EP1402246A1 - Device and method for positioning a sample mounted on a luminous discharge spectrometer - Google Patents

Device and method for positioning a sample mounted on a luminous discharge spectrometer

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Publication number
EP1402246A1
EP1402246A1 EP02751254A EP02751254A EP1402246A1 EP 1402246 A1 EP1402246 A1 EP 1402246A1 EP 02751254 A EP02751254 A EP 02751254A EP 02751254 A EP02751254 A EP 02751254A EP 1402246 A1 EP1402246 A1 EP 1402246A1
Authority
EP
European Patent Office
Prior art keywords
sample
positioning
spectrometer
electrode
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP02751254A
Other languages
German (de)
French (fr)
Inventor
Patrick Chapon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Publication of EP1402246A1 publication Critical patent/EP1402246A1/en
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges

Definitions

  • the present invention relates to a device and a method for positioning a sample mounted on a glow discharge spectrometer.
  • Glow discharge spectrometry makes it possible to establish the multi-elemental composition of a conductive or non-conductive sample at depths varying from a few nanometers to several hundred micrometers. It is a method of rapid and direct analysis of solids whether in the form of metals, powders, polymers, ceramics or even glasses.
  • Glow Discharge Optical Emission Spectrometry (“GD-OES”) comprises a light discharge source and one or more optical spectrometers. The sample to be analyzed is generally placed manually on the spectrometer and its positioning is done blind. This difficulty in positioning the sample stems from a lack of visibility of the area of the spectrometer facing the anode. It also follows that the location, prior to analysis, of the part of the surface of the sample which will actually be exposed to the glow discharge created in the spectrometer is difficult.
  • Such a spectrometer often includes a device allowing the cleaning of the anode after the commissioning of the glow discharge source.
  • a gas generally argon (at a pressure of the order of 5 mbar) is ionized and erodes ("sputtering") the surface of the sample to analyze. This results in the ejection of constituent atoms of said sample which are either pumped or cover the surfaces of the anode. The latter therefore tends to be covered with a deposit which may degrade the operation of the source. It is thus necessary to remove this coating by a sharp tool, a drill for example.
  • the objective of the present invention is to provide a device and a method simple in their design and in their operating mode allowing the precise positioning of a sample on a glow discharge source by using the device allowing the cleaning of the anode.
  • the invention relates to a device for positioning a sample in a luminescent discharge spectrometer comprising a protective member of a mechanical assembly, said mechanical assembly comprising a cutting tool capable of receiving a removable tip having a main axis, said glow discharge spectrometer comprises means of first electrode, of internal diameter D, against which a sample to be analyzed can be mounted, said sample having a first side and a second side, said first side being capable of being exposed partly to a luminescent discharge created in the spectrometer and the second face being external to said spectrometer and opposite the mechanical assembly,
  • the removable end piece includes a light source producing a light beam centered on said first electrode means.
  • the light beam has a diameter d substantially equal to the internal diameter D of the means of the first electrode, the light source is a laser diode,
  • the light source is placed along the main axis of the nozzle
  • the light source is placed perpendicular to the main axis of the nozzle
  • a plane mirror is inserted in the end piece and positioned at 45 ° from the main axis of the end piece
  • the tip is fitted with an optical output lens.
  • the invention also relates to a method for positioning a sample in a glow discharge spectrometer.
  • a sample to be analyzed is mounted against means of the first electrode of a glow discharge spectrometer
  • a removable tip is mounted on a mechanical assembly comprising a cutting tool, said tip being centered and in the axis of the means of the first electrode, - ° one illuminates said sample with a light beam of diameter d substantially equal to the internal diameter D first electrode means, - ° we locate the position of the light beam on the sample.
  • the structure of the sample is mapped using the glow discharge spectrometer.
  • FIG. 1 is a schematic representation of the ' positioning device of a sample, according to the invention
  • FIG. 2 is a schematic representation of the removable tip with the light source inserted along the main axis of the tip;
  • FIG. 3 shows the removable tip with the light source placed perpendicular to the main axis of the tip
  • Figure 1 shows the device for positioning a sample according to the invention. It comprises a protective member 1 of a mechanical assembly which includes a cutting tool 2.
  • the term "cutting tool” means any rotary cutting tool such as drills, milling cutters for example, or allowing sanding such as, for example, heads with sand.
  • the mechanical assembly comprises means 3 for driving said cutting tool 2.
