EP1408234B2 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP1408234B2
EP1408234B2 EP03022427A EP03022427A EP1408234B2 EP 1408234 B2 EP1408234 B2 EP 1408234B2 EP 03022427 A EP03022427 A EP 03022427A EP 03022427 A EP03022427 A EP 03022427A EP 1408234 B2 EP1408234 B2 EP 1408234B2
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EP
European Patent Office
Prior art keywords
piston
valve
space
locking device
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03022427A
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German (de)
French (fr)
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EP1408234A1 (en
EP1408234B1 (en
Inventor
Eckhard Bez
Thorsten Burggraf
Stefan Dr. Zabeschek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1408234A1 publication Critical patent/EP1408234A1/en
Publication of EP1408234B1 publication Critical patent/EP1408234B1/en
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Publication of EP1408234B2 publication Critical patent/EP1408234B2/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/12—Valves; Arrangement of valves arranged in or on pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0005—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons
    • F04B39/0016—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons with valve arranged in the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/12—Valves; Arrangement of valves arranged in or on pistons
    • F04B53/123—Flexible valves

Definitions

  • the invention relates to a vacuum pump.
  • the closest prior art is the WO 00/63557 , It shows a vacuum pump for conveying gases with a piston chamber wall limited displacement, with a piston oscillating in the piston with piston crown, which is designed as a valve, with gas discharge valve at the upper end of the displacement and with a gas inlet opening, which radially in the lower part of the displacement is arranged, the valve in the piston head allows a gas flow between the hub and gear chamber, in order to reduce the pressure difference between the two spaces, the valve consists of an opening in the piston head and a frictional device, wherein the opening through a membrane depending on Gas flow is held by the non-positive device in a closed state.
  • the present invention relates to one or more stages of construction.
  • the pistons perform an oscillating movement between their two reversal points. During the upward movement of a piston, the gas is compressed and expelled. During the downward movement creates a vacuum in the displacement. So gases can flow through suitable valves in the displacement.
  • the work to be done in the downward movement of the piston results from the pressure difference between the pressure in the transmission chamber and the negative pressure in the displacement and from the surface of the piston and the length of the stroke. This effect increases the power consumption of the pump drive and increases the temperature of pump components, which interferes with smooth and safe operation. Dissipating the heat is associated with additional undesirable expense.
  • the invention is based on the object to present a construction by which additional unnecessary energy consumption and unwanted heating of the pump components are avoided. Particular attention should be paid to the fact that dead spaces do not arise in the area of pump-active components (eg pistons and valves). These include gases during the pumping process and thus significantly affect the pumping properties.
  • pump-active components eg pistons and valves
  • the work to be done in the downward movement of the piston is reduced.
  • the pressure difference between the pressure in the gear chamber and the negative pressure in the displacement is reduced by the flowing over the piston head into the displacement gas.
  • This effect is achieved by installing a valve in the piston crown. Openings in the piston crown provide a direct connection between the gear chamber and displacement. By such a construction dead spaces are avoided and thus ensures an effective pumping behavior.
  • the piston 3 performs an oscillating movement, whereby the delivery of gas is effected.
  • the gas to be pumped passes through radial inlet openings 5 in the piston cylinder wall 2 in the region of the lower pressure point of the piston in the displacement 1 and is discharged via a valve 7 at the upper end of the displacement.
  • the movement of the piston is generated via a connecting rod 8 and a piston rod 10, which is connected to a drive device.
  • the axial boundary of the piston 3 is formed by the piston head 12.
  • the piston head is formed according to the invention simultaneously as a valve. For this he is provided with openings 14. These openings are covered by a membrane which, depending on the embodiment, can be designed as a plastic membrane 16 interspersed with ferromagnetic particles or as a magnetic plastic membrane 18.
  • the function of the valve includes a non-positive device which presses the membrane in the closed state to seal the openings 14 on this.
  • the non-positive device is formed by a recessed in a groove 20 magnetic ring 21 or magnet segments 22 together with the plastic membrane 16.
  • a metal plate 24 and a magnetic plastic membrane 18 together form the frictional device.
  • the openings 14 are sealed by the membrane 16 or 18, so that the previously flowed through the inlet openings 5 in the displacement 1 gas compressed and can be discharged via the valve 7.
  • the diaphragm 16 or 18 is raised due to the pressure difference between the negative pressure in the displacement 1 and the pressure in the transmission chamber 26, and a pressure compensation takes place.
  • the magnetic forces generated by the non-positive device ensure from a defined pressure difference for a secure adhesion of the membrane and thus for a gas-tight closing of the holes.

