EP1442640A1 - Plasmabeschleuniger-anordnung - Google Patents
Plasmabeschleuniger-anordnungInfo
- Publication number
- EP1442640A1 EP1442640A1 EP02785332A EP02785332A EP1442640A1 EP 1442640 A1 EP1442640 A1 EP 1442640A1 EP 02785332 A EP02785332 A EP 02785332A EP 02785332 A EP02785332 A EP 02785332A EP 1442640 A1 EP1442640 A1 EP 1442640A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- plasma chamber
- plasma
- magnetic field
- longitudinal direction
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 101100434193 Halocynthia roretzi MA1A gene Proteins 0.000 claims description 3
- -1 MA1Z Proteins 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 22
- 230000001133 acceleration Effects 0.000 description 11
- 230000005686 electrostatic field Effects 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 5
- 238000006386 neutralization reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/54—Plasma accelerators
Definitions
- the invention relates to a plasma accelerator arrangement
- Plasma accelerator arrangements serve, for example, as drives for spacecraft.
- a working gas is ionized in a plasma chamber and the ions are accelerated in an electrostatic field and ejected as a neutralized plasma beam by means of supplied electrons.
- Hall thruster the annular plasma chamber of which is penetrated by an essentially radial static magnetic field.
- Hall thrusters are known, for example, from EP 0541309 A1 or US 5847493.
- an electron source which is arranged on the side of the beam exit of the plasma chamber outside of this and laterally offset relative to it, emits an electron current which is partially conducted as ionization electrons into the plasma chamber and ionized under the influence of the electric field between the electron source and the anode arranged at the bottom of the plasma chamber partially carried as neutralization electrons from ions emerging from the chamber.
- the ionization electrons are deflected in the plasma chamber under the influence of the magnetic field and form annular drift currents, as a result of which the dwell time and the ionization effect on working gas introduced into the plasma chamber are substantially increased.
- BESTATIGUNGSKOPIE DE-AS1222589 shows a plasma accelerator arrangement in which an arc discharge is ignited in a plasma chamber delimited by an anode and a cathode by an electrostatic field between the anode and cathode.
- the resulting ions are isolated by an outside of the plasma chamber and by an isolated one
- Electrode separately arranged annular ion acceleration electrode removed and accelerated ejected.
- a high-energy bundled electron beam supplied from the cathode side on the central axis of the arrangement runs through the plasma chamber and emerges with the electrons of the electron beam through the accelerating electrode and neutralizes the ion beam.
- the electrons generated during the arc discharge and the electrons of the beam supplied, which are braked by impact processes, perform an oscillating movement between the ion acceleration electrode and the cathode.
- a magnetic collimator field parallel to the longitudinal axis bundles the particle flows around the central axis. Further electrostatic acceleration stages with magnetic bundling can be connected to the acceleration electrode.
- Patent Abstracts of Japan 09223474 describes a plasma accelerator which has a plasma generator chamber and a plasma accelerator chamber in succession, through which working gas is passed.
- a coil arrangement generates a magnetic field parallel to the beam.
- a plurality of stabilizing electrodes comprising the beam are arranged in succession in both chambers.
- a plasma accelerator arrangement in which an energy-focused, concentrated electron beam is introduced into a plasma chamber delimited in the longitudinal direction by an anode and an end electrode and guided along the central axis through a magnet arrangement becomes.
- Several intermediate electrodes are provided in the longitudinal direction between the anode and the end electrode, which subdivide the potential difference between the anode and the end electrode into several stages.
- the magnet arrangement shows the peculiarity that the magnetic field generated by it in the plasma chamber periodically changes the polarity in the longitudinal direction and field sections of the first type and second type alternate in the longitudinal direction, the field lines predominantly radial in the sections of the first type, that is to say perpendicular to the longitudinal direction, and in the sections of the second type, the field lines run predominantly axially, ie parallel to the longitudinal direction.
- the sections of the first type preferably lie between two electrodes which follow one another in the longitudinal direction and form barriers for electrons accelerated towards the anode. Such a multi-stage arrangement with the electron barriers enables an increase in the efficiency of the plasma accelerator.