  • the protective member 1 can for example be a casing and the driving means 3 for the cutting tool 2 comprise a motor and a piston.
  • Said drive means 3 and the cutting tool 2 define an axis 4 centered on means of the first electrode 5, of internal diameter D (typically between 1 and 8 mm), of a glow discharge spectrometer 6.
  • the protective member 1 is mounted on rails 7 and is capable of sliding or rolling between two extreme positions, a retracted position and an advanced position.
  • the advanced position corresponds to the cutting tool 2 inserted deep into the means of the first electrode 5.
  • a sample 8 is capable of being mounted on the spectrometer 6 for analysis.
  • the sample 8 has a first face 9 and a second face 10.
  • the first face 9 is the one likely to be exposed in part to a luminescent discharge created in the spectrometer 6 and the second face 10 is external to said spectrometer 6 and in screw with respect to the mechanical assembly.
  • the first electrode means 5 comprises in a preferred embodiment an anode.
  • the device comprises a removable tip 11 having an opening 12 at its diameter end and having a main axis 13 centered on the means of the first electrode 5.
  • the tip 11 is in an embodiment in Teflon.
  • This removable end piece 11 includes a light source 14 producing a light beam centered on said first electrode means 5.
  • the diameter d of the light beam is substantially equal to the internal diameter D of the first electrode means 5.
  • the amplitude of variation of the d / D ratio remains less than ten percent.
  • the diameter d of the light beam can be controlled by means of a flow restrictor.
  • the light source 14 is a laser diode. It is supplied with current by an external power supply 15.
  • the diameter d is advantageously at least equal to the internal diameter D of the first electrode means 5 so as to allow the light beam to pass.
  • the end piece 11 is positioned on the cutting tool 2. In a second embodiment it is positioned on the drive means 3, the cutting tool 2 having been previously dismantled.
  • the light source 14 is inserted along the main axis 13 of the removable tip 11.
  • the tip 11 is provided with an optical output lens 16 allowing the collimation of the light beam.
  • Said light beam is centered on the means of the first electrode 5 thus creating a light spot 17 on the external face 10 of the sample 8 and thus making it possible to precisely point the part of the first face 9 which will be effectively exposed to the luminescent discharge. It is thus possible to locate on the second face 10 of the sample 8 and therefore externally, said part.
  • the light source 14 is placed perpendicular to the main axis 13 of the end piece 11. The latter therefore comprises means 18 for reflecting the light beam towards the means of first electrode 5.
  • said means 18 comprise a plane mirror positioned at 45 ° to the main axis 13 of the removable tip 11 between the light source 14 and the outlet of the tip 11.
  • the tip 11 is provided of an optical output lens 16 allowing the collimation of the light beam coming from the light source 14.
  • the invention also relates to a method of positioning a sample 8 in which a sample 8 to be analyzed is mounted against means of the first electrode 5 of a glow discharge spectrometer 6. In one embodiment, for this, the sample 8 is manually maintained in position against the means of the first electrode 5 and a vacuum is produced in the spectrometer 6 using mechanical pumps.
  • a removable end piece 11 is mounted on a mechanical assembly comprising a cutting tool 2, said end piece 11 being " centered and in the axis of the means of the first electrode 5.
  • the protective member 1 is a casing
  • the cutting tool 2 comprises a drill, for example.
  • said sample 8 is illuminated with a light beam of diameter d substantially equal to the internal diameter D of the first electrode means 5 and the position of the light beam is identified on the sample 8.
  • the light beam is from a laser diode.
  • the member 1 is in the retracted position and the sample 8 is pointed with the beam.
  • the sample 8 is mounted on a precision positioning device, for example, an X-Y table. The recording of the positions of the zones actually exposed to the glow discharge then makes it possible to map the structure of the sample 8 using the glow discharge spectrometer 6.
  • the removable tip 11 comprises a light source 14 producing a light beam and an optical output lens 16 focusing said light beam on the means of the first electrode 5.
  • the light spot 17 produced by the light beam on the external face 10 of the sample 8 has a diameter d "substantially equal to the internal diameter D of the means of first electrode 5 and is centered on these means

Abstract

The invention relates to a device and method for positioning a sample (8) mounted on a luminous discharge spectrometer (6). A sample (8) to be analyzed is mounted on the first electrode means (5) of a luminous discharge spectrometer (6) and a detachable arm (11) is subsequently mounted on a mechanical assembly comprising a cutting tool (2). Said detachable arm (11) comprises a light source (14) which is used to illuminate the sample (8) with a light beam having a diameter equal to the inner diameter of the first electrode means (5) and the position of the light beam on the sample (8) is then determined. The part of the sample (8) which will be exposed to the luminous discharge is thus precisely determined.

Description

Dispositif et procédé de positionnement d'un échantillon monté sur un spectromètre à décharge luminescente. Device and method for positioning a sample mounted on a glow discharge spectrometer.
La présente invention concerne un dispositif et un procédé de positionnement d'un échantillon monté sur un spectromètre à décharge luminescente.The present invention relates to a device and a method for positioning a sample mounted on a glow discharge spectrometer.
La spectrométrie à décharge luminescente permet d'établir la composition multi-élémentaire d'un échantillon conducteur ou non conducteur sur des profondeurs variant de quelques nanomètres à plusieurs centaines de micromètres. C'est une méthode d'analyse rapide et directe des solides qu'ils soient sous la forme de métaux, poudres, polymères, céramiques ou encore de verres. La spectrométrie d'émission à décharge luminescente ("GD-OES" - Glow Discharge Optical Emission Spectrometry) comporte une source à décharge lumineuse et un ou plusieurs spectromètres optiques. L'échantillon à analyser est placé généralement manuellement sur le spectromètre et son positionnement se fait en aveugle. Cette difficulté dans le positionnement de l'échantillon provient d'un manque de visibilité de la zone du spectromètre faisant face à l'anode. Il en résulte également que le repérage, préalablement à l'analyse, de la partie de la surface de l'échantillon qui sera effectivement exposée à la décharge luminescente crée dans le spectromètre est difficile.Glow discharge spectrometry makes it possible to establish the multi-elemental composition of a conductive or non-conductive sample at depths varying from a few nanometers to several hundred micrometers. It is a method of rapid and direct analysis of solids whether in the form of metals, powders, polymers, ceramics or even glasses. Glow Discharge Optical Emission Spectrometry ("GD-OES") comprises a light discharge source and one or more optical spectrometers. The sample to be analyzed is generally placed manually on the spectrometer and its positioning is done blind. This difficulty in positioning the sample stems from a lack of visibility of the area of the spectrometer facing the anode. It also follows that the location, prior to analysis, of the part of the surface of the sample which will actually be exposed to the glow discharge created in the spectrometer is difficult.
Un tel spectromètre inclut souvent un dispositif permettant le nettoyage de l'anode après la mise en service de la source à décharge luminescente. En effet, dans le principe de fonctionnement d'une telle source, un gaz, généralement de l'argon (à une pression de l'ordre de 5 mbar) est ionisé et vient éroder ("sputtering") la surface de l'échantillon à analyser. Il en résulte l'éjection d'atomes constitutifs dudit échantillon qui soit sont pompés, soit viennent recouvrir les surfaces de l'anode. Cette dernière tend donc à être recouverte d'un dépôt pouvant dégrader le fonctionnement de la source. Il est ainsi nécessaire d'éliminer ce revêtement par un outil tranchant, un foret par exemple.Such a spectrometer often includes a device allowing the cleaning of the anode after the commissioning of the glow discharge source. Indeed, in the operating principle of such a source, a gas, generally argon (at a pressure of the order of 5 mbar) is ionized and erodes ("sputtering") the surface of the sample to analyze. This results in the ejection of constituent atoms of said sample which are either pumped or cover the surfaces of the anode. The latter therefore tends to be covered with a deposit which may degrade the operation of the source. It is thus necessary to remove this coating by a sharp tool, a drill for example.
L'objectif de la présente invention est de proposer un dispositif et un procédé simples dans leur conception et dans leur mode opératoire permettant le positionnement précis d'un échantillon sur une source à décharge luminescente en faisant appel au dispositif permettant le nettoyage de l'anode. A cet effet, l'invention concerne un dispositif de positionnement d'un échantillon dans un spectromètre à décharge luminescente comprenant un organe protecteur d'un ensemble mécanique, ledit ensemble mécanique comportant un outil coupant apte à recevoir un embout amovible ayant un axe principal, ledit spectromètre à décharge luminescente comprend des moyens de première électrode, de diamètre intérieur D, contre lesquels un échantillon à analyser est susceptible d'être monté, ledit échantillon ayant une première face et une seconde face, ladite première face étant susceptible d'être exposée en partie à une décharge luminescente crée dans le spectromètre et la seconde face étant externe audit spectromètre et en vis à vis de l'ensemble mécanique,The objective of the present invention is to provide a device and a method simple in their design and in their operating mode allowing the precise positioning of a sample on a glow discharge source by using the device allowing the cleaning of the anode. . To this end, the invention relates to a device for positioning a sample in a luminescent discharge spectrometer comprising a protective member of a mechanical assembly, said mechanical assembly comprising a cutting tool capable of receiving a removable tip having a main axis, said glow discharge spectrometer comprises means of first electrode, of internal diameter D, against which a sample to be analyzed can be mounted, said sample having a first side and a second side, said first side being capable of being exposed partly to a luminescent discharge created in the spectrometer and the second face being external to said spectrometer and opposite the mechanical assembly,
