EP1398575B1 - Vorrichtung zur Geräuschminderung von einer Lüftereinheit - Google Patents

Vorrichtung zur Geräuschminderung von einer Lüftereinheit Download PDF

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Publication number
EP1398575B1
EP1398575B1 EP02255902A EP02255902A EP1398575B1 EP 1398575 B1 EP1398575 B1 EP 1398575B1 EP 02255902 A EP02255902 A EP 02255902A EP 02255902 A EP02255902 A EP 02255902A EP 1398575 B1 EP1398575 B1 EP 1398575B1
Authority
EP
European Patent Office
Prior art keywords
fan unit
baffles
fan
shaped guides
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02255902A
Other languages
English (en)
French (fr)
Other versions
EP1398575A1 (de
Inventor
Zong Tang c/o Kyodo-Allied Industries Ltd. Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyodo-Allied Industries Ltd
Original Assignee
Kyodo-Allied Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyodo-Allied Industries Ltd filed Critical Kyodo-Allied Industries Ltd
Priority to DE60230616T priority Critical patent/DE60230616D1/de
Priority to AT02255902T priority patent/ATE419496T1/de
Priority to EP02255902A priority patent/EP1398575B1/de
Publication of EP1398575A1 publication Critical patent/EP1398575A1/de
Application granted granted Critical
Publication of EP1398575B1 publication Critical patent/EP1398575B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/007—Ventilation with forced flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/44—Fluid-guiding means, e.g. diffusers
    • F04D29/441—Fluid-guiding means, e.g. diffusers especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/663—Sound attenuation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24—Means for preventing or suppressing noise

Definitions

  • the present invention relates to an apparatus for minimising noise from air moving devices.
  • the present invention pertains to a system for reducing noise from a fan unit in a clean room facility.
  • the problem associated with the particle content in a clean room facility is exacerbated in confined space or enclosures such as a multi-story wafer fabrication plant.
  • the present invention envisages the height of the ceiling to be less than three meters. Because of the low height clearance, the noise from fan units is quite pronounced.
  • a known fan unit is disclosed in US6030186 .
  • the present invention provides a fan unit comprising at least a fan blower disposed on a base plate, a top housing coupled to said base plate with an inlet opening, and side housing coupled to said top housing for enclosing the fan unit, said side housing further having an outlet opening, the fan being for drawing air through the inlet opening and for discharging air through the outlet opening, the fan unit having at least a pair of shaped guides disposed on said base plate within said fan unit and circumferentially of said fan blower for receiving air discharged therefrom; whereby the flow of air is guided with reduced turbulence compared to a fan unit which does not have the shaped guides, such that noise from said fan unit is minimized without requiring conventional sound insulation material in contact with the air flow path and without introducing contaminants from such sound insulation material into the airflow through the fan unit; characterised in that said shaped guides form a pair of air flow channels, and a neck portion for each flow channel where each air flow channel is of significantly reduced width for creating a high pressure air zone within each neck portion for creating substantially
  • At least a pair of diffusion baffles disposed within the fan unit and at an output of said shaped guides for diffusing the airflow therefrom.
  • at least a pair of guide baffles disposed within said fan unit for directing airflow below said base plate.
  • the at least a pair of guide baffles may be adjacent to said diffusion baffles.
  • the shaped guides may be coupled to said base plate with a plurality of clips, and the diffusion baffles may be disposed at an angle of between 30° and 60°, preferably 45°, with the surface of said side housing.
  • the lower edges of the guide baffles may be substantially sloping or substantially straight.
  • the shaped guides may be substantially S-shaped and have oppositely curved ends.
  • one end of each of the shaped guides has a radius of curvature greater than the other end to form a flattened S-shape at the one end. It may even be substantially straight.
  • One or more of: the diffusion baffles, the guide baffles and the shaped guides may be perforated.
  • the perforation may be over a part only or all of each of the baffles and/or guides.
  • the perforations may be covered by a cloth.
  • the guide baffles may be curved.
  • the shaped guides may be substantially S-shaped and may have oppositely curved ends.
  • the one end of each of the shaped guides may be substantially straight.
  • the guide baffles may be curved or flat.
  • a fan unit for minimising noise is described.
  • numerous specific details are set forth such as guides and baffles, etc. in order to provide a thorough understanding of the present invention.
  • well-known parts such as the motors for the fan blower and ducts connected to the fan units are not shown in order not to obscure the present invention.
  • FIG. 1 is an exploded, right side, perspective elevation view of a fan unit being integrated as part of a fan unit 10.
  • the fan unit of FIG. 1 is not according to the invention, because of the shape of the guides 24'.
  • a fan unit according to the invention is obtained by replacing the guides 24' with guides 24 as shown in Figure 4 . Any description of parts of Figures 1 and 2 apart from the guides 24' applies to the invention as well.
  • the fan unit comprises a fan blower 12 disposed within a base plate 14, a top housing 16 and side housings 22 respectively.
  • the fan blower 12 is supported in the base plate 14 by a mounting 20 on the underside of the base plate 14.
  • a motor disposed underneath the fan blower 12 for providing rotational movement for the fan blower.
  • the fan unit draws air externally from an air inlet 18 and discharges it via outlet opening 19 as shown in FIG. 2 .
  • a filter 32 for removing large particles or contaminants.
  • the fan unit 10 is effective in circulating or ventilating air in a clean room facility, the noise generated by such unit is annoying. It is a practice in the industry to insulate the fan unit by lining the interior of the fan filter with insulating materials such as sponge, PVC foam, or fibreglass. Unfortunately, over time such insulating materials tend to contaminate the clean room facility as particles from the surface are dislodged and introduced into the airflow through the fan unit. Without the knowledge of the clean room operator, the fan unit becomes a source of contaminants. In the process, the output from clean room facility such as wafer dies, compact discs, or disk drives, is contaminated.
  • geometric guides are placed in strategic locations within the fan unit to minimise noise from it without contaminating the air flowing through it.
  • Baffles may also be placed along the path of the airflow.
  • a pair of shaped guides 24' is disposed on either side and circumferentially of the fan blower.
  • a set of diffusion baffles 26 and guide baffles 28 for diffusing and directing air from the shaped guides 24 may also be provided.
  • One or more of the diffusion baffles 26, guide baffles 28 and shaped guides 24 may be porous, if desired. The porosity may be by using perforations; may be partial or complete over the area of the baffles 26, 28 and/or guides 24'.
  • Guide baffles 28 may be curved, if desired.
  • FIG. 4 is a top, plan elevation view of a fan unit according to the invention, in which guides 24 according to the invention can be seen. Apart from the shape of the guides, FIG. 4 corresponds to section A-A in FIG. 2 .
  • the shaped guides 24 are contoured to receive the discharged air from the fan blower 12 (shown in the dotted circle) and to guide the flow of air with minimum amount of turbulence towards the diffusion baffles 26.
  • the shaped guides are made of metallic material whose spring back effect enable the installer to install it easily by inserting it between a plurality of clips 36 disposed on the base plate 14.
  • each guide 24 may have a flattened "S" shape by having one end 21 of a greater radius of curvature than end 17.
  • Ends 21 have a varying radius of curvature and blend relatively smoothly with their respective side walls, as is shown in FIG. 4 , being substantially tangential to the side wall. The variance in curvature progressively increases the radius of curvature towards the end of end 21.
  • the end 21 may be straight, if desired.
  • the embodiment of FIG. 4 gives more open flow characteristics.
  • the diffusion baffles 26 are at an angle of between 30° and 60°, preferably 45°, to the surface of the side housing.
  • Each baffle 26 may be a sheet of metal, and may have a matrix of holes or perforations over all or part of its surface. In one preferred form of the present invention, the perforations are 3.3 mm in diameter with about 50% spacing.
  • the diffusion baffles 26 are disposed at the angles given above to diffuse the air flowing from the shaped guides 24.
  • Each baffle 26 is preferably a metal plate and, in the form described above, has perforations in it. There is a space 31 behind it. Some of the airflow will contact the metal plate of baffle 26 and be deflected downwardly. Some of the airflow will pass through the perforations.
  • the size of the perforations will determine whether or not the air will slow when passing through the perforations. Due to space 31 behind baffles 26, air pressure in space 31 will increase to be the same as that on the perforations at the strongest part of the airflow. This will force air out through perforations in baffles 26 where the airflow is not as strong.
  • the space 31 may have insulation or other material in it to reduce air turbulence in space 31 and therefore reduce noise.
  • a similar space 37 may be provided behind each shaped guide 24. Space 37 may contain insulation, if desired, particularly if shaped guides 24 are partially or completely perforated.
  • guide baffles 28 may also be perforated, with the perforations being over all or part of their surfaces. Similarly for guides 24. For baffles 26, 28 and guides 24, if perforated, a cloth covering may be placed over all or some of the perforations to further reduce noise. By using a cloth, the dislodgement and contamination problem is avoided.
  • Guide baffles 28 Adjacent and below the lower edge of the diffusion baffles 26 are disposed the guide baffles 28 for redirecting the flow of air below the base plate.
  • Guide baffles 28 may be straight or, as illustrated, curved. Although the guide baffles 28 can have a straight leading edge, it is preferred they have straight but sloping leading edges 35 as illustrated in FIGS. 2 and 4 .
  • FIG. 4 the placement of shaped guides 24, the diffusion baffles 26, and the guide baffles 28 are symmetrical to each other with reference to a rotational axis of 180 degrees centred at the fan blower 12.
  • the V shaped baffle 30 is disposed below the fan blower 12 mounting for distributing the air flow evenly before discharging it through the outlet opening 19 of the fan unit 10.
  • the two shaped baffles 24 create two air-flow channels 23 through which air is moved towards the diffusion baffles 26.
  • the channels 23 have a narrow neck 25 formed by the curve of baffles 24 forming a projection 33 that is significantly closer to (i.e. less spaced from) fan unit 12.
  • the neck 25 creates a constriction on air flow, and thus a high pressure air zone within neck 25. Air will flow from high pressure to low pressure. This therefore forces all air in the neck 25 into the two channels 23 so that the air flow will be strongly unidirectional as air will generally not flow from low pressure to high pressure. This significantly reduces turbulence. As such, noise is significantly reduced, and air-flow efficiency is increased.
  • the outlet ends of channels 23 are large increasing air flow efficiency.
  • FIG. 6 is a chart comparing the average velocity of airflow of a fan unit operated in accordance with the present invention and not in accordance with the present invention over a range of fan blower settings (measured in Hz). The average velocity of airflow is measured at fifteen different points in the fan fitter unit and illustrated in FIG. 5 respectively. Referring to FIG. 6 , one can appreciate that the average velocity of a fan unit operated in accordance with the present invention is higher and more even than that not operated in accordance with the present invention. It is evident that pressure loss of a fan unit operating in accordance with the present invention is less than that without the present invention. As such, considerable energy saving over time can be achieved.
  • FIG. 7 is a chart comparing the noise level from a fan unit with and without the present invention and is measured at a location one meter directly below the outlet of the unit. Measured one meter below a fan unit, the present invention allows the fan unit to operate with far less noise than one without the present invention.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Cookers (AREA)
  • Control Of Electric Motors In General (AREA)