- DE 10014033 A1 describes a plasma accelerator arrangement with a similar magnetic field arrangement for an annular plasma chamber and an electron source located at the end of the plasma chamber.
- a plasma accelerator arrangement known from DE 10014033 A1 provides for the introduction of electrons accelerated from the anode side into the annular plasma chamber in the form of a cylindrical hollow beam into the plasma chamber.
- US 6215124 B1 describes an ion accelerator in the manner of a Hall thruster with an annular plasma chamber and an essentially radial magnetic field between a radially inner first and a radially outer second magnetic pole.
- a plurality of electrodes are arranged at different radial distances from the exit of the plasma chamber on the end face of the plasma chamber on its end face pointing in the beam direction, essentially transverse to the beam direction and outside the plasma chamber, which electrodes are arranged at different radial distances from the plasma chamber Intermediate potentials between the cathode potential and the anode potential or even below.
- a magnetic short circuit around the anode region shifts a maximum of the longitudinal gradient of the magnetic field in the direction of the exit of the plasma chamber and preferably to the outside.
- the object of the present invention is to further improve such a plasma accelerator arrangement, in particular with regard to the efficiency.
- the acceleration stage and thus at one position, where the ion concentration due to ionization of the previous stages is already high, a high potential difference for accelerating the ions to a high speed and thus a large impulse is available, whereas the small potential difference of the preceding stages is particularly favorable for the ionization of the working gas.
- the acceleration stage is also available for the multiplication of the ionization electrons supplied there by impact ionization and the secondary electrons that are produced in the process.
- Ionization electrons are understood here and in the following to mean the electrons which are accelerated towards the anode in the electrostatic field and produce positively charged ions of the working gas when they are influenced by the magnetic field.
- the term ionization electrons also distinguishes these electrons from the electrons referred to as neutralization electrons, which are emitted to the outside with the accelerated ion beam and ensure a charge-neutral plasma beam.
- Ionization electrons and neutralization electrons can, at least in part, originate from the same electron source.
- the section between an end electrode arranged when the plasma jet emerges from the plasma chamber and an intermediate electrode closest to it in the direction of the anode is referred to as the last or exit-side potential stage.
- the potential difference occurring in this potential level between the end electrode and the next intermediate electrode is referred to as the last potential difference.
- the magnetic field configuration present in the plasma chamber in connection with the electrode arrangement within the plasma chamber, preferably in the form of a longitudinally alternating sequence of sections of the first type with predominantly radial, i.e. perpendicular to the longitudinal direction of the plasma chamber, field lines and sections of the second type with predominantly axial field lines, ie field lines running parallel to the longitudinal direction of the plasma chamber, and in particular the magnetic field existing in the plasma chamber with the magnetic field section in the last potential stage in connection with the large potential difference of the outlet-side last potential stage.
- the intermediate electrodes are preferably between adjacent magnetic field sections of the first type with a predominantly radial course of the magnetic field.
- a magnetic field section of the first type prevents the ionization electrons supplied to the last potential stage from being accelerated highly and hitting one of the next electrodes while losing the energy absorbed in the process. Rather, a magnetic field section of the first type forms a barrier for the electrons accelerated in the electrostatic field by forcing them onto drift tracks with predominantly transverse movement components and by gradually passing the energy from the electrostatic field
- the magnetic field section of the first type in the last potential stage advantageously lies between the electrodes forming the last stage, in particular in a region where the electrostatic field is essentially axial and has high values.
- the ions are not significantly influenced in their movement by the magnetic field and accelerated axially high by the electrostatic field of the last potential stage, the high acceleration in the longitudinal course of the plasma chamber advantageously due to the strong inequality of the potential stages according to the invention only begins in a range in which the degree of ionization of the working gas is very high, so that the last potential stage, which comprises almost the entire potential difference of the arrangement, can be used essentially for acceleration for all working gas ions.
- the last potential difference is advantageously at least 4 times, in particular at least 10 times the first potential difference, i. H. the potential difference between the electrode facing away from the plasma outlet and the intermediate electrode closest to it in the direction of the plasma outlet.
- the section between the anode and that next intermediate electrode is referred to as the first potential stage.
- the potential difference of the last potential level is then advantageously at least 4 times, in particular at least 10 times the largest potential difference of the other potential levels.
- the last potential difference is advantageously greater than the sum of the other potential differences and is preferably at least 2 times, in particular at least 4 times the sum of the other potential differences.
- the end electrode can be formed by an electrode surrounding and / or laterally delimiting the plasma chamber when the plasma jet emerges.
- the end electrode can also be arranged laterally offset when the plasma jet emerges outside the plasma chamber, in particular also in the manner of the cathodes of the Hall thruster arrangements.
- the ionization electrons initiating the ionization can be supplied to the last potential stage in a manner known per se.
- an accelerated electron beam can be introduced into the plasma chamber from the anode side and can be guided centrally in the longitudinal direction by the magnetic field arrangement.
- the electrons of the electron beam ES are braked in the electric field.
- Some of the electrons in the electron beam are deflected at the end of the last potential stage and accelerated towards the anode as ionization electrons. Another part of the
- Electrons of the electron beam emerge from the chamber with the working gas ions as an electrically neutral plasma jet.
- an electron source is laterally offset outside the plasma chamber when the plasma jet emerges and emits an electron current, which is partly as ionization electrons through the
- an electrode can be provided when the plasma jet emerges from the plasma chamber
- a gas discharge can be ignited by briefly increasing the gas pressure and / or the potential difference of the last potential stage. However, it can also be started by spontaneous ionization, for example by high-energy radiation.
- the different types of electron sources can also be implemented in combination.
- Fig. 3 shows an arrangement with an ion-loaded electrode as an electron source.
- a plasma chamber PK is constructed essentially in a circular cylindrical manner about a longitudinal axis LA.
- the plasma chamber is surrounded by several, preferably annular electrodes EA, EZ1, EZ2, EE at different potentials, spaced one after the other in the longitudinal direction LR.
- a working gas AG, in particular xenon, is supplied to the plasma chamber.
- a closely focused, highly accelerated electron beam ES from a beam source is guided on the longitudinal axis from the side of the first electrode EA, also referred to as an anode, into the plasma chamber and is guided centrally through the magnetic field MF of a magnet arrangement surrounding the plasma chamber on the longitudinal axis LA.
- the course of the potential across the different potentials of the separated electrodes is monotonous in the longitudinal direction LR and is directed in such a way that the electrons of the electron beam slow down along their path through the plasma chamber and positively charged ions of the working gas generated in the plasma chamber in the direction of the end electrode EE, which is the last electrode the row at the beam exit SA of the plasma chamber is arranged to be accelerated.
- Ions and electrons NE leave the plasma chamber at the beam exit as an electrically neutral plasma beam PB.
- the magnet arrangement is represented schematically by a plurality of magnetic rings MR surrounding the plasma chamber, which are alternately polarized in opposite directions in the longitudinal direction.
- Such a magnet arrangement generates a magnetic field in the plasma chamber, which in the longitudinal direction at positions between successive ones
- the magnetic field sections of the first type form electron barriers in the potential stages formed by two successive electrodes each with a first potential difference PDA for the first anode-side potential stage between the anode EA and the first intermediate electrode EZ1, an intermediate potential difference PDZ for an intermediate stage between the first (EZ1) and second (EZ2) intermediate electrode and a last, outlet-side potential difference PDE for the last potential stage between the second
- the potential difference PDE of the last potential level is at least 4 times, in particular at least 10 times the potential difference PDA of the first potential level or, in the case of more than two potential levels, at least 4 times, in particular at least 10 times the largest of the potential differences PDA , PDZ of the other potential levels.
- Potential levels advantageously less than the last potential difference PDE and is preferably a maximum of 50%, in particular a maximum of 25% of the last potential difference PDE.
- PDA 50 V
- PDZ 50 V
- the number of electrons suitable for ionization rises steeply due to the multiplication factor from stage to stage from the last potential stage to the first potential stage.
- the main part of the ionization of the working gas therefore lies in the potential stages PDA and PDZ. Due to the magnetic field section MA1 E of the first type in the last potential stage, strong decelerated electrons in the introduced electron beam are held in this stage for a long time and thereby already generate a large number of secondary electrons, which are transferred to the next stage in the direction of the anode.
- the concentration of the ions accelerated in the direction from the anode EA to the end electrode EE has almost reached its maximum when it enters the last potential stage, so that the high potential difference of this last potential stage is essentially available as acceleration potential for the entire ion current.
- the combination of the high last potential difference PDE and the magnetic field section MA1 E in the last potential stage thus leads to a particularly good efficiency of the plasma accelerator arrangement.
- Magnetic field sections MA1A, MA1Z of the first type which alternate in the longitudinal direction in succession with magnetic field sections MA2 of the second type, in which the magnetic field in the plasma chamber is predominantly axial, ie. H. runs parallel to the longitudinal direction.
- a particularly high proportion of ionization is achieved in the first potential stage.
- magnetic field sections of the first and second types are shown spaced apart by transition sections in the figures.
- the electrons Due to the course of the magnetic field diverging towards the longitudinal axis in the sections of the first type and the predominantly axial course in the sections of the second type, the electrons are largely kept away from the lateral electrodes and remain as ionization electrons.
- the initial ionization electrons IE in the last potential stage are obtained in the arrangement sketched in FIG. 1 in that a part of the electrons of the introduced electron beam does not overcome the potential of the end electrode and is branched off from the electron beam and accelerated in the opposite direction, one sees in FIG 2 for the region of the plasma jet exit SA, a cathode arranged in the manner of the Hall thruster outside the plasma chamber PKT as the electron source QE, the emitted electron current of which is guided to a first part as ionization electrons IE through the beam outlet SA into the plasma chamber and to a different extent than Neutralization electrons NE is carried by the plasma beam PB.
- the end electrode can be formed by this cathode, so that the last potential stage is formed between the cathode EQ and the intermediate electrode closest to the outlet.
- the plasma chamber there is again a magnetic field section MA1 E of the first type between the beam exit SA and the intermediate electrode EZ2 with the described mode of action on the ionization electrons accelerated by the cathode EQ in the direction of the intermediate electrode.
- the plasma chamber in contrast to FIG. 1, is assumed to be ring-shaped around a longitudinal axis LAT in a conventional manner.
- the magnet arrangement then contains radial inner and outer magnetic rings MRI or MRA with the same polarity.
- the generation of the primary electrodes is, however, independent of the cylindrical or ring-shaped chamber geometry, and the external cathode EQ is particularly suitable as an electron source for both geometries.
- FIG. 3 Another possibility for generating ionization electrons in the last potential stage is outlined in FIG. 3.
- the end electrode EEB is exposed to the bombardment and / or field influence by ions from an edge area RP of the plasma jet. Ions striking the end electrode release electron showers, for example, which are accelerated towards the intermediate electrode EZ2 as ionization electrons IE and are also carried along by the plasma beam as a neutralization electron current NE.
- the end electrode EEB advantageously consists of the ion bombardment-resistant material with a high secondary electron emission coefficient.
- the magnetic field section MA1 E is again provided between the end electrode EE4 and the intermediate electrode EZ2, without the field course being explicit here is drawn.
- the passive electrode is also particularly advantageous in connection with intermediate electrodes at floating intermediate potentials.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Particle Accelerators (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10153723 | 2001-10-31 | ||
| DE10153723A DE10153723A1 (de) | 2001-10-31 | 2001-10-31 | Plasmabeschleuniger-Anordnung |
| PCT/EP2002/012095 WO2003039215A1 (de) | 2001-10-31 | 2002-10-30 | Plasmabeschleuniger-anordnung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1442640A1 true EP1442640A1 (de) | 2004-08-04 |
| EP1442640B1 EP1442640B1 (de) | 2011-12-28 |
Family
ID=7704325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP02785332A Expired - Lifetime EP1442640B1 (de) | 2001-10-31 | 2002-10-30 | Plasmabeschleuniger-anordnung |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7075095B2 (de) |
| EP (1) | EP1442640B1 (de) |
| JP (1) | JP4593919B2 (de) |
| DE (1) | DE10153723A1 (de) |
| RU (1) | RU2275761C2 (de) |
| WO (1) | WO2003039215A1 (de) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10318925A1 (de) * | 2003-03-05 | 2004-09-16 | Thales Electron Devices Gmbh | Antriebsvorrichtung eines Raumflugkörpers und Verfahren zur Lagesteuerung eines Raumflugkörpers mit einer solchen Antriebsvorrichtung |
| ATE335928T1 (de) * | 2003-03-20 | 2006-09-15 | Elwing Llc | Antriebssystem für raumfahrzeuge |
| US7461502B2 (en) | 2003-03-20 | 2008-12-09 | Elwing Llc | Spacecraft thruster |
| EP2295797B1 (de) * | 2004-09-22 | 2013-01-23 | Elwing LLC | Antriebssystem für Raumfahrzeuge |
| SE529058C2 (sv) * | 2005-07-08 | 2007-04-17 | Plasma Surgical Invest Ltd | Plasmaalstrande anordning, plasmakirurgisk anordning, användning av en plasmakirurgisk anordning och förfarande för att bilda ett plasma |
| KR101094919B1 (ko) * | 2005-09-27 | 2011-12-16 | 삼성전자주식회사 | 플라즈마 가속기 |
| JP4697460B2 (ja) * | 2006-10-04 | 2011-06-08 | 三菱電機株式会社 | 電源装置 |
| US9447779B2 (en) | 2006-11-09 | 2016-09-20 | Alexander Kapulkin | Low-power hall thruster |
| DE102006059264A1 (de) * | 2006-12-15 | 2008-06-19 | Thales Electron Devices Gmbh | Plasmabeschleunigeranordnung |
| US7825601B2 (en) * | 2007-11-28 | 2010-11-02 | Mark Edward Morehouse | Axial Hall accelerator with solenoid field |
| US8138677B2 (en) * | 2008-05-01 | 2012-03-20 | Mark Edward Morehouse | Radial hall effect ion injector with a split solenoid field |
| US7767986B2 (en) * | 2008-06-20 | 2010-08-03 | Varian Semiconductor Equipment Associates, Inc. | Method and apparatus for controlling beam current uniformity in an ion implanter |
| KR101420716B1 (ko) | 2012-05-23 | 2014-07-22 | 성균관대학교산학협력단 | 사이클로트론 |
| US9253868B1 (en) * | 2014-11-21 | 2016-02-02 | Applied Materials, Inc. | Neutral beam source with plasma sheath-shaping neutralization grid |
| US9480140B2 (en) | 2014-11-21 | 2016-10-25 | Applied Materials, Inc. | Material modification by neutral beam source with selected collision angle |
| FR3062545B1 (fr) * | 2017-01-30 | 2020-07-31 | Centre Nat Rech Scient | Systeme de generation d'un jet plasma d'ions metalliques |
| DE102017204590B3 (de) | 2017-03-20 | 2018-08-02 | Airbus Defence and Space GmbH | Cusp-Feld-Triebwerk |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3075115A (en) | 1961-03-27 | 1963-01-22 | John W Flowers | Ion source with space charge neutralization |