Selon l'invention :According to the invention:
- l'embout amovible comporte une source de lumière produisant un faisceau lumineux centré sur lesdits moyens de première électrode.- The removable end piece includes a light source producing a light beam centered on said first electrode means.
La présente invention concerne également les caractéristiques qui ressortiront au cours de la description qui va suivre et qui devront être considérées isolément ou selon toutes leurs combinaisons techniquement possibles :The present invention also relates to the characteristics which will emerge during the following description and which should be considered in isolation or in all their technically possible combinations:
- le faisceau lumineux a un diamètre d sensiblement égal au diamètre intérieur D des moyens de première électrode, - la source de lumière est une diode laser,the light beam has a diameter d substantially equal to the internal diameter D of the means of the first electrode, the light source is a laser diode,
- la source de lumière est placée suivant l'axe principal de l'embout,- the light source is placed along the main axis of the nozzle,
- la source de lumière est placée perpendiculairement à l'axe principal de l'embout,- the light source is placed perpendicular to the main axis of the nozzle,
- un miroir plan est inséré dans l'embout et positionné à 45° de l'axe principal de l'embout,- a plane mirror is inserted in the end piece and positioned at 45 ° from the main axis of the end piece,
- l'embout est muni d'une lentille optique de sortie.- the tip is fitted with an optical output lens.
L'invention concerne également un procédé de positionnement d'un échantillon dans un spectromètre à décharge luminescente.The invention also relates to a method for positioning a sample in a glow discharge spectrometer.
Selon l'invention, -°on monte un échantillon à analyser contre des moyens de première électrode d'un spectromètre à décharge luminescente,According to the invention, - a sample to be analyzed is mounted against means of the first electrode of a glow discharge spectrometer,
-°on monte un embout amovible sur un ensemble mécanique comprenant un outil coupant, ledit embout étant centré et dans l'axe des moyens de première électrode, -°on éclaire ledit échantillon avec un faisceau lumineux de diamètre d sensiblement égal au diamètre intérieur D des moyens de première électrode, -°on repère la position du faisceau lumineux sur l'échantillon.- ° a removable tip is mounted on a mechanical assembly comprising a cutting tool, said tip being centered and in the axis of the means of the first electrode, - ° one illuminates said sample with a light beam of diameter d substantially equal to the internal diameter D first electrode means, - ° we locate the position of the light beam on the sample.
La présente invention concerne également les caractéristiques qui ressortiront au cours de la description qui va suivre et qui devront être considérées isolément ou selon toutes leurs combinaisons techniquement possibles :The present invention also relates to the characteristics which will emerge during the following description and which should be considered in isolation or in all their technically possible combinations:
- on cartographie la structure de l'échantillon à l'aide du spectromètre à décharge luminescente.- the structure of the sample is mapped using the glow discharge spectrometer.
L'invention sera décrite plus en détail en référence aux dessins annexés dans lesquels: - la figure 1 est représentation schématique du' dispositif de positionnement d'un échantillon, selon l'invention ;The invention will be described in more detail with reference to the accompanying drawings in which: - Figure 1 is a schematic representation of the ' positioning device of a sample, according to the invention;
- la figure 2 est une représentation schématique de l'embout amovible avec la source de lumière insérée suivant l'axe principal de l'embout;- Figure 2 is a schematic representation of the removable tip with the light source inserted along the main axis of the tip;
- la figure 3 représente l'embout amovible avec la source de lumière placée perpendiculairement à l'axe principal de l'embout;- Figure 3 shows the removable tip with the light source placed perpendicular to the main axis of the tip;
La Figure 1 montre le dispositif de positionnement d'un échantillon selon l'invention. Il comporte un organe protecteur 1 d'un ensemble mécanique qui comprend un outil coupant 2. On entend par - outil coupant - tout outil rotatif tranchant comme des forets, des fraises par exemple, ou permettant le ponçage comme, par exemple, des têtes à poncer. Dans un mode de réalisation préféré, l'ensemble mécanique comporte des moyens d'entraînement 3 dudit outil coupant 2. L'organe protecteur 1 peut par exemple être un carter et les moyens d'entraînement 3 de l'outil coupant 2 comprendre un moteur et un piston. Lesdits moyens d'entraînement 3 et l'outil coupant 2 définissent un axe 4 centré sur des moyens de première électrode 5, de diamètre intérieur D (typiquement entre 1 et 8 mm), d'un spectromètre 6 à décharge luminescente.Figure 1 shows the device for positioning a sample according to the invention. It comprises a protective member 1 of a mechanical assembly which includes a cutting tool 2. The term "cutting tool" means any rotary cutting tool such as drills, milling cutters for example, or allowing sanding such as, for example, heads with sand. In a preferred embodiment, the mechanical assembly comprises means 3 for driving said cutting tool 2. The protective member 1 can for example be a casing and the driving means 3 for the cutting tool 2 comprise a motor and a piston. Said drive means 3 and the cutting tool 2 define an axis 4 centered on means of the first electrode 5, of internal diameter D (typically between 1 and 8 mm), of a glow discharge spectrometer 6.
Dans un mode de réalisation, l'organe protecteur 1 est monté sur des rails 7 et est susceptible de glisser ou rouler entre deux positions extrêmes, une position rétractée et une position avancée. La position avancée correspond à l'outil coupant 2 inséré au plus profond dans les moyens de première électrode 5. Un échantillon 8 est susceptible d'être monté sur le spectromètre 6 pour analyse. L'échantillon 8 comporte une première face 9 et une seconde face 10. La première face 9 est celle susceptible d'être exposée en partie à une décharge luminescente crée dans le spectromètre 6 et la seconde face 10 est externe audit spectromètre 6 et en vis à vis de l'ensemble mécanique. Les moyens de première électrode 5 comprennent dans un mode de réalisation préféré une anode.In one embodiment, the protective member 1 is mounted on rails 7 and is capable of sliding or rolling between two extreme positions, a retracted position and an advanced position. The advanced position corresponds to the cutting tool 2 inserted deep into the means of the first electrode 5. A sample 8 is capable of being mounted on the spectrometer 6 for analysis. The sample 8 has a first face 9 and a second face 10. The first face 9 is the one likely to be exposed in part to a luminescent discharge created in the spectrometer 6 and the second face 10 is external to said spectrometer 6 and in screw with respect to the mechanical assembly. The first electrode means 5 comprises in a preferred embodiment an anode.
Le dispositif comprend un embout 11 amovible ayant une ouverture 12 à son extrémité de diamètre d' et ayant un axe principal 13 centré sur les moyens de première électrode 5. L'embout 11 est dans un mode de réalisation en Téflon. Cet embout 11 amovible comporte une source de lumière 14 produisant un faisceau lumineux centré sur lesdits moyens de première électrode 5. Le diamètre d du faisceau lumineux est sensiblement égal au diamètre intérieur D des moyens de première électrode 5. Avantageusement, l'amplitude de variation du rapport d/D reste inférieure à dix pour cent. Le diamètre d du faisceau lumineux peut être contrôlé au moyen d'un restricteur de flux. Dans un mode de réalisation avantageux, la source de lumière 14 est une diode laser. Elle est alimentée en courant par une alimentation électrique 15 externe. Le diamètre d' est avantageusement au moins égal au diamètre intérieur D des moyens de première électrode 5 de façon à laisser passer le faisceau lumineux. Dans un premier mode de réalisation, l'embout 11 est positionné sur l'outil coupant 2. Dans un second mode de réalisation il est positionné sur les moyens d'entraînement 3, l'outil coupant 2 ayant été préalablement démonté.The device comprises a removable tip 11 having an opening 12 at its diameter end and having a main axis 13 centered on the means of the first electrode 5. The tip 11 is in an embodiment in Teflon. This removable end piece 11 includes a light source 14 producing a light beam centered on said first electrode means 5. The diameter d of the light beam is substantially equal to the internal diameter D of the first electrode means 5. Advantageously, the amplitude of variation of the d / D ratio remains less than ten percent. The diameter d of the light beam can be controlled by means of a flow restrictor. In an advantageous embodiment, the light source 14 is a laser diode. It is supplied with current by an external power supply 15. The diameter d is advantageously at least equal to the internal diameter D of the first electrode means 5 so as to allow the light beam to pass. In a first embodiment, the end piece 11 is positioned on the cutting tool 2. In a second embodiment it is positioned on the drive means 3, the cutting tool 2 having been previously dismantled.
Dans un premier mode de réalisation (cf. Fig. 2), la source de lumière 14 est insérée suivant l'axe principal 13 de l'embout 11 amovible. L'embout 11 est muni d'une lentille optique 16 de sortie permettant la collimation du faisceau lumineux. Ledit faisceau lumineux est centré sur les moyens de première électrode 5 créant ainsi une tache 17 lumineuse sur la face externe 10 de l'échantillon 8 et permettant ainsi de pointer précisément la partie de la première face 9 qui sera effectivement exposée à la décharge luminescente. Il est ainsi possible de repérer sur la seconde face 10 de l'échantillon 8 et donc de manière externe, ladite partie. Dans un second mode de réalisation (cf. Fig. 3), la source de lumière 14 est placée perpendiculairement à l'axe principal 13 de l'embout 11. Ce dernier comprend donc des moyens de réflexion 18 du faisceau lumineux vers les moyens de première électrode 5. Avantageusement, lesdits moyens 18 comprennent un miroir plan positionné à 45° de l'axe principal 13 de l'embout 11 amovible entre la source de lumière 14 et la sortie de l'embout 11. L'embout 11 est muni d'une lentille optique 16 de sortie permettant la collimation du faisceau