EP1390693A1

EP1390693A1 - Sensor device for performing rapid optical measurement of distances according to the confocal optical imaging principle

Info

Publication number: EP1390693A1
Application number: EP02729892A
Authority: EP
Inventors: Anton Schick
Original assignee: Siemens AG
Current assignee: NanoFocus AG
Priority date: 2001-05-28
Filing date: 2002-05-15
Publication date: 2004-02-25
Anticipated expiration: 2022-05-15
Also published as: JP2004526979A; WO2002097364A1; DE10125885B4; DE10125885A1; DE50214645D1; US20050002042A1; WO2002097364A8; JP3947159B2; US7038793B2; EP1390693B1

Abstract

The invention relates to a sensor device for performing rapid optical measurement of distances according to the confocal optical imaging principle in order to determine distance values and/or height values of a surface. The sensor device comprises a point-shaped light-emitting element that is arranged on an optical axis, a reflector, which is arranged perpendicular to the optical axis and which can be displaced along the optical axis, imaging optics centered with regard to the optical axis, and a point-shaped light-receiving element that is situated at the same location as the light-emitting element. The components of the sensor device are arranged in such a manner that: light emitted by the light-emitting element is reflected by the reflector; while the reflector is displaced, the imaging optics focus the light reflected by the reflector at least once onto the surface to be measured; the focussed light is at least partially backscattered by the surface to be measured, and; while the reflector is displaced, the imaging optics focus, via the reflector, the backscattered light at least once onto the light-receiving element.

Description

description

Sensor device for fast optical distance measurement based on the confocal optical imaging principle

The invention relates to a sensor device for rapid optical distance measurement and for determining distance ^¬ and / or height values of a surface, in particular for three-dimensional surface measurement.

For assembly systems in the field of electronics production, e.g. for automatic placement machines for printed circuit boards, the demands on the positional tolerances of the components are increasing due to the increasing miniaturization of components. The demand for placement speed has also increased significantly in recent years and will probably continue to increase in the future. As a result of these high requirements, assembly systems will also need high-precision and fast distance or height sensors in addition to high-precision and fast position sensors for components. Such sensors are e.g. required for checking the coplanarity of the connector pins of components. Another application for distance or height sensors is the distance control between a component and the circuit carrier during the mounting process.

Devices known hitherto for recording height raster images, which consist of a multiplicity of three-dimensional points of object surfaces, are essentially based on the so-called triangulation method. A laser beam scans the surface of the object to be examined. While the two planar location coordinates of a certain surface point are known from the current positioning of the laser beam, the height coordinate of the surface point currently to be measured is detected by at least one laterally arranged lens in conjunction with a location-sensitive detector. By sequential lighting the three-dimensional surface to be examined by means of the laser beam can thus be the area to be examined upper ^¬ measured.

The resolution of optical distance sensors that use the triangulation method depends on the so-called triangulation angle. Since the resolution capacity of the distance sensors must also be improved with a future reduction in size of the components, the triangulation angle must be increased in such optical distance sensors, but this leads to a considerable increase in existing shading problems. Another disadvantage of optical distance sensors based on the triangulation method is that the surfaces to be examined i. a. have different optical scattering power. Precise distance measurements are i. a. only possible for objects whose surface is isotropic, i.e. has an equally pronounced scattering power in all directions of the laser beam striking the surface. Such an isotropic scattering capacity is generally not guaranteed, in particular in the case of metallically reflecting or also transparent surfaces.

A method known for the three-dimensional measurement of surface structures is based on the so-called confocal

Principle. Here, a point-shaped light source, which is usually defined by a pinhole, is imaged on the surface of the object to be detected. The light scattered back from the surface is in turn imaged on an almost punctiform detector, which is also usually defined by a pinhole. The light intensity striking the detector is at its maximum when both the object and the detector plane are actually in the focus of the respective optics. If the object surface to be examined is outside the focal plane, the measuring beam is expanded in front of the point-like detector and the measurable intensity decreases sharply. In a known sensor ^¬ _f olgenden be based on Figure 1 to the optical device described distance measurement according to the confocal principle. The sensor device 100 includes a light source 101, a first aperture 102, a Strahltei ^¬ ler 103, a second aperture plate 104, a light detector 105 and a lens 106th The first lens hood 102 is arranged un ^¬ indirectly in front of the light source 101 so that the system acts from light source 101 and the first aperture plate 102 as a point light source which has an effective light-emitting area corresponding to the cross section of the opening of the first aperture plate 102nd Correspondingly, the second pinhole 104 is arranged directly in front of the light detector 105. The light detector 105, the second pinhole 104, the beam splitter 103, the objective 106 and the point of the surface to be measured currently to be measured (not shown) lie on an axis which coincides with the optical axis of the objective 106.

The beam path in the sensor device 100 is explained below. The light emitted by the point light source first strikes the beam splitter 103. This is inclined relative to the optical axis, so that the light emitted by the point light source is directed after reflection at the beam splitter 103 onto the objective 106 and is focused by it onto a focal point 107 which is at least in the vicinity of the surface to be measured. The light at least partially reflected back from the surface is in turn imaged onto the second pinhole 104 by means of the objective 106. Only the light that is transmitted through the beam splitter 103 without further deflection contributes to this illustration. The two diaphragms 102 and 104 are arranged confocally relative to the focal plane of the lens 106, ie the distance between the second pinhole 104 and the lens 106 is equal to the sum of the distances between the first pinhole 102 and the beam splitter 103 and between the beam splitter 103 and the lens 106. For the opti- see pictures signified ^¬ within the sensor apparatus 100 tet this is that the aperture 102 is imaged by reflection at the beam splitter 103 from the lens 106 to the focal point 107 and the focal point 107 by the lens 106 imaged on the second aperture plate 104 is ,