| DE3165714D1 (en) | 1980-12-17 | 1984-09-27 | Wellcome Found | Long duration neuromuscular blocking agents, pharmaceutical compositions containing them and processes for their preparation |
| JPS63154273A (ja) * | 1986-12-17 | 1988-06-27 | Mitsubishi Heavy Ind Ltd | プラズマト−チ |
| JPH04190597A (ja) * | 1990-11-22 | 1992-07-08 | Nkk Corp | 移行式プラズマトーチ |
| US5365070A (en) * | 1992-04-29 | 1994-11-15 | The Regents Of The University Of California | Negative ion beam injection apparatus with magnetic shield and electron removal means |
| FR2693770B1 (fr) * | 1992-07-15 | 1994-10-14 | Europ Propulsion | Moteur à plasma à dérive fermée d'électrons. |
| US5475354A (en) * | 1993-06-21 | 1995-12-12 | Societe Europeenne De Propulsion | Plasma accelerator of short length with closed electron drift |
| US5563418A (en) * | 1995-02-17 | 1996-10-08 | Regents, University Of California | Broad beam ion implanter |
| JPH0917345A (ja) * | 1995-06-30 | 1997-01-17 | Japan Atom Energy Res Inst | 負イオン源電極 |
| RU2088802C1 (ru) * | 1995-12-09 | 1997-08-27 | Исследовательский центр им.М.В.Келдыша | Холловский двигатель |
| RU2092983C1 (ru) * | 1996-04-01 | 1997-10-10 | Исследовательский центр им.М.В.Келдыша | Плазменный ускоритель |
| JPH09223474A (ja) | 1996-02-16 | 1997-08-26 | Sumitomo Heavy Ind Ltd | 加速型プラズマ銃 |
| IL126413A0 (en) * | 1996-04-01 | 1999-05-09 | Int Scient Products | A hall effect plasma accelerator |
| JP2002502086A (ja) * | 1998-01-23 | 2002-01-22 | アナリティカ オブ ブランフォード インコーポレーテッド | 表面からの質量分光測定 |
| US6060718A (en) * | 1998-02-26 | 2000-05-09 | Eaton Corporation | Ion source having wide output current operating range |
| US6215124B1 (en) * | 1998-06-05 | 2001-04-10 | Primex Aerospace Company | Multistage ion accelerators with closed electron drift |
| DE19828704A1 (de) * | 1998-06-26 | 1999-12-30 | Thomson Tubes Electroniques Gm | Plasmabeschleuniger-Anordnung |
| DE10014034C2 (de) * | 2000-03-22 | 2002-01-24 | Thomson Tubes Electroniques Gm | Plasma-Beschleuniger-Anordnung |
| DE10014033C2 (de) * | 2000-03-22 | 2002-01-24 | Thomson Tubes Electroniques Gm | Plasma-Beschleuniger-Anordnung |
| US6525326B1 (en) * | 2000-09-01 | 2003-02-25 | Axcelis Technologies, Inc. | System and method for removing particles entrained in an ion beam |
| RU2196397C2 (ru) * | 2000-12-28 | 2003-01-10 | Петросов Валерий Александрович | Способ и устройство для ускорения ионов в плазменных ускорителях холловского типа |
-
2001
- 2001-10-31 DE DE10153723A patent/DE10153723A1/de not_active Withdrawn
-
2002
- 2002-10-30 US US10/494,147 patent/US7075095B2/en not_active Expired - Lifetime
- 2002-10-30 WO PCT/EP2002/012095 patent/WO2003039215A1/de not_active Ceased
- 2002-10-30 EP EP02785332A patent/EP1442640B1/de not_active Expired - Lifetime
- 2002-10-30 RU RU2004116314/06A patent/RU2275761C2/ru not_active IP Right Cessation
- 2002-10-30 JP JP2003541325A patent/JP4593919B2/ja not_active Expired - Fee Related
Non-Patent Citations (1)
| Title |
|---|
| See references of WO03039215A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003039215A1 (de) | 2003-05-08 |
| JP4593919B2 (ja) | 2010-12-08 |
| US20050174063A1 (en) | 2005-08-11 |
| RU2004116314A (ru) | 2005-05-20 |
| EP1442640B1 (de) | 2011-12-28 |
| JP2005507555A (ja) | 2005-03-17 |
| DE10153723A1 (de) | 2003-05-15 |
| US7075095B2 (en) | 2006-07-11 |
| RU2275761C2 (ru) | 2006-04-27 |
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