AU2003236107A1 - Method of measuring accurate parallelism - Google Patents

Method of measuring accurate parallelism

Info

Publication number
AU2003236107A1
AU2003236107A1 AU2003236107A AU2003236107A AU2003236107A1 AU 2003236107 A1 AU2003236107 A1 AU 2003236107A1 AU 2003236107 A AU2003236107 A AU 2003236107A AU 2003236107 A AU2003236107 A AU 2003236107A AU 2003236107 A1 AU2003236107 A1 AU 2003236107A1
Authority
AU
Australia
Prior art keywords
measuring accurate
accurate parallelism
parallelism
measuring
accurate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003236107A
Inventor
Zaili Dong
Yingming Hao
Jinjun Ou
Jun Wang
Feng Zhu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenyang Institute of Automation of CAS
Original Assignee
Shenyang Institute of Automation of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenyang Institute of Automation of CAS filed Critical Shenyang Institute of Automation of CAS
Publication of AU2003236107A1 publication Critical patent/AU2003236107A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AU2003236107A 2003-03-12 2003-04-07 Method of measuring accurate parallelism Abandoned AU2003236107A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN03111155.6 2003-03-12
CNB031111556A CN100390502C (en) 2003-03-12 2003-03-12 Measuring method for precision parallelism
PCT/CN2003/000245 WO2004081493A1 (en) 2003-03-12 2003-04-07 Method of measuring accurate parallelism

Publications (1)

Publication Number Publication Date
AU2003236107A1 true AU2003236107A1 (en) 2004-09-30

Family

ID=32968456

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003236107A Abandoned AU2003236107A1 (en) 2003-03-12 2003-04-07 Method of measuring accurate parallelism

Country Status (3)

Country Link
CN (1) CN100390502C (en)
AU (1) AU2003236107A1 (en)
WO (1) WO2004081493A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100451540C (en) * 2006-01-12 2009-01-14 中国科学院长春光学精密机械与物理研究所 Device for detecting three-axle parallel of large photoelectric monitoring equipment using thermal target technology
CN102520799B (en) * 2011-12-22 2015-03-25 胡世曦 Projection keyboard
US8743375B2 (en) 2012-06-26 2014-06-03 Shenzhen China Star Optoelectronics Technology Co., Ltd. Parallelism measuring system and method thereof
CN102749044B (en) * 2012-06-26 2015-06-24 深圳市华星光电技术有限公司 Parallel detection system and method
CN102967277A (en) * 2012-11-19 2013-03-13 尹玉军 Method for measuring depth of parallelism of orienting pipes
CN103471526B (en) * 2013-07-29 2016-03-30 中国原子能科学研究院 A kind of accurate parallelism adjusting device and control method
CN106767420B (en) * 2017-02-13 2022-07-26 苏州迅威光电科技有限公司 Full-automatic detection device and method for precision images of vertical axis group of total station
CN115299843B (en) * 2022-06-17 2023-04-07 中山市微视医用科技有限公司 Endoscope lens flatness adjusting system and using method thereof
CN115655123A (en) * 2022-12-12 2023-01-31 宁夏大学 Device for detecting parallelism of heat shield of single crystal furnace

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5114236A (en) * 1989-08-04 1992-05-19 Canon Kabushiki Kaisha Position detection method and apparatus
JP3271348B2 (en) * 1993-01-14 2002-04-02 株式会社ニコン Leveling mating surface measuring method and exposure apparatus
JP3451606B2 (en) * 1994-12-08 2003-09-29 株式会社ニコン Projection exposure equipment
JP3757430B2 (en) * 1994-02-22 2006-03-22 株式会社ニコン Substrate positioning apparatus and exposure apparatus
JPH09189519A (en) * 1996-01-11 1997-07-22 Ushio Inc Pattern detection method and device for aligning positions of mask and work
JPH10246618A (en) * 1997-03-04 1998-09-14 Toshiba Corp Parallelism-measuring apparatus
JP3513031B2 (en) * 1998-10-09 2004-03-31 株式会社東芝 Adjustment method of alignment apparatus, aberration measurement method, and aberration measurement mark
JP3204253B2 (en) * 1999-07-06 2001-09-04 株式会社ニコン Exposure apparatus, device manufactured by the exposure apparatus, exposure method, and method of manufacturing device using the exposure method
JP3869645B2 (en) * 2000-11-01 2007-01-17 住友重機械工業株式会社 Exposure apparatus adjustment method and exposure apparatus

Also Published As

Publication number Publication date
CN1530629A (en) 2004-09-22
CN100390502C (en) 2008-05-28
WO2004081493A1 (en) 2004-09-23

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase