EP1445580B1 - Verfahren zum Betrieb eines Resonators mit elektrostatischem Antrieb - Google Patents

Verfahren zum Betrieb eines Resonators mit elektrostatischem Antrieb Download PDF

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Publication number
EP1445580B1
EP1445580B1 EP04290137A EP04290137A EP1445580B1 EP 1445580 B1 EP1445580 B1 EP 1445580B1 EP 04290137 A EP04290137 A EP 04290137A EP 04290137 A EP04290137 A EP 04290137A EP 1445580 B1 EP1445580 B1 EP 1445580B1
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Prior art keywords
control signal
electrodes
vibration
vibrating member
quadrature
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EP04290137A
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English (en)
French (fr)
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EP1445580A1 (de
Inventor
Alain Renault
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Safran Electronics and Defense SAS
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Sagem Defense Securite SA
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators

Definitions

  • the present invention relates to a method of implementing an electrostatic resonator for use as an inertial rotation sensor.
  • electrostatic resonators comprising a metallized bell-shaped vibrating member adapted to be vibrated at a resonant frequency under the effect of electrostatic forces generated by electrodes disposed opposite a portion of the vibrating member.
  • the resonator is adapted to operate in gyrometric mode or in gyro mode.
  • the vibrating member is excited by means of a combination of control signals applied to the resonant frequency of the vibrating member and modulated to provide an amplitude control signal, a precession control signal. and a quadrature control signal, these control signals being applied so that a measure of the vibration of the vibrating member and a demodulation of that vibration at the resonant frequency of the vibrating member allow by appropriate equations of determine the rotational speed at which the resonator is subjected.
  • An object of the invention is to provide a method of implementing an electrostatic vibrating resonator operating with high accuracy preferably using a reduced number of electrodes and connections of these electrodes.
  • a method for implementing a resonator in a gyrometric mode having a vibrating member adapted to be vibrated at a resonant frequency under the effect of electrostatic forces generated by electrodes disposed opposite a portion of the vibrating member, the method comprising the steps of exciting the organ vibrating by means of a combination of control signals comprising an amplitude control signal, a precession control signal and an amplitude modulated quadrature control signal, to measure a vibration of the vibrating member and to demodulate the vibration at the resonance frequency of the vibrating member, the precession control signal being applied at a frequency twice the resonant frequency.
  • the amplitude control signal is applied at a double frequency of the resonant frequency in a maintenance phase of the vibration of the vibrating organ.
  • the quadrature control signal is applied as a continuous signal on common electrodes with the amplitude control signal.
  • the electrostatic forces resulting from the quadrature control are the consequence of an intermodulation resulting from the gap variation with respect to the electrodes.
  • the amplitude control signal is preferably applied so that the vibration of the vibrating member is oriented so that a vibration node faces an interval between two electrodes. The portion of the vibrating member facing an electrode is then subjected to a non-zero air gap variation that provides a strong intermodulation and consequently the best measurement accuracy.
  • the amplitude control at a double frequency of the resonant frequency is applied to the vibrating member itself and the quadrature control is applied to electrodes that are simultaneously assigned to a detection. This results in increased dynamics improving the accuracy of the measurement with a minimum of connections.
  • the resonator has been shown on a very enlarged scale and by exaggerating the thicknesses of the electrodes and air gaps.
  • the resonator comprises in known manner a hemispherical vibrating member 1, for example a bell made of silica and fixed by a rod 4 to a base 3.
  • the inner surface of the bell 1 and the edge of the latter and the rod 4 are covered with a layer of metal 2.
  • the base 3 carries the main electrodes designated by the general reference numeral 5 and the special reference numerals 5.1, 5.2 ..., 5.8 to identify them individually.
  • the electrodes 5 extend opposite the edge of the vibrating member 1.
  • the resonator further comprises a guard electrode generally designated 6, divided into two parts 6.1 and 6.2 each comprising four auxiliary electrodes, bearing the general reference numeral 7, and the particular reference numerals 7.1 for the electrodes auxiliaries of Part 6.1, and 7.2 for auxiliary electrodes in Part 6.2.
  • the electrodes 7.1 and 7.2 extend alternately between the electrodes 5.
  • the part 6.1 of the guard electrode consists of a central disk from which the auxiliary electrodes 7.1 extend radially outwards while the part 6.2 of the guard electrode consists of a circular ring extending around the electrodes 5 and having auxiliary electrodes 7.2 radially inwardly projecting.
  • the vibrating member is first vibrated by applying an AC amplitude control signal.
  • the vibration can not be obtained by a signal at a frequency twice the resonant frequency of the vibrating member 1.
  • the amplitude control signal is therefore applied to the resonant frequency.
  • the amplitude control signal is applied so that vibration of the vibrating member is oriented so that a vibration node is facing an interval between two electrodes.
  • the AC amplitude control signal is modally applied in quadrature to at least two electrodes.
  • the AC amplitude control signal is applied in phase to at least two electrodes at 45 ° to each other, for example to the electrodes 5.1 and 5.2.
  • the resulting vibration then has a belly opposite the gap between the electrodes 5.1 and 5.2 as illustrated by a thick double arrow in the figure.
  • Corresponding stomachs appear in the intervals between electrodes 5.3 and 5.4, 5.5 and 5.6, 5.7 and 5.8.
  • Simultaneously nodes are formed in the intervals between the electrodes 5.2 and 5.3, 5.4 and 5.5, 5.6 and 5.7, 5.8 and 5.1, as illustrated by small circles in thick lines on the figure 2 .
  • the diametrically opposed electrodes i.e. the electrodes 5.5 and 5.6 in the example described above, are also powered with the same amplitude control signal.
  • the vibration thus oriented therefore has a non-zero amplitude with respect to each main electrode 5.
  • the same position of the vibration can also be obtained by feeding the electrode 5.2 or the electrodes 5.2 and 5.6 with a signal CA, and the electrode 5.3 or the electrodes 5.3 and 5.7 with a signal -CA (ie say in opposition of phase).
  • the dynamics can be further increased by simultaneously supplying the eight main electrodes 5.
  • the electrodes 5.1, 5.2, 5.5 and 5.6 are supplied with a signal CA, and the electrodes 5.3, 5.4, 5.7 and 5.8 with a signal -CA.
  • the amplitude control is switched to a maintenance phase in which the AC amplitude control signal is applied at a frequency twice the frequency of the amplifier. resonance.
  • the control signal can then be applied either to the electrodes 5 or to the metallized layer 2 of the bell 1. Indeed, at this frequency, the gap variation with respect to the electrodes is sufficient to generate electrostatic forces that maintain the vibration, even in the case where a same control signal is applied to all the electrodes 5 or in the case where a single amplitude control signal is applied to the bell.
  • this precession control CP is applied to maintain the orientation of the vibration despite the movements of the equipment on which the resonator is mounted.
  • this precession control CP the amplitude of which is moreover calculated in a known manner in itself, is applied at a double frequency of the resonant frequency, on the control electrodes with the appropriate sign to maintain the vibration in a stable orientation.
  • the quadrature control CQ is preferably applied according to the invention according to a continuous signal whose amplitude is calculated in a manner known per se to cancel the drift of the resonator.
  • the quadrature control is applied appropriately depending on the electrodes used for the application of this command.
  • a CA - CP - CQ signal is applied to the electrode 5.1 while a AC + CP + CQ signal is applied to electrode 5.2.
  • the dynamics can be increased by respectively applying the same signals to the electrodes 5.5 and 5.6.
  • the signal CA - CP - CQ is applied to the electrodes 5.1, 5.3, 5.5 and 5.7 and the signal CA + CP + CQ is simultaneously applied to the electrodes 5.2, 5.4, 5.6, and 5.8 .
  • the AC amplitude control signal is applied to the bell, this component is removed from the signal applied to the control electrodes.
  • the two parts 6.1 and 6.2 of the guard electrode are connected to the ground in order to perform the usual functions of reducing crosstalk between the electrodes.
  • the other electrodes are available to effect the detection of the modified vibration in order to calculate the precession control and the speed of rotation of the resonator. Only one electrode can be used to this reception. However, for a better dynamic, at least two electrodes, and preferably four electrodes, are used for reception.
  • the measurement of the amplitude of the vibration can be carried out by one of the combinations D5.3 + D5.4, D5.3 + D5.7, D5.4 + D5.8, D5. 3 + D5.8, D5.4 + D5.7 or D5.3 + D5.4 + D5.7 + D5.8.
  • the measurement of the amplitude can be carried out on the eight electrodes 5 by the combination D5.1 + D5.2 + D5.5 + D5.6 - D5.3 - D5.4 - D5.7 - D5.8.
  • the servo error can be measured by one of the combinations D5.3 - D5.4, D5.3 - D5.8, D5.7 - D5.4 or D5.3 - D5.4 + D5. 7 - D5.8.
  • the precession control is suppressed but the resonator can also be implemented in the same way as in the gyro mode.
  • the orientation of the vibration is no longer fixed and is a function of the movements to which the resonator is subjected.
