EP1556667A2 - Ensemble pour mesurer la geometrie ou la structure d'un objet - Google Patents

Ensemble pour mesurer la geometrie ou la structure d'un objet

Info

Publication number
EP1556667A2
EP1556667A2 EP03809757A EP03809757A EP1556667A2 EP 1556667 A2 EP1556667 A2 EP 1556667A2 EP 03809757 A EP03809757 A EP 03809757A EP 03809757 A EP03809757 A EP 03809757A EP 1556667 A2 EP1556667 A2 EP 1556667A2
Authority
EP
European Patent Office
Prior art keywords
lenses
beam path
arrangement according
measuring
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03809757A
Other languages
German (de)
English (en)
Inventor
Ralf Christoph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Werth Messtechnik GmbH
Original Assignee
Werth Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Werth Messtechnik GmbH filed Critical Werth Messtechnik GmbH
Publication of EP1556667A2 publication Critical patent/EP1556667A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Definitions

  • the invention relates to an arrangement for measuring the geometry or structure of an object by means of a coordinate measuring machine with an optical system for recording and imaging a measuring point on at least one optical sensor such as a CCD sensor, the optical system containing at least one displaceable lens group having measuring lenses and wherein at least some of the measuring lenses are each received by a holder.
  • Zoom lenses are particularly suitable as imaging systems for use in image processing systems for measurement technology. Both systems in which only the magnification can be adjusted and systems in which both the magnification and working distance can be adjusted are known (DE 198 16 270.7-52).
  • the object of the present invention is to avoid the disadvantages mentioned above and to provide an arrangement in which the lighting is optimized while avoiding disturbing reflections.
  • the problem is essentially solved in that at least one further lens for imaging a light beam onto the object is arranged in at least some of the receptacles of the at least one displaceable lens group, the first beam path emanating from the measuring lenses on the object side being parallel to that of the at least one another lens outgoing second beam path.
  • a plurality of beam paths are combined in parallel within a mechanical structure of at least one, preferably a plurality of adjustable lens groups for setting the imaging scale and / or the working distance, in particular a zoom lens.
  • the optical axis of the measuring lenses runs parallel to the optical axis of the imaging lenses in the region of the displaceable lens groups.
  • the beam passing through the illuminating lenses is deflected into the optical axis of the measuring lenses. This can be done using mirrors or beam splitters.
  • zoom optics with adjustable lenses suitable for enlargement or working distance changes are distinguished by the fact that the imaging lenses for two or more parallel imaging beam paths are accommodated in each lens receptacle.
  • One beam path can be optimized for the requirements of image processing imaging optics and a second beam path for the requirements of bright field illumination.
  • one beam path is optimized according to the requirements of an image processing optics and another according to the requirements of a laser distance sensor.
  • the corresponding beams pass through separate lenses, which are however taken up by common receptacles, which in turn are designed to be adjustable to the desired extent and according to the requirements, as can be seen in principle both from DE 198 16 270 AI or DE 10049 303 AI.
  • More than two lenses can also be accommodated in one and the same receptacle, with one beam path being designed for the requirements of image processing optics, one beam path for the requirements of a laser distance sensor and one beam path for the requirements of bright field incident light illumination.
  • the corresponding lenses are integrated in the corresponding receptacles.
  • the lenses present in the respective recordings can have the same optical properties, but the coating can be optimized with regard to the use of differently colored light.
  • high-quality optical systems with basically the same nominal parameters can be selected for the optics, that is to say the lenses for the image processing beam path and for the other beam paths or those of lower value.
  • optical beam paths should be combined into a common beam path by a deflection system in the front area of the optics, ie on the object side.
  • Mirror systems or radiation splitters should preferably be mentioned.
  • a displaceable diaphragm can be integrated, which is arranged at the respective location required for the setting of the object in such a way that a telecentric optical system can be implemented.
  • a so-called telecenter aperture can be poured into and out of the optical beam path as required.
  • the realization of a telecenter aperture can also be effectively brought into the beam path by opening and closing.
  • Fig. 2 shows a second embodiment of an optic
  • Fig. 3 is a schematic diagram of a coordinate measuring machine.
  • FIG. 3 shows a coordinate measuring machine 100 with a base frame 2 consisting for example of granite.
  • a measuring table 104 is arranged on this, on which there is a non-workpiece 105 that is to be measured.
  • a portal 106 is arranged to be adjustable along the base frame 102 in the Y direction of the coordinate measuring machine 100.
  • columns or stands 108, 110 are slidably supported on the base frame 102.
  • a crossmember 112 extends from the columns 108, 110, along which, in the exemplary embodiment in the X direction of the coordinate measuring machine, a carriage 114 is adjustably arranged, which in turn accommodates a quill or column 116 which is adjustable in the Z-axis direction.
  • a sensor system 118 which is described in more detail in FIGS. 1 and 2, emanates from the sleeve or column 116 or from an interchangeable interface provided thereon in order to measure the workpiece 105 arranged on the measuring table 104.
  • the sensor system 118 comprises a first lens group 10 and a second lens group 12.
  • Each lens group 10, 12 has a plurality of lenses 14, 16 or 18, 20 or 22, 24, a plurality of lenses in each case from one joint recording 26, 28, 30 go out.
  • the lenses 18, 20 proceed from the receptacle 26, the lenses 14, 16 from the receptacle 28 and the lenses 22, 24 from the receptacle 30. If only two lenses per image are shown in the exemplary embodiment, then more than two lenses can also be present in each image according to the requirements.
  • the lenses 14, 16, 18, 20, 22, 24 present in the receptacles 26, 28, 30 are aligned with one another in such a way that beam paths running parallel to one another can be formed.
  • the lenses 14, 18, 22 are arranged in a first row and the lenses 16, 20, 24 in a second row, each with a common optical axis 32, 34.
  • the lenses 14, 18, 22 are designed with zoom optics in order to measure an object 38 - the workpiece 38 in the illustration in FIG. 3 - by means of an optical sensor such as a CCD sensor 36 or camera.
  • the recordings 26, 28 are adjustable, as indicated by the arrows.
  • a light source 38 is assigned to the lenses 16, 20, 24 aligned along the optical axis 34.
  • the beam passing through the lenses 24, 16, 28 is then deflected onto the object 38 via a mirror 40 and a beam splitter 24 as well as a further fixed lens 44 running on the object side.
  • the light beam originating from the illumination source 38 and the beam required for the measurement by means of the CCD sensor thus strike the same measurement point of the object 38.
  • the exemplary embodiment of FIG. 2 differs from that of FIG. 1 in that a beam 46 running parallel to a measuring beam 44 is deflected into the optical beam 44 outside of lenses via a mirror 48 and a beam splitter 50 in the exemplary embodiment.
  • the light beams 44, 46 thus strike the same point 52 of an object 54. 2 along an optical axis 56 of lenses 58, 60, 62, 64, which are aligned with an optical sensor such as a CCD sensor 66.
  • the lenses 58, 60, 62, 64 also proceed from receptacles 68, 70, 72, 74, in which lenses 76, 78, 80, 82 are arranged, via which the beam 46 is imaged.
  • the lenses 76, 78, 80, 88 can be intended for bright field illumination or a laser distance sensor.
  • the receptacles 70, 72 are adjustable (see arrows).
  • the teaching according to the invention avoids the disadvantages inherent in the prior art, in particular undesirable scattered light or light reflection
  • Different requirements can be met with different lens groups without additional mechanical expenditure.
  • the lenses 58, 76 and 64, 68 starting from the receptacles 68, 74 are fixed and the lenses 60, 78 and 62, 80 starting from the receptacles 70, 72 are arranged to be movable relative to one another, for example by an enlargement or working distance in to be able to change the desired scope.
  • Measurements with a laser distance sensor or for a bright-field incident light measurement are integrated without sacrificing quality.
  • the images taken by the sensor 36 are processed in the usual way.
  • the images recorded by the CCD sensor 36 can e.g. B. digitized in an interface card in a computer.
  • the image is then available in the computer so that it can be accessed for image processing purposes.
  • These include numerical methods for simple image enhancement such as noise reduction or contrast enhancement as well as more complex methods for automatic feature extraction or pattern recognition.
  • the image processing computer can be a PC, a workstation or a parallel computer architecture.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un ensemble pour mesurer la géométrie ou la structure d'un objet (38) au moyen d'un appareil de mesure de coordonnées comprenant un système optique conçu pour enregistrer et représenter un point de mesure sur au moins un capteur optique (36), ledit système optique comprenant au moins un groupe de lentilles mobile (10, 12), pourvu de lentilles de mesure (14, 18, 22), et au moins quelques unes des lentilles de mesure étant chacune reçues dans un logement (26, 28, 30). Selon la présente invention, au moins une autre lentille conçue pour représenter un rayon lumineux sur l'objet est installée dans au moins quelques uns des logements recevant les lentilles de mesure dudit groupe de lentilles mobile.
EP03809757A 2002-11-01 2003-11-03 Ensemble pour mesurer la geometrie ou la structure d'un objet Withdrawn EP1556667A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10251412.7A DE10251412B4 (de) 2002-11-01 2002-11-01 Anordnung zur Messung der Geometrie und/oder Struktur eines Objektes
DE10251412 2002-11-01
PCT/EP2003/012228 WO2004040234A2 (fr) 2002-11-01 2003-11-03 Ensemble pour mesurer la geometrie ou la structure d'un objet