The actual distance measurement takes place in that the entire sensor device 100 is moved in the z-direction 108 relative to the surface, not shown, to be measured. In the course of this movement, the light intensity measured by the light detector 105 is detected. The course 109 of the measured light intensity as a function of the distance between the sensor device 100 and the surface to be measured is sketched in the insert 110. A maximum 111 is shown precisely when the focal point 107 lies directly on the surface to be measured. In other words, the maximum 111 is obtained when the opening of the first aperture 102 is mapped onto the smallest possible area on the surface to be measured. With the confocal arrangement of the two pinhole diaphragms 102 and 104, this means that the illuminated area on the surface to be measured (not shown) is imaged on the smallest possible area by means of the objective 106, which coincides with the opening of the second pinhole diaphragm 104. The distance from the corresponding point of the surface to be measured to the sensor device 100 can be determined from the course 109 of the light intensity, in particular from the exact position of the maximum 111. An entire three-dimensional surface profile of an unknown structure is then determined by sequential distance measurements between the sensor device 100 and individual points on the surface to be measured.

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P P P- P P Φ P φ Z P- P φ P- 01 P P Ω P Ω P- t a P 01

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01 PM oi φ P Φ P φ P> rt P- P> PP ⁴ 03 3 P> 03 oi 3 d iQ φ P> P-

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Φ P- d o 03 d rt Φ P d P Φ P- N rt H Ω

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dc to>P> P ¹ π o Cπ o Cπ o cπ

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Ω P 01 _* et P- PP φ P 3 li Φ P Ω rt 01 H Ω P- PP 3 Hi 3 03 φ 3 NP d tr 03 03 rt rt P- pj: PPO tr Φ o 01 P ⁴ rt P PJ: P- rt pj: P- PL Φ rt tr Φ Φ O tr ¹ HE Φ CΛ Φ tr CΛ et VP Ω IV Φ Φ M EP • d rt Φ e EP Φ φ

Φ P PJ φ PV P- Hl P d φ 01 Φ Φ d rt PP ⁴ Φ P 01 PP tr P tr rt Φ d 03 01 03 et Ω Φ Hi Φ ^• P dd O φ μ. P- 01 Hi Φ Φ w et tr Φ rt φ o

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Z P> P Φ P- 01 rt P "P dod P- O 03 PH dd 01 d PP ¹ d ZP ⁴

Φ et Φ P P- P Ω Λ Φ P Φ P Ω P P- d Φ φ Φ P Φ z d P- P Φ φ tr Hi

P P- P- Φ P tr ddd H <! d P ⁴ <! dd 3 d P φ φ d PP o P

P <! d H Φ N Φ P dodo P o φ P> P ¹ φ d HP d P tr Φ φ Φ 03 03 z LP Φ LP s: P rt φ P φ PP 01 P- P LP J rt P- ιq tr φ Φ lp

PN φ φ d Φ P Φ PP P- rt _" » 01 01 rt d φ φ & 01 Φ ddd -l tr d ¹ P- IV Φ P- P- P- P rt P- d P- Φ P- 01 P tr o <! ö Φ

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P Φ rt O tr φ Ό P Hl P et Ω P et φ tr P φ rt rt P φ P- tr P P- N d Φ Φ

P a P- P et P- φ P LQ P Φ d tr φ d P ⁾ p • rt P 03 P- d IV dd P

• Φ NZH ¹ Φ P ⁾ dd Φ Ω d P φ Hi S ^ Φ _^ »φ M d LQ P tu

NP d φ Φ rt Φ 01 oi _^ q PP ⁴ ιq 03 IV rt P- o ü P- P ιq φ rt PJ Φ zd ιq P P- * d P Φ rt rt Ω a P ⁾ 01 Ω r P d 01 P - Φ rt Z φ P rt P P- PP ⁾ isi er O Φ P P- Φ P Φ tr • Ö 3 P ⁴ Φ φ P od P Φ Φ p- LQ φ φ Φ 01 s: Φ tr PP dd OP o p- Φ rt 01 PJ LP Ό φ> Q rt PP rt N rt Φ 01 l_l. ds: ^L P rt P- P> o 03 rt P- d

Φ α> • s: φ P- o φ o P φ S P- Φ Φ Φ P dd P- o P- CΛ d Φ P d Φ d φ φ Φ d rt d Λ ⁴ tr φ P- O 0) P - rt Φ Φ 01 P 03 "d W PJ 03 01 LP

P 03 P- P ü P- * »Φ rt l_l. 3 d P Ω 01 P rt P 01 01 φ P- rt a H) f. Hi rt Hi P- rt Φ 01 φ φ dd ⁴ rt φ Φ iQ Φ P φ P- PJ ad: Φ d tr ¹ d: Φ O φ Φ ≤ f. P Φ IV V 3 φ P d P- Φ P oi P? Vd Φ P ⁴ P φ α P- tr P 03 od 01 P- rt O d 01 P tr P α rt 01 P Hi 01 φ Ω P; v L > tr α rt 01 d N d P- rt P rt 01 Φ tr PJ d p-

P ⁴ do rt d Pl Φ Φ tr P- Hi ZP ^ Ω Φ Φ rt d Φ zd φ P- dd Sö

P. rt d • d Hi Φ P- Φ> q tr O Φ PO tr PP 01 Φ P <φ Hi P- P ιq Φ φ lP Lq Ό Φ 03 P- P <φ P- 3 •> P- P Φ o HP 01 03 d Hi

01 d 03 P ^• d M Φ φ o tr Hl P> rt P • d S CΛ Ω 01 PP φ Φ φ Hi d φ Hi d Hi P ⁾ Φ P- oi P Φ P- P- Φ do Z o Φ P ⁴ Cd N φ H- P o LP Φ tr «O d P- H- PPN 01 P Φ d P d Φ P d PH ddd P ⁾ P 01 IV p- h- ~ P LP P rt d ¹ d O d Φ P d 01 PP ιq • Hi φ d 3 LP rt

Ω φ 3 03 P. d Φ P- iQ d S P P P o p- Φ Φ rt PJ P- Hi φ O

P ⁴ L dd P Ω rt PP? O P- rt φ P φ 01 3 Φ Ω d • 3 P rt d tr h- ¹ d LQ a 01 P ⁴ Φ Φ P Φ Φ t- ^f P <Φ d tr N Φ PJ = 01 z PP> P- LP P- rt rt PP 3 tr d l_l. P P- o <φ d φ Φ HP EP _^ φ rt Φ 03 P rt Φ s; 01 d: P- φ Ω φ P o P- rt> h- ¹ 3 Φ α LQ φ 01 φ> 01 PP ⁴ P- PPP ddd H d 01

P 03 φ 03 P. P ^> d V 01 P Φ P- Φ rt P P- rt φ d 01 d Φ φ P o

Φ Φ φ • 3 Φ 03 P- ¹ φ dd iq P Λ LQ Ω Φ 01 P Hi P. d P- H,

P 03 P pi: tr ¹ 3 φ φ Hi φ dd rt Φ d φ P ⁴ P- P. d: d P- ö EP P- P- d: P- • LP P ⁴ P CΛ Φ tr rt [- ^■ t-ι tr P- CΛ Hi dg 01 PJ

Φ tr ¹ P- Ω tr ¹ P ^J H tr d 01 P> φ J d tr P- HH d P> JP rt 01

P- P- o Φ tr P ⁴ P- φ φ P CΛ • d! PP PJ Ω P- d 03 a Ω d PJ 01 rt Ω P 03 Φ rt Ω P P- d P> OP rt O 03 Φ rt ιq Hi tr Ω d tr p tr dd

Φ tr rt Φ <! z P ⁴ rt P da P- Φ Jl o _{^ *} rt rt P ⁴ Lq φ Φ 01 LP p. Φ

P rt Φ O Φ rt Φ Φ iQ Hi P- P P Ό P s: H- Φ Z rt 03 03 rt 01 P-

01 P- ZPPP 01 ιq rt NO tr ¹ Φ P Φ Φ Hi o Φ s: 01 d

Φ Φ N Φ 3 01 Hi φ P- 03 d o P- H S 3 0 d P- d Φ φ

<! rt ^• »P- d Φ rt P- O tr V 3 P- φ K Ω PNO: H Ό P P- d P- d

Φ φ rt LQ d Φ rt P- P P> P ⁾ dd 1 P ⁴ Φ Z LP Φ HI 3 φ 01 ^ 03 01 tr

P! V Φ rt 1 IV d 3 ddd P rt rt p 1 d PJ H φ PJ rt o Φ 1 1 1 1 rt PP ⁾ Φ I P- 1 P φ P 1

1 d 1 03

Further advantages and features of the present invention, it ^¬ be gathered from the following exemplary description of presently preferred embodiments.

Figure 1 shows an optical sensor device according to the confocal imaging principle according to the prior art. FIG. 2 shows an optical sensor device having a first and a second module according to the confocal imaging principle according to a first

Embodiment of the invention. In the second module, one end of the optical waveguide is split into two partial ends, a first partial end being optically coupled to the light source and a second partial end to the light detector. Figure 3 shows a second module of an optical sensor device according to a second embodiment of the invention. The light source and light detector are coupled to the optical waveguide according to the invention by means of a beam splitter. FIG. 4 shows a first module of an optical sensor device according to the confocal imaging principle according to a third exemplary embodiment of the

Invention. A deflecting mirror is also arranged on the optical axis.

FIG. 2 shows an optical sensor device 200 based on the confocal imaging principle according to a first exemplary embodiment of the invention. The sensor device 200 has a first module 201 and a second module 202. The first module 201 contains an electronics module 203, a laser 204 serving as a light source and a photodiode 205 serving as a light detector. The laser 204 is coupled to the electronics module 203 by means of an electrical connecting line 206. The photodiode 205 is connected by means of the electrical connection ω ω ιo MP ¹ cπ o Cπ O Cπ o Cπ

N o 01 rt s tr Hi Kl Hl P oi PN Φ tr id tr P ^J Hi d tr Hi P oo IV rt Φ ro NP p ¹ tr P- o φ Φ P ¹ Φ Φ φ Ω Φ Φ P- P- Φ Φ Φ H- P Φ 3 O: P- P • do Φ PP> s: d Φ p Φ φ P P- Φ co P- P- P tr 3 P- rt P z PJ 03 P Φ P oi P φ P rt ^• d P 01 o Φ P-

P- PP IV rt P- ⁾ Φ rt P- Φ P Ω oi Ω Hl 3 dd H- • d • rt P- rt

P Hi rt tO Φ PJ rt P ⁾ Φ Φ PP Sö d <! * d iQ Sö oi tr Φ rt φ tr O P- rt φ 03 Φ Φ P- rt ro d α H • tO d P od H d rt φ d Φ P- rt P- ^• d HO P- HH vQ rt n P ^J α 01 03 Φ σ d

Φ PJ: PP 01 P Hi LP P Φ • Ω H- P- t PP P-> P Φ 01 Φ P ⁴ rt ⁾ rt d P

03 Ω ö Φ pj: t Φ PJ n HN tr Φ Φ to φ φ Φ O 03 • 01 Pl rt tr P> P P- tr to PP> d tr Φ to o α et L tr o ro d tr d M s ; LQ Φ P ⁾ t Φ tO φ o tO s p-ro

Φ oi Φ r iQ 03 V to & φ Φ d Φ Φ ro Φ P 3 o tr ¹ φ ö Φ P- do 03 o rt Hl φ PP ¹ 3 P> Φ Φ rt co rt P "P d PJP ¹ tr P Φ ^• d P ⁴ P- IV P ⁾ P Pl P rt -J

Φ. Pi P P Φ P> O O P φ ιq • Φ P φ • d Hi H Ω o 01 01 φ d

P- do Φ Φ P rt tr ¹ P- HPP 3 H- P d LP P- s: pi: tr * d rt d P 3 3

P- IV d P P- d PP Φ P- Φ rt Φ ö Φ 03 φ ö s: d PJ rt ^• d IM Φ P Φ p- P- s: ^• or rt P Φ P- Ω LP Φ d HM rt tr P g rt d P- Φ o rt LQ PJ Φ iP H z Φ z Φ ro rt rt

Φ d ⁴ 01 H- Φ μ. Hi P ⁴ Φ 03 Φ) • P- P rt φ PP 01 P Φ 01 φ φ Pl o rt

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Φ P Φ rt P> • Φ Ό P- ad 3 Φ P ⁴ tr d P Φ φ PP ⁴ Z dd φ Φ P> 3 o 03 3

P> P co d H ¹ Ό Ω pd P Φ ιq P rt V φ φ p ^j : dd H φ * d

PP rt dd ü Φ tr J Φ PMP to s:. PP. P- P Ω x H P- Pl P d φ rt Φ K φ LQ Φ d P ⁾ d P> Φ p * et 03 H "t P P-> φ rt P- tr rt φ P Φ PPP P- p-

Hi Φ P d V oi P rt Z 03 P Φ ^ to φ P d α Ω Sö Φ φ Φ Hi P- P- Φ P 03 03 d Φ

01 tr ¹ oi rt Φ φ P- Φ IV rt & PP 03 Φ tr φ • O: rt P- rt Ω φ IV φ rt p- LP ir ¹ φ PPP rt P rt p- Hi P et Hi £ Ά P Φ P Φ t φ Φ t 03 rt iv Φ Ω PJ Φ P- μ. P- tr ¹ PJ 03 P P- P 03 o 3 d: o O 3 PP d P ¹ P- PP rt tr P 01 Ω o rt P- Φ 03 Φ CΛ O Φ P- rt • d P- tr ö N φ P. 3 P- Φ Φ PP ¹ PP "O

P- et P ⁾ φ tr tr Φ Ω P PJ d tr Φ rt rt P Φ d V d ^> ü iQ d P Φ £ Φ P- d

Φ rt Ω P et et P d ⁴ <! > a P- tr Φ P- rt d Hi rt O Φ P tr μ. N o IV Ω

P - et tr P Λ Z rt Φ O ro a? t P- 01 Φ P P o P Φ PJ ro 01

H ¹ P ¹ rt φ z P o P ⁴ rt P Φ d Φ IV) P- do φ a to o P Ω (- ^■ P Φ φ P ro φ tr ¹ d * rt

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PJ et tr ¹ Φ PP ⁾ P 03 3 03 P 01 φ P- μ. P • d P ¹ s: d rt Φ 01 rt 01 o rt H ¹

01 s: P P- d Φ oi rt Φ IV> P 03 rt Φ Λ P oi rt P ¹ • Φ

P- PJ φ Ω P Φ 03 rd- d ¹ Φ t

H tr PJ μ. rt a P- rt Ω Φ J ro P- PJ P- P d φ P PI d LP

PH d P ¹ J P- o Hi d H tr 01 P- ro 03 d 03 Φ Φ 03 N 3 Φ φ N α I- "φ

Φ P Hi et H rt H d ¹ O 03 Ω to Φ o 01 φ P ¹ Ω Hi rt 03

CΛ • φ P- P- z H- 3 P- d Φ Φ X

Hi φ tr to i-S 3 a Φ g tr • H H <rt H "Q P P- o

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P- PN Φ d φ φ j-. rt ^• dd: 3 rt Φ LQ Ω rt 01 ZPPP ⁴ rt

Φ P- d <<P P- ¹ P Φ ^• d tr Φ μ. CΛ tr M Φ P ⁴ tr CΛ φ φ sd to rt rt ro •

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Φ φ φ 03 co d P P- Φ Hi rt P> tr p ro P- EP φ p £ Ω φ d rt j-> PJ

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Ω tr 03 ro φ Φ rt s: P P Z Ω P- P- d 3 Ω P- P- ro o rt LP rt P

P ⁴ Φ 01 O o Hl d Φ Φ Φ P- CΛ P ⁴ & P d »q CΛ P ⁴ P 03 01 rt o P- Φ Φ Φ P 03 et H Φ Φ P- PH d O 01 rt rt 01 P ⁴ P ⁾ Φ 03 φ ro Φ 01 01 P- Φ rt

Hl d Hl Hi Ω rt Sd Φ ω • o φ IV P Φ PJ φ μ. 3 Φ ro ^• d H Ω Ό P- rt 3 Φ

ZHOP ⁴ φ P Φ et Φ rt tr d PJ p- X P- φ p Sö od 03 PJ ro tr P ⁾ P Φ

P- p: φ IV Φ rt P 1 P Φ P- Φ Φ * Φ t P- d P φ Φ ro ro d P o P S

P Ω d IV 1 PJ Φ 1> 1 d P ⁾ tr to PJ 1 ro IV ro LP cπ LP 1 Φ o

PP ⁴ 03 1 1 1 1 o 1 1 o rt P ¹ Φ Φ P- 1 Φ 1 O 1 o 1 1 d

co co to to P ¹ P ¹

Cπ o Cπ o Cπ o Cπ

P 3 LP P tr Cπ ro d 03 P- N P ö g o φ rt P P- Ω Φ <

P- O: P- d Φ o Φ rt P z Φ ⁾ o tr P Φ P- PP ⁴ P- Φ

Ω P rt Hl P 01 Ω to d φ φ PP J. rt P φ rt Φ PP tr P i: q O 3 d Φ P- Q d φ 03 oi Φ Φ oi et φ Φ P ⁴ oi tr φ Φ P- rt H φ V Ό P- SP rt 3 Ω d P P- P Hl P d p- P £ P Φ P a rt P rt φ oi P tr