Description

Die Erfindung betrifft eine Vakuumpumpe.The invention relates to a vacuum pump.

Nächstliegender Stand der Technik ist die WO 00/63557 . Sie zeigt eine Vakuumpumpe zur Förderung von Gasen mit einem durch eine Kolbenzylinderwand begrenzten Hubraum, mit einem im Hubraum oszillierenden Kolben mit Kolbenboden, welcher als Ventil ausgebildet ist, mit Gasausstoßventil am oberen Ende des Hubraumes und mit einer Gaseinlassöffnung, welche radial im unteren Bereich des Hubraumes angeordnet ist, das Ventil im Kolbenboden einen Gasstrom zwischen Hub- und Getrieberaum zulässt, um in der Folge die Druckdifferenz zwischen beiden Räumen abzubauen, wobei das Ventil aus einer Öffnung im Kolbenboden und einer kraftschlüssigen Vorrichtung besteht, wobei die Öffnung durch eine Membran in Abhängigkeit vom Gasstrom durch die kraftschlüssige Vorrichtung in einem geschlossenen Zustand gehalten wird.The closest prior art is the WO 00/63557 , It shows a vacuum pump for conveying gases with a piston chamber wall limited displacement, with a piston oscillating in the piston with piston crown, which is designed as a valve, with gas discharge valve at the upper end of the displacement and with a gas inlet opening, which radially in the lower part of the displacement is arranged, the valve in the piston head allows a gas flow between the hub and gear chamber, in order to reduce the pressure difference between the two spaces, the valve consists of an opening in the piston head and a frictional device, wherein the opening through a membrane depending on Gas flow is held by the non-positive device in a closed state.

In der US 5 921 755 ist eine Vakuumpumpe beschrieben mit einem durch eine Kolbenzylinderwand begrenzten Hubraum, mit einem im Hubraum oszillierenden Kolben mit Kolbenboden, mit Gasausstoßventil am oberen Ende des Hubraumes und mit Gaseinlassöffnungen, welche radial im unteren Bereich des Hubraumes angeordnet sind.In the US 5,921,755 a vacuum pump is described with a limited piston cylinder wall displacement, with a piston oscillating in displacement piston head, with gas discharge valve at the upper end of the displacement and with gas inlet openings which are arranged radially in the lower region of the displacement.

Die vorliegende Erfindung bezieht sich auf ein- oder mehrstufige Bauweisen. Die Kolben führen eine oszillierende Bewegung zwischen ihre beiden Umkehrpunkten aus. Bei der Aufwärtsbewegung eines Kolbens wird das Gas verdichtet und ausgestoßen. Bei der Abwärtsbewegung entsteht ein Unterdruck im Hubraum. So können Gase über geeignete Ventile in den Hubraum einströmen.The present invention relates to one or more stages of construction. The pistons perform an oscillating movement between their two reversal points. During the upward movement of a piston, the gas is compressed and expelled. During the downward movement creates a vacuum in the displacement. So gases can flow through suitable valves in the displacement.

Die zu leistende Arbeit bei der Abwärtsbewegung des Kolbens resultiert aus der Druckdifferenz zwischen dem Druck im Getrieberaum und dem Unterdruck im Hubraum sowie aus der Oberfläche des Kolbens und der Länge des Hubes. Durch diesen Effekt wird die Leistungsaufnahme des Pumpenantriebes erhöht und es kommt zur Temperaturerhöhung von Pumpenbauteilen, was sich störend auf einen reibungslosen und sicheren Betrieb auswirkt. Die Wärme abzuführen, ist mit zusätzlichem unerwünschten Aufwand verbunden.The work to be done in the downward movement of the piston results from the pressure difference between the pressure in the transmission chamber and the negative pressure in the displacement and from the surface of the piston and the length of the stroke. This effect increases the power consumption of the pump drive and increases the temperature of pump components, which interferes with smooth and safe operation. Dissipating the heat is associated with additional undesirable expense.

Die Offenlegungsschrift US 2002/0023449 offenbart eine Kolbenmaschine zur Förderung von Gasen. Es wird vorgeschlagen, das einzige, im Kolbenboden angeordnete Gaseinlassventil mit Magneten zu versehen, die das Schließen dieses Ventils aufgrund von Magnetkräften bewirken.The publication US 2002/0023449 discloses a piston machine for conveying gases. It is proposed to provide the only, arranged in the piston crown gas inlet valve with magnets that cause the closing of this valve due to magnetic forces.

Der Erfindung liegt die Aufgabe zu Grunde, eine Konstruktion vorzustellen, durch welche zusätzlicher unnötiger Energieverbrauch und unerwünschte Erwärmung der Pumpenbauteile vermieden werden. Besondere Aufmerksamkeit ist darauf zu lenken, dass im Bereich der pumpaktiven Bauteile (z. B. Kolben und Ventile) keine Toträume entstehen. Diese schließen während des Pumpvorganges Gase ein und beeinträchtigen somit erheblich die Pumpeigenschaften.The invention is based on the object to present a construction by which additional unnecessary energy consumption and unwanted heating of the pump components are avoided. Particular attention should be paid to the fact that dead spaces do not arise in the area of pump-active components (eg pistons and valves). These include gases during the pumping process and thus significantly affect the pumping properties.

Die Aufgabe wird durch die Merkmale der Ansprüche 1 und 4 gelöst. Die Ansprüche 2 und 3 stellen weitere Ausgestaltungsformen der Erfindung dar.The object is solved by the features of claims 1 and 4. Claims 2 and 3 illustrate further embodiments of the invention.

Durch die erfindungsgemäße Anordnung wird die zu leistende Arbeit bei der Abwärtsbewegung des Kolbens reduziert. Dabei wird die Druckdifferenz zwischen dem Druck im Getrieberaum und dem Unterdruck im Hubraum durch das über den Kolbenboden in den Hubraum strömende Gas abgebaut. Dieser Effekt wird durch den Einbau eines Ventils in den Kolbenboden erreicht. Öffnungen im Kolbenboden stellen eine direkte Verbindung zwischen Getrieberaum und Hubraum her. Durch eine solche Konstruktion werden Toträume vermieden und somit ein effektives Pumpverhalten gewährleistet.The inventive arrangement, the work to be done in the downward movement of the piston is reduced. In this case, the pressure difference between the pressure in the gear chamber and the negative pressure in the displacement is reduced by the flowing over the piston head into the displacement gas. This effect is achieved by installing a valve in the piston crown. Openings in the piston crown provide a direct connection between the gear chamber and displacement. By such a construction dead spaces are avoided and thus ensures an effective pumping behavior.

An Hand der Figuren 1 bis 4 soll die Erfindung näher erläutert werden. Es zeigen:

  • Fig. 1 Ansaugseite einer Kolbenpumpe mit der erfindungsgemäßen Anordnung,
  • Fig. 2 Schnitt entlang A - A' aus Fig. 1,
  • Fig. 2a Schnitt entlang A - A' aus Fig. 1 einer weiteren Ausführungsform,
  • Fig. 3 eine weitere Ausführungsform der Erfindung,
  • Fig. 4 Schnitt entlang B - B' aus Fig. 3.
Based on FIGS. 1 to 4 the invention will be explained in more detail. Show it:
  • Fig. 1 Suction side of a piston pump with the arrangement according to the invention,
  • Fig. 2 Section along A - A 'off Fig. 1 .
  • Fig. 2a Section along A - A 'off Fig. 1 another embodiment,
  • Fig. 3 a further embodiment of the invention,
  • Fig. 4 Section along B - B 'off Fig. 3 ,

In einem zylindrischen Hubraum 1, der durch die Kolbenzylinderwand 2 begrenzt ist, führt der Kolben 3 eine oszillierende Bewegung aus, wodurch die Förderung von Gas bewirkt wird. Das zu pumpende Gas tritt durch radiale Einlassöffnungen 5 in der Kolbenzylinderwand 2 im Bereich des unteren Druckpunktes des Kolbens in den Hubraum 1 ein und wird über ein Ventil 7 am oberen Ende des Hubraumes ausgestoßen. Die Bewegung des Kolbens wird über ein Pleuel 8 und eine Kolbenstange 10, die mit einer Antriebsvorrichtung verbunden ist, erzeugt. Die axiale Begrenzung des Kolbens 3 wird durch den Kolbenboden 12 gebildet. Der Kolbenboden ist erfindungsgemäß gleichzeitig als Ventil ausgebildet. Dazu ist er mit Öffnungen 14 versehen. Diese Öffnungen werden durch eine Membran abgedeckt, welche je nach Ausführungsform als Kunststoffmembran 16, durchsetzt mit ferromagnetischen Partikeln, oder als magnetische Kunststoffmembran 18 ausgebildet sein kann.In a cylindrical displacement 1, which is delimited by the piston cylinder wall 2, the piston 3 performs an oscillating movement, whereby the delivery of gas is effected. The gas to be pumped passes through radial inlet openings 5 in the piston cylinder wall 2 in the region of the lower pressure point of the piston in the displacement 1 and is discharged via a valve 7 at the upper end of the displacement. The movement of the piston is generated via a connecting rod 8 and a piston rod 10, which is connected to a drive device. The axial boundary of the piston 3 is formed by the piston head 12. The piston head is formed according to the invention simultaneously as a valve. For this he is provided with openings 14. These openings are covered by a membrane which, depending on the embodiment, can be designed as a plastic membrane 16 interspersed with ferromagnetic particles or as a magnetic plastic membrane 18.

Zur Funktion des Ventils gehört eine kraftschlüssige Vorrichtung, welche die Membran in geschlossenem Zustand zur Abdichtung der Öffnungen 14 auf diese drückt. Im ersten Fall wird die kraftschlüssige Vorrichtung durch einen in einer Nut 20 eingelassenen Magnetring 21 oder Magnetsegmente 22 zusammen mit der Kunststoff membran 16 gebildet. Im zweiten Fall bilden eine Metallplatte 24 und eine magnetische Kunststoffmembran 18 zusammen die kraftschlüssige Vorrichtung.The function of the valve includes a non-positive device which presses the membrane in the closed state to seal the openings 14 on this. In the first case, the non-positive device is formed by a recessed in a groove 20 magnetic ring 21 or magnet segments 22 together with the plastic membrane 16. In the second case, a metal plate 24 and a magnetic plastic membrane 18 together form the frictional device.

Beim Aufwärtshub werden die Öffnungen 14 durch die Membran 16 bzw. 18 abgedichtet, so dass das vorher durch die Einlassöffnungen 5 in den Hubraum 1 eingeströmte Gas verdichtet und über das Ventil 7 ausgestoßen werden kann. Beim Abwärtshub wird die Membran 16 bzw. 18 auf Grund der Druckdifferenz zwischen dem Unterdruck im Hubraum 1 und dem Druck im Getrieberaum 26 angehoben, und ein Druckausgleich findet statt. Die durch die kraftschlüssige Vorrichtung erzeugten Magnetkräfte sorgen ab einer definierten Druckdifferenz für ein sicheres Haften der Membran und damit für ein gasdichtes Verschließen der Bohrungen. During the upstroke, the openings 14 are sealed by the membrane 16 or 18, so that the previously flowed through the inlet openings 5 in the displacement 1 gas compressed and can be discharged via the valve 7. During the downward stroke, the diaphragm 16 or 18 is raised due to the pressure difference between the negative pressure in the displacement 1 and the pressure in the transmission chamber 26, and a pressure compensation takes place. The magnetic forces generated by the non-positive device ensure from a defined pressure difference for a secure adhesion of the membrane and thus for a gas-tight closing of the holes.

