2810732B1 true FR2810732B1 (fr) 2003-04-18

Family

ID=8851769

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0008273A Expired - Fee Related FR2810732B1 (fr) 2000-06-27 2000-06-27 Procede de mesure spectroscopique a definition spectrale amelioree

Country Status (1)

Country Link
FR (1) FR2810732B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10324934A1 (de) 2003-06-03 2004-12-23 Carl Zeiss Jena Gmbh Anordnung und ein Verfahren zur Erkennung von Schichten, die auf Oberflächen von Bauteilen angeordnet sind, und Bestimmung deren Eigenschaften

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03272425A (ja) * 1990-03-20 1991-12-04 Shimadzu Corp 分光光度計
DE4017317C2 (de) * 1990-05-30 2000-02-17 Bodenseewerk Perkin Elmer Co Anodnung zur Verbesserung der Auflösung eines Spektrometers
GB9320261D0 (en) * 1993-10-01 1993-11-17 Unicam Ltd Spectrophotometer

Also Published As

Publication number Publication date
FR2810732A1 (fr) 2001-12-28

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20120229