lumineux issu de la source de lumière 14. L'invention concerne également un procédé de positionnement d'un échantillon 8 dans lequel on monte un échantillon 8 à analyser contre des moyens de première électrode 5 d'un spectromètre 6 à décharge luminescente. Dans un mode de réalisation, on maintient, pour cela, manuellement l'échantillon 8 en position contre les moyens de première électrode 5 et on réalise le vide dans le spectromètre 6 à l'aide de pompes mécaniques. On monte ensuite un embout 11 amovible sur un ensemble mécanique comprenant un outil coupant 2, ledit embout 11 étant" centré et dans l'axe des moyens de première électrode 5. Dans un mode de réalisation, l'organe protecteur 1 est un carter, l'outil coupant 2 comprend un foret, par exemple.In a first embodiment (see Fig. 2), the light source 14 is inserted along the main axis 13 of the removable tip 11. The tip 11 is provided with an optical output lens 16 allowing the collimation of the light beam. Said light beam is centered on the means of the first electrode 5 thus creating a light spot 17 on the external face 10 of the sample 8 and thus making it possible to precisely point the part of the first face 9 which will be effectively exposed to the luminescent discharge. It is thus possible to locate on the second face 10 of the sample 8 and therefore externally, said part. In a second embodiment (cf. FIG. 3), the light source 14 is placed perpendicular to the main axis 13 of the end piece 11. The latter therefore comprises means 18 for reflecting the light beam towards the means of first electrode 5. Advantageously, said means 18 comprise a plane mirror positioned at 45 ° to the main axis 13 of the removable tip 11 between the light source 14 and the outlet of the tip 11. The tip 11 is provided of an optical output lens 16 allowing the collimation of the light beam coming from the light source 14. The invention also relates to a method of positioning a sample 8 in which a sample 8 to be analyzed is mounted against means of the first electrode 5 of a glow discharge spectrometer 6. In one embodiment, for this, the sample 8 is manually maintained in position against the means of the first electrode 5 and a vacuum is produced in the spectrometer 6 using mechanical pumps. Then a removable end piece 11 is mounted on a mechanical assembly comprising a cutting tool 2, said end piece 11 being " centered and in the axis of the means of the first electrode 5. In one embodiment, the protective member 1 is a casing, the cutting tool 2 comprises a drill, for example.
On éclaire enfin ledit échantillon 8 avec un faisceau lumineux de diamètre d sensiblement égale au diamètre intérieur D des moyens de première électrode 5 et on repère la position du faisceau lumineux sur l'échantillon 8. Dans un mode de réalisation préféré, le faisceau lumineux est issu d'une diode laser. Dans un mode de réalisation, l'organe 1 est en position rétracté et on pointe l'échantillon 8 avec le faisceau. Avantageusement, l'échantillon 8 est monté sur un dispositif de positionnement de précision, par exemple, une table X-Y. Le relevé des positions des zones effectivement exposées à la décharge luminescente permet alors de cartographier la structure de l'échantillon 8 à l'aide du spectromètre à décharge luminescente 6.Finally, said sample 8 is illuminated with a light beam of diameter d substantially equal to the internal diameter D of the first electrode means 5 and the position of the light beam is identified on the sample 8. In a preferred embodiment, the light beam is from a laser diode. In one embodiment, the member 1 is in the retracted position and the sample 8 is pointed with the beam. Advantageously, the sample 8 is mounted on a precision positioning device, for example, an X-Y table. The recording of the positions of the zones actually exposed to the glow discharge then makes it possible to map the structure of the sample 8 using the glow discharge spectrometer 6.
L'invention ne saurait être limitée à la description qui précède et est susceptible de modifications avec l'évolution des technologies. Des substitutions et/ou des modifications dans la structure générale et dans les détails du présent dispositif de positionnement peuvent être réalisées par un homme du métier sans s'écarter de l'esprit de la présente invention.The invention cannot be limited to the above description and is subject to modification with the evolution of technology. Substitutions and / or modifications in the general structure and in the details of the present positioning device can be carried out by a person skilled in the art without departing from the spirit of the present invention.
Ainsi dans un mode de réalisation, l'embout 11 amovible comporte une source de lumière 14 produisant un faisceau lumineux et une lentille optique 16 de sortie focalisant ledit faisceau lumineux sur les moyens de première électrode 5. La tache lumineuse 17 produit par le faisceau lumineux sur la face externe 10 de l'échantillon 8 a un diamètre d" sensiblement égal au diamètre intérieur D des moyens de première électrode 5 et est centrée sur ces moyens Thus in one embodiment, the removable tip 11 comprises a light source 14 producing a light beam and an optical output lens 16 focusing said light beam on the means of the first electrode 5. The light spot 17 produced by the light beam on the external face 10 of the sample 8 has a diameter d "substantially equal to the internal diameter D of the means of first electrode 5 and is centered on these means