P • PO P- P d 03 o Φ d Hi PJ: ro 01 Φ pi: 01 P- P- 3 P- iQ Φ ro P Φ P φ rt PH P- EP o Ω rt 01 rt Hi P- Φ ö 3 3 tr Φ dg P ro <l tr d pj: Hi P tr ro P- a Φ φ SU d 01 OPPO Φ JP rt rt P- do φ ffi 3 P d P- O: Φ P d Φ LP dd H 3 do O: Φ Φ PP ⁴ > t P ⁴ d P 3 φ P 01 d P> ιp sn tr PJ P φ Φ d P ¹ P ιq 3 PP d P tr O: Φ d CΛ ω o 03 P ⁴ φ Φ P ^ Φ P φ Φ P φ tr d Hi pd Φ Pl <! Hl IV P P- 01 H φ d H rt d Φ rt φ d • P d P- od = H 0 ro d φ 01 3 d H Φ 03

P dd Hl 01 φ d tr φ o PP φ CΛ IV <3 P- lO pi: P> rt σ P- O Hl P PJ • d ro d J IV rt O Φ rt d ^ iqd Φ P- d P φ dd J d P P- tr φ z tr a O P- P Hi μ. Φ o rt Hi P Φ P <! Φ s: a P O Φ Φ P IV

H 01 01 d O <! LP ιq 03 rt Φ d 03 φ φ Hi d PHH 03 dd O: Ω d P o Φ 03 P- Φ d P- Ω PH ¹ O Φ rt rt Ω 03 d 01 tr tr <q PP Hl tr Φ PO: ιq P ⁴ PH "IV PPP ⁴ ιq d P- Φ P- pi: Φ P rt φ P Φ P- PJ Φ Φ PP 03 φ d Φ P s; Ω φ tr P- rt Öd P- P- d P- ¹ P d P- P- P- rt

Hi LQ P ω Φ tr tr P 03 Pi LQ O φ. 03 φ P ⁴ P Φ rt 0 ⁾ pi: d P- et Φ * Z d rt • d tr Φ P T3 ^" O rt rt

P ⁴ P <l rt 01 d P σi P- Φ Hl rt Φ O rt 3 d rt

P Φ O Φ rt d Hl φ P os: P- P ro ö 01 O PJ P ⁴ P ⁾ •

P d rt LQ ⁾ Ω PP Φ 03 Φ t φ P- P? O d ro ^ Φ 3 φ a P Ω P o rt rt P- p- rt Pi Q

P ⁴ tr P- t P d PL tr Φ P- O 3 O Φ

"P- P- P d o 03 φ • H Φ Φ Φ tr IV O P PJ P P d φ 01 J Φ o Φ H pi: d P N rt d Φ P- P- J

• P 01 d d P- Q d "• π 03 z, O Φ O φ d

N ω qd PH Φ po rt HP ro 01 P ö tr d SU φ LP φ P 3 IV 3 Φ ^• d Φ o Φ NPJ Φ PO: 3 φ Hi pi: P- PJ • d P

01 ro P tr Pi: Hi ω P- EP Ω d o o P- d t d

P Ω Φ Φ EP P>: P d P ⁴ P dd P Sö P 01 odd φ tr a P- d tr Φ P PL Φ d N Φ φ LP Cπ d * _*

P P 3 P 3 P P- d Φ LP P d 03 P P- Hi rt J rt

P- P- Φ Φ rt d 3 Φ PJ rt Hi φ Ό H- φ d Φ Φ s:

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Φ Φ Φ P- P 01 P P- P d φ P d 01 PH Lq ⁾ P ⁴

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P Φ d - ^> tr • ιq P 03 o tr Φ Φ rt ro • PJ Φ ^

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P ¹ PP tr P Hi φ tr s P- Φ d P- z PJ P ⁴ P tr ¹ Φ 03 α LJ. d = P o Φ 3 P φ φ PL d rt Ω P- P

P- O Φ Φ dd ⁴ P ⁴ P tr Φ p- Φ d P- tr Ω Hl 3

PPP ⁴ P 1 P- d Φ Φ ro 03 rt 01 P tr P- I rt 1 φ 1 H o Φ 1 et pj: rt Φ P 1 td 1 1

o O to t h- ¹ cπ o Cπ o cπ o Cπ oi 01 3 Z ω o Φ P d: P PJ rt 3 Pl ⁽ - ^■ C CΛ 01 Cd IV 01 J t 3 Ω P 03 CΛ Lq rt öd P IV ^

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P- PP P- ¹ P co Φ f Φ r o P EP Ω PP PJ j3 tr 03 I - ¹ rt Ω P Φ 01 P ⁴ P- PH "ZPPP φ φ P P. IV 3 P Φ rt Hi P ⁴ oi P • ö PQO tr OPP a 03 Φ P 3

Ω Φ Φ ιq rt o IV ¹ • Φ o Pd OPP rt p- Φ IV P PJ Ω P m P- p Lq o _^ «tr rt d er φ PP φ rt P- P- PP 01 o ^• * Φ tr PJ P tr ⁾ Φ LQ Pd Φ d • d Φ

P Φ φ IV P- d P- O Ω o d tq Hi! 3 tr P- P 3 P- N d tr PJ P- P- d rt 3 P-

Φ P P- Φ P- o 01 d P tr PJ Φ φ P- o φ K Φ Φ h- ¹ P P- 03 PJ d Ω Φ tr P d iq P- d P

P d P- P • d Ω (0 et 03 3 d PP 01 PJ HP α rt Ω d 3 d ⁴ P Φ Φ 01 01 φ rt φ • d tr CO P lP PPP 01 H Φ Φ P rt tr Hi 03 • P 03 P Ω 01 03