  • the position of the nodes changes according to the movement of the resonator, so that at certain times, the position of a node coincides with the center of an electrode and in the case of a continuous quadrature control signal. , it is no longer subject to intermodulation due to an absence of gap variation.
  • the guard electrode is used to apply quadrature control to electrodes that are not facing a vibration node.
  • the main electrodes used are electrodes 5.1, 5.2, 5.5 and 5.6.
  • the CA - CQ signal is applied to the electrodes 5.1 and 5.5 while the CA + CQ signal is applied to the electrodes 5.2 and 5.6.
  • the node that was initially between the electrodes 5.2 and 5.3 moves until the node is near the middle of the electrode 5.2. In this situation the quadrature control applied to the electrode 5.2 loses is efficiency.
  • the signal CA - CQ is switched on the part 6.1 of the guard electrode and the signal CA + CQ on the part 6.2 of the guard electrode.
  • the node that faces the electrode 5.2 is then halfway between the electrodes 7.1 and 7.2 respectively subjected to the signals CA - CQ and CA + CQ.
  • the air gap facing the electrodes 7.1 and 7.2 is therefore variable so that the quadrature control is subject to intermodulation.
  • the quadrature control thus finds its full effectiveness.
  • the control signals are thus alternately applied to the main electrodes 5 and the secondary electrodes 7 as the vibration is rotated in order to maintain the vibration nodes between the electrodes to which the quadrature control signal is applied.
  • the increase in the number of electrodes to which the control signals are applied makes it possible to increase the dynamics and therefore the accuracy of operation. Furthermore, in the resonators used in the space domain it is not possible to switch the electrodes between a control function and a detection function. For an implementation in this field it is therefore usually necessary to assign half of the main electrodes to the control and the other half to the detection.
  • the amplitude control is applied to the bell at a frequency twice the resonant frequency.
  • the continuous quadrature control signal -CQ is applied to the main electrodes 5.1, 5.3, 5.5 and 5.7 while the continuous quadrature control signal CQ is applied to the main electrodes 5.2, 5.4, 5.6 and 5.8.
  • each of the main and auxiliary electrodes is connected to a detection element which, in a manner known per se, is a charge amplifier, that is to say an operational amplifier comprising a capacitor disposed between the inverting input connected to an electrode of the resonator and the output of the amplifier.
  • the quadrature control signal is applied to the non-inverting input and is added to the detection signal. Since the quadrature control signal is a known and continuous voltage, it is easy to subtract this signal to obtain the detection signal alone. It should be noted in this regard that two electrodes diametrically opposite can be connected in parallel to the same charge amplifier.
  • the quadrature control is alternately applied to the main electrodes and to the auxiliary electrodes as previously indicated.
  • eleven connections are required to be able to apply the control signal to eight electrodes and to collect the detection signal on eight electrodes.
  • the gain of the detectors it is possible to calibrate the gain of the detectors so that it is the same in two ways in quadrature.
  • an analysis of the vibration is performed at a frequency twice the resonance frequency for modally quadrature electrodes when a vibration node is facing them.
  • This calibration can be performed either in an initialization phase by applying a precession command to place a vibration node successively opposite each of the electrodes, or by performing a calibration measurement whenever the vibration is detected in a position for which a vibration node is facing an electrode.
  • the vibration is first oriented so that a vibration node is facing the electrodes 5.2, 5.6, 5.4 and 5.8, the electrodes 5.2 and 5.6 being connected in parallel with each other.
  • a demodulation of the vibration at a frequency twice the resonance frequency makes it possible to determine the gains G1 and G2.
  • the vibration is then oriented so that a vibration node is facing electrodes 5.1, 5.3, 5.5 and 5.7.
  • the gains G3 and G4 of the charge amplifiers associated with each pair of electrodes are determined.
  • the coefficient k is then applied during the demodulated detection at the resonant frequency.
  • the amplitude control signal can be applied to the resonance frequency.
  • the amplitude control is applied so that the vibration obtained has nodes between the electrodes, which makes it possible to obtain large air gap variations with respect to the electrodes and therefore a maximum intermodulation between the variations of the electrodes.
  • gap and continuous control signals or control signals at a frequency twice the resonant frequency can also be implemented with a lower dynamic by generating the vibration in a conventional manner so that the vibration has knots and bellies facing the electrodes. This loss of dynamics will then have to be compensated by more powerful control electronics and detection electronics.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Claims (13)