Claims

REVENDICATIONS
1. Dispositif de positionnement d'un échantillon dans un spectromètre à décharge luminescente (6) comportant un organe protecteur (1) d'un ensemble mécanique, ledit ensemble mécanique comportant un outil coupant (2) apte à recevoir un embout amovible (11) ayant un axe principal (13), ledit spectromètre à décharge luminescente (6) comprend des moyens de première électrode (5), de diamètre intérieur D, contre lesquels un échantillon (8) à analyser est susceptible d'être monté, ledit échantillon (8) ayant une première face (9) et une seconde face (10), ladite première face (9) étant susceptible d'être exposée en partie à une décharge luminescente crée dans le spectromètre (6) et la seconde face (10) étant externe audit spectromètre (6) et en vis à vis de l'ensemble mécanique, caractérisé en ce que : - l'embout (11) amovible comporte une source de lumière (14) produisant un faisceau lumineux centré sur lesdits moyens de première électrode (5).1. Device for positioning a sample in a glow discharge spectrometer (6) comprising a protective member (1) of a mechanical assembly, said mechanical assembly comprising a cutting tool (2) capable of receiving a removable tip (11) having a main axis (13), said glow discharge spectrometer (6) comprises first electrode means (5), of internal diameter D, against which a sample (8) to be analyzed can be mounted, said sample ( 8) having a first face (9) and a second face (10), said first face (9) being capable of being exposed in part to a luminescent discharge created in the spectrometer (6) and the second face (10) being external to said spectrometer (6) and opposite the mechanical assembly, characterized in that: - the removable end piece (11) comprises a light source (14) producing a light beam centered on said first electrode means ( 5).
2. Dispositif de positionnement d'un échantillon selon la revendication 1 , caractérisé en ce que le faisceau lumineux a un diamètre d sensiblement égal au diamètre intérieur D des moyens de première électrode (5).2. Device for positioning a sample according to claim 1, characterized in that the light beam has a diameter d substantially equal to the internal diameter D of the means of the first electrode (5).
3. Dispositif de positionnement d'un échantillon selon l'une des revendications 1 et 2, caractérisé en ce que la source de lumière (14) est une diode laser.3. Device for positioning a sample according to one of claims 1 and 2, characterized in that the light source (14) is a laser diode.
4. Dispositif de positionnement d'un échantillon selon l'une des revendications 1 à 3, caractérisé en ce que la source de lumière (14) est placée suivant l'axe principal (13) de l'embout (11).4. Device for positioning a sample according to one of claims 1 to 3, characterized in that the light source (14) is placed along the main axis (13) of the nozzle (11).
5. Dispositif de positionnement d'un échantillon selon l'une des revendications 1 à 3, caractérisé en ce que la source de lumière (14) est placée perpendiculairement à l'axe principal (13) de l'embout (11). 5. Device for positioning a sample according to one of claims 1 to 3, characterized in that the light source (14) is placed perpendicular to the main axis (13) of the nozzle (11).
6. Dispositif de positionnement d'un échantillon selon la revendication 5, caractérisé en ce qu'un miroir plan (18) est inséré dans l'embout (11) et positionné à 45° de l'axe principal (13) de l'embout (11 )6. Device for positioning a sample according to claim 5, characterized in that a plane mirror (18) is inserted in the end piece (11) and positioned at 45 ° from the main axis (13) of the end cap (11)
7. Dispositif de positionnement d'un échantillon selon l'une des revendications 1 à 6, caractérisé en ce que l'embout est muni d'une lentille optique (16) de sortie. 7. Device for positioning a sample according to one of claims 1 to 6, characterized in that the end piece is provided with an optical lens (16) for output.
8. "Procédé de positionnement d'un échantillon dans un spectromètre à décharge luminescente caractérisé en ce que ;8. "Method for positioning a sample in a glow discharge spectrometer characterized in that;
-°on monte un échantillon (8) à analyser contre des moyens de première électrode (5) d'un spectromètre à décharge luminescente (6), -°on monte un embout (11) amovible sur un ensemble mécanique comprenant un outil coupant (2), ledit embout (11) étant centré et dans l'axe des moyens de première électrode (5),- ° a sample (8) to be analyzed is mounted against means of the first electrode (5) of a luminescent discharge spectrometer (6), - ° a removable tip (11) is mounted on a mechanical assembly comprising a cutting tool ( 2), said end piece (11) being centered and in the axis of the means of the first electrode (5),
-°on éclaire ledit échantillon (8) avec un faisceau lumineux de diamètre d sensiblement égal au diamètre intérieur D des moyens de première électrode (5),- the said sample (8) is illuminated with a light beam of diameter d substantially equal to the internal diameter D of the means of the first electrode (5),
-°on repère la position du faisceau lumineux sur l'échantillon (8).- ° the position of the light beam is located on the sample (8).
9.°Procédé de positionnement d'un échantillon selon la revendication 10, caractérisé en ce qu'on cartographie la structure de l'échantillon (8) à l'aide du spectromètre à décharge luminescente (6). 9. A method of positioning a sample according to claim 10, characterized in that the structure of the sample (8) is mapped using the glow discharge spectrometer (6).
EP02751254A 2001-06-18 2002-06-17 Device and method for positioning a sample mounted on a luminous discharge spectrometer Ceased EP1402246A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0107986A FR2826121B1 (en) 2001-06-18 2001-06-18 DEVICE AND METHOD FOR POSITIONING A SAMPLE MOUNTED ON A LUMINESCENT DISCHARGE SPECTROMETER
FR0107986 2001-06-18
PCT/FR2002/002083 WO2002103336A1 (en) 2001-06-18 2002-06-17 Device and method for positioning a sample mounted on a luminous discharge spectrometer