Pd P Φ Φ Φ Φ O φ P- d Φ N Φ d P- d tr P ⁾ d rt P> Φ Φ Pd * d Φ φ P ⁴

P Φ P- c- CO H ¹ Φ Φ P zd P Ω d * dd P d tr P- d> JP Φ 01 Φ φ IV

Hl 3 d tr rt <φ P P- 01 φ LP P ⁴ Q Φ tr Φ z P 01 Φ dd PJ PP

P- co Φ • Φ ι IV Φ rt p- Ξ rt P rt P φ tr ¹ 01 01 Φ rt Hi P Φ S Hi Φ

PN d P ¹ PP φ rt P Φ Φ rt P- tr d φ P- 01 H PJ Λ O: O PJ d Φ z rt I φ! P- P-

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P PJ: Φ Φ • d co co rt ιq cπ P P- ιq J P 01 o LQ PL P- s: rt P S 03 ιq P P- φ P>

EP 01 Ooooo 03 P- Φ 01 d P φ PP Hi P rt φ Φ Z Φ P Φ P P- P ro rt Φ J ^. -JPP ⁾ o P- ^> d PPP Φ d 3 Φ P Φ P- Hi P- φ rt PJ 01 d 03

^ - N • P- φ dd p- 01 01 3 01 Φ 32 P- P ⁴ PS! P d PPP d Φ φ • d

Φ z <! d 3 o p- Hi Φ Φ co 3 rt p- lP P φ φ φ Φ P Φ P- Hi P-

P ⁾ 3 φ α or μ. P rt • Pd H Φ Φ rt S d Φ h- ¹ P d P- φ d ⁴ IV ö P φ t 03 φ d P- Φ PP rt φ d co φ 01 d φ Φ P Ω P LP 01 d P ⁾ rt Pd P- tr <! to φ LQ

Hi Φ et PPP ö o Φ P p- oi Hi PP ⁴ φ φ φ d O φ Φ o OP ⁴ φ

Lq P Φ P- PL P. co ιq P- * »IV φ d d> Φ M N Pd φ 01 01 α L P P> P P P

Φ 01 ω d ¹ Ω P- Φ o Φ rt H dd P Φ H rt PJ 3 ö Φ <Ό ^ Φ rt tr 03 tr rt P- tr φ 3 Cπ ω d P φ LP 01 »Λ ⁴ <J Hi P - O Φ tr P- φ P ¹ ro σi dd φ φ IV

P ⁾ φ g Ω et o ¹ d O Pd P φ Hi tr rt O P- P 01 H Φ rt P 03 ro d P- zddd O tr d π Pd P- CD φ P d P 01 P d: P- OPPN P- rt d P ¹ o IV o P ^J φ φ Φ rt P et P d ⁴ 03 d P- Hi rt tr Φ PPP P- rt φ tr 00 rt 01 s ι P- J dz iQ o Φ rt 3 Ω Φ ? v P- Φ • d PP 01 tr d φ P ^J z & PJ P- N PJ rt P H-

P- d φ rt IV P- tr P- 3 P 01 P d P- PH p- 01 rt P- d ^ o P- Hi φ μ. ω 01 * I- "3 o rt d = rt et d OP od tr to 01 P PJ α PH Ω Ω σi d rt z 03 rt Hi P- P tr P Φ PL dg P Φ ro tr rt Φ PL Φ P- P ⁴ P ⁴ 00 PJ P ¹ Φ φ zg P-

»D: φ rt P- o φ P P- ddo Λ OI 01 P ¹ NN P- OP P- Φ Φ PJ P PJ Φ d ⁴ φ P od P φ OJ iQ P Φ tr Ω d P φ PPP tr P 3 O P- rt si P. 03 P ^ P & P P- 3 P dx Φ tr φ a P oi ö Φ φ P- t rt O φ φ 03 rt pd Ω φ φ φ Ϊ5 ⁴ φ φ 03 ω φ d P - P P- • Φ PP td ¹ rt P>: P P- P Φ

PJ d P ⁴ P- 3 a P- Pd o P d 01 p- d O Pd tr 01 Hl ro P> rt tr rt 01 01 • Z

P «ι Φ rt co od H- co td co co P • d Φ φ P- Φ rt o 3 ro d Φ Φ Φ Φ Φ o 01 03 Φ d <o P φ φ o μ. _^ »Pj: o Φ P- tr IV P 1 Φ Φ oi P- rt P ¹ 1 Φ Φ ö PP

Lq tr P P- Cπ d IV J- »Ω d Φ Φ Jy SU 01 3 V N IV IV 03 01 H- P 3 P- rt α

Φ Φ Ω rt P ⁴ φ 1 3 H dr N PJ 01 rt P- H PJ Ό d Hl P- φ H "Φ

P P- P co P ⁴ P P- rt P- Q θ: Φ 1 • rt O od P φ Φ o rt PJ P

Φ I rt rt o 01 1 d Φ LP d N d 1 1 d Φ P- d 1 P

3 1 o 1 1 rt φ 1 1 1 1 1 iQ

co o M r P ¹ h- ¹

Cπ o Cπ o cπ o Cπ

01 Φ rt ιq Φ P P- Hi> fc> IV Φ μi. Φ rt LQ H 03 a rt ^ CΛ td tr H Z d P d LP co Φ

P t P- Φ Φ 3 p- p- P PJ rt P- Φ P P- Φ Φ Φ P φ co P- P- φ z rt φ Φ rt P Φ Φ P- φ oi PJ ro PJ Φ P- P

Φ 01 oi PP et H ¹ o P rt o PP 3 Φ rt Φ oi P Ω P- HPPPP 03 co dd P- P d 03 rt oi rt Φ P * P - ¹ Φ rt PJ: Pi P rt Hl φ PJ P ⁴ oi Φ p p. φ P> oi Φ oi φ rt

