EP1427265A3 - Device and method for coating a substrate and substrate coating - Google Patents

Device and method for coating a substrate and substrate coating Download PDF

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Publication number
EP1427265A3
EP1427265A3 EP03022387A EP03022387A EP1427265A3 EP 1427265 A3 EP1427265 A3 EP 1427265A3 EP 03022387 A EP03022387 A EP 03022387A EP 03022387 A EP03022387 A EP 03022387A EP 1427265 A3 EP1427265 A3 EP 1427265A3
Authority
EP
European Patent Office
Prior art keywords
substrate
functional layer
coating
layer
plasma jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03022387A
Other languages
German (de)
French (fr)
Other versions
EP1427265A2 (en
Inventor
Christoph Treutler
Gerhard Benz
Stefan Grosse
Sascha Henke
Andreas Gross
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1427265A2 publication Critical patent/EP1427265A2/en
Publication of EP1427265A3 publication Critical patent/EP1427265A3/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Es wird eine Vorrichtung (5) zur Beschichtung eines Substrates (10) mit Mitteln zur Erzeugung eines Gasstromes und einer Plasmastrahlquelle (20) vorgeschlagen, mit der ein auf das Substrat (10) einwirkender Plasmastrahl (40) erzeugbar ist, wobei neben der Plasmastrahlquelle (20) eine bei Betrieb einen Materialeintrag auf das Substrat (10) bewirkende Hohlkathode (23) vorgesehen ist. Weiter wird ein Verfahren zum Beschichten eines Substrates (10) vorgeschlagen, wobei mit Hilfe einer Plasmastrahlquelle (20) eine erste Funktionsschicht (13) mit oder aus einer Schicht mit einer Matrix mit darin eingebetteten nanoskaligen Partikeln auf dem Substrat (10) abgeschieden wird, und wobei mit Hilfe einer Hohlkathode (23) über ein Gasflusssputtern eine zweite Funktionsschicht (11) auf dem Substrat (10) abgeschieden wird. Schließlich wird eine Beschichtung (5) auf einem Substrat (10) vorgeschlagen, wobei auf dem Substrat (10) eine zweite Funktionsschicht (11), auf der zweiten Funktionsschicht (11) eine Zwischenschicht (12) und auf der Zwischenschicht (12) eine erste Funktionsschicht (13) vorgesehen ist. Die Zwischenschichten (12) ist dabei als einen hinsichtlich der Zusammensetzung allmählichen Übergang zwischen der zweiten Funktionsschicht (11) und der ersten Funktionsschicht (13) vermittelnde Gradientenschicht ausgebildet, während mindestens eine der Funktionsschichten (11, 13) eine Matrixschicht mit darin eingebetteten nanoskaligen Partikeln aufweist.

Figure imgaf001
The invention relates to a device (5) for coating a substrate (10) with means for generating a gas stream and a plasma jet source (20), with which a plasma jet (40) acting on the substrate (10) can be generated, wherein beside the plasma jet source ( 20) is provided during operation of a material entry on the substrate (10) causing hollow cathode (23). Furthermore, a method for coating a substrate (10) is proposed, wherein with the aid of a plasma jet source (20) a first functional layer (13) with or from a layer having a matrix with nanoscale particles embedded therein is deposited on the substrate (10), and wherein by means of a hollow cathode (23) via a gas flow sputtering a second functional layer (11) is deposited on the substrate (10). Finally, a coating (5) on a substrate (10) is proposed, wherein a second functional layer (11) is provided on the substrate (10), an intermediate layer (12) on the second functional layer (11) and a first functional layer on the intermediate layer (12) Functional layer (13) is provided. The intermediate layers (12) are designed as a gradual transition between the second functional layer (11) and the first functional layer (13), while at least one of the functional layers (11, 13) has a matrix layer with nanoscale particles embedded therein ,
Figure imgaf001
EP03022387A 2002-12-03 2003-10-06 Device and method for coating a substrate and substrate coating Withdrawn EP1427265A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10256257 2002-12-03
DE2002156257 DE10256257A1 (en) 2002-12-03 2002-12-03 Device and method for coating a substrate and coating on a substrate

Publications (2)

Publication Number Publication Date
EP1427265A2 EP1427265A2 (en) 2004-06-09
EP1427265A3 true EP1427265A3 (en) 2011-05-04

Family

ID=32308922

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03022387A Withdrawn EP1427265A3 (en) 2002-12-03 2003-10-06 Device and method for coating a substrate and substrate coating

Country Status (2)

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EP (1) EP1427265A3 (en)
DE (1) DE10256257A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006024433B4 (en) 2006-05-24 2021-09-09 JOH. WINKLHOFER & SÖHNE GMBH & Co. KG Wear-resistant chain with wear protection coating in a nanocrystalline structure
DE102008033938B4 (en) * 2008-07-18 2012-04-19 Innovent E.V. Method for depositing layers on a substrate
DE102009010497A1 (en) * 2008-12-19 2010-08-05 J-Fiber Gmbh Multi-nozzle tubular plasma deposition burner for the production of preforms as semi-finished products for optical fibers

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19635669C1 (en) * 1996-09-03 1997-07-24 Fraunhofer Ges Forschung Coating large area substrate by gas flow sputtering
US5928771A (en) * 1995-05-12 1999-07-27 Diamond Black Technologies, Inc. Disordered coating with cubic boron nitride dispersed therein
EP0992606A2 (en) * 1998-10-09 2000-04-12 Rolls-Royce Plc A method of applying a coating to a metallic article and an apparatus for applying a coating to a metallic article
WO2001040542A1 (en) * 1999-12-04 2001-06-07 Robert Bosch Gmbh Method for producing composite layers using a plasma jet source
WO2002062114A1 (en) * 2001-02-02 2002-08-08 Robert Bosch Gmbh Plasma unit and method for generation of a functional coating
DE10104611A1 (en) * 2001-02-02 2002-08-14 Bosch Gmbh Robert Device for the ceramic-like coating of a substrate
WO2003018862A2 (en) * 2001-08-25 2003-03-06 Robert Bosch Gmbh Method for producing a nanostructured coating

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3034076B2 (en) * 1991-04-18 2000-04-17 日本真空技術株式会社 Metal ion source

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5928771A (en) * 1995-05-12 1999-07-27 Diamond Black Technologies, Inc. Disordered coating with cubic boron nitride dispersed therein
DE19635669C1 (en) * 1996-09-03 1997-07-24 Fraunhofer Ges Forschung Coating large area substrate by gas flow sputtering
EP0992606A2 (en) * 1998-10-09 2000-04-12 Rolls-Royce Plc A method of applying a coating to a metallic article and an apparatus for applying a coating to a metallic article
WO2001040542A1 (en) * 1999-12-04 2001-06-07 Robert Bosch Gmbh Method for producing composite layers using a plasma jet source
WO2002062114A1 (en) * 2001-02-02 2002-08-08 Robert Bosch Gmbh Plasma unit and method for generation of a functional coating
DE10104611A1 (en) * 2001-02-02 2002-08-14 Bosch Gmbh Robert Device for the ceramic-like coating of a substrate
WO2003018862A2 (en) * 2001-08-25 2003-03-06 Robert Bosch Gmbh Method for producing a nanostructured coating

Also Published As

Publication number Publication date
DE10256257A1 (en) 2004-06-24
EP1427265A2 (en) 2004-06-09

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