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EP1402246A1 true EP1402246A1 (en) 2004-03-31

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EP (1) EP1402246A1 (en)
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JP7281468B2 (en) * 2018-08-10 2023-05-25 株式会社堀場製作所 Glow discharge emission analysis method and glow discharge emission analysis device
CN110596076B (en) * 2019-07-09 2022-03-15 中国航发北京航空材料研究院 Automatic sample loading device of glow discharge spectrometer and loading method thereof

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FR2174652B3 (en) * 1972-03-06 1975-03-07 Siderurgie Fse Inst Rech
US4623229A (en) * 1983-09-29 1986-11-18 Photon Sources, Inc. Articulated laser arm
US4762411A (en) * 1985-03-15 1988-08-09 The Boeing Company Boresight alignment verification device
CA1261486A (en) * 1986-04-16 1989-09-26 Michael A. Lucas Systems for the direct analysis of solid samples by atomic emission spectroscopy
GB8804290D0 (en) * 1988-02-24 1988-03-23 Vg Instr Group Glow discharge spectrometer
US5086226A (en) * 1989-05-31 1992-02-04 Clemson University Device for radio frequency powered glow discharge spectrometry with external sample mount geometry
GB9000547D0 (en) * 1990-01-10 1990-03-14 Vg Instr Group Glow discharge spectrometry
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JP3502915B2 (en) * 1998-02-04 2004-03-02 理学電機工業株式会社 Glow discharge emission spectrometer

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US20040233427A1 (en) 2004-11-25
WO2002103336A1 (en) 2002-12-27
FR2826121A1 (en) 2002-12-20
US7227635B2 (en) 2007-06-05
FR2826121B1 (en) 2004-02-20

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