EP1595135A4 - METHOD FOR CARRYING OUT OPTICAL MEASUREMENT ON A SAMPLE - Google Patents

METHOD FOR CARRYING OUT OPTICAL MEASUREMENT ON A SAMPLE

Info

Publication number
EP1595135A4
EP1595135A4 EP04706394A EP04706394A EP1595135A4 EP 1595135 A4 EP1595135 A4 EP 1595135A4 EP 04706394 A EP04706394 A EP 04706394A EP 04706394 A EP04706394 A EP 04706394A EP 1595135 A4 EP1595135 A4 EP 1595135A4
Authority
EP
European Patent Office
Prior art keywords
sample
optical measurement
performing optical
measurement
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04706394A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP1595135A1 (en
Inventor
David Beaglehole
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beaglehole Instruments Ltd
Original Assignee
Beaglehole Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beaglehole Instruments Ltd filed Critical Beaglehole Instruments Ltd
Publication of EP1595135A1 publication Critical patent/EP1595135A1/en
Publication of EP1595135A4 publication Critical patent/EP1595135A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
EP04706394A 2003-02-03 2004-01-29 METHOD FOR CARRYING OUT OPTICAL MEASUREMENT ON A SAMPLE Withdrawn EP1595135A4 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
NZ52393703 2003-02-03
NZ52393703 2003-02-03
NZ52751603 2003-08-12
NZ52751603 2003-08-12
PCT/NZ2004/000010 WO2004070365A1 (en) 2003-02-03 2004-01-29 Method of performing optical measurement on a sample

Publications (2)

Publication Number Publication Date
EP1595135A1 EP1595135A1 (en) 2005-11-16
EP1595135A4 true EP1595135A4 (en) 2007-04-11

Family

ID=32852814

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04706394A Withdrawn EP1595135A4 (en) 2003-02-03 2004-01-29 METHOD FOR CARRYING OUT OPTICAL MEASUREMENT ON A SAMPLE

Country Status (3)

Country Link
EP (1) EP1595135A4 (ja)
JP (1) JP4555900B2 (ja)
WO (1) WO2004070365A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007046943A (ja) * 2005-08-08 2007-02-22 Tokyo Univ Of Agriculture & Technology 観測装置、観測方法、ファラデー回転角測定方法、ファラデー楕円率測定方法、カー回転角測定方法及びカー楕円率測定方法
JP5396572B2 (ja) * 2008-04-04 2014-01-22 システム・インスツルメンツ株式会社 円二色性スペクトルの測定方法及び測定装置
WO2010060454A1 (en) * 2008-11-03 2010-06-03 Institut De Ciencies Fotoniques, Fundacio Privada Device for determining a fluorescence polarization anisotropy distribution in real time and related procedure for measuring in real time a temperature distribution of a fluid medium
JP2010223822A (ja) * 2009-03-24 2010-10-07 Dainippon Screen Mfg Co Ltd 分光エリプソメータおよび偏光解析方法
CN105637345B (zh) 2013-05-23 2018-06-12 海因兹仪器公司 偏振性质成像系统
CN115597503B (zh) * 2022-12-12 2023-03-28 睿励科学仪器（上海）有限公司 基于脉冲激光的椭偏量测装置及相关的光操作方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4708473A (en) * 1984-02-08 1987-11-24 Dornier Gmbh Acquisition of range images
US5286968A (en) * 1990-06-29 1994-02-15 Centre National De La Recherche Scientifique (Cnrs) Method and device for multichannel analog detection

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5501637A (en) * 1993-08-10 1996-03-26 Texas Instruments Incorporated Temperature sensor and method
FR2737572B1 (fr) * 1995-08-03 1997-10-24 Centre Nat Rech Scient Ellipsometre multi-detecteurs et procede de mesure ellipsometrique multi-detecteurs

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4708473A (en) * 1984-02-08 1987-11-24 Dornier Gmbh Acquisition of range images
US5286968A (en) * 1990-06-29 1994-02-15 Centre National De La Recherche Scientifique (Cnrs) Method and device for multichannel analog detection

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
COLLINS R W ET AL: "Dual rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films", JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A (OPTICS, IMAGE SCIENCE AND VISION) OPT. SOC. AMERICA USA, vol. 16, no. 8, August 1999 (1999-08-01), pages 1997 - 2006, XP002422853, ISSN: 0740-3232 *
DUBOIS A ET AL: "High-resolution full-field optical coherence tomography with a Linnik microscope", APPLIED OPTICS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, US, vol. 41, no. 4, 1 February 2002 (2002-02-01), pages 805 - 812, XP002373646, ISSN: 0003-6935 *
GLEYZES P ET AL: "MULTICHANNEL NOMARSKI MICROSCOPE WITH POLARIZATION MODULATION: PERFORMANCE AND APPLICATIONS", OPTICS LETTERS, OSA, OPTICAL SOCIETY OF AMERICA, WASHINGTON, DC, US, vol. 22, no. 20, 15 October 1997 (1997-10-15), pages 1529 - 1531, XP008017799, ISSN: 0146-9592 *
See also references of WO2004070365A1 *

Also Published As

Publication number Publication date
WO2004070365A1 (en) 2004-08-19
JP4555900B2 (ja) 2010-10-06
EP1595135A1 (en) 2005-11-16
JP2006516731A (ja) 2006-07-06

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Legal Events

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