Claims (18)

  1. Lüftereinheit (10), umfassend mindestens ein auf einer Grundplatte (14) angeordnetes Lüftergebläse (12), ein an die genannte Grundplatte (14) gekoppeltes oberes Gehäuse (16) mit einer Einlassöffnung (18) und ein zum Einschließen der Lüftereinheit (10) an das genannte obere Gehäuse (16) gekoppeltes seitliches Gehäuse (22), wobei das genannte seitliche Gehäuse (22) weiter eine Auslassöffnung (19) hat und der Lüfter (12) zum Saugen von Luft durch die Einlassöffnung (18) und zum Ausblasen von Luft durch die Auslaßöffnung (19) ist, wobei die Lüftereinheit (10) mindestens ein Paar geformter Führungen (24) aufweist, die auf der genannten Grundplatte (14) in der genannten Lüftereinheit (10) und in Umfangsrichtung vom genannten Lüftergebläse (12) angeordnet sind, um davon ausgeblasene Luft zu empfangen; wodurch der Strom von Luft, verglichen mit einer Lüftereinheit (10), die die geformten Führungen (24) nicht aufweist, mit verringerter Turbulenz geführt wird, so dass Lärm von der genannten Lüftereinheit minimiert wird, ohne herkömmliches Schallisolierungsmaterial in Kontakt mit dem Luftströmungspfad zu benötigen und ohne Verunreinigungen von solchem Schallisolierungsmaterial in den Luftstrom durch die Lüftereinheit einzuführen, wobei
    die genannten geformten Führungen (24) ein Paar Luftstromkanäle (23) und einen Halsabschnitt (25) für jeden Strömungskanal (23) bilden, wobei jeder Luftströmungskanal (23) eine wesentlich reduzierte Breite hat, um eine Hochdruek-Luftzone in jedem Halsabschnitt (25) zu erzeugen, um im Wesentlichen unidirektionalen Luftstrom in jedem Luftströmungskanal (23) zu erzeugen, dadurch gekennzeichnet, dass der Krümmungsradius eines Endes (21) der geformten Führungen (24) fortschreitend entlang dem einen Ende (21) zunimmt, wobei das eine Ende (21) relativ gleichmäßig in eine assoziierte Seitenwand übergeht.
  2. Lüftereinheit nach Anspruch 1, dadurch gekennzeichnet, dass mindestens ein Paar in der Lüftereinheit und an einem Ausgang der genannten geformten Führungen (24) angeordneter Streubleche (26) zum Streuen des Luftstroms davon vorgesehen ist.
  3. Lüftereinheit nach Anspruch 1 oder Anspruch 2, dadurch gekennzeichnet, dass mindestens ein Paar in der genannten Lüftereinheit angeordneter Führungsbleche (28) zum Leiten von Luftstrom unter die genannte Grundplatte (14) vorgesehen ist.
  4. Lüftereinheit nach Anspruch 3, wenn an Anspruch 2 angehängt, wobei sich das mindestens eine Paar von Führungsblechen (28) neben dem mindestens einen Paar von Streublechen (26) befindet.
  5. Lüftereinheit nach Anspruch 3 oder Anspruch 4, dadurch gekennzeichnet, dass die Lüftereinheit weiter mindestens ein an der Unterseite der Grundplatte (14) angeordnetes V-förmiges Umlenkblech (30) umfasst, um den Luftstrom gleichmäßig zu verteilen, wobei der Strom von Luft, im Vergleich zu einer Lüftereinheit, die die geformten Führungen (24), das Paar von Streublechen (26), das Paar von Führungsblechen (28) und die V-förmigen Umlenkbleche (30) nicht aufweist, mit verringerter Turbulenz geführt wird.
  6. Lüftereinheit nach einem der Ansprüche 3 bis 5, dadurch gekennzeichnet, dass die genannten geformten Führungen (24) mit einer Vielzahl von Klammern (36) an die genannte Grundplatte (14) gekoppelt sind; die genannten Streubleche (26) in einem Winkel von zwischen 30° und 60° zur Oberfläche des genannten seitlichen Gehäuses (22) angeordnet sind; und die Unterkanten (35) der Führungsbleche (28) im Wesentlichen geneigt sind.
  7. Lüftereinheit nach Anspruch 5, dadurch gekennzeichnet, dass der Winkel 45° beträgt.
  8. Lüftereinheit nach einem der Ansprüche 3 bis 7, dadurch gekennzeichnet, dass die Unterkanten (35) der Führungsbleche (28) zwischen den Ecken im Wesentlichen gerade sind.
  9. Lüftereinheit nach einem der Ansprüche 3 bis 8, dadurch gekennzeichnet, dass die Streubleche (26) und/oder die Führungsbleche (28) und/oder die geformten Führungen (24) gelocht sind.
  10. Lüftereinheit nach Anspruch 9, dadurch gekennzeichnet, dass die Lochung nur an einem Teil der Führungsbleche (26, 28), der Streubleche (26) und/oder der geformten Führungen (24) vorhanden ist.
  11. Lüftereinheit nach Anspruch 9, dadurch gekennzeichnet, dass die Lochung überall an den Führungsblechen (26, 28), Streublechen (26) und/oder geformten Führungen (24) vorhanden ist.
  12. Lüftereinheit nach Anspruch 10 oder Anspruch 11, wobei die Lochungen von einem Tuch bedeckt sind.
  13. Lüftereinheit nach einem der Ansprüche 1 bis 12, wobei die geformten Führungen (24) im Wesentlichen S-förmig sind und entgegengesetzt gekrümmte Enden (17, 21) haben.
  14. Lüftereinheit nach Anspruch 13, wobei jeweils ein Ende (21) der geformten Führungen (24) einen größeren Krümmungsradius hat als das andere Ende (17), um eine abgeflachte S-Form an dem einen Ende (21) zu bilden.
  15. Lüftereinheit nach Anspruch 14, wobei jeweils das eine Ende (21) der geformten Führungen (24) im Wesentlichen gerade ist.
  16. Lüftereinheit nach einem der Ansprüche 3 bis 12, wobei die Führungsbleche (28) gekrümmt sind.
  17. Lüftereinheit nach einem der Ansprüche 3 bis 12, wobei die Streubleche (26) gekrümmt sind.
  18. Lüftereinheit nach einem der Ansprüche 3 bis 12, wobei die Führungsbleche (28) eben sind.
EP02255902A 2002-08-23 2002-08-23 Vorrichtung zur Geräuschminderung von einer Lüftereinheit Expired - Lifetime EP1398575B1 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE60230616T DE60230616D1 (de) 2002-08-23 2002-08-23 Vorrichtung zur Geräuschminderung von einer Lüftereinheit
AT02255902T ATE419496T1 (de) 2002-08-23 2002-08-23 Vorrichtung zur geräuschminderung von einer lüftereinheit
EP02255902A EP1398575B1 (de) 2002-08-23 2002-08-23 Vorrichtung zur Geräuschminderung von einer Lüftereinheit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02255902A EP1398575B1 (de) 2002-08-23 2002-08-23 Vorrichtung zur Geräuschminderung von einer Lüftereinheit

Publications (2)

Publication Number Publication Date
EP1398575A1 EP1398575A1 (de) 2004-03-17
EP1398575B1 true EP1398575B1 (de) 2008-12-31

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Family Applications (1)

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EP02255902A Expired - Lifetime EP1398575B1 (de) 2002-08-23 2002-08-23 Vorrichtung zur Geräuschminderung von einer Lüftereinheit

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EP (1) EP1398575B1 (de)
AT (1) ATE419496T1 (de)
DE (1) DE60230616D1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101573451B1 (ko) 2015-09-09 2015-12-01 지용섭 층류형 혼합챔버 구조의 저소음 청정공조유니트
KR101573772B1 (ko) 2015-09-09 2015-12-02 지용섭 항균기능을 갖는 콤팩트형 팬 필터 유니트 및 이를 이용한 청정공조시스템

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2951247B1 (fr) * 2009-10-14 2012-01-27 France Air Caisson de ventilation a haut rendement
CN112061365B (zh) * 2020-08-10 2022-04-22 上海外高桥造船有限公司 一种远洋客船用室内降噪装置
DE102023105981A1 (de) 2023-03-10 2024-09-12 Rosenberg Ventilatoren Gmbh Gehäuse für eine Ventilatoreinrichtung und Ventilatoreinrichtung mit einem derartigen Gehäuse

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3438710C2 (de) * 1984-10-23 1986-11-27 Wilhelm Gebhardt Gmbh, 7112 Waldenburg Dachventilator
US5803721A (en) * 1996-10-29 1998-09-08 Enviroflex, Inc. Clean room fan unit
WO1999011984A1 (en) * 1997-09-03 1999-03-11 Kyodo-Allied Industries Ltd. A method and apparatus for minimising noise from fan filter unit
DE69929618T2 (de) * 1999-09-30 2006-10-05 Kyodo-Allied Industries Ltd. Vorrichtung zur geräuschverminderung eines gebläses

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101573451B1 (ko) 2015-09-09 2015-12-01 지용섭 층류형 혼합챔버 구조의 저소음 청정공조유니트
KR101573772B1 (ko) 2015-09-09 2015-12-02 지용섭 항균기능을 갖는 콤팩트형 팬 필터 유니트 및 이를 이용한 청정공조시스템

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Publication number Publication date
EP1398575A1 (de) 2004-03-17
DE60230616D1 (de) 2009-02-12
ATE419496T1 (de) 2009-01-15

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