H "Φ Φ P CΛ Z 01 PJ P ⁾ PJ P • EP O rt φ Hi P tr rt • d P- • Φ co P 03 PP φ rt N Φ rt P Φ P * 0 ⁾ P- d P d H ¹ • P ¹ Φ P- P co Oi o P Φ N φ rt P φ φ co ro Φ z CΛ P

Φ P- CΛ ad PJ LQ P- iQ Hi Sö α Φ Lq 01 P 3 rt P co £ Φ φ rt g P rt rt p IV d Φ oi • Φ PJ P- φ P P- Φ Φ P o P- P - Φ PJ co Φ P- P- Φ

Φ o Φ - Φ Φ Hi o rt Hi 03 dd φ Φ P P- P 01 L £> PL rt rt PP ¹ P- d rt dd

PP 01 d P- "P- P φ ö P ^J Φ P P- ιp <φ 01 td rt rt Φ Φ Φ 03

01 d Φ Φ P- ¹ LPP 03 d Φ Φ N 3 φ d tr ¹ φ Φ td Z P>P> P P- P- Φ PP Hl rt ¹ P P- φ P Φ P IV zd φ P- IV P PJ P- P d PJ P- d Ω PJ P Φ 0

Φ P- Φ P N P φ d o rt φ P H Ω o 01 P P- 01 P 03 tr d Φ CΛ P g φ tr

01 o Ω IV φ 03 d rt IV Ό Sö o p- P Z tr * d Φ P P> LP rt rt P et ιp H PJ 01 o P- P

> d tr rt P- Φ o. P rt Φ P rt P- P- s; et • dd PP φ Φ Φ rt rt dg rt et P rt P Ό Φ P- Hi Φ rt P Φ Φ PPJ rt 01 PJ P d PJ O CΛ § Φ dddo P- z P- d>fc> P- rt ü Ω 01 H ^< >fc> rt P P- Z P- P- Φ P ⁾ P P- d H rt Φ d ι

PL 03 φ 03 P ro φ P- Φ tr Ω Φ ro g Φ rt P- rt zo 01 d LP Φ td Hl P d CΛ ω P 01 d Ω Ω LP o 01 01 P et tr IV 0 d PJ Φ H • P- PPP Φ P- d PJ PJ tr tr P ⁴ Φ Ω φ rt _^ PP h PP Φ td Φ rt ON Ω P Φ tr P- a P o Φ φ J ^ PJ P d ⁴ α NP od> tr Φ α P P- 01 Φ PZ tr PJ rt P p Φ ro P-

P- LP P LQ ro P φ ad P φ t- ^> d PJ d PL PJ z Ω P φ et 03 * «« rt 03 Φ IV co 03

03 Φ Φ co LP d P- ¹ > P- 01 P d 01 a P- tr Φ tr ¹ P P- Z Φ Φ o O rt IV φ X ⁴ Φ Ω Φ P Ω J-> d J- »Hi POH P- P et P P- Φ rt Φ t- ¹ α P- l- ¹ • d 3 P- o P- O 3 o tr P Φ P ⁴ ro φ o:> d Ω P rt P Ά 01 Ω rt Φ H P- PJ M CO P- • d P- φ q • d rt * p- P oi Ω IV P 01 P ¹ P t tr <! rt P ⁴ Φ rt d rt P ⁴ _^ «M Ω 01 Φ CO P Φ rt φ * d Φ • d rt P Φ tr P φ PO P- rt Φ w φ Φ rt Λ Φ tr 03 P CO oi

3 Φ P φ P oi Φ os: d PXP Φ P ¹ o P PL PJ d et Φ rt μ.

PJ: H- oi Φ φ N φ Hi * d P z & Φ d φ K 01 <1 PJ a Z PL CO PJ • Φ 03

EP rt rt P- rt Z et φ φ rt μ. ιq ^ PJ P et φ g O 01 3 Φ Φ P> co d co

• '3 rt

3 • P • P- O

P Φ p- P P- P 01 oi P- d P- Φ P- o P oi Φ μ. 03 ro Hi o ö

P- Φ 01 φ IV 03 Ω μ. rt tr q Pi CΛ o P- 3 φ P rt • P ¹ P- φ Pd rt α 3 ö o P rt Ω CΛ d ⁴ φ Φ d rt P d P- p- d P. P Φ Φ d ^ φ g P ⁾

P P- J Φ tr O tr J Φ tr Φ P- P φ P 03 Φ φ P φ J P- PP or ö rt 01 d Φ 03 Pd P Φ CΛ P Φ a P P- 03 P- PJ 01 PP φ 01 P 01 P d P PJ φ ^ P α P- P PJ P p tt> P • d 4 ^ d tr Φ rt 03 co Φ tr P- J P- Pd

PNPN φ ga d- Φ 3 ro Φ P- Φ P- h ° d ^• • f P hd P- PP Φ P 03 Φ

P- d Φ z! VP Cπ> t- ^J P- ro P Φ Φ d rt rt o PJ Φ P ⁴ oo rt φ P- P- φ Φ tr φ rt ιq 3 φ rt et Φ Φ O Ω rt P- Φ P- Λ ⁴ P 01 01 OPO Φ H Φ P d X rt φ P- PP 3 H ¹ * _^ tr μ. rt dd tr ¹ P- Lq dd φ rt CO Φ P P- Φ P rt

Φ P ⁴ P rt O P- P ¹ 03 P Φ P 3 P P- Φ 01 PPNO CO P- Φ tr "N 03 CΛ P- Φ P

P O: p- Φ P Φ Sö H- Z Φ 03 P Φ N Ω Φ 01 Ω P z PL Φ P d Φ z rt rt d 03 O

P Ω P- tr Φ d φ Φ 03 Φ P z tr PP ⁾ P- d ⁴ P- φ P- 3 d ιp P. d φ d IV d

> P- tr gi Hi 01 H ¹ P φ P φ et d φ P ^J o P- O d Φ Φ Ω P- α J od P- d ιq et o ^ (- ^■ φ Ω φ P- IV Pd P- P PJ Hi d Pi: P- rt ld PL 03 tr rt P- tr • p-