Publications (1)

Publication Number Publication Date
EP1556667A2 true EP1556667A2 (fr) 2005-07-27

Family

ID=32115218

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03809757A Withdrawn EP1556667A2 (fr) 2002-11-01 2003-11-03 Ensemble pour mesurer la geometrie ou la structure d'un objet

Country Status (6)

Country Link
US (1) US7230721B2 (fr)
EP (1) EP1556667A2 (fr)
JP (1) JP2006504941A (fr)
AU (1) AU2003300508A1 (fr)
DE (1) DE10251412B4 (fr)
WO (1) WO2004040234A2 (fr)

Families Citing this family (9)

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Publication number Priority date Publication date Assignee Title
JP2008524565A (ja) * 2004-12-16 2008-07-10 ベルス・メステヒニーク・ゲーエムベーハー 座標測定装置ならびに座標測定装置を用いて測定する方法
US8810904B2 (en) * 2011-02-09 2014-08-19 Northwestern University Optical contact micrometer
WO2014023332A1 (fr) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Appareil de mesure des coordonnées pour la détermination de coordonnées spatiales sur un objet de mesure
DE102012109726A1 (de) * 2012-09-04 2014-04-03 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung der Geometrie eines Objektes mit einer Zoomoptik
JP6372969B2 (ja) * 2012-12-03 2018-08-15 矢崎総業株式会社 電流センサ
DE102014108353A1 (de) 2013-06-13 2014-12-18 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung von Geometrien an Messobjekten mittels eines kombinierten Sensorsystems
DE102016102579A1 (de) * 2016-02-15 2017-08-17 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zum Bestimmen einer Vielzahl von Raumkoordinaten an einem Gegenstand
FR3080677B1 (fr) * 2018-04-27 2020-05-29 Insidix Dispositif de mesure topographique
US10965464B1 (en) 2018-06-08 2021-03-30 Wells Fargo Bank, N.A. Tactile binary coded communication

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JPS54110856A (en) * 1978-02-18 1979-08-30 Olympus Optical Co Ltd Three-lens zoom micoroscope
US5033856A (en) * 1984-07-05 1991-07-23 Canon Kabushiki Kaisha Three-dimensional shape measuring apparatus
DE3806686A1 (de) * 1988-03-02 1989-09-14 Wegu Messtechnik Mehrkoordinatenmess- und -pruefeinrichtung
DE4134481C2 (de) * 1991-10-18 1998-04-09 Zeiss Carl Fa Operationsmikroskop zur rechnergestützten, stereotaktischen Mikrochirurgie
JP2981941B2 (ja) * 1991-12-02 1999-11-22 株式会社新川 ボンデイングワイヤ検査装置
US5359416A (en) 1992-10-19 1994-10-25 Thiokol Corporation System and process for detecting and monitoring surface defects
US5539417A (en) * 1994-11-16 1996-07-23 Kelly Communications Group, Inc. Antenna clip assembly and antenna control circuit for cellular phone
GB9705105D0 (en) * 1997-03-12 1997-04-30 Brown & Sharpe Limited Optical surface measurement apparatus and methods
DE19747027A1 (de) * 1997-04-21 1998-10-22 Wegu Messtechnik Multisensor-Tasteinrichtung
DE19733709B4 (de) * 1997-08-04 2005-08-11 Leitz Messtechnik Gmbh Optischer Tastkopf für 3D-Koordinatenmeßgeräte
DE19816270A1 (de) * 1998-04-11 1999-10-21 Werth Messtechnik Gmbh Verfahren und Anordnung zur Erfassung der Geometrie von Gegenständen mittels eines Koordinatenmeßgeräts
US6396589B1 (en) * 1999-03-17 2002-05-28 Minolta Co., Ltd. Apparatus and method for measuring three-dimensional shape of object
DE10049303A1 (de) * 2000-07-13 2002-01-31 Werth Messtechnik Gmbh Verfahren zum berührungslosen Messen von Geometrien von Gegenständen
DE10056073A1 (de) * 2000-11-08 2002-06-06 Hans Tiziani Optisches Verfahren und Sensor zur Gewinnung einer 3D-Punktwolke

Non-Patent Citations (1)

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Title
See references of WO2004040234A2 *

Also Published As

Publication number Publication date
AU2003300508A1 (en) 2004-05-25
AU2003300508A8 (en) 2004-05-25
WO2004040234A2 (fr) 2004-05-13
US7230721B2 (en) 2007-06-12
DE10251412B4 (de) 2016-10-06
WO2004040234B1 (fr) 2004-10-07
US20060023226A1 (en) 2006-02-02
JP2006504941A (ja) 2006-02-09
DE10251412A1 (de) 2004-05-19
WO2004040234A3 (fr) 2004-08-12

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