  1. Verfahren zum Betrieb eines Resonators im gyrometrischen Modus, wobei der Resonator ein Schwingelement (1) umfasst, das dazu geeignet ist, unter der Wirkung von elektrostatischen Kräften, die von Elektroden erzeugt werden, die gegenüber einem Abschnitt des Schwingelements angeordnet sind, mit einer Resonanzfrequenz in Schwingung versetzt zu werden, wobei das Verfahren die Schritte umfasst: Erregen des Schwingelements mittels einer Kombination aus Steuersignalen, die ein Amplitudensteuersignal (CA), ein Präzessionssteuersignal (CP) und ein Quadratursteuersignal (CQ) umfasst, die amplitudenmoduliert sind, Messen einer Schwingung des Schwingelements und Demodulieren der Schwingung mit der Resonanzfrequenz des Schwingelements, dadurch gekennzeichnet, dass das Präzessionssteuersignal (CP) mit einer doppelten Frequenz der Resonanzfrequenz angelegt wird.
  2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass in einer Phase des In-Schwingung-Versetzens das Amplitudensteuersignal (CA) mit der Resonanzfrequenz des Schwingelements angelegt wird und in einer Beetriebsphase das Amplitudensteuersignal (CA) mit einer doppelten Frequenz der Resonanzfrequenz angelegt wird.
  3. Verfahren nach Anspruch 2, dadurch gekennzeichnet, dass in der Betriebsphase das Amplitudensteuersignal (CA) an mindestens einer Hälfte der Elektroden angelegt wird, die auf symmetrische Weise relativ zum Schwingelement verteilt sind, oder am Schwingelement selbst.
  4. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass das Amplitudensteuersignal (CA) derart angelegt wird, dass die Schwingung des Schwingelements derart ausgerichtet ist, dass sich ein Schwingungsknoten gegenüber jedem Intervall zwischen zwei Elektroden befindet.
  5. Verfahren nach Anspruch 3 und Anspruch 4, in Kombination genommen, dadurch gekennzeichnet, dass mindestens während der Phase des In-Schwingung-Versetzens das Amplitudensteuersignal (CA) an mindestens zwei Elektroden angelegt wird, die zueinander modal um 90° phasenverschoben sind.
  6. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass das Quadratursteuersignal (CQ) ein kontinuierliches Signal ist, das an Elektroden angelegt wird, die dem Amplitudensteuersignal (CA) und dem Präzessionssteuersignal (CP) gemeinsam sind.
  7. Verfahren zum Betreiben eines Resonators im gyroskopischen Modus, wobei der Resonator ein Schwingelement (1) umfasst, das dazu geeignet ist, unter der Wirkung von elektrostatischen Kräften, die von Elektroden erzeugt werden, die gegenüber einem Abschnitt des Schwingelements angeordnet sind, mit einer Resonanzfrequenz in Schwingung versetzt zu werden, wobei das Verfahren die Schritte umfasst: Erregen des Schwingelements mittels einer Kombination von Steuersignalen, die in einer Betriebsphase ein Amplitudensteuersignal (CA) mit einer doppelten Frequenz der Resonanzfrequenz des Schwingelements und ein kontinuierliches Quadratursteuersignal (CQ) umfasst, die beide amplitudenmoduliert sind, Messen einer Schwingung des Schwingelements und Demodulieren der Schwingung mit der Resonanzfrequenz des Schwingelements, dadurch gekennzeichnet, dass die Amplitudensteuersignale und die Quadratursteuersignale um 90° phasenverschoben an den gemeinsamen Elektroden angelegt werden.