03 φ PL o ro Φ P P P rt Φ tr o et Φ Φ X

P ⁴ P t Φ d φ φ Φ P- • d CO • d Ω p

Hi 03 P d PL ro IV tC- Φ o 03 Φ φ Hi Φ rt ιP P • dld Ω P φ o P rt Φ P ⁴ o

0 PJ d rt ro P CΛ Hi P- 01 Φ φ P- rt rt <co tr Φ P- CD P- C Φ Φ rt PL tr PP p- O o PJ d ϊ CΛ d IV φ H- φ> o et P 03 o PJ d P- <J d

P P- iQ J- »03 P 03 a φ P ⁾ Φ P g rt φ X ⁴ Φ P d cπ z rt Hi α 3 03 OPH ¹ d Ω Φ O. -. rt tr P- as: rt a IV d OOP ^h μ. s: 01 φ CΛ O Φ a rt Φ P PJ d tr 01 ro P>fc> Φ Ω Φ Φ P rt PPP IV PJ p- d Φ Hi Φ P- ¹ rt Z IV Φ Φ PPP CO

LP et rt P- 3 ro Hl tr LQ P- Φ O P d rt 01 d Φ P 0 P I- "P P- d co P- LP O

03 Φ P- Ω P- P ^> P- rt Φ (- ^■ P Hi φ d tr Hi φ PJ H 03 o H CΛ ω Ω Φ O

Hi P 03 P ⁴ et d Φ P- tr t- ¹ Φ O d P φ Φ P PJ P tr P 01 P- PJ co tr 03 o J et rt rt d P. tr PZ 03 P- d- PJ => IV P P- rt d 01 t- "P- da ro et rt 0

P P rt Φ P φ Φ 01 Φ P Cπ O d PL P> d. d oi φ rt Φ J 01 d Φ tr a LP Φ 3 PP rt P Φ P ιt-> 03 o P>: to 01 d φ L rt P- Φ g P d φ Φ dd φ φ d P- P> 03 1 P ro Φ "d 1 Hi σ 01 rt P- rt 01 (-> P t P ^ P

1 rt P φ ro 1 1 J 1 Φ 1 1 1 1 P 1 1 1 P 01 1

co co ro to P ¹ H>

Cπ o cπ o cπ O Cπ

P 01 φ rt φ Φ oi Φ P- P rt tr P- ¹ Φ Pd

Φ rt P P z - - Hi φ J> p-

LQ LP P »d rt φ O P

Φ 3 d

P Φ O d

03 • d ιq

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P tr IV

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P rt ιq iq 03 Φ

Φ P- d

3 rt

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03 rt P-

03 Ω P

Φ ⁾ P ⁴ PJ

P rt P

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Z Φ φ

P- ^ rt 03

P d Φ rt

P d IV Φ

IV rt P- ¹ rt o

P- P rt o Φ d _^ ~. d Φ

P P- P

03 Ω 03

P tr rt et Φ

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Cπ Cπ

Claims

claims

1. Sensor device for fast optical distance measurement according to the confocal imaging principle for determining distance and / or height values of a surface, in particular for three-dimensional surface measurement

A point-shaped light-emitting element arranged on an optical axis,

A reflector arranged perpendicular to the optical axis and movable along the optical axis,

An imaging optics centered on the optical axis and

A point-shaped light-receiving element which is arranged at the same location as the light-emitting element, where

Light emitted by the light-emitting element is reflected by the reflector,

In the course of the movement of the reflector, the light reflected by the reflector is focused at least once by the imaging optics onto the surface to be measured,

• the focused light is at least partially scattered back from the surface to be measured and

• In the course of the movement of the reflector, the backscattered light is focused at least once by the imaging optics via the reflector onto the light-receiving element.

2. Sensor device according to claim 1, wherein the reflector is a plane mirror.

3. Sensor device according to one of claims 1 or 2, wherein the reflector is moved periodically.

4. Sensor device according to one of claims 1 to 3, in which the reflector is moved by means of an electromagnetic, a piezoelectric and / or a micromechanical capacitive drive.

5. Sensor device according to one of claims 7 to 4, in which the imaging optics has a converging lens.

6. Sensor device according to one of claims 1 to 5, wherein the wavelength of the light is in the infrared, in the visible or in the ultraviolet spectral range.

7. Sensor device according to one of claims 1 to 6, wherein the light-emitting element and the light-receiving element

Element are realized by means of a first end of an optical waveguide.

8. Sensor device according to one of claims 1 to 6, in which the light emitted by the light-emitting element and the light received by the light-receiving element is additionally directed via a deflection reflector arranged on the optical axis.

9. Sensor device according to claim 8, wherein the deflecting reflector is a plane mirror.

10. Sensor device according to claim 8 or 9, wherein the deflecting reflector is oriented at a fixed angle of 45 ° to the optical axis.

11. Sensor device according to one of claims 7 to 10, in which a second end of the optical waveguide is optically coupled both to a light source and to a light detector.

12. The sensor device according to claim 11, wherein the second end of the optical waveguide is split into two partial ends, a first partial end being optically coupled to the light source and a second partial end to the light detector.

13. Sensor device according to claim 11, in which the light source and light detector are optically coupled to the second end of the optical waveguide by means of a fiber coupling device having a beam splitter.

14. Sensor device according to one of claims 11 to 13, wherein the light source is a laser or a light emitting diode.

15. Sensor device according to one of claims 11 to 14, wherein the light detector is a secondary electron multiplier, a photodiode, an avalache photodiode or a multi-channel plate detector.