Claims (4)

  1. Vacuum pump for delivering gases having a piston-swept space (1) delimited by a piston cylinder wall (2), having a piston (3) reciprocating in the piston-swept space and having a piston head (12) designed as a valve, having a gas discharge valve (7) at the upper end of the piston-swept space, and having gas inlet openings (5) disposed radially in the lower region of the piston-swept space, the valve in the piston head allows a gas flow between piston-swept space and transmission space in order subsequently to reduce the pressure difference between both spaces, wherein the valve comprises openings (14) in the piston head (12) and a force-locking device (16, 21; 18, 24), wherein the openings (14) are held by a diaphragm (16; 18) in an open or closed state in dependence upon the gas flow through the force-locking device, wherein the force-locking device comprises a magnetic arrangement (21) and a plastic diaphragm (16) permeated with ferromagnetic particles.
  2. Vacuum pump according to claim 1, characterized in that the magnetic arrangement comprises an annular permanent magnet (21) let into a groove (20).
  3. Vacuum pump according to claim 1, characterized in that the magnetic arrangement comprises a segment-shaped permanent magnet (22) let into a groove (20).
  4. Vacuum pump for delivering gases having a piston-swept space (1) delimited by a piston cylinder wall (2), having a piston (3) reciprocating in the piston-swept space and having a piston head (12) designed as a valve, having a gas discharge valve (7) at the upper end of the piston-swept space, and having gas inlet openings (5) disposed radially in the lower region of the piston-swept space, the valve in the piston head allows a gas flow between piston-swept space and transmission space in order subsequently to reduce the pressure difference between both spaces, wherein the valve comprises openings (14) in the piston head (12) and a force-locking device (16, 21; 18, 24), wherein the openings (14) are held by a diaphragm (16; 18) in an open or closed state in dependence upon the gas flow through the force-locking device, wherein the force-locking device comprises a metal plate (24) and a magnetic plastic diaphragm (18).
EP03022427A 2002-10-10 2003-10-07 Vacuum pump Expired - Lifetime EP1408234B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10247336A DE10247336A1 (en) 2002-10-10 2002-10-10 Piston machine for conveying gases
DE10247336 2002-10-10

Publications (3)

Publication Number Publication Date
EP1408234A1 EP1408234A1 (en) 2004-04-14
EP1408234B1 EP1408234B1 (en) 2006-11-22
EP1408234B2 true EP1408234B2 (en) 2010-08-25

Family

ID=32010426

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03022427A Expired - Lifetime EP1408234B2 (en) 2002-10-10 2003-10-07 Vacuum pump

Country Status (4)

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US (1) US7241120B2 (en)
EP (1) EP1408234B2 (en)
JP (1) JP4397664B2 (en)
DE (2) DE10247336A1 (en)

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BRPI0702471B1 (en) * 2007-07-04 2018-07-10 Whirlpool S.A. PISTON FOR REFRIGERATION COMPRESSOR
JP5458439B2 (en) * 2010-03-24 2014-04-02 株式会社医器研 Rotary cylinder device
DE102012217892A1 (en) * 2012-10-01 2014-05-15 Siemens Aktiengesellschaft Cast iron with niobium and component
BR102014007259A2 (en) * 2014-03-26 2015-12-08 Whirlpool Sa reciprocating compressor fitted with suction valve arrangement
CN104033378B (en) * 2014-06-19 2015-12-30 皖西学院 magnet-type plunger pump
CN104912773B (en) * 2015-07-01 2017-10-24 浙江申元机电有限公司 A kind of air compression plant and air compressor machine
CN110425106B (en) * 2019-08-16 2020-09-08 成都正升能源技术开发有限公司 Piston assembly for linear compressor

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WO2000063557A1 (en) † 1999-04-15 2000-10-26 Leybold Vakuum Gmbh Piston vacuum pump with a gas inlet and a gas outlet

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Publication number Priority date Publication date Assignee Title
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WO2000063557A1 (en) † 1999-04-15 2000-10-26 Leybold Vakuum Gmbh Piston vacuum pump with a gas inlet and a gas outlet

Also Published As

Publication number Publication date
EP1408234A1 (en) 2004-04-14
EP1408234B1 (en) 2006-11-22
US7241120B2 (en) 2007-07-10
DE50305737D1 (en) 2007-01-04
JP4397664B2 (en) 2010-01-13
JP2004132371A (en) 2004-04-30
DE10247336A1 (en) 2004-04-22
US20040071574A1 (en) 2004-04-15

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