  8. Verfahren nach Anspruch 7, dadurch gekennzeichnet, dass das Amplitudensteuersignal (CA) an mindestens der Hälfte der auf symmetrische Weise verteilten Elektroden angelegt wird.
  9. Verfahren nach Anspruch 7, dadurch gekennzeichnet, dass das Quadratursteuersignal an Elektroden angelegt wird, die einen Schwingungsknoten einrahmen.
  10. Verfahren zum Betreiben eines Resonators im gyroskopischen Modus, wobei der Resonator ein Schwingelement (1) umfasst, das dazu geeignet ist, mit einer Resonanzfrequenz in Schwingung versetzt zu werden, mittels einer Kombination von Steuersignalen, die in einer Betriebsphase ein Amplitudensteuersignal (CA) mit einer doppelten Frequenz der Resonanzfrequenz des Schwingelements und ein kontinuierliches Quadratursteuersignal (CQ) umfassen, die beide amplitudenmoduliert sind, dadurch gekennzeichnet, dass das Verfahren die Schritte umfasst: Anlegen des Amplitudensteuersignals an dem Schwingungselement selbst, Anlegen des Quadratursteuersignals an den Elektroden, die gegenüber dem Schwingelement angeordnet sind, und gleichzeitiges Erfassen einer Schwingung des Schwingelements an genau diesen Elektroden.
  11. Verfahren nach Anspruch 10, dadurch gekennzeichnet, dass das Quadratursteuersignal an Elektroden angelegt wird, die einen Schwingungsknoten des Schwingelements einrahmen.
  12. Verfahren nach Anspruch 11, dadurch gekennzeichnet, dass das Quadratursteuersignal abwechselnd an zwei Elektrodengruppen angelegt wird, die ineinander verschachtelt sind.
  13. Verfahren nach Anspruch 10, dadurch gekennzeichnet, dass ein Ausgleich der Detektionsverstärkung der um 90° phasenverschobenen Elektroden durch eine Analyse der Schwingung bei doppelter Frequenz der Resonanzfrequenz erfolgt, um die realen Detektionsverstärkungen zu bestimmen, und Berechnung eines Ausgleichskoeffizienten.
EP04290137A 2003-02-06 2004-01-20 Verfahren zum Betrieb eines Resonators mit elektrostatischem Antrieb Expired - Lifetime EP1445580B1 (de)

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Application Number Priority Date Filing Date Title
FR0301383A FR2851041B1 (fr) 2003-02-06 2003-02-06 Procede de mise en oeuvre d'un resonateur sous l'effet de forces electrostatiques
FR0301383 2003-02-06

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EP1445580B1 true EP1445580B1 (de) 2010-03-10

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US (3) US7010977B2 (de)
EP (1) EP1445580B1 (de)
AT (1) ATE460643T1 (de)
DE (1) DE602004025871D1 (de)
FR (1) FR2851041B1 (de)
SG (1) SG135941A1 (de)

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EP1445580A1 (de) 2004-08-11
US7127947B2 (en) 2006-10-31
US20040154399A1 (en) 2004-08-12
ATE460643T1 (de) 2010-03-15
US7010977B2 (en) 2006-03-14
DE602004025871D1 (de) 2010-04-22
US20060096376A1 (en) 2006-05-11
SG135941A1 (en) 2007-10-29
FR2851041A1 (fr) 2004-08-13
US7127946B2 (en) 2006-10-31
US20060096375A1 (en) 2006-05-11
FR2851041B1 (fr) 2